CN213613110U - Cleaning structure inside annealing furnace - Google Patents

Cleaning structure inside annealing furnace Download PDF

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Publication number
CN213613110U
CN213613110U CN202022368682.5U CN202022368682U CN213613110U CN 213613110 U CN213613110 U CN 213613110U CN 202022368682 U CN202022368682 U CN 202022368682U CN 213613110 U CN213613110 U CN 213613110U
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China
Prior art keywords
annealing
water tank
cooling water
annealing furnace
pipe
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CN202022368682.5U
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Chinese (zh)
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朱建平
孙志平
严鑫
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Jiangsu Chengfei New Material Technology Co Ltd
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Jiangsu Chengfei New Material Technology Co Ltd
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Abstract

The utility model discloses an inside washing structure of annealing stove relates to annealing stove clearance technical field, for solving the annealing stove among the prior art when the clearance, uses the steel wire to pass the annealing pipe, is connected with the steel wire ball, then the steel wire is pulled out to rethread steel wire wheel, lets the steel wire ball accomplish the washing to the annealing stove inside, and this process is complicated to what still clear up is not very thoroughly clean, has the remaining problem of spot. One side of annealing furnace case is provided with first cooling water tank, and the opposite side of annealing furnace case is provided with second cooling water tank, annealing furnace case and second cooling water tank and first cooling water tank welded connection, the top of second cooling water tank and first cooling water tank all is provided with the tank lid, and the tank lid rotates through the pivot with first cooling water tank and second cooling water tank and is connected, the inside of annealing furnace case is provided with annealing pipe, and annealing pipe has a plurality ofly.

Description

Cleaning structure inside annealing furnace
Technical Field
The utility model relates to an annealing stove clearance technical field specifically is an inside washing structure of annealing stove.
Background
An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate.
However, when the existing annealing furnace is cleaned, a steel wire penetrates through an annealing pipe and is connected with a steel wire ball, and then the steel wire is pulled out through a steel wire wheel, so that the steel wire ball can clean the inside of the annealing pipe, the process is complex, the cleaning is not thorough and clean, and stains are left; therefore, the existing requirements are not satisfied, and a cleaning structure for the inside of the annealing furnace is proposed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an inside washing structure of annealing furnace to solve the annealing furnace that proposes in the above-mentioned background art when the clearance, use the steel wire to pass the annealing pipe, couple together with the steel wire ball, then the steel wire is pulled out to rethread steel wire wheel, lets the steel wire ball accomplish the washing to the annealing pipe inside, and this process is complicated, and still clear up not very thoroughly clean, has the remaining problem of spot.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an inside washing structure of annealing stove, includes the annealing stove case, one side of annealing stove case is provided with first cooling water tank, and the opposite side of annealing stove case is provided with second cooling water tank, annealing stove case and second cooling water tank and first cooling water tank welded connection, the top of second cooling water tank and first cooling water tank all is provided with the tank lid, and the tank lid rotates through the pivot with first cooling water tank and second cooling water tank to be connected, the inside of annealing stove case is provided with annealing pipe, and annealing pipe has a plurality ofly, first cooling water tank, annealing stove case and second cooling water tank are passed in proper order to annealing pipe, the inside of annealing pipe is provided with the rotary rod, one side of rotary rod is provided with rotatory page or leaf board, and rotary rod and rotatory page or leaf board fixed connection.
Preferably, the bottom of the water tank cover is provided with a plurality of baffles, and a communicating pipe is arranged between the baffles.
Preferably, the annealing pipe sleeves are arranged at two ends of the annealing pipe, and the annealing pipe sleeves are connected through clamping grooves.
Preferably, the bottom of the annealing furnace box is provided with a base, the bottom of the base is provided with a base support, and the base is connected with the base support in a welding mode.
Preferably, one end of the rotating rod is provided with a first fixing plate, the other end of the rotating rod is provided with a motor, and one side of the motor is provided with a second fixing plate.
Preferably, the motor is connected with the second fixing plate in a welding mode, the rotary rod is connected with the first fixing plate through the clamping groove in a rotating mode, and the motor is connected with the rotary rod through the rotary shaft in a rotating mode.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model designs the cleaning structure in the annealing pipe inside the annealing furnace box, can automatically clean the dirt in the annealing pipe, reduces the working strength of workers, can keep the annealing pipe clean in real time, has high temperature when used, and ensures the safety of the workers because the workers do not directly contact the annealing pipe during automatic cleaning;
2. the rotary rod rotates in the annealing pipe, so that the rotary vane plate on one side of the rotary rod can rub each part of the inner wall of the annealing pipe, dirt on the inner wall of the annealing pipe can be cleaned, consumption of cleaning tools is reduced, and the annealing pipe is more energy-saving and environment-friendly;
3. the utility model discloses an annealing pipe box of both ends design detachable of annealing pipe can let the dirt that annealing pipe inner wall cleared up get off discharge, and the back is all fallen by the friction to the dirt of annealing pipe the inside, only needs to dismantle annealing pipe box to wherein pour into the clearance water, let the dirt flow out just can, workman's operation is got up simply.
Drawings
FIG. 1 is an overall front view of the present invention;
FIG. 2 is a schematic view of the annealing pipe of the present invention;
fig. 3 is an enlarged view of the position a of the present invention.
In the figure: 1. an annealing furnace box; 2. a first cooling water tank; 3. a water tank cover; 4. a base support; 5. a communicating pipe; 6. a partition plate; 7. annealing the tube; 8. an annealing pipe sleeve; 9. a rotating leaf plate; 10. rotating the rod; 11. a first fixing plate; 12. a second fixing plate; 13. a motor; 14. a second cooling water tank; 15. a base.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, the present invention provides an embodiment: a cleaning structure in an annealing furnace comprises an annealing furnace box 1, wherein a first cooling water tank 2 is arranged on one side of the annealing furnace box 1, a second cooling water tank 14 is arranged on the other side of the annealing furnace box 1, copper wires enter the annealing furnace box 1 from the first cooling water tank 2 and then enter the second cooling water tank 14 in use, annealing of the copper wires can be completed in the process, ductility of the copper wires is improved, the annealing furnace box 1 is connected with the second cooling water tank 14 and the first cooling water tank 2 in a welding mode, the structure of the device is more stable, the device cannot be scattered in the use process, water tank covers 3 are arranged on the tops of the second cooling water tank 14 and the first cooling water tank 2, the water tank covers 3 are rotatably connected with the first cooling water tank 2 and the second cooling water tank 14 through rotating shafts, in the annealing process of the copper wires, the water tank covers 3 can be opened to check and adjust states of the copper wires, and the structure is, the workman of being convenient for operates, annealing stove case 1's inside is provided with annealing pipe 7, and annealing pipe 7 has a plurality ofly, can anneal to many copper wires simultaneously, improve device's work efficiency, annealing pipe 7 passes first cooling water tank 2 in proper order, annealing stove case 1 and second cooling water tank 14, annealing stove case 1 heats annealing pipe 7, the copper wire side is inside annealing pipe 7, the copper wire can be heated more evenly, annealing pipe 7's inside is provided with rotary rod 10, one side of rotary rod 10 is provided with rotatory page or leaf board 9, and rotary rod 10 and rotatory page or leaf board 9 fixed connection, rotary rod 10 rotates and drives rotatory page or leaf board 9 and rotate, clear up the dirt to annealing pipe 7 inner wall, moreover, the steam generator is simple in structure.
Further, the bottom of tank lid 3 all is provided with baffle 6, and baffle 6 has a plurality ofly, is provided with communicating pipe 5 between a plurality of baffles 6, can distinguish between baffle 6 and place liquid, lets the performance that the annealing of copper wire came out better.
Furthermore, annealing pipe sleeves 8 are arranged at two ends of the annealing pipe 7, the annealing pipe 7 is connected with the annealing pipe sleeves 8 through clamping grooves, the detachable annealing pipe sleeves 8 can enable dirt on the inner wall of the annealing pipe 7 to be rubbed off and then to be treated in a centralized mode, only the annealing pipe sleeves 8 need to be detached, clear water is poured into the annealing pipe sleeves, the dirt flows out, and the annealing pipe sleeves are easy to operate by workers.
Further, the bottom of annealing furnace case 1 is provided with base 15, and the bottom of base 15 is provided with base support 4, and base 15 and base support 4 welded connection, let the device more firm to be higher than the height on ground a bit, can dispel the heat, prevent that annealing furnace case high temperature from arousing the fire.
Further, the one end of rotary rod 10 is provided with first fixed plate 11, and the other end of rotary rod 10 is provided with motor 13, one side of motor 13 is provided with second fixed plate 12, motor 13 can drive rotary rod 10 and rotate, thereby it rubs to let the rotatory page or leaf board 9 of rotary rod 10 one side to every part of annealing pipe 7 inner wall, let the dirt on the annealing pipe 7 inner wall can both be cleared up, and also reduce the consumption of clearance instrument, more energy-concerving and environment-protective.
Further, motor 13 and second fixed plate 12 welded connection, rotary rod 10 and first fixed plate 11 pass through the draw-in groove and rotate to be connected, and motor 13 rotates through the pivot with rotary rod 10 to be connected, lets it can be in the steady rotation of annealing pipe 7, makes abluent cleaner.
The working principle is as follows: when the device is used, if the annealing tube 7 is used for a long time and is too dirty, and the annealing tube 7 is cleaned, the copper wire at one end of the annealing tube 7 is firstly cut off, the copper wire in the annealing tube 7 is drawn out from the other end, then the motor 13 in the annealing tube 7 is started, the motor 13 drives the rotating rod 10 to rotate, the rotating vane 9 at one side of the rotating rod 10 rotates along with the rotating rod 10, the rotating vane 9 rubs each part of the inner wall of the annealing tube 7, dirt on the inner wall of the annealing tube 7 can be cleaned by friction, then the annealing tube sleeves 8 at two ends of the annealing tube 7 are taken down, cleaning liquid is poured into one end of the annealing tube 7, a box connected with the dirt is placed in the annealing tube 7, the cleaning liquid is circulated in the annealing tube 7, the cleaning liquid flows out of the box from the other end along with the dirt in the annealing tube 7, and the cleaning of the annealing tube 7 is finished, the copper wire can be continuously annealed only by taking away the box with the stains, installing the disassembled annealing pipe sleeves 8 at the two ends of the annealing pipe 7 and enabling the copper wire taken out before to pass through the annealing pipe 7 again.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (6)

1. The utility model provides an inside washing structure of annealing stove, includes annealing stove case (1), its characterized in that: a first cooling water tank (2) is arranged on one side of the annealing furnace box (1), a second cooling water tank (14) is arranged on the other side of the annealing furnace box (1), the annealing furnace box (1) is connected with the second cooling water tank (14) and the first cooling water tank (2) in a welding mode, water tank covers (3) are arranged on the tops of the second cooling water tank (14) and the first cooling water tank (2), the water tank covers (3) are rotatably connected with the first cooling water tank (2) and the second cooling water tank (14) through rotating shafts, annealing pipes (7) are arranged inside the annealing furnace box (1), a plurality of annealing pipes (7) are arranged, the annealing pipes (7) sequentially penetrate through the first cooling water tank (2), the annealing furnace box (1) and the second cooling water tank (14), a rotating rod (10) is arranged inside the annealing pipe (7), and a rotating vane (9) is arranged on one side of the rotating rod (10), and the rotating rod (10) is fixedly connected with the rotating leaf plate (9).
2. The inside cleaning structure of an annealing furnace according to claim 1, wherein: the bottom of water tank lid (3) all is provided with baffle (6), and baffle (6) have a plurality ofly, a plurality of be provided with communicating pipe (5) between baffle (6).
3. The inside cleaning structure of an annealing furnace according to claim 1, wherein: annealing pipe sleeves (8) are arranged at two ends of the annealing pipe (7), and the annealing pipe (7) is connected with the annealing pipe sleeves (8) through clamping grooves.
4. The inside cleaning structure of an annealing furnace according to claim 1, wherein: the bottom of the annealing furnace box (1) is provided with a base (15), the bottom of the base (15) is provided with a base support (4), and the base (15) is connected with the base support (4) in a welding mode.
5. The inside cleaning structure of an annealing furnace according to claim 1, wherein: one end of the rotating rod (10) is provided with a first fixing plate (11), the other end of the rotating rod (10) is provided with a motor (13), and one side of the motor (13) is provided with a second fixing plate (12).
6. The inside cleaning structure of an annealing furnace according to claim 5, wherein: motor (13) and second fixed plate (12) welded connection, rotary rod (10) are connected through the draw-in groove rotation with first fixed plate (11), motor (13) are connected through the pivot rotation with rotary rod (10).
CN202022368682.5U 2020-10-22 2020-10-22 Cleaning structure inside annealing furnace Active CN213613110U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022368682.5U CN213613110U (en) 2020-10-22 2020-10-22 Cleaning structure inside annealing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022368682.5U CN213613110U (en) 2020-10-22 2020-10-22 Cleaning structure inside annealing furnace

Publications (1)

Publication Number Publication Date
CN213613110U true CN213613110U (en) 2021-07-06

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ID=76621999

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022368682.5U Active CN213613110U (en) 2020-10-22 2020-10-22 Cleaning structure inside annealing furnace

Country Status (1)

Country Link
CN (1) CN213613110U (en)

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