CN213596458U - Combined carbon/carbon composite material crucible - Google Patents
Combined carbon/carbon composite material crucible Download PDFInfo
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- CN213596458U CN213596458U CN202022119141.9U CN202022119141U CN213596458U CN 213596458 U CN213596458 U CN 213596458U CN 202022119141 U CN202022119141 U CN 202022119141U CN 213596458 U CN213596458 U CN 213596458U
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Abstract
The utility model relates to a modular carbon/carbon combined material crucible has diapire, lateral wall and replacement, the lateral wall with the diapire is connected in order to enclose into open-top's chamber of acceping, the lateral wall orientation the mounting groove has been seted up to the one side of acceping the chamber, the mounting groove certainly it is close to accept the opening in chamber the direction of diapire extends, replacement detachably install in the mounting groove. The utility model discloses a straight tube section position perishable problem has been solved to combination formula carbon/carbon combined material crucible, has improved the whole life of crucible, when adopting this crucible bearing quartz crucible simultaneously, can separate the replacement earlier before dismantling quartz crucible, reserves the gap of carbon/carbon crucible and quartz crucible to the harm to carbon/carbon crucible when reducing quartz crucible and dismantling. Trial through practice, the utility model discloses a crucible convenient to use has improved 30% ~ 40% on original life's of crucible basis, greatly reduced the degree of difficulty of dismantling quartz crucible.
Description
Technical Field
The utility model relates to a combined material technical field especially relates to a modular carbon/carbon combined material crucible.
Background
The crucible is an important component of common equipment in the technical field of composite materials, is a container for melting and refining metal liquid, heating solid and liquid and other various reactions, and is a foundation for ensuring the smooth progress of physical and chemical reactions. The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method. The common single crystal furnace body comprises a furnace bottom plate, a main furnace chamber, a furnace cover, an isolation valve chamber, an auxiliary furnace chamber, a seed crystal lifting rotating mechanism, a crucible lifting rotating mechanism and the like, and all cavities are subjected to defect furnace chamber inspection and flaw detection, and subjected to water pressure test and helium mass spectrometer leak detection. The production process of the single crystal furnace generally comprises feeding, melting, necking growth, shouldering growth, isometric growth, tail growth and the like. The feeding is to put polysilicon raw material and impurities into a quartz crucible, wherein the types of the impurities are determined according to the N or P type of the resistor, and the types of the impurities comprise boron, phosphorus, antimony and arsenic. After the polycrystalline silicon raw material is added into the quartz crucible, the crystal growth furnace is closed, vacuumized, filled with high-purity argon to maintain the high-purity argon within a certain pressure range, and then the power supply of the graphite heater is turned on to heat the polycrystalline silicon raw material to a temperature higher than the melting temperature so as to melt the polycrystalline silicon raw material. Neck growth, i.e., after the temperature of the silicon melt has stabilized, the seed crystal is slowly immersed in the silicon melt. The seed crystal is subject to dislocations due to thermal stresses when the seed crystal is in contact with the silicon melt field, and these dislocations must be lost by growth with shrinkage. The necking growth is that the seed crystal is quickly lifted upwards, the diameter of the grown seed crystal is reduced to a certain size, and as the dislocation line and the growth axis form a crossed angle, the dislocation can grow out of the crystal surface as long as the necking is long enough, and a crystal with zero dislocation is generated. After the neck grows, the temperature and the pulling speed are reduced to gradually increase the diameter of the crystal to the required size. After the constant diameter growth, namely the growth of the thin neck and the shoulder, the diameter of the crystal bar can be maintained between plus and minus 2mm by continuously adjusting the pulling speed and the temperature, the part with fixed diameter is called a constant diameter part, and the monocrystalline silicon piece is taken from the constant diameter part. After the equal diameter part is grown, the diameter of the crystal bar is gradually reduced until the crystal bar becomes a sharp point and is separated from the liquid level. And the grown crystal bar is lifted to the upper furnace chamber to be cooled for a period of time and then taken out, thus completing one growth cycle.
Along with the enlargement of the productivity of the current single crystal furnace, the size of a single crystal thermal field is further increased, the adjustment and optimization of the single crystal thermal field lead the temperature of a carbon/carbon crucible to be higher and higher, and the local temperature reaches 1600-1700 ℃, thus the corrosion speed of the crucible is accelerated, and the service life of the crucible is seriously shortened. At present common solution mainly is split type crucible or multilobe formula crucible about adopting, carries out corresponding change according to the corruption condition of crucible, but this kind of structure one run into quartz crucible when leaking silicon, has safe risk, and the quartzy meeting of high temperature condition softens, and split type and multilobe formula crucible bulk strength is not high, has certain defect to quartz crucible's support, changes and leads to quartz crucible to leak silicon.
SUMMERY OF THE UTILITY MODEL
Based on this, it is necessary to provide a combined carbon/carbon composite crucible having a long overall life span and a good support for the quartz crucible.
The combined carbon/carbon composite material crucible is provided with a bottom wall, a side wall and a replacement part, wherein the side wall is connected with the bottom wall to form an accommodating cavity with an open top, a mounting groove is formed in one side, facing the accommodating cavity, of the side wall, the mounting groove extends from an opening of the accommodating cavity to a direction close to the bottom wall, and the replacement part is detachably mounted in the mounting groove.
Researches show that with the enlargement of the capacity of the current single crystal furnace, the size of a single crystal thermal field is further increased, the adjustment and optimization of the single crystal thermal field lead to the acceleration of the corrosion speed of the crucible, and particularly the most serious corrosion is caused in a region with the height of 200mm along the edge of a straight pipe section of a carbon/carbon crucible, thus the service life of the whole crucible is seriously shortened. And the final density of the carbon/carbon crucible reaches 1.3-1.4 g/cm along with the increase of the size of the carbon/carbon crucible3This latter is difficult to improve, and the corrosion resistance of the crucible is directly related to its density, the higher the density the greater its corrosion resistance, but the greater the carbon/carbon size the more difficult it is to densify the vapor deposition.
The utility model discloses a modular carbon/carbon combined material crucible redesigns and adjusts the structure, has set up the mounting groove towards the one side of acceping the chamber at the lateral wall, and this mounting groove extends to the direction that is close to the diapire from the opening of acceping the chamber to install replacement detachably in the mounting groove. Therefore, on one hand, the straight pipe section part which is most prone to corrosion of the crucible can be replaced in the later period, so that the purpose of prolonging the service life of the whole carbon/carbon crucible is achieved. On the other hand, the material and the density of the easy-to-corrode part, namely the replacement part, can be adjusted independently, the easy-to-corrode part, namely the replacement part, can be manufactured independently, the density is improved more easily due to the fact that the workpiece is smaller and thinner, meanwhile, the material can be changed, and the material with higher corrosion resistance is selected, so that the defect that the overall density of the carbon/carbon crucible is lower is overcome, the corrosion resistance of the easy-to-corrode part is improved, the service life of the whole crucible is prolonged, resources are saved, and the production cost is reduced. Therefore, the utility model discloses a straight tube section position perishable problem has been solved to combination formula carbon/carbon combined material crucible, has improved the whole life of crucible, when adopting this crucible bearing quartz crucible simultaneously, can separate the replacement earlier before dismantling quartz crucible, reserves the gap of carbon/carbon crucible and quartz crucible to harm to carbon/carbon crucible when reducing quartz crucible and dismantling. Trial through practice, the utility model discloses a crucible convenient to use has improved 30% on original life's of crucible basis, also greatly reduced the degree of difficulty of dismantling quartz crucible.
In one embodiment, the replacement part includes a main body portion and a bent portion connected to the main body portion, the main body portion is configured to abut against a surface of the side wall facing the accommodating cavity, and the bent portion is configured to abut against an end surface of the side wall away from the bottom wall.
In one embodiment, the mounting groove extends along the circumferential direction of the side wall and forms a ring shape, and the main body part is cylindrical.
In one embodiment, the mounting groove is annular, and the body portion is cylindrical.
In one embodiment, the size of the mounting groove in the thickness direction of the side wall is 1/3-1/2 of the thickness of the side wall.
In one embodiment, the size of the mounting groove in the height direction of the side wall is 1/3-2/3 of the height of the side wall.
In one embodiment, the thickness of the main body part is 4mm to 5 mm.
In one embodiment, the height of the main body part is 20cm to 30 cm.
In one embodiment, the size of the bent part along the height direction of the side wall is 5 mm-15 mm.
In one embodiment, the replacement is a carbon/carbon material replacement, a boron nitride material replacement, or a carbon ceramic material replacement.
Drawings
Fig. 1 is a schematic structural view of a combined carbon/carbon composite crucible according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a replacement of the composite carbon/carbon crucible shown in fig. 1.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1, the combined carbon/carbon composite crucible 100 according to an embodiment of the present invention has a bottom wall 10, a side wall 20 and a replacement 30, wherein the side wall 20 is connected to the bottom wall 10 to form a cavity enclosed by an open top, the side wall 20 has a mounting groove formed toward one side of the cavity, the mounting groove extends from the opening of the cavity to a direction close to the bottom wall 10, and the replacement 30 is detachably mounted on the mounting groove.
Researches show that with the enlargement of the capacity of the current single crystal furnace, the size of a single crystal thermal field is further increased, the adjustment and optimization of the single crystal thermal field lead to the acceleration of the corrosion speed of the crucible, and particularly the most serious corrosion is caused in a region with the height of 200mm along the edge of a straight pipe section of a carbon/carbon crucible, thus the service life of the whole crucible is seriously shortened. And the final density of the carbon/carbon crucible reaches 1.3-1.4 g/cm along with the increase of the size of the carbon/carbon crucible3This latter is difficult to improve, and the corrosion resistance of the crucible is directly related to its density, the higher the density the greater its corrosion resistance, but the greater the carbon/carbon size the more difficult it is to densify the vapor deposition.
The utility model discloses a modular carbon/carbon combined material crucible 100 redesigns and adjusts the structure, has set up the mounting groove towards the one side of accepting the chamber at lateral wall 20, and this mounting groove extends to the direction that is close to diapire 10 from the opening of accepting the chamber to install replacement detachably in the mounting groove. Thus, on the one hand, the most easily corroded straight tube section of the crucible 100 can be replaced later, so as to achieve the purpose of prolonging the service life of the whole carbon/carbon crucible. On the other hand, the material and the density of the easy-to-corrode part, namely the replacement part 30, can be adjusted independently, the easy-to-corrode part, namely the replacement part 30, can be manufactured independently, the density is improved more easily due to the fact that the workpiece is smaller and thinner, meanwhile, the material can be changed, and the material with higher corrosion resistance is selected, so that the defect that the overall density of the carbon/carbon crucible is lower is overcome, the corrosion resistance of the easy-to-corrode part is improved, the service life of the whole crucible is prolonged, resources are saved, and the production cost is reduced. Therefore, the utility model discloses a straight tube section position perishable problem has been solved to combination formula carbon/carbon combined material crucible 100, has improved the whole life of crucible, when adopting this crucible 100 bearing quartz crucible simultaneously, can separate replacement 30 earlier before dismantling quartz crucible, reserves the gap of carbon/carbon crucible and quartz crucible to the harm to carbon/carbon crucible when reducing quartz crucible and dismantling. Trial through practice, the utility model discloses a 100 convenient to use of crucible has improved 30% on original life's of crucible basis, also greatly reduced the degree of difficulty of dismantling quartz crucible.
In a specific example, as shown in fig. 2, the replacement 30 includes a main body portion 31 and a bent portion 32 connected to the main body portion 31, the main body portion 31 is configured to abut against a surface of the sidewall 20 facing the receiving cavity, and the bent portion 32 is configured to abut against an end surface of the sidewall far from the bottom wall 10. Thus, the replacement part 30 is more convenient and more stable when being installed in the installation groove, and has a protective effect on the end surface of the side wall far away from the bottom wall 10.
In a specific example, the mounting groove extends in a circumferential direction of the side wall 20 and is formed in a ring shape, and the main body portion 31 has a cylindrical shape. Thus, the most easily corroded opening part of the straight tube section of the whole crucible 100 can be replaced by the replacement part 30, so that the corrosion resistance is improved, and the service life of the whole crucible is prolonged.
In a specific example, the mounting groove is annular, and the body 31 is cylindrical, that is, the receiving cavity of the crucible 100 is cylindrical. It will be appreciated that the specific shape is not limited thereto, for example, the receiving cavity is in the shape of a rectangular column, and the shapes of the mounting groove and the main body 31 are adjusted accordingly.
In a specific example, the size of the mounting groove along the thickness direction of the side wall 20 is 1/3-1/2 of the thickness of the side wall 20, so that the service life can be prolonged well, and the manufacturing of materials with higher density is facilitated.
In a specific example, the dimension of the mounting groove along the height direction of the side wall 20 is 1/3-2/3 of the height of the side wall 20, so that the straight pipe section part which is most prone to corrosion can be better covered, and the service life of the whole crucible 100 is prolonged.
In a specific example, the thickness of the main body portion is 4mm to 5mm, that is, the dimension of the mounting groove in the thickness direction of the side wall 20 is 4mm to 5mm, preferably 5 mm. Alternatively, the height of the body portion is 20cm to 30cm, i.e., the dimension of the mounting groove in the height direction of the side wall 20 is 20cm to 30cm, preferably 25 cm.
In a specific example, the bent portion 32 has a dimension of 5mm to 15mm, preferably 10mm, in the height direction of the side wall 20.
In one particular example, the displacement 30 is a carbon/carbon material displacement, a boron nitride material displacement, or a carbon ceramic material displacement. Alternatively, the carbon/carbon material replacement has a density of 1.7g/cm3。
In a particular example, the inner surfaces of the bottom wall 10 and the side walls 20 facing the housing cavity are provided with graphite paper. Optionally, the graphite paper has a thickness of 0.3mm to 2 mm. So, further utilize the lubricating property of graphite paper, keep apart quartz crucible outer wall and carbon/carbon crucible inner wall, play the effect of preventing bonding, reduced the degree of hugging closely of quartz crucible outer wall and carbon/carbon crucible inner wall, alleviateed the damage to carbon/carbon crucible when getting rid of quartz crucible residual effectively simultaneously, it is better to improve the effect in crucible life-span, has improved 40% on the basis of original life of crucible, has saved manufacturing cost greatly.
The utility model discloses a straight tube section position perishable problem has been solved to combination formula carbon/carbon combined material crucible 100, has improved the whole life of crucible, when adopting this crucible 100 bearing quartz crucible simultaneously, can separate replacement 30 earlier before dismantling quartz crucible, reserves the gap of carbon/carbon crucible and quartz crucible to harm to carbon/carbon crucible when reducing quartz crucible and dismantling. Trial through practice, the utility model discloses a combination formula carbon/carbon combined material crucible 100 convenient to use has improved 30% ~ 40% on original life's of crucible basis, also greatly reduced the degree of difficulty of dismantling quartz crucible.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. The combined carbon/carbon composite material crucible is characterized by comprising a bottom wall, a side wall and a replacement part, wherein the side wall is connected with the bottom wall to form an accommodating cavity with an open top, one side of the side wall, facing the accommodating cavity, is provided with a mounting groove, the mounting groove extends from an opening of the accommodating cavity to a direction close to the bottom wall, and the replacement part is detachably mounted on the mounting groove.
2. The composite carbon/carbon crucible as claimed in claim 1, wherein the replacement part comprises a main body and a bent part connected to the main body, the main body is configured to abut against a surface of the sidewall facing the receiving cavity, and the bent part is configured to abut against an end surface of the sidewall away from the bottom wall.
3. The crucible of claim 2, wherein the mounting groove extends in a circumferential direction of the sidewall and is formed in a ring shape, and the main body has a cylindrical shape.
4. The composite carbon/carbon crucible as claimed in claim 3, wherein the mounting groove is annular, and the body part is cylindrical.
5. The composite carbon/carbon crucible as claimed in any one of claims 1 to 4, wherein the installation groove has a size of 1/3-1/2 of the thickness of the side wall in the thickness direction of the side wall.
6. The crucible as claimed in claim 5, wherein the installation groove has a dimension in a height direction of the side wall of 1/3-2/3 of the height of the side wall.
7. The composite carbon/carbon crucible as claimed in any one of claims 2 to 4, wherein the body has a thickness of 4mm to 5 mm.
8. The composite carbon/carbon crucible as claimed in claim 7, wherein the height of the body is 20cm to 30 cm.
9. The composite carbon/carbon crucible as claimed in any one of claims 2 to 4, wherein the bent portion has a dimension of 5mm to 15mm in a height direction of the side wall.
10. The composite carbon/carbon crucible of any one of claims 1 to 4, wherein the replacement is a carbon/carbon material replacement, a boron nitride material replacement or a carbon ceramic material replacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022119141.9U CN213596458U (en) | 2020-09-24 | 2020-09-24 | Combined carbon/carbon composite material crucible |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022119141.9U CN213596458U (en) | 2020-09-24 | 2020-09-24 | Combined carbon/carbon composite material crucible |
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| CN213596458U true CN213596458U (en) | 2021-07-02 |
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| CN202022119141.9U Active CN213596458U (en) | 2020-09-24 | 2020-09-24 | Combined carbon/carbon composite material crucible |
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