CN213579889U

CN213579889U - High-stability monocrystalline silicon differential pressure sensor

Info

Publication number: CN213579889U
Application number: CN202023199319.1U
Authority: CN
Inventors: 陈跃; 彭芳; 雷姣
Original assignee: Shanghai Aijin Intelligent Technology Co Ltd
Current assignee: Shanghai Aijin Intelligent Technology Co Ltd
Priority date: 2020-12-25
Filing date: 2020-12-25
Publication date: 2021-06-29
Anticipated expiration: 2030-12-25

Abstract

The utility model relates to a sensor field specifically is a high stability monocrystalline silicon differential pressure sensor, including the sensor housing, the inboard of sensor housing is equipped with the median septum, install monocrystalline silicon sensor chip on the median septum, the side space is sensor positive pressure chamber and sensor negative pressure chamber respectively about monocrystalline silicon sensor chip, the left and right sides of monocrystalline silicon sensor chip still cooperates respectively and is connected with first excessive pressure protection film and second excessive pressure protection film, first isolation ripple piece is installed to the port in first measurement chamber, the port in second measurement chamber is installed the second and is kept apart the ripple piece, sensor positive pressure intracavity is still circumferential distribution and is equipped with a plurality of first oil cavity ways that lead to, sensor negative pressure intracavity is still circumferential distribution and is equipped with a plurality of second and leads to oil cavity way. The utility model discloses stability is high, and the measurement accuracy and the precision of sensor are good, can be applicable to complicated operating mode, are worth promoting.

Description

High-stability monocrystalline silicon differential pressure sensor

Technical Field

The utility model relates to a sensor field specifically is a high stability monocrystalline silicon differential pressure sensor.

Background

Differential pressure sensors are common tools in the industrial field for measuring differential pressures of gases or liquids, and are commonly used in industrial processes to measure pressures in various industrial process fluids, such as cement, liquid water vapor and chemical gases, pulp, petroleum, gas, pharmaceutical, food, and other fluid-type processing plants.

Differential pressure sensors typically include a stack of process fluid pressure inputs operatively connected to the sensor die between respective two inputs, and typically also include a stack of isolation diaphragms positioned in the process fluid inlet and isolating the differential pressure sensor from the sensed fluid, with pressure being communicated from the process fluid to the differential pressure sensor by a substantially incompressible fill fluid carried in a passageway extending through each isolation diaphragm to the differential pressure sensor.

The existing differential pressure sensor has poor stability, poor measurement accuracy and precision and is not suitable for complex working conditions. Therefore, in view of the above situation, there is an urgent need to develop a high-stability monocrystalline silicon differential pressure sensor to overcome the shortcomings in the current practical application.

SUMMERY OF THE UTILITY MODEL

An object of the embodiment of the utility model is to provide a high stability monocrystalline silicon differential pressure sensor to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the embodiment of the present invention provides the following technical solutions:

a high-stability monocrystalline silicon differential pressure sensor comprises a sensor shell, wherein a middle partition plate is arranged in the middle of the inner side of the sensor shell, a monocrystalline silicon sensor chip is mounted in the middle of the middle partition plate, a sensor positive pressure cavity and a sensor negative pressure cavity are respectively arranged in the left side space and the right side space of the monocrystalline silicon sensor chip, a first overvoltage protective film and a second overvoltage protective film are respectively connected to the left side and the right side of the monocrystalline silicon sensor chip in a matched manner, a first measurement cavity is arranged on one side, away from the first overvoltage protective film, of the sensor positive pressure cavity, a first isolation corrugated sheet is mounted at a port first isolation corrugated sheet mounting port of the first measurement cavity, a second measurement cavity is arranged on one side, away from the second overvoltage protective film, of the sensor negative pressure cavity, a second isolation corrugated sheet is mounted at a port second isolation corrugated sheet mounting port of the second measurement cavity, and a plurality of first oil, two ends of the first oil through cavity channel are respectively connected with the first overpressure protection film and the first measurement cavity, a plurality of second oil through cavity channels are circumferentially distributed in the negative pressure cavity of the sensor, two ends of each second oil through cavity channel are respectively connected with the second overpressure protection film and the second measurement cavity, two adjacent first oil through cavity channels and two adjacent second oil through cavity channels are respectively connected through branch oil through cavity channels, and silicone oil is filled in the first oil through cavity channels, the second oil through cavity channels and the branch oil through cavity channels; the outer side of the monocrystalline silicon sensor chip is also provided with an annular isolation protection pad in a matching way, the outer wall of the annular isolation protection pad is connected with the middle partition plate, the inner wall of the annular isolation protection pad is connected with the monocrystalline silicon sensor chip, and the annular isolation protection pad is made of antistatic insulating materials; the cavity wall of the first measuring cavity is provided with a plurality of first reinforcing convex blocks for supporting and fixing the first isolating corrugated sheet, and the cavity wall of the second measuring cavity is provided with a plurality of second reinforcing convex blocks for supporting and fixing the second isolating corrugated sheet.

As a further aspect of the present invention: the first oil through cavity channels and the second oil through cavity channels are uniformly distributed in the circumferential direction, the first oil through cavity channels and the second oil through cavity channels are horizontally arranged, the included angle between every two adjacent first oil through cavity channels and the included angle between every two adjacent second oil through cavity channels are 60 degrees, the middle first oil through cavity channel and the middle second oil through cavity channel are coaxially arranged, the middle first oil through cavity channel is vertically connected to the central position of the first overpressure protection film, and the middle second oil through cavity channel is vertically connected to the central position of the second overpressure protection film; the branch oil cavity channel is of an arc-shaped structure, two ends of the branch oil cavity channel between every two adjacent first oil cavity channels are respectively and correspondingly connected to the middle positions of the two first oil cavity channels, and two ends of the branch oil cavity channel between every two adjacent second oil cavity channels are respectively and correspondingly connected to the middle positions of the two second oil cavity channels.

As a further aspect of the present invention: the middle part of the upper side of one first oil through cavity channel in the middle is also connected with a first oil filling pipeline, the first oil filling pipeline extends out of the top of the sensor shell, the first oil filling pipeline is fixedly connected with the top of the sensor shell in a sealing mode, and a first sealing cover can be detachably mounted at the upper end of the first oil filling pipeline.

As a further aspect of the present invention: the middle part of the upper side of one second oil-filled channel in the middle is also connected with a second oil-filled channel, the second oil-filled channel extends out of the top of the sensor shell, the second oil-filled channel is fixedly connected with the top of the sensor shell in a sealing manner, and a second sealing cover can be detachably mounted at the upper end of the second oil-filled channel.

As a further aspect of the present invention: the upper part of the middle partition board is also provided with a sensor connecting channel, and one side of the sensor connecting channel, which is close to the monocrystalline silicon sensor chip, is provided with a chip silicon film area.

Compared with the prior art, the utility model discloses the beneficial effect of embodiment is:

according to the high-stability monocrystalline silicon differential pressure sensor, the middle partition plate is arranged in the middle of the inner side of the sensor shell, and the monocrystalline silicon sensor chip is arranged in the middle of the middle partition plate, so that the stability and reliability of detection of the monocrystalline silicon sensor chip can be improved; little deformation can take place for monocrystalline silicon sensor chip under the effect of positive negative pressure, thereby lead to the resistance of the bridge circuit resistance of monocrystalline silicon sensor chip inside to change, and then lead to its electric current output who produces to change thereupon, with the pressure differential that measures the sensor both ends, circumference evenly distributed through first logical oil chamber way and second logical oil chamber way sets up, and connect through branch logical oil chamber way between two adjacent first logical oil chamber ways and between two adjacent second logical oil chamber ways respectively, can promote the measurement accuracy and the precision of monocrystalline silicon sensor chip, make it applicable in more complicated operating mode, be worth promoting.

Drawings

Fig. 1 is a schematic front sectional structure view of an embodiment of the present invention.

Fig. 2 is a schematic perspective view of a first oil passage portion in an embodiment of the present invention.

Fig. 3 is a schematic top view of the embodiment of the present invention.

Fig. 4 is an enlarged schematic view of a portion a of fig. 1.

In the figure: 1-a first isolating corrugated sheet mounting opening, 2-a second isolating corrugated sheet mounting opening, 3-a first reinforcing bump, 4-a second reinforcing bump, 5-a first isolating corrugated sheet, 6-a second isolating corrugated sheet, 7-a first measuring cavity, 8-a second measuring cavity, 9-a sensor positive pressure cavity, 10-a sensor negative pressure cavity, 11-an annular isolating protection pad, 12-a middle partition plate, 13-a sensor shell, 14-a first overpressure protection film, 15-a monocrystalline silicon sensor chip, 16-a second overpressure protection film, 17-a first oil filling cavity channel, 18-a first oil filling channel, 19-a first sealing cover, 20-a second sealing cover, 21-a second oil filling channel, 22-a second oil filling cavity channel, 23-a sensor connecting channel, 24-branch oil cavity passage, 25-chip silicon membrane region.

Detailed Description

The technical solution of the present patent will be described in further detail with reference to the following embodiments.

Reference will now be made in detail to embodiments of the present patent, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present patent and are not to be construed as limiting the present patent.

Example 1

Referring to fig. 1-2, in the embodiment of the present invention, a high-stability monocrystalline silicon differential pressure sensor includes a sensor housing 13, a middle partition plate 12 is disposed in the middle of the inner side of the sensor housing 13, a monocrystalline silicon sensor chip 15 is mounted in the middle of the middle partition plate 12, a sensor positive pressure cavity 9 and a sensor negative pressure cavity 10 are respectively disposed in the left and right side spaces of the monocrystalline silicon sensor chip 15, a first overvoltage protection film 14 and a second overvoltage protection film 16 are respectively coupled to the left and right sides of the monocrystalline silicon sensor chip 15, a first measurement cavity 7 is disposed on the side of the sensor positive pressure cavity 9 away from the first overvoltage protection film 14, a first isolation corrugated sheet 5 is mounted at a first isolation corrugated sheet mounting port 1 of the first measurement cavity 7, a second measurement cavity 8 is disposed on the side of the sensor negative pressure cavity 10 away from the second overvoltage protection film 16, a second isolation corrugated sheet 6 is mounted at a second isolation sheet mounting port 2 of the second measurement cavity 8, still the circumference distributes in the sensor positive pressure chamber 9 and is equipped with a plurality of first oil chamber ways 17 that lead to, the both ends that first oil chamber way 17 leads to are connected with first excessive pressure protection film 14 and first measurement chamber 7 respectively, it is equipped with a plurality of second oil chamber ways 22 that still circumference distributes in the sensor negative pressure chamber 10, the both ends that second oil chamber way 22 leads to are connected with second excessive pressure protection film 16 and second measurement chamber 8 respectively, connect through a branch oil chamber way 24 between two adjacent first oil chamber ways 17 and between two adjacent second oil chamber ways 22 respectively, just first oil chamber way 17, second oil chamber way 22 and branch oil chamber way 24 intussuseption are filled with silicone oil.

In the embodiment of the present invention, the middle partition plate 12 is disposed in the middle of the inner side of the sensor housing 13, and the monocrystalline silicon sensor chip 15 is mounted in the middle of the middle partition plate 12, so that the detection stability and reliability of the monocrystalline silicon sensor chip 15 can be improved; the monocrystalline silicon sensor chip 15 can take place tiny deformation under the effect of positive negative pressure, thereby lead to the resistance of the bridge circuit resistance of monocrystalline silicon sensor chip 15 inside to change, and then lead to its electric current output that produces to change thereupon, with the pressure differential of measuring the sensor both ends, circumference evenly distributed through first logical oil chamber way 17 and second logical oil chamber way 22 sets up, and connect through branch logical oil chamber way 24 between two adjacent first logical oil chamber ways 17 and between two adjacent second logical oil chamber ways 22 respectively, can promote monocrystalline silicon sensor chip 15's measurement accuracy and precision, make its applicable in more complicated operating mode, be worth promoting.

Example 2

Referring to fig. 1-4, the difference between the present embodiment and embodiment 1 is:

in this embodiment, a plurality of first reinforcing protrusions 3 for supporting and fixing the first isolating corrugated sheet 5 are arranged on the cavity wall of the first measuring cavity 7, a plurality of second reinforcing protrusions 4 for supporting and fixing the second isolating corrugated sheet 6 are arranged on the cavity wall of the second measuring cavity 8, and the application reliability and effect of the first isolating corrugated sheet 5 and the second isolating corrugated sheet 6 can be improved by the arrangement of the first reinforcing protrusions 3 and the second reinforcing protrusions 4.

In this embodiment, the first oil through channel 17 and the second oil through channel 22 are uniformly distributed in the circumferential direction, the first oil through channel 17 and the second oil through channel 22 are horizontally arranged, an included angle between two adjacent first oil through channels 17 and an included angle between two adjacent second oil through channels 22 are 60 °, the middle first oil through channel 17 and the middle second oil through channel 22 are coaxially arranged, the middle first oil through channel 17 is vertically connected to the center of the first overpressure protection film 14, the middle second oil through channel 22 is vertically connected to the center of the second overpressure protection film 16, and the pressure conveying effect of the second overpressure protection film is improved.

The branch oil cavity channel 24 is of an arc-shaped structure, two ends of the branch oil cavity channel 24 between two adjacent first oil cavity channels 17 are respectively and correspondingly connected to the middle positions of the two first oil cavity channels 17, and two ends of the branch oil cavity channel 24 between two adjacent second oil cavity channels 22 are respectively and correspondingly connected to the middle positions of the two second oil cavity channels 22, so that the overall application effect is improved.

The middle part of the upper side of one first oil through cavity channel 17 in the middle is also connected with a first oil filling pipeline 18, the first oil filling pipeline 18 extends out of the top of the sensor shell 13, the first oil filling pipeline 18 is fixedly connected with the top of the sensor shell 13 in a sealing way, and the upper end of the first oil filling pipeline 18 can be also detachably provided with a first sealing cover 19; the middle part of the upper side of one middle second oil passage channel 22 is also connected with a second oil filling channel 21, the second oil filling channel 21 extends out of the top of the sensor shell 13, the second oil filling channel 21 is fixedly connected with the top of the sensor shell 13 in a sealing manner, a second sealing cover 20 can be detachably mounted at the upper end of the second oil filling channel 21, and the first oil passage channel 17 and the second oil passage channel 22 are filled with silicon oil through the arrangement of the first oil filling channel 18 and the second oil filling channel 21, so that the application is convenient.

In this embodiment, the outer side of the monocrystalline silicon sensor chip 15 is further provided with an annular isolation protection pad 11 in a matching manner, the outer wall of the annular isolation protection pad 11 is connected with the middle partition plate 12, the inner wall of the annular isolation protection pad 11 is connected with the monocrystalline silicon sensor chip 15, the annular isolation protection pad 11 is made of an antistatic insulating material, the upper part of the middle partition plate 12 is further provided with a sensor connection channel 23, one side of the sensor connection channel 23, which is close to the monocrystalline silicon sensor chip 15, is provided with a chip silicon film region 25, and through the arrangement of the sensor connection channel 23 and the chip silicon film region 25, the electrical connection of the monocrystalline silicon sensor chip 15 is facilitated, so that the integral application is more reliable; in addition, the specific type and circuit connection of the monocrystalline silicon sensor chip 15 are not particularly limited, and the sensor chip can be flexibly set in actual use.

The circuits, electronic components and modules involved are prior art and can be implemented by those skilled in the art, without further elaboration, and the invention also does not relate to the improvement of software programs.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature. The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or reference letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

The above is only the preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, without departing from the concept of the present invention, several modifications and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent.

Claims

1. A high stability monocrystalline silicon differential pressure sensor, includes sensor housing (13), its characterized in that:

a middle partition plate (12) is arranged in the middle of the inner side of the sensor shell (13), a monocrystalline silicon sensor chip (15) is installed in the middle of the middle partition plate (12), and a sensor positive pressure cavity (9) and a sensor negative pressure cavity (10) are respectively arranged in the left and right spaces of the monocrystalline silicon sensor chip (15);

the left side and the right side of the monocrystalline silicon sensor chip (15) are respectively connected with a first overvoltage protection film (14) and a second overvoltage protection film (16) in a matched mode, a first measurement cavity (7) is formed in one side, away from the first overvoltage protection film (14), of the positive pressure cavity (9) of the sensor, a first isolation corrugated sheet (5) is installed at a port first isolation corrugated sheet installation opening (1) of the first measurement cavity (7), a second measurement cavity (8) is formed in one side, away from the second overvoltage protection film (16), of the negative pressure cavity (10) of the sensor, and a second isolation corrugated sheet (6) is installed at a port second isolation corrugated sheet installation opening (2) of the second measurement cavity (8);

a plurality of first oil through cavity channels (17) are circumferentially distributed in the sensor positive pressure cavity (9), two ends of each first oil through cavity channel (17) are respectively connected with the first overpressure protection film (14) and the first measurement cavity (7), a plurality of second oil through cavity channels (22) are circumferentially distributed in the sensor negative pressure cavity (10), two ends of each second oil through cavity channel (22) are respectively connected with the second overpressure protection film (16) and the second measurement cavity (8), two adjacent first oil through cavity channels (17) and two adjacent second oil through cavity channels (22) are respectively connected through branch oil through cavity channels (24), and the first oil through cavity channels (17), the second oil through cavity channels (22) and the branch oil through cavity channels (24) are filled with silicone oil;

the outer side of the monocrystalline silicon sensor chip (15) is also provided with an annular isolation protection pad (11) in a matching manner, the outer wall of the annular isolation protection pad (11) is connected with the middle partition plate (12), the inner wall of the annular isolation protection pad (11) is connected with the monocrystalline silicon sensor chip (15), and the annular isolation protection pad (11) is made of antistatic insulating materials;

the cavity wall of the first measuring cavity (7) is provided with a plurality of first reinforcing convex blocks (3) for supporting and fixing the first isolating corrugated sheet (5), and the cavity wall of the second measuring cavity (8) is provided with a plurality of second reinforcing convex blocks (4) for supporting and fixing the second isolating corrugated sheet (6).

2. The high-stability monocrystalline silicon differential pressure sensor is characterized in that three first oil through channels (17) and three second oil through channels (22) are uniformly distributed in the circumferential direction, a plurality of first oil through channels (17) and a plurality of second oil through channels (22) are horizontally arranged, an included angle between every two adjacent first oil through channels (17) and an included angle between every two adjacent second oil through channels (22) are both 60 degrees, a middle first oil through channel (17) and a middle second oil through channel (22) are coaxially arranged, the middle first oil through channel (17) is vertically connected to the central position of a first overpressure protective film (14), and the middle second oil through channel (22) is vertically connected to the central position of a second overpressure protective film (16); the branch oil through cavity channel (24) is of an arc-shaped structure, two ends of the branch oil through cavity channel (24) between two adjacent first oil through cavity channels (17) are respectively and correspondingly connected to the middle positions of the two first oil through cavity channels (17), and two ends of the branch oil through cavity channel (24) between two adjacent second oil through cavity channels (22) are respectively and correspondingly connected to the middle positions of the two second oil through cavity channels (22).

3. The high-stability monocrystalline silicon differential pressure sensor is characterized in that a first oil filling pipeline (18) is further connected to the middle of the upper side of the middle first oil through cavity channel (17), the first oil filling pipeline (18) extends out of the top of the sensor shell (13), the first oil filling pipeline (18) is fixedly connected with the top of the sensor shell (13) in a sealing mode, and a first sealing cover (19) is detachably mounted at the upper end of the first oil filling pipeline (18).

4. The high-stability monocrystalline silicon differential pressure sensor is characterized in that a second oil filling pipeline (21) is further connected to the middle of the upper side of the middle second oil through cavity channel (22), the second oil filling pipeline (21) extends out of the top of the sensor shell (13), the second oil filling pipeline (21) is fixedly connected with the top of the sensor shell (13) in a sealing mode, and a second sealing cover (20) is detachably mounted at the upper end of the second oil filling pipeline (21).

5. The high-stability monocrystalline silicon differential pressure sensor is characterized in that the upper part of the middle partition plate (12) is also provided with a sensor connecting channel (23), and the side, close to the monocrystalline silicon sensor chip (15), of the sensor connecting channel (23) is provided with a chip silicon membrane region (25).