CN213478599U - Vacuum pump suitable for multiple industries and capable of automatically adjusting vacuum degree - Google Patents
Vacuum pump suitable for multiple industries and capable of automatically adjusting vacuum degree Download PDFInfo
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- CN213478599U CN213478599U CN202022678808.9U CN202022678808U CN213478599U CN 213478599 U CN213478599 U CN 213478599U CN 202022678808 U CN202022678808 U CN 202022678808U CN 213478599 U CN213478599 U CN 213478599U
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Abstract
The utility model discloses a but vacuum pump suitable for trades and automatically regulated vacuum belongs to the technical field of vacuum pump, the vacuum pump includes: the vacuum pump comprises a vacuum pump cavity, wherein each stage of cavity is arranged in the vacuum pump cavity and is a mutually independent sealed space; an exhaust pipeline communicated with the vacuum pump cavity; the one-way valves are respectively communicated between the cavities of each stage, and the airflow direction of each one-way valve is matched with the airflow direction of the exhaust pipeline; the vacuum pump comprises air inlet branch pipes which are respectively communicated with cavities at all levels, wherein valves are arranged on the air inlet branch pipes, and different vacuum degrees are generated by combining the opening and closing states of the valves, so that the purposes of accurately controlling the vacuum degree of the vacuum pump in all levels, improving the use safety and prolonging the service life are achieved.
Description
Technical Field
The utility model belongs to the technical field of the vacuum pump, particularly, relate to a but vacuum pump suitable for trades and automatically regulated vacuum.
Background
Generally, once a vacuum pump is manufactured, the vacuum degree of the vacuum pump is fixed within a range and cannot be automatically adjusted, and if the vacuum degree is adjusted, the vacuum degree is generally adjusted by replacing the vacuum pump, but the cost is too high.
The common method that the adjustment vacuum degree adopted at present is to install a precision relief valve at the vacuum pump air inlet, and its principle is: the pressure release valve is opened, external gas enters the vacuum pump, the vacuum degree is reduced, the specific structure is shown in figure 1, and the scheme has the following defects:
(1) the pressure release valve is generally manually controlled, and the control of the vacuum degree cannot be accurate;
(2) external gas can enter the pump body, so that the load of the vacuum pump is greatly increased, the power consumption cost is increased, and the service life of the vacuum pump is also shortened;
(3) for special processes (such as silane gas), external air is not allowed to directly enter the air inlet, otherwise, silane is caused to explode after reacting with air, and only special process gas is externally connected to adjust the vacuum degree, so that the process cost is greatly increased;
(4) the potential safety hazard exists, if the process gas is poisonous and harmful gas, if external precision relief valve (4) has the risk of leaking, leads to the emergence of incident.
SUMMERY OF THE UTILITY MODEL
In view of this, in order to solve the above-mentioned problem that prior art exists, the utility model aims at providing a but vacuum pump that is applicable to the trade and automatically regulated vacuum is in order to reach the purpose that can carry out accurate control at each rank scope to the vacuum of vacuum pump to improve safety in utilization and life.
The utility model discloses the technical scheme who adopts does: a vacuum pump adapted for multiple industries and capable of automatically adjusting a vacuum level, the vacuum pump comprising:
the vacuum pump comprises a vacuum pump cavity, wherein each stage of cavity is arranged in the vacuum pump cavity and is a mutually independent sealed space;
an exhaust pipeline communicated with the vacuum pump cavity;
the one-way valves are respectively communicated between the cavities of each stage, and the airflow direction of each one-way valve is matched with the airflow direction of the exhaust pipeline;
and the air inlet branch pipes are respectively communicated with the cavities at all levels, and valves are arranged on the air inlet branch pipes and are combined to generate different vacuum degrees through the opening and closing states of the valves.
Furthermore, a plurality of partition plates are arranged in the vacuum pump cavity, and the vacuum pump cavity is divided into cavities at different levels through the partition plates.
Furthermore, each check valve is respectively arranged on each partition plate, and each stage of cavity is communicated in a one-way mode through each check valve, so that the phenomenon that airflow of other unnecessary cavities flows backwards when different vacuum degree requirements need to be acquired is prevented.
Furthermore, each air inlet branch pipe is communicated with the same air inlet pipe, and the air inlet pipe is connected with an air inlet source.
Furthermore, the valve adopts an electromagnetic valve, and the opening and closing of the electromagnetic valve can be executed by signals.
Further, the vacuum pump further includes:
and the controller is electrically connected with the electromagnetic valves respectively, and the full-automatic accurate control of the vacuum degree is realized under the action of the controller.
Furthermore, a main shaft which is coaxial with the vacuum pump cavity and is rotatably arranged is arranged in the vacuum pump cavity, a plurality of sections of rotors are arranged on the main shaft, and the rotors are respectively arranged in the cavities of all stages.
The utility model has the advantages that:
1. adopt the utility model provides a but vacuum pump suitable for trades and automatically regulated vacuum, it is through separating the vacuum pump cavity is inside, carries out full automatic control to the steam admission volume in each subregion, and then can realize carrying out accurate control to the all levels of vacuum.
2. Adopt the utility model provides a vacuum pump suitable for trades and automatically regulated vacuum, the state combination of opening and close through each valve produces different vacuum, can the at utmost adjust vacuum according to the demand, reduces the load of vacuum pump, reduces the consumption cost, and the at utmost reduces the processing cost simultaneously, prolongs maintenance cycle and life.
3. Adopt the utility model provides a but vacuum pump suitable for trades and automatically regulated vacuum, it can be applicable to all applications and all special technology, and whole vacuum pump is totally closed system at the operation in-process, does not have the risk that harmful gas leaked, has the high advantage of security.
Drawings
Figure 1 is a schematic diagram of the construction of a prior art vacuum pump solution;
FIG. 2 is a schematic view of the overall structure of the vacuum pump which is applicable to multiple industries and can automatically adjust the vacuum degree provided by the present invention;
the drawings are labeled as follows:
the method comprises the following steps of 1-vacuum pump cavity, 2-air inlet pipe, 3-exhaust pipeline, 4-pressure release valve, 5-electric motor, 6-controller, 7-main shaft, 8-partition plate, 9-one-way valve, 10-first electromagnetic valve, 11-second electromagnetic valve, 12-third electromagnetic valve, 13-fourth electromagnetic valve, 14-first-stage cavity, 15-second-stage cavity, 16-third-stage cavity and 17-fourth-stage cavity.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that the indication of the position or the positional relationship is based on the position or the positional relationship shown in the drawings, or the position or the positional relationship that the utility model is usually placed when using, or the position or the positional relationship that the skilled person conventionally understands, or the position or the positional relationship that the utility model is usually placed when using, and is only for the convenience of describing the present invention and simplifying the description, but does not indicate or suggest that the indicated device or element must have a specific position, be constructed and operated in a specific position, and thus, cannot be understood as limiting the present invention. Furthermore, the terms "first" and "second" are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed" and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases for a person of ordinary skill in the art; the drawings in the embodiments are provided to clearly and completely describe the technical solutions in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Example 1
In the embodiment, a vacuum pump which is applicable to multiple industries and can automatically adjust the vacuum degree is specifically provided, and the purpose of accurately controlling the vacuum degree of the vacuum pump in each level range and improving the use safety and the service life is achieved through the vacuum pump, as shown in fig. 2, the vacuum pump is specifically designed as follows:
the major structure of vacuum pump system is vacuum pump cavity 1, through be equipped with a plurality of baffles 8 in vacuum pump cavity 1, separate into cavity at different levels with vacuum pump cavity 1 through each baffle 8, each baffle 8 all adopts the mode of seal assembly to locate vacuum pump cavity 1's inside, when practical application, can adopt welded mode with each baffle 8 seal welding on vacuum pump cavity 1's inner chamber, and with dividing into level four cavity 17 in vacuum pump cavity 1, do respectively: a primary cavity 14, a secondary cavity 15, a tertiary cavity 16 and a quaternary cavity 17.
Above-mentioned vacuum pump cavity 1 comprises middle chamber barrel and the sealed bearing mounting panel of locating middle chamber barrel both ends, because multistage partition has been carried out to vacuum pump cavity 1's inside, be equipped with in vacuum pump cavity 1 rather than coaxial and rotate the main shaft 7 that sets up, the both ends of main shaft 7 are all rotated and are located on the bearing mounting panel and the one end of main shaft 7 is equipped with its pivoted motor of drive, be equipped with multistage rotor and each section rotor and arrange respectively in each stage cavity on main shaft 7, in the design, should ensure that each section rotor respectively with one-level cavity 14, second grade cavity 15, tertiary cavity 16 and level four cavity 17 correspond the matching, and then the rotor can normally rotate under the drive of main shaft 7.
The interior of the vacuum pump cavity 1 is divided into cavities at all levels by the partition plates 8, and the cavities at all levels are mutually independent sealed spaces, namely: the primary cavity 14, the secondary cavity 15, the tertiary cavity 16 and the quaternary cavity 17 are independent and sealed. In order to realize the accurate control of the vacuum degree, the vacuum degree control device is arranged on the air inlet branch pipes which are respectively communicated with the cavities at all levels, valves are arranged on the air inlet branch pipes, and different vacuum degrees are generated by the combination of the opening and closing states of the valves. The first electromagnetic valve 10, the second electromagnetic valve 11, the third electromagnetic valve 12 and the fourth electromagnetic valve 13 are respectively arranged on the air inlet branch pipes corresponding to the first-stage cavity 14, the second-stage cavity 15, the third-stage cavity 16 and the fourth-stage cavity 17, and different vacuum degrees are generated by the combination of the on-off states of the electromagnetic valves. Preferably, in order to further improve the convenience of intake air delivery, each intake branch pipe is communicated with the same intake pipe 2, and the intake pipe 2 is connected with an intake air source
An exhaust pipeline 3 is arranged to be communicated with the vacuum pump cavity 1, in the embodiment, the exhaust pipeline 3 is communicated with the inside of the four-stage cavity 17, so that the intake air of the intake pipe 2 is discharged along the path from the first-stage cavity 14 to the four-stage cavity 17.
The check valves 9 are respectively communicated between the cavities of each stage, each check valve 9 is respectively arranged on each partition plate 8, the cavities of each stage are communicated in a one-way mode through each check valve 9, and meanwhile, the airflow direction of each check valve 9 is matched with the airflow direction of the exhaust pipeline 3; in the present embodiment, the flow direction of each check valve 9 is toward the four-stage cavity 17, so as to ensure that the intake air of the intake port can be exhausted to the atmosphere through the exhaust pipeline 3 under any on-off combination among the first solenoid valve 10, the second solenoid valve 11, the third solenoid valve 12 and the fourth solenoid valve 13. Because the one-way valve 9 is arranged on the partition plate 8 between different cavities, the air flow of other unnecessary cavities is prevented from flowing backwards when different vacuum degrees are obtained.
In order to realize that full-automatic control can be realized when the vacuum degree of the vacuum pump is adjusted, in this embodiment, a controller 6 loaded with control logic in advance is further provided, the controller 6 is electrically connected to each of the electromagnetic valves, and on the basis of the electrical connection between the first electromagnetic valve 10, the second electromagnetic valve 11, the third electromagnetic valve 12, and the fourth electromagnetic valve 13 and the controller 6, the controller 6 controls the on/off of the first electromagnetic valve 10, the second electromagnetic valve 11, the third electromagnetic valve 12, and the fourth electromagnetic valve 13 to obtain different degrees of vacuum degrees, and the adjustment of the vacuum degree is exemplified as follows:
when the first solenoid valve 10 is opened and the second solenoid valve 11, the third solenoid valve 12 and the fourth solenoid valve 13 are all closed, the highest degree of vacuum can be obtained;
on the contrary, when the first solenoid valve 10, the second solenoid valve 11, and the third solenoid valve 12 are all closed, and when the fourth solenoid valve 13 is opened, the minimum degree of vacuum can be obtained.
The present invention is not limited to the above-mentioned optional embodiments, and any other products in various forms can be obtained by anyone under the teaching of the present invention, and any changes in the shape or structure thereof, all the technical solutions falling within the scope of the present invention, are within the protection scope of the present invention.
Claims (7)
1. A vacuum pump suitable for multiple industries and capable of automatically adjusting vacuum degree, the vacuum pump comprising:
the vacuum pump comprises a vacuum pump cavity, wherein each stage of cavity is arranged in the vacuum pump cavity and is a mutually independent sealed space;
an exhaust pipeline communicated with the vacuum pump cavity;
the one-way valves are respectively communicated between the cavities of each stage, and the airflow direction of each one-way valve is matched with the airflow direction of the exhaust pipeline;
and the air inlet branch pipes are respectively communicated with the cavities at all levels, and valves are arranged on the air inlet branch pipes and are combined to generate different vacuum degrees through the opening and closing states of the valves.
2. The vacuum pump applicable to multiple industries and capable of automatically adjusting the vacuum degree according to claim 1, wherein a plurality of partition plates are arranged in the vacuum pump cavity, and the vacuum pump cavity is divided into cavities of different levels by the partition plates.
3. The vacuum pump applicable to multiple industries and capable of automatically adjusting the vacuum degree according to claim 2, wherein each check valve is respectively arranged on each partition plate, and each stage of cavity is communicated in a one-way mode through each check valve.
4. The vacuum pump applicable to multiple industries and capable of automatically adjusting vacuum degree according to claim 1, wherein each air inlet branch pipe is communicated with the same air inlet pipe, and the air inlet pipe is connected with an air inlet source.
5. The vacuum pump applicable to multiple industries and capable of automatically adjusting vacuum degree according to claim 1, wherein the valve is a solenoid valve.
6. A vacuum pump adapted for multiple industries and capable of automatically adjusting vacuum degree according to claim 5, further comprising:
and the controller is electrically connected with the electromagnetic valves respectively.
7. The vacuum pump applicable to multiple industries and capable of automatically adjusting the vacuum degree according to claim 1, wherein a main shaft which is coaxial and rotatably arranged with the vacuum pump is arranged in the vacuum pump cavity, a plurality of sections of rotors are arranged on the main shaft, and the rotors of each section are respectively arranged in the cavities of each stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022678808.9U CN213478599U (en) | 2020-11-18 | 2020-11-18 | Vacuum pump suitable for multiple industries and capable of automatically adjusting vacuum degree |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022678808.9U CN213478599U (en) | 2020-11-18 | 2020-11-18 | Vacuum pump suitable for multiple industries and capable of automatically adjusting vacuum degree |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213478599U true CN213478599U (en) | 2021-06-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022678808.9U Active CN213478599U (en) | 2020-11-18 | 2020-11-18 | Vacuum pump suitable for multiple industries and capable of automatically adjusting vacuum degree |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213478599U (en) |
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2020
- 2020-11-18 CN CN202022678808.9U patent/CN213478599U/en active Active
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