CN213467769U - Preparation facilities of electron level boron trichloride - Google Patents

Abstract

The utility model relates to the technical field of chemical equipment, in particular to a preparation device of electronic grade boron trichloride, which comprises a reactor, wherein an inner tube is fixedly arranged on the reactor, a reactant inlet is arranged on the inner tube, an inner lamp tube is fixedly arranged in the inner tube, a spiral sheet is fixedly arranged in the inner tube, an overflow port is arranged on the inner tube, a sleeve is fixedly arranged on the inner tube, an outer lamp tube is fixedly arranged on the sleeve, a sampling port is arranged on the reactor, a circulating tube is fixedly arranged on the reactor, and a liquid inlet tube and a liquid outlet tube are fixedly connected on the circulating tube; the inner tube and the sleeve form two reaction checkpoints in the photocatalytic reactor, firstly, hydrogen and chlorine enter the spiral air passage formed by the spiral sheets in the inner tube, can receive the irradiation of the inner lamp tube in a large area in the process of rapid flow, and then enter the sleeve, so that the complete reaction of excess materials is ensured, and the reaction completion degree is higher.

Description

Preparation facilities of electron level boron trichloride

Technical Field

The utility model relates to a chemical industry equipment technical field specifically is a preparation facilities of electron level boron trichloride.

Background

Boron trichloride is colorless fuming liquid or gas, is decomposed in water to generate hydrogen chloride and boric acid, emits a large amount of heat, generates smoke due to hydrolysis in wet air, has strong reaction capacity, can form various coordination compounds, is commonly used as an organic synthesis catalyst, and is widely used as an etchant in the semiconductor integrated circuit manufacturing industry. With the rapid development of the semiconductor industry, the fineness of integrated circuits is higher and higher, so that the purity requirement of boron trichloride used as an auxiliary raw material in the manufacturing process of the integrated circuits is higher and higher.

At present, boron powder and hydrogen chloride are commonly used as reactants in the preparation process of boron trioxide, and hydrogen chloride is usually synthesized in a photocatalytic reactor, but the light source of the existing photocatalytic reactor is usually directly arranged at the top of the reactor, so that the contact area of illumination, chlorine and hydrogen is small, the light intensity distribution is uneven, the reaction efficiency is greatly reduced, the hydrogen and chlorine do not react completely when passing through the reactor quickly, and the hydrogen and chlorine pass through the reactor at low speed and have explosion potential safety hazard.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a preparation facilities of electron level boron trichloride to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a preparation facilities of electron level boron trichloride, includes the reactor, fixed mounting has the inner tube on the reactor, and is provided with the reactant import on the inner tube, fixed mounting has interior fluorescent tube in the inner tube, and fixed mounting has the flight in the inner tube, be provided with the overflow mouth on the inner tube, and fixed mounting has the sleeve on the inner tube, fixed mounting has outer fluorescent tube on the sleeve, be provided with the extraction mouth on the reactor, and fixed mounting has the circulating pipe on the reactor, fixedly connected with feed liquor pipe and drain pipe on the circulating pipe.

Preferably, the reactor is a long cylindrical tank body, the bottom of the reactor is fixedly provided with support legs, the inner pipe is arranged in the middle of the reactor, the bottom of the inner pipe extends out of the reactor, and the two reactant inlets are divided into a hydrogen inlet and a chlorine inlet.

Preferably, the vertical center of installing at the inner tube of interior fluorescent tube, and the flight is installed with interior fluorescent tube as the center, the flight constitutes spiral air flue, the overflow mouth sets up on the upper portion of inner tube, and the sleeve opening is outside installing at the inner tube down, outer fluorescent tube is installed on telescopic lateral wall, and outer fluorescent tube and interior fluorescent tube are the ultraviolet lamp.

Preferably, the extraction outlet is arranged at the top of the reactor, the circulating pipe is a water pipe arranged in the side wall of the reactor, and the liquid inlet pipe and the liquid outlet pipe are respectively connected to two ends of the circulating pipe.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the inner tube and the sleeve form two reaction checkpoints in the photocatalytic reactor, firstly hydrogen and chlorine enter a spiral air passage formed by spiral sheets in the inner tube, can receive the irradiation of an inner lamp tube in a large area in the process of fast flowing, and then enter the sleeve, so that the reaction of excess materials is ensured to be complete, the reaction completion degree is higher, the fast flowing of the chlorine and the hydrogen is ensured, and the explosion in a sealed container is avoided;

2. the utility model discloses an provide the illumination condition through interior fluorescent tube and outer fluorescent tube in the reactor, and carry out the circulation of heat preservation liquid by feed liquor pipe and drain pipe in the circulating pipe, keep warm to the reactor to the temperature condition of reaction is provided.

Drawings

Fig. 1 is a front view of the structure of the present invention;

fig. 2 is a schematic diagram of the photocatalytic structure of the present invention.

In the figure: the device comprises a reactor 1, an inner tube 2, a reactant inlet 3, an inner lamp tube 4, a spiral sheet 5, an overflow port 6, a sleeve 7, an outer lamp tube 8, a sampling port 9, a circulating tube 10, a liquid inlet tube 11 and a liquid outlet tube 12.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 2, the present invention provides a technical solution: the utility model provides a preparation facilities of electron level boron trichloride, includes reactor 1, fixed mounting has inner tube 2 on reactor 1, and is provided with reactant inlet 3 on the inner tube 2, fixed mounting has interior fluorescent tube 4 in the inner tube 2, and fixed mounting has flight 5 in the inner tube 2, be provided with overflow mouth 6 on the inner tube 2, and fixed mounting has sleeve 7 on the inner tube 2, fixed mounting has outer fluorescent tube 8 on the sleeve 7, be provided with extraction opening 9 on reactor 1, and fixed mounting has circulating pipe 10 on reactor 1, fixedly connected with feed liquor pipe 11 and drain pipe 12 on the circulating pipe 10.

The reactor 1 is a long cylindrical tank body, support legs are fixedly arranged at the bottom of the reactor 1, the inner pipe 2 is arranged in the middle of the reactor 1, the bottom of the inner pipe 2 extends out of the reactor 1, two reactant inlets 3 are arranged and are divided into a hydrogen inlet and a chlorine inlet, hydrogen and chlorine are introduced into the inner pipe 2 from the reactant inlets 3 for preliminary reaction, and then the rest materials enter the reactor 1 for continuous and sufficient reaction;

the inner lamp tube 4 is vertically arranged at the center of the inner tube 2, the spiral sheet 5 is arranged by taking the inner lamp tube 4 as the center, the spiral sheet 5 forms a spiral air passage, the overflow port 6 is arranged at the upper part of the inner tube 2, the opening of the sleeve 7 is downwards arranged outside the inner tube 2, the outer lamp tube 8 is arranged on the side wall of the sleeve 7, the outer lamp tube 8 and the inner lamp tube 4 are ultraviolet lamps, hydrogen and chlorine enter the inner tube 2, the inner lamp tube 4 provides illumination conditions, the hydrogen and the chlorine rapidly flow in the spiral air passage through the guide of the spiral sheet 5, the time for the raw materials to receive illumination is longer, the reaction is sufficient as far as possible, then the hydrogen, the chlorine and the chlorine enter the sleeve 7 from the overflow port 6 and flow downwards, the outer lamp tube 8 provides illumination conditions at the moment, so that the raw materials of reactants are completely reacted, and finally the hydrogen chloride is extracted;

the extraction outlet 9 is arranged at the top of the reactor 1, the circulating pipe 10 is a water pipe arranged in the side wall of the reactor 1, the liquid inlet pipe 11 and the liquid outlet pipe 12 are respectively connected with two ends of the circulating pipe 10, hydrogen chloride gas generated by reaction is collected from the extraction outlet 9, heat preservation liquid is introduced into the circulating pipe 10 through the liquid inlet pipe 11 to heat or cool the reactor 1, so that proper reaction temperature is provided, and the heat preservation liquid in the circulating pipe 10 returns to the liquid tank from the liquid outlet 12 to be circulated;

the working principle is as follows: firstly, hydrogen and chlorine are introduced into a reactor 1 from a reactant inlet 3, heat preservation liquid is introduced into a circulating pipe 10 through a liquid inlet pipe 11 to carry out temperature rise or temperature reduction on the reactor 1, thereby providing a suitable reaction temperature, hydrogen and chlorine gas are first introduced into the inner tube 2, the inner lamp tube 4 provides illumination conditions, meanwhile, the raw materials flow in the spiral air passage rapidly under the guidance of the spiral sheet 5, so that the time for the raw materials to receive light is prolonged, the raw materials react fully as much as possible, then hydrogen, chlorine and hydrogen chloride flow downwards in the sleeve 7 from the overflow port 6 at the top of the inner tube 2, the outer lamp tube 8 provides light conditions at the moment, so that the raw materials of reactants react completely, the hydrogen chloride flows out to the space of the reactor 1 from the bottom of the sleeve 7, and finally, extracting hydrogen chloride from an extraction port 9 to finish the preparation of the hydrogen chloride, wherein the hydrogen chloride is used as a raw material for preparing boron trichloride.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. The utility model provides a preparation facilities of electron level boron trichloride, includes reactor (1), its characterized in that: fixed mounting has inner tube (2) on reactor (1), and is provided with reactant import (3) on inner tube (2), fixed mounting has interior fluorescent tube (4) in inner tube (2), and fixed mounting has flight (5) in inner tube (2), be provided with overflow mouth (6) on inner tube (2), and fixed mounting has sleeve (7) on inner tube (2), fixed mounting has outer fluorescent tube (8) on sleeve (7), be provided with extraction opening (9) on reactor (1), and fixed mounting has circulating pipe (10) on reactor (1), fixedly connected with feed liquor pipe (11) and drain pipe (12) on circulating pipe (10).

2. The apparatus of claim 1, wherein the apparatus comprises: reactor (1) is the long tube-shape jar body, and reactor (1) bottom fixed mounting has the stabilizer blade, install at reactor (1) middle part inner tube (2), and inner tube (2) bottom stretches out reactor (1), reactant import (3) are provided with two, divide into hydrogen import and chlorine import.

3. The apparatus of claim 1, wherein the apparatus comprises: interior fluorescent tube (4) are vertical to be installed in the center of inner tube (2), and install as the center by interior fluorescent tube (4) in flight (5), flight (5) constitute spiral air flue, overflow mouth (6) set up on the upper portion of inner tube (2), and sleeve (7) opening installation down in inner tube (2) outside, install on the lateral wall of sleeve (7) outer fluorescent tube (8), and outer fluorescent tube (8) and interior fluorescent tube (4) are the ultraviolet lamp.

4. The apparatus of claim 1, wherein the apparatus comprises: the extraction opening (9) is arranged at the top of the reactor (1), the circulating pipe (10) is a water pipe arranged in the side wall of the reactor (1), and the liquid inlet pipe (11) and the liquid outlet pipe (12) are respectively connected to two ends of the circulating pipe (10).

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