SUMMERY OF THE UTILITY MODEL
In view of this, the present invention is directed to a vacuum high-pressure motion platform for mass spectrometry to solve the above-mentioned problems.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
the utility model provides a vacuum high pressure motion platform for mass spectrometry, includes cavity, high pressure conduction part, sample target plate drag, XY motion, be equipped with XY motion on the inside bottom plate of cavity, high pressure conduction part one end is connected with the cavity, and the other end drags with the sample target plate to be connected, the sample target plate drags to be connected on XY motion.
Furthermore, an x-axis guide rail positioning groove is formed in a bottom plate in the cavity, a molecular pump interface and a high-voltage electrode interface are arranged on the right side wall, a penning gauge interface is arranged on the rear side wall, and an electrode driving switching aerial plug interface is arranged on the front side wall.
Further, high pressure conduction part includes vacuum high voltage electrode, high pressure conduction pole piece, high pressure introduction connecting piece, insulating post, contact copper brush, the high voltage electrode interface on the cavity right side wall is worn out to vacuum high voltage electrode front end, and high pressure conduction pole piece is connected to the rear end, high pressure introduction connecting piece is connected to the high pressure conduction pole piece other end, high pressure introduction connecting piece other end bottom is connected with the insulating post, the x connecting plate upper surface at xy motion is connected to insulating post bottom, contact copper brush fixed connection is at high pressure introduction connecting piece front end downside, and can contact with the upper surface of high pressure conduction pole piece and be connected.
Further, the sample target plate drags including the target drags, insulating spliced pole, target drags the fixed plate, the target drags fixed plate fixed connection on XY moving mechanism's y connecting plate, the target drags the fixed plate upper surface and is equipped with insulating spliced pole, the top of insulating spliced pole is connected with the target and drags.
Further, the target drags inside and is equipped with the air guide hole.
Furthermore, the xy-motion mechanism comprises an x-axis guide rail, an x-axis motor, an x-axis lead screw, an x-axis connecting plate, a y-axis motor, a y-axis lead screw nut and a y-axis connecting plate, wherein the two x-axis guide rails are respectively arranged in an x-axis guide rail positioning groove in the cavity, the two x-axis guide rails are jointly and slidably connected with the x-axis connecting plate, the x-axis connecting plate is connected with the y-axis connecting plate through the y-axis guide rail, the upper surface of the y-axis connecting plate is fixedly connected with a sample target plate support, the x-axis motor and the y-axis motor are respectively connected with the x-axis lead screw and the y-axis lead screw through gear reducers, the x-axis connecting plate and the y-axis connecting plate are respectively connected through the x-axis lead screw nut and the y-axis lead screw nut, the bearing fixing base is fixed on the inside bottom plate of cavity, the bearing fixing base outside is equipped with the x encoder of being connected with x axle screw, the both sides of x connecting plate all are equipped with x direction opto-coupler separation blade the inboard bottom both ends still are equipped with the x opto-coupler in the cavity, the both sides of y connecting plate are equipped with y opto-coupler separation blade, x connecting plate upper surface both sides all are equipped with y axle opto-coupler.
Compared with the prior art, a vacuum high pressure motion platform for mass spectrum detection have following advantage:
a vacuum high pressure motion platform for mass spectrometric detection realize low-cost high accuracy two dimensional movement under vacuum environment, realize that the high pressure is leading-in simultaneously with motion platform insulating, further reduced time of flight mass spectrograph's manufacturing cost, applicable in other small-size equipment of moving under the vacuum simultaneously.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation. In the drawings:
fig. 1 is a schematic structural view of a vacuum high-pressure motion platform according to an embodiment of the present invention;
fig. 2 is a schematic view of a cavity structure according to an embodiment of the present invention;
fig. 3 is a schematic structural view of the vacuum high-pressure motion platform according to the embodiment of the present invention after the cavity is removed;
FIG. 4 is a schematic view of a contact copper brush connection structure according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a sample target plate holder according to an embodiment of the present invention;
fig. 6 is a schematic structural view of the XY movement mechanism according to the embodiment of the present invention.
Description of reference numerals:
1-a cavity; 11-molecular pump interface; 12-penning interface; 13-electrode driving switching aerial plug interface; 14-high voltage electrode interface; 15-x axis guide rail locating slots; 2-a high voltage conducting component; 21-vacuum high voltage electrode; 22-high voltage conducting pole piece, 23-high voltage leading-in connecting piece, 24-insulating column and 25-contact copper brush; 3-dragging a sample target plate; 31-target dragging; 32-insulating connecting column; 33-target towing fixing plate; 4-xy motion; 41-x axis guide rails; a 42-x axis motor; a 43-x axis lead screw; 44-x axis screw nuts; 45-nut connection plate; 46-bearing fixing seat; a 47-x encoder; a 48-x direction light coupling baffle plate; a 49-x optocoupler; a 410-x web; a 411-y axis motor; a 412-y axis lead screw; 413-y axis lead screw nuts; 414-y connecting plate; 415-y light coupling flaps; 416-y axis optocoupler.
Detailed Description
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1 to 6, a vacuum high-pressure motion platform for mass spectrometry comprises a cavity 1, a high-pressure conduction part 2, a sample target plate dragging 3 and an XY motion mechanism 4, wherein the XY motion mechanism 4 is arranged on a bottom plate in the cavity 1, one end of the high-pressure conduction part 2 is connected with the cavity 1, the other end of the high-pressure conduction part is connected with the sample target plate dragging 3, and the sample target plate dragging 3 is connected on the XY motion mechanism 4.
The cavity 1 is made of 7075 aluminum alloy and is of an integrally formed structure.
An x-axis guide rail positioning groove 15 is formed in a bottom plate in the cavity 1, a molecular pump interface 11 and a high-voltage electrode interface 14 are arranged on the right side wall, a penning gauge interface 12 is arranged on the rear side wall, and an electrode driving switching aerial insertion interface 13 is arranged on the front side wall.
High pressure conduction part 2 includes that vacuum high voltage electrode 21, high pressure conduction pole piece 22, high pressure introduce connecting piece 23, insulating column 24, contact copper brush 25, high voltage electrode interface 14 on the wall of cavity 1 right side is worn out to vacuum high voltage electrode 21 front end, and high pressure conduction pole piece 22 is connected to the rear end, high pressure conduction pole piece 22 other end is connected the high pressure and is introduced connecting piece 23, just high pressure conduction pole piece 22 horizontal level sets up, the vertical level setting of connecting piece 23 is introduced to the high pressure, high pressure is introduced connecting piece 23 other end bottom and is connected with insulating column 24, insulating column 24 bottom is connected at xy moving mechanism 4's x connecting plate 410 upper surface, contact copper brush 25 fixed connection is introduced connecting piece 23 front end downside at high pressure, and can contact with the upper surface of high pressure conduction pole piece 22 and be connected.
The outer wall of the vacuum high-voltage electrode 21 is coated with a polytetrafluoroethylene outer tube, and the end face of the vacuum high-voltage electrode is connected with the right side wall of the cavity through an O-shaped ring.
The sample target plate dragging 3 comprises a target dragging 31, an insulating connecting column 32 and a target dragging fixing plate 33, the target dragging fixing plate 33 is fixedly connected to a y connecting plate 414 of the XY moving mechanism 4, the insulating connecting column 32 is arranged on the upper surface of the target dragging fixing plate 33, and the top of the insulating connecting column 32 is connected with the target dragging 31.
The target is dragged to be 304 stainless steel materials, and gas holes are formed in the target, so that gas can be led out, and the vacuum standard can be reached.
The insulating connecting column 32 is made of PEEK materials and is connected with the target dragging plate 31 and the target dragging fixing plate 33 respectively, so that the high voltage is guaranteed not to be conducted to the two-dimensional motion platform, and the problems of breakdown and the like are solved.
The xy-motion mechanism 4 comprises an x-axis guide rail 41, an x-axis motor 42, an x-axis lead screw 43, an x-connecting plate 410, a y-axis motor 411, a y-axis lead screw 412, a y-axis lead screw nut 413 and a y-connecting plate 414, wherein the two x-axis guide rails 41 are respectively arranged in an x-axis guide rail positioning groove 15 in the cavity 1, the two x-axis guide rails 41 are jointly and slidably connected with the x-connecting plate 410, the x-connecting plate 410 is connected with the y-axis guide rail 414 through the y-axis guide rail, the upper surface of the y-connecting plate 414 is fixedly connected with a sample target plate mop 3, the x-axis motor 42 and the y-axis motor 411 are respectively connected with the x-axis lead screw 43 and the y-axis lead screw 412 through a gear reducer, the x-axis lead screw nut 44 and the y-axis lead screw nut 413 are respectively connected with the x-connecting plate 410 and the y-connecting plate 414, the, the nut connecting plate uses structure and the material that has certain flexibility, guarantees when small assembly error exists with installation error, the stability of whole equipment motion, the other end of x axle lead screw 43 is connected with bearing fixing base 46, bearing fixing base 46 is fixed on the inside bottom plate of cavity 1, the bearing fixing base 46 outside is equipped with the x encoder 47 of being connected with x axle lead screw 43, the both sides of x connecting plate 410 all are equipped with x direction opto-coupler separation blade 48 the inboard bottom both ends of cavity 1 still are equipped with x opto-coupler 49, the both sides of y connecting plate 414 are equipped with y opto-coupler separation blade 415, x connecting plate 410 upper surface both sides all are equipped with y axle opto-coupler 416.
And a plurality of air guide grooves are formed in the y connecting plate, so that the vacuum performance is ensured.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.