CN213327822U

CN213327822U - Air exhaust device of magnetron sputtering equipment

Info

Publication number: CN213327822U
Application number: CN202022045504.9U
Authority: CN
Inventors: 李长栋; 魏承亚; 魏茂奎
Original assignee: Shandong Mudong Vacuum Technology Co ltd
Current assignee: Shandong Mudong Vacuum Technology Co ltd
Priority date: 2020-09-17
Filing date: 2020-09-17
Publication date: 2021-06-01
Anticipated expiration: 2030-09-17

Abstract

The utility model discloses an air exhaust device of magnetron sputtering equipment, including the box of bleeding, the inside fixedly connected with aspiration pump of the box of bleeding, the one end fixedly connected with of air exhaust pipeline bleed the joint, the top fixedly connected with gas transmission pipeline of aspiration pump, gas transmission pipeline's one end fixedly connected with condensing equipment, the one end fixedly connected with filter equipment of liquid transmission pipeline, one side fixedly connected with liquid output tube of filter equipment, the spout has been seted up to the upper surface of base, one side and the spring fixed connection of sliding block, sliding block and spout sliding connection. The utility model discloses a condensing equipment and filter equipment's setting is convenient for carry out the condensation through the condenser to the gas of suction, is favorable to reducing gaseous temperature fast, is convenient for simultaneously filter the impurity and the harmful substance of gas and cooling liquid inside, avoids the pollution that harmful gas directly discharges and cause the environment.

Description

Air exhaust device of magnetron sputtering equipment

Technical Field

The utility model relates to the technical field of industrial machinery, in particular to an air extractor of magnetron sputtering equipment.

Background

The magnetron sputtering technology is widely applied in the last 90 th century to the present day, plays a great role in the fields of industrial production and scientific research, is widely and successfully applied to many aspects as a very effective film deposition method, particularly in the fields of optical films, microelectronics and material surface treatment, is used for film deposition and surface covering layer preparation, is one of physical vapor deposition, can be used for preparing various materials such as metals, semiconductors, insulators and the like by a general sputtering method, and has the advantages of simple equipment, easiness in control, large coating area, strong adhesive force and the like.

The structure of the existing sealed air extractor is relatively single, good cooling can not be carried out on gas, and the target surface is provided with metal compounds which are not subjected to filtering treatment, so that the environment pollution caused by the extracted gas is large, the vibration amplitude of the existing air extractor in the working process is large, the buffer performance is poor, and therefore the novel air extractor of the magnetron sputtering equipment is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an air exhaust device of magnetron sputtering equipment is in order to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an air exhaust device of magnetron sputtering equipment, includes the box of bleeding, the inside fixedly connected with aspiration pump of the box of bleeding, the one end fixedly connected with bleed-off pipe of aspiration pump, the one end fixedly connected with bleed-off joint of bleed-off pipe, the top fixedly connected with gas transmission pipeline of aspiration pump, the one end fixedly connected with condensing equipment of gas transmission pipeline, one side fixedly connected with infusion pipeline of condensing equipment, the one end fixedly connected with filter equipment of infusion pipeline, one side fixedly connected with liquid output tube of filter equipment, the below of the box of bleeding is provided with the base.

Preferably, one end of the air exhaust joint is fixedly connected with a joint snap ring, and one end of the air exhaust pipeline is fixedly provided with a one-way valve.

Preferably, a condenser is arranged in the condensing device, and a circulating condensing pipe is fixedly connected to one side of the condenser.

Preferably, the filtering device comprises a first filtering core, a second filtering core and a spiral pipe, one end of the infusion pipeline is fixedly connected with the first filtering core, and one end of the spiral pipe is fixedly connected with the liquid output pipe.

Preferably, the upper surface of the base is provided with a sliding chute, and the inside of the sliding chute is fixedly connected with a spring.

Preferably, the lower surface of the air exhaust box body is fixedly connected with a traction plate, and one end of the traction plate is fixedly connected with a sliding block.

Preferably, one side of the sliding block is fixedly connected with the spring, and the sliding block is connected with the sliding groove in a sliding mode.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a condensing equipment and filter equipment's setting is convenient for carry out the condensation through the condenser to the gas of suction, is favorable to reducing gaseous temperature fast, and the processing in the later stage of being convenient for is convenient for filter the impurity and the harmful substance of gas and cooling liquid inside simultaneously, avoids the direct pollution that the discharge caused the environment of harmful gas, can effectively improve people's environmental consciousness.

2. The utility model discloses a setting of traction plate, the air exhaust pump during operation produces vibrations to drive the traction plate and remove, thereby make the sliding block slide in the spout, sliding block extrusion spring, the spring give the buffering effort of box of bleeding, thereby play certain guard action to the box of bleeding, can improve certain shock-absorbing capacity, avoid air exhaust device great at the in-process vibration range of work, take place easily to damage, this structure all has very big practical value in a lot of devices.

Drawings

FIG. 1 is a schematic view of the cross-sectional structure of the present invention;

FIG. 2 is a schematic view of the filtering apparatus of the present invention;

fig. 3 is an enlarged schematic view of a portion a of fig. 1 according to the present invention.

In the figure: 1. an air extraction box body; 2. an air pump; 3. an air extraction pipeline; 4. an air extraction joint; 5. a gas pipeline; 6. a condensing unit; 7. a fluid delivery conduit; 8. a filtration device; 81. a first filter element; 82. a second filter element; 83. a spiral tube; 9. a liquid outlet pipe; 10. a base; 11. a connector snap ring; 12. a one-way valve; 13. a condenser; 14. a circulating condenser pipe; 15. a chute; 16. a spring; 17. a traction plate; 18. and a slider.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-3, the present invention provides an embodiment: the utility model provides an air exhaust device of magnetron sputtering equipment, including air exhaust box 1, air exhaust box 1's inside fixedly connected with aspiration pump 2, air exhaust pump 2's one end fixedly connected with bleed-off pipe 3, bleed-off pipe 3's one end fixedly connected with bleed-off joint 4, air exhaust pump 2's top fixedly connected with gas transmission pipeline 5, gas transmission pipeline 5's one end fixedly connected with condensing equipment 6, one side fixedly connected with infusion pipeline 7 of condensing equipment 6, the one end fixedly connected with filter equipment 8 of infusion pipeline 7, one side fixedly connected with liquid output tube 9 of filter equipment 8, air exhaust box 1's below is provided with base 10, setting through aspiration pump 2, constantly bleed under in aspiration pump 2, make the interior atmospheric pressure that remains stable of magnetron sputtering cavity, thereby realize the large tracts of land coating.

Furthermore, one end of the air extraction joint 4 is fixedly connected with a joint snap ring 11, one end of the air extraction pipeline 3 is fixedly provided with a one-way valve 12, and air can only flow in one direction and cannot flow back through the one-way valve 12, so that the air extraction pump 2 can conveniently extract air.

Further, condensing equipment 6's inside is provided with condenser 13, and one side fixedly connected with circulation condenser pipe 14 of condenser 13, through condensing equipment 6's setting, is convenient for condense the gas of suction through condenser 13, is favorable to reducing the temperature of gas fast, the processing in the later stage of being convenient for.

Further, filter equipment 8 includes first filter element 81, second filter element 82 and spiral pipe 83, and infusion pipeline 7's one end and first filter element 81 fixed connection, spiral pipe 83's one end and liquid output tube 9 fixed connection, through filter equipment 8's setting, are convenient for filter the inside impurity of gas and cooling liquid and harmful substance, avoid the pollution that harmful gas directly discharges and cause the environment.

Further, the upper surface of the base 10 is provided with a sliding groove 15, the inside of the sliding groove 15 is fixedly connected with a spring 16, and the sliding block 18 can slide conveniently through the arrangement of the sliding groove 15 to form a buffer device with the spring 16.

Further, the lower fixed surface of the air pumping box body 1 is connected with a traction plate 17, one end of the traction plate 17 is fixedly connected with a sliding block 18, and through the arrangement of the traction plate 17, the air pumping pump 2 in the air pumping box body 1 generates vibration when working, so that the traction plate 17 is driven to move, and the sliding block 18 slides in the sliding groove 15.

Furthermore, one side of the sliding block 18 is fixedly connected with the spring 16, the sliding block 18 is slidably connected with the sliding groove 15, the sliding block 18 slides in the sliding groove 15 through the arrangement of the spring 16, the sliding block 18 extrudes the spring 16, and the spring 16 provides a buffering acting force for the air extraction box body 1 to protect the air extraction box body 1.

The working principle is as follows: this novel air exhaust of magnetron sputtering equipment device, when bleeding the during operation, continuously bleed through aspiration pump 2, rethread condenser 13 condenses the gas of suction, through first filter element 81 after the condensation, second filter element 82 and spiral pipe 83 filter the inside impurity of gas and cooling liquid and harmful substance, 2 during operations of aspiration pump simultaneously, produce vibrations, thereby drive the traction plate 17 and remove, thereby make sliding block 18 slide in

spout

15, 18 extrusion springs 16 of sliding block, spring 16 gives the buffering effort of 1 of box of bleeding, thereby play certain guard action to box 1 of bleeding.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a suction device of magnetron sputtering equipment, includes air exhaust box (1), its characterized in that: the utility model discloses a solar air extracting device, including air extracting box body (1), inside fixedly connected with aspiration pump (2) of air extracting box body (1), the one end fixedly connected with air exhaust pipeline (3) of air exhaust pump (2), the one end fixedly connected with air exhaust joint (4) of air exhaust pipeline (3), the top fixedly connected with gas transmission pipeline (5) of air exhaust pump (2), one end fixedly connected with condensing equipment (6) of gas transmission pipeline (5), one side fixedly connected with infusion pipeline (7) of condensing equipment (6), the one end fixedly connected with filter equipment (8) of infusion pipeline (7), one side fixedly connected with liquid output tube (9) of filter equipment (8), the below of air extracting box body (1) is provided with base (10).

2. The air extractor of the magnetron sputtering device according to claim 1, wherein: one end of the air exhaust joint (4) is fixedly connected with a joint clamping ring (11), and one end of the air exhaust pipeline (3) is fixedly provided with a one-way valve (12).

3. The air extractor of the magnetron sputtering device according to claim 1, wherein: the condenser (13) is arranged in the condensing device (6), and a circulating condensing pipe (14) is fixedly connected to one side of the condenser (13).

4. The air extractor of the magnetron sputtering device according to claim 1, wherein: the filtering device (8) comprises a first filtering core (81), a second filtering core (82) and a spiral pipe (83), one end of the infusion pipeline (7) is fixedly connected with the first filtering core (81), and one end of the spiral pipe (83) is fixedly connected with the liquid output pipe (9).

5. The air extractor of the magnetron sputtering device according to claim 1, wherein: the upper surface of the base (10) is provided with a sliding groove (15), and a spring (16) is fixedly connected inside the sliding groove (15).

6. The air extractor of the magnetron sputtering device according to claim 1, wherein: the lower surface of the air extraction box body (1) is fixedly connected with a traction plate (17), and one end of the traction plate (17) is fixedly connected with a sliding block (18).

7. The air extractor of the magnetron sputtering device according to claim 6, wherein: one side of the sliding block (18) is fixedly connected with the spring (16), and the sliding block (18) is connected with the sliding groove (15) in a sliding mode.