CN213302555U

CN213302555U - Optical device

Info

Publication number: CN213302555U
Application number: CN202021736444.9U
Authority: CN
Inventors: 翟雷应; 秦琦; 蔡瑜; 王远峰
Original assignee: Shenzhen University
Current assignee: Shenzhen University
Priority date: 2020-08-17
Filing date: 2020-08-17
Publication date: 2021-05-28
Anticipated expiration: 2030-08-17

Abstract

The utility model is suitable for an optical chip technical field provides an optical device, and this optical device includes first base plate, second base plate, first runner, second runner, first elastic component and second elastic component. At least one filling cavity for filling liquid is formed between the first substrate and the second substrate, the first elastic assembly is arranged in the first flow channel and used for plugging the filling cavity close to the first flow channel, the second elastic assembly is arranged in the filling cavity and used for plugging the filling cavity close to the second flow channel, and the elastic coefficient of the second elastic assembly is smaller than that of the first elastic assembly. The utility model provides an optical device, the export in chamber is filled in at first shutoff to second elastic component, is full of along with filling the chamber and constantly filling, and the entry in chamber is filled in first elastic component shutoff of liquid promotion, when realizing that liquid fills up full, can be with the export in chamber and entry shutoff and locking, and easy operation has solved the technical problem that the timeliness is poor and the technology is complicated.

Description

Optical device

Technical Field

The utility model belongs to the technical field of the optical chip, more specifically say, relate to an optical device.

Background

The liquid lens is formed by filling liquid into the lens and adjusting the final optical performance by changing the physical properties of the liquid. A tunable filter is also an optical device based on liquid filling. Wherein the liquid-filled based lens or filter may continue the optical characteristics of a conventional lens or filter and the micro-machining process can be well utilized. The liquid lens or tunable filter alters the incident light wave by changing the properties of the liquid, such as by altering its refractive index. Due to the fact that the liquid is more in variety and the optical coefficient such as the refractive index is wide in selectable range, the liquid lens or the liquid-filled adjustable filter can well meet optical requirements of more applications. In addition, since liquid materials are low in cost and less in dosage, and are suitable for mass production and processing, more and more manufacturers select liquid lenses.

However, since the liquid has fluidity, its form is not controllable, and the optical element has extremely high angular, temperature and wavelength sensitivity, the sealing and filling of the liquid is a difficult process, and bubbles are easily generated, so that the difficulty of liquid integration manufacturing is always troubling the development of the device process, especially when manufacturing in batches. The prior art is to carry out plugging through a hydrophobic coating, the time efficiency of the prior art also has certain problems, and the adoption of the hydrophobic coating for plugging is difficult, so that the whole processing technology becomes more complex.

SUMMERY OF THE UTILITY MODEL

An object of the embodiment of the utility model is to provide an optical device to solve the technical problem that current liquid lens shutoff ageing nature existence problem and shutoff difficulty lead to the technology complicacy.

In order to achieve the above object, the utility model adopts the following technical scheme: provided is an optical device including: a first substrate;

the second substrate is arranged on the first substrate, and at least one filling cavity for filling liquid is formed between the first substrate and the second substrate;

a first flow channel having a liquid inlet in communication with an inlet of the fill cavity proximate the first flow channel;

a second flow passage having a liquid outlet in communication with an outlet of the fill cavity adjacent the second flow passage;

the first elastic component is arranged in the first flow passage and used for plugging the filling cavity close to the first flow passage; and

and the second elastic component is arranged in the filling cavity and used for plugging the filling cavity close to the second flow passage, and the elastic coefficient of the second elastic component is smaller than that of the first elastic component.

Optionally, the first elastic component comprises:

a first piston for sealing off an inlet of the filling chamber adjacent to the first flow passage; and

the two first cantilevers are connected with one end of the first piston, and one end of each first cantilever is abutted against the inner wall of the first flow passage;

the second elastic component includes:

the second piston is used for plugging an outlet of the filling cavity close to the second flow passage; and

the two second cantilevers are connected with one end of the second piston, and one end of each second cantilever is abutted against the inner wall of the second flow passage;

wherein the elastic coefficient of the first cantilever is greater than the elastic coefficient of the second cantilever.

Optionally, the first cantilever and the second cantilever are both cantilevers made of silicon material.

Optionally, the optical device further includes a device layer, the device layer is located between the first substrate and the second substrate, and the first flow channel and the second flow channel are opened on the device layer; the first piston includes:

a first piston body, one end of the first piston body being connected to the first cantilever;

the first elastic sheet is connected with the other end of the first piston body and extends towards the direction of the first piston body; and

the second elastic sheet is connected with the other end of the first piston body and arranged opposite to the first elastic sheet, and the second elastic sheet extends towards the direction of the first piston body; a first buckle extends from one side of the device layer towards the first elastic sheet, and the first buckle is buckled with the first elastic sheet; and a second buckle extends from the other side of the device layer towards the second elastic sheet, and the second buckle is buckled with the second elastic sheet.

Optionally, the second piston comprises:

a second piston body connected with the second cantilever;

the third elastic sheet is connected with the other end of the second piston body and extends towards the direction of the second piston body; and

the fourth elastic sheet is connected with the other end of the second piston body and arranged opposite to the third elastic sheet, and the fourth elastic sheet extends towards the direction of the second piston body;

and one side of the device layer extends towards the corresponding third buckle in the direction of the third elastic sheet, and the other side of the device layer extends towards the corresponding fourth buckle in the direction of the fourth elastic sheet.

Optionally, the first flow channel comprises:

a first sub-channel in communication with the liquid inlet; and

the second sub-flow passage is communicated with an inlet of the filling cavity close to the second sub-flow passage, and the first elastic component is arranged in the second sub-flow passage;

the second flow passage is used for the second elastic component to extend into. Optionally, the optical device further comprises:

the film layer is covered on the first substrate and used for limiting the filling cavity;

wherein the membrane layer is an expandable membrane layer.

Optionally, the deformed height of the film layer and the liquid flow rate of the first flow channel satisfy the formula:

wherein V1 is the liquid flow rate, t is the time for the liquid to flow into the filling cavity when the liquid flow rate is V1, S is the cross-sectional area perpendicular to the liquid flow direction in the first flow channel, h is the required deformation height of the film layer, and R is the radius of curvature of the designed optical device.

Optionally, a heating cavity is further formed between the first substrate and the second substrate, the heating cavity is enclosed in the periphery of the filling cavity, and the heating cavity is isolated from the filling cavity, the first flow passage and the second flow passage, and the optical device further includes:

and the first heater is filled in the first heating cavity and used for heating and adjusting the temperature of the liquid so as to change the deformation curvature of the film layer.

and the second heater is filled in the second heating cavity and used for heating and adjusting the temperature of the liquid so as to change the refractive index of the liquid.

The utility model provides an optical device's beneficial effect lies in: compared with the prior art, the utility model discloses an optical device, through setting up the elastic coefficient with second elastic component into the elastic coefficient that is less than first elastic component, make the export in second elastic component at first shutoff packing chamber, along with filling the chamber and constantly filling up full, the entry in chamber is filled in the shutoff of first elastic component to liquid promotion, when realizing that liquid fills up full, can be with the export and the entry shutoff and the locking in packing the chamber, it has the ageing existence problem to have solved the shutoff of adoption hydrophobic coating, the operation is simple, the technical problem of the technology complicacy has further been solved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments or the prior art descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive labor.

Fig. 1 is a schematic cross-sectional structural diagram of an optical device according to an embodiment of the present invention;

fig. 2 is a schematic top view structure diagram of an optical device in an initial state according to an embodiment of the present invention;

FIG. 3 is a partially enlarged view of portion A of FIG. 2;

fig. 4 is a schematic diagram of a third top view structure of an optical device according to an embodiment of the present invention in a locked state;

FIG. 5 is a partially enlarged view of the portion B in FIG. 4;

fig. 6 is a schematic top view of a wafer batch fabrication wafer structure for a first structured optical device according to an embodiment of the present invention;

fig. 7 is a first schematic cross-sectional structural diagram of an optical device according to a second structure of the embodiment of the present invention;

fig. 8 is a schematic top view of an optical device with a second structure according to an embodiment of the present invention;

fig. 9 is a schematic top view of a chip batch manufacturing wafer of an optical device according to a second structure of the present invention;

fig. 10 is a structural diagram of a processing process of an integrated chip according to an embodiment of the present invention;

fig. 11 is a flowchart of a processing process of an integrated chip according to an embodiment of the present invention;

fig. 12 is a schematic cross-sectional structural view of a lens according to a first embodiment of the present invention;

fig. 13 is a schematic view of the cavity filled with the lens and the deformed height of the film layer according to the first embodiment of the present invention;

fig. 14 is a schematic diagram illustrating a relationship between a deformation height of a film layer of a lens and a curvature radius of the lens according to a first embodiment of the present invention;

fig. 15 is a schematic cross-sectional structural diagram of a filter according to a second embodiment of the present invention;

fig. 16 is a schematic top view of a filter according to a second embodiment of the present invention;

fig. 17 is a graph showing the result of static transmission light of the filter according to the second embodiment of the present invention;

fig. 18 is a diagram of a result of dynamic transmission light of a filter according to a second embodiment of the present invention.

Wherein, in the figures, the respective reference numerals:

1-an optical device; 11-a first substrate; 111-a first snap; 112-a second buckle; 113-a third buckle; 114-a fourth snap; 12-a second substrate; 13-a first flow channel; 131-a first sub-channel; 132-a second sub-flow channel; 14-a second flow channel; 15-a first elastic component; 151-first piston; 1511-a first piston body; 1512-a first dome; 1513-second shrapnel; 152-a first cantilever; 16-a second elastic component; 161-a second piston; 1611-a second piston body; 1612-third spring plate; 1613-a fourth shrapnel; 162-a second cantilever; 18-filling the cavity; 19-a device layer; 2-a lens; 21-a film layer; 22-a first heater;

3-a filter; 31-a second heater;

4-manufacturing wafers in batches by using chips; 41-bottom silicon; 42-buried intermediate silicon dioxide layer; 43-top layer silicon; 44-a liquid channel; 441-an inlet; 442-an outlet; 451-a first glass substrate; 452-a second glass substrate;

d-the width of the designed fill cavity 18; h-the deformation height of the film layer; r-radius of curvature of the lens; l1-n is a plot of 1.2; l2-n is a plot of 1.3; l3-n is a plot of 1.4; l4-n is a plot of 1.5.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1, fig. 2 and fig. 4 together, an optical device 1 according to an embodiment of the present invention will now be described. The optical device 1 is a micro-nano optical device. Among them, micro-nano optics is rapidly developed in the aspects of photoelectric functional materials, photochemistry, bioelectronics and the like, and is continuously expanded and deepened with the lapse of time, and relates to nonlinear processes such as light emission, absorption, photoelectric conversion and the like more and more. With the development of micro-nano optics such as mirror microstructures, micro-optical arrays (such as micro-lens arrays and micro-reflector arrays), micro-optical devices (such as micro-gratings and micro-resonance rings) and the like, optical systems are further miniaturized to achieve system integration, and then are further developed into self-adaptive and intelligent micro-nano optics. At present, optical devices are developed towards miniaturization, such as micro lenses, and the lenses originally used by people are in the order of centimeters, and with the development of technologies towards high integration, micro lenses and even nano micro lenses are reported at present. With the gradual maturity of micro-nano processing technology, micro-nano optical devices are continuously manufactured, and can be well integrated in a plurality of optical devices, so that the performance of the micro-nano optical devices is greatly improved. On the other hand, the size of the optical device is gradually reduced, which also presents a new problem for the integration and intelligence of the device, for example, the sphericity and surface flatness of the microlens are difficult to ensure, and the conventional polishing technology is basically not used.

This has resulted in the appearance of non-conventional optical lenses based on optical fundamentals, such as fresnel lenses, super-surface lenses, etc., which are well suited to the use of micro-machining processes. However, this type of lens uses a complicated equivalent, and therefore its diffraction efficiency is reduced to various degrees. In addition, the micro-machining process thereof has great challenges due to the minute size in theoretical calculation. The use of liquid filled lenses continues the optical characteristics of conventional lenses and allows for good utilization of the micro-machining process. And the liquid-based optical lens can effectively reduce the process difficulty and reduce the manufacturing cost. In addition to microlenses, other optical devices based on liquid are very important devices, and the devices change incident light waves by using the characteristics of the liquid, for example, the incident light wave front is changed by changing the refractive index of the devices. In addition, the liquid material has low cost and less consumption, and is suitable for mass production and processing. Typically such devices require adjustment of certain physical properties of the liquid to achieve the final optical properties.

The optical device 1 includes a first substrate 11, a second substrate 12, a first flow channel 13, a second flow channel 14, a first elastic member 15, and a second elastic member 16. The second substrate 12 is disposed on the first substrate 11, at least one filling cavity 18 for filling liquid is formed between the first substrate 11 and the second substrate 12, a liquid inlet of the first flow channel 13 is communicated with an inlet of the filling cavity 18 close to the first flow channel 13, and a liquid outlet of the second flow channel 14 is communicated with an outlet of the filling cavity 18 close to the second flow channel 14. The first elastic component 15 is arranged in the first flow passage 13 and used for sealing the filling cavity 18 close to the first flow passage 13, the second elastic component 16 is arranged in the filling cavity 18 and used for sealing the filling cavity 18 close to the second flow passage 14, and the elastic coefficient of the second elastic component 16 is smaller than that of the first elastic component 15.

The elastic coefficient refers to the stiffness coefficient, and the larger the value of the elastic force generated when the deformation amount of the gear is described, the larger the value is, the larger the force required for the unit length of the deformation is.

The specific principle is as follows:

first, the liquid is injected into the filling cavities 18 at a relatively low speed, and in an initial state, neither the first elastic member 15 nor the second elastic member 16 blocks the corresponding filling cavity 18, and the filling cavity 18 is gradually filled with the liquid.

Specifically, when the liquid reaches the first elastic component 15, the liquid enters the filling cavity 18 through the first flow passage 13, the first flow passage 13 and the filling cavity 18 are gradually filled with the solution along with the continuous entering of the liquid, the overflowed liquid flows out of the filling cavity 18, the speed of the liquid is further increased, and when the pressure reaches a certain value P, because the elastic coefficient of the second elastic component 16 is smaller than that of the first elastic component 15, the liquid first pushes the second elastic component 16 to block the outlet of the filling cavity 18 close to the second flow passage 14 and is locked.

Then, the speed of the fluid in the first flow channel 13 is rapidly increased, when the pressure reaches P', the thrust of the liquid to the first elastic component 15 is greater than the restraining force of the first elastic component 15, so that the first elastic component 15 blocks the inlet of the filling cavity 18 close to the first flow channel 13, the filling cavity 18 can be blocked while the filling cavity 18 is filled with the liquid, and the first elastic component 15 and the second elastic component 16 respectively lock the corresponding filling cavity 18 under the continuous impact of the liquid, thereby solving the technical problems of poor timeliness and difficult blocking in the existing blocking mode.

The utility model provides an optical device 1, compared with the prior art, set up the coefficient of elasticity through with second elastic component 16 into being less than first elastic component 15's coefficient of elasticity, make the export of second elastic component 16 at first shutoff packing chamber 18, along with filling chamber 18 and constantly filling up, liquid promotes the entry that first elastic component 15 shutoff packed chamber 18, when realizing that liquid fills up, can be with the export and the entry shutoff and the locking of packing chamber 18, it has the ageing existing problem to have solved the shutoff of adopting hydrophobic coating, and the operation is simple, the technical problem of the technology complicacy has further been solved.

In particular applications, and with further reference to fig. 6, the number of fill cavities 18 is one, two, or more. When the number of the filling cavities 18 is one, the first elastic member 15 is used for blocking the inlet of the filling cavity 18, and the second elastic member 16 is used for blocking the outlet of the filling cavity 18.

With further reference to fig. 7 and 8, when the number of the filling cavities 18 is two or more, the plurality of filling cavities 18 are arranged in an array, the first elastic component 15 is used to block the inlet of the filling cavity 18 close to the first flow channel 13, the second elastic component 16 is used to block the outlet of the filling cavity 18 close to the second flow channel 14, and two adjacent filling cavities 18 are communicated through the flow channels.

It should be noted that the impact force applied to the first elastic element 15 can be obtained from FT — MV, where F is the average acting force, T is the acting time, M is the piston mass, and V is the fluid velocity. It follows that the pressure of the liquid applied to the first elastic element 15 is proportional to the fluid speed, on the basis of which it is possible to design the structure of the filling chamber 18 with a precise pressure difference. When the elastic modulus of the first elastic element 15 and the second elastic element 16 are different, the pressure of the filling cavity 18 is larger, and increases with the difference.

In another embodiment of the present invention, referring to fig. 1, fig. 2 and fig. 4, the first elastic element 15 includes a first piston 151 and two first cantilevers 152. The first piston 151 is used for sealing an inlet of the filling cavity 18 close to the first flow channel 13, the two first cantilevers 152 are respectively connected to one end of the first piston 151, and the two first cantilevers 152 are oppositely arranged. The first cantilever 152 is in a suspended type, and can be transversely bent to enter the first flow channel 13 when the card is about to be clamped, the first cantilever 152 keeps a bent state after the card is clamped, the first cantilever 152 is abutted against the inner wall in the first flow channel 13, when liquid flows in from the first flow channel 13, when the liquid impacts the first cantilever 152, the first cantilever 152 generates an elastic force for blocking the liquid, and when the pressure reaches a certain value, the constraint force of the first cantilever 152 is smaller than the thrust force of the liquid, the liquid can drive the first piston 151 to block the filling cavity 18 close to the first flow channel 13.

Second resilient assembly 16 includes a second piston 161 and two second arms 162. The second piston 161 is used for sealing an outlet of the filling cavity 18 close to the second flow passage 14, the two second cantilevers 162 are respectively connected to one end of the second piston 161, and the two second cantilevers 162 are oppositely arranged. The second cantilever 162 is in a suspended type, and can be transversely bent to enter the second flow channel when the second cantilever 162 is clamped, the second cantilever 162 keeps a bent state after the clamping, the second cantilever 162 is abutted against the inner wall in the second flow channel, when liquid flows out, the liquid flows out from a gap between the second cantilever 162 and the first substrate 11 and the second substrate 12, when the liquid continuously impacts the second cantilever 162, the second cantilever 162 generates an elastic force for blocking the liquid, and when the pressure reaches a certain value, the constraint force of the second cantilever 162 is smaller than the thrust force of the liquid, the liquid can drive the second piston 161 to block the filling cavity 18 close to the second flow channel 14.

Specifically, the elastic coefficient of the first cantilever 152 is larger than that of the second cantilever 162, so that the second piston 161 connected to the second cantilever 162 first blocks the outlet of the filling chamber 18, and then the first piston 151 connected to the first cantilever 152 blocks the inlet of the filling chamber 18.

Further, in this embodiment, the first cantilever 152 and the second cantilever 162 are both cantilevers made of silicon material, and since the liquid filled in the optical device 1 is organic liquid, and the silicon material is not easy to react with the organic liquid, the stability of the cantilever made of silicon is high, and compared with plugging by using a hydrophobic coating, the reliability of the cantilever made of silicon is high, and particle contamination is not easy to generate.

The first piston 151 and the second piston 161 are respectively tapered, the cross-sectional diameter of the end of the first piston 151 close to the filling chamber 18 is smaller than that of the end far away from the filling chamber 18, and the cross-sectional diameter of the end of the second piston 161 close to the filling chamber 18 is larger than that of the end far away from the filling chamber 18.

In another embodiment of the present invention, referring to fig. 2 to fig. 5, the optical device 1 further includes a device layer 19, the device layer 19 is located between the first substrate 11 and the second substrate 12, the first flow channel 13 and the second flow channel 14 are disposed on the device layer 19, and the first piston 151 includes a first piston body 1511, a first elastic sheet 1512, and a second elastic sheet 1513. The first piston body 1511 is connected to the first cantilever 152, the first resilient piece 1512 is connected to the other end of the first piston body 1511 and extends toward the first piston body 1511, the second resilient piece 1513 is connected to the other end of the first piston body 1511 and is disposed opposite to the first resilient piece 1512, the second resilient piece 1513 extends toward the first piston body 1511, one side of the device layer 19 extends toward the first latch 111 corresponding to the first resilient piece 1512, and the other side of the device layer 19 extends toward the second latch 112 corresponding to the second resilient piece 1513.

Specifically, a groove is formed between the first resilient piece 1512 and the device layer 19, and a gap is formed between the first resilient piece 1512 and the first piston body 1511, so that when liquid impacts, the liquid flows out from the groove between the first resilient piece 1512 and the device layer 19, and when the first resilient piece 1512 is fastened to the first buckle 111, the liquid flows into the gap between the first resilient piece 1512 and the first piston body 1511, so that the first resilient piece 1512 is always fastened to the first buckle 111, and thus locking is performed. The groove is formed between the second elastic sheet 1513 and the device layer 19, and the gap is formed between the second elastic sheet 1513 and the first piston body 1511, which will not be described herein.

In another embodiment of the present invention, referring to fig. 2 to 5, the second piston 161 includes a second piston body 1611, a third elastic sheet 1612 and a fourth elastic sheet 1613. The second piston body 1611 is connected to the second cantilever 162, the third elastic piece 1612 is connected to the other end of the second piston body 1611 and extends toward the second piston body 1611, the fourth elastic piece 1613 is connected to the other end of the second piston body 1611 and is opposite to the third elastic piece 1612, the fourth elastic piece 1613 extends toward the second piston body 1611, one side of the device layer 19 is provided with a third buckle 113 extending toward the corresponding third elastic piece 1612, and the other side of the device layer 19 is provided with a fourth buckle 114 extending toward the corresponding fourth elastic piece 1613

Specifically, there is a groove between the third elastic sheet 1612 and the device layer, there is a gap between the third elastic sheet 1612 and the second piston body 1611, and when the liquid impacts, the liquid flows out from the groove between the third elastic sheet 1612 and the first substrate 11, and when the third elastic sheet 1612 is fastened to the third fastener 113, the liquid flows into the gap between the third elastic sheet 1612 and the second piston body 1611, so that the third elastic sheet 1612 is fastened to the third fastener 113 all the time, thereby locking. The grooves are formed between the fourth resilient sheet 1613 and the device layer 19, and the gaps are formed between the fourth resilient sheet 1613 and the second piston body 1611, which will also have the above-mentioned effects, and will not be described herein.

In another embodiment of the present invention, referring to fig. 2 and 4, the first flow channel 13 includes a first sub-flow channel 131 and a second sub-flow channel 132. The first sub-flow channel 131 is vertically communicated with the second sub-flow channel 132, the first sub-flow channel 131 is communicated with the liquid inlet, the second sub-flow channel 132 is communicated with the inlet of the filling cavity 18 close to the second sub-flow channel 132, and the first elastic element 15 is disposed in the second sub-flow channel 132. The second flow passage 14 is used for the second piston 161 of the second elastic component 16 to extend into, thereby closing the outlet of the filling cavity 18, and the second elastic component 16 is arranged in the filling cavity 18.

Further, in conjunction with fig. 7, 8 and 9, the structure described above is compatible with a MEMS (Micro-Electro-Mechanical System) process, and thus can be designed as a wafer level processing structure. Throughout the wafer, liquid is injected into each individual fill cavity 18 through a reticulated liquid channel 44. From the liquid inlet 441, the liquid channel 44 is branched into several branches. They are then split into more branches into each individual filling cavity 18. This enables each optical device 1 to be brought together at the same pressure, all at atmospheric pressure, before the piston is closed. Similarly, the same distribution of the fluid passages 44 is used for fluid outflow. In this way, a wafer level liquid integrated structure fabrication technique is achieved. With further reference to fig. 10 and 11, the specific processing method of the optical device 1 is as follows:

(a) firstly, preparing an SOI wafer, wherein the top layer silicon 43 of the wafer is 25 mu m;

(b) an etching liquid channel 44 on a glass substrate 45;

(c) silicon-first glass substrate 451 is anodically bonded;

(d) removing the bottom silicon 41 and the intermediate silicon dioxide buried layer 42;

(e) photoetching and deep silicon etching are carried out for 25 micrometers;

(f) a second silicon-second glass substrate 452 anodic bonding; in this step, the second glass substrate 452 of the upper layer is anodically bonded to the top silicon 43;

(g) a liquid is injected into the fill cavity 18.

Finally, a wafer batch 4 having a plurality of the optical devices 1 described above is formed.

Liquid is injected into the wafer through the liquid channel 44 by the driving of a syringe pump, each filling cavity 18 is communicated with each other through a pipe, when the liquid is input at the inlet 441, the liquid reaches each filling cavity 18 through the pipe, the liquid is output from the outlet 442, when all the filling cavities 18 are filled with the liquid, the outlet close to the filling cavity 18 is firstly closed according to the piston closing principle of the single optical device 1, and then the inlet of the filling cavity 18 is closed.

By adopting the method, batch production and manufacturing can be realized, and micro-nano-scale processing can be completely realized to obtain the single micro-nano-scale optical device 1.

When a single unitary optical device 1 is desired, only one fill cavity 18 needs to be provided within each optical device 1 in the chip.

When the array-type optical devices 1 are needed, the filling cavities 18 in each optical device 1 in the chip need to be arranged in a plurality of arrays. And (4) processing and cutting according to the requirement.

The following examples are provided based on different applications of the optical device 1:

the first embodiment is as follows:

with further reference to fig. 12, the optical device 1 may be a lens 2, the optical device 1 being a focus tunable liquid filled lens 2. Wherein the optical device 1 further comprises a film 21, the film 21 is covered on the second substrate 12, the film 21 is used for defining the filling cavity 18, wherein the film 21 is an expandable film 21, so that a deformation film with a desired curvature can be realized according to the liquid passing amount.

In a specific application, the membrane 21 is typically made of an elastic transparent material, such as PDMS (polydimethylsiloxane), which changes its shape under an external tension, so as to manipulate the light beam, such as connecting the beginning of the first channel 13 of the focus tunable liquid filled lens 2 with a syringe, which is fixed to a mechanical pump. When the mechanical pump does not inject liquid into the first flow channel 13, the elastic membrane is in a flat state. When a mechanical pump injects liquid into this first flow channel 13, the pressure in the liquid chamber increases and the membrane in the liquid chamber swells, as shown in fig. 12. Based on this principle, the greater the amount of liquid injected by the mechanical pump, the greater the pressure in the liquid chamber, the greater the curvature of the membrane bulge and the smaller the corresponding radius of the elastic membrane bulge. In this way, the convergence angle of the light beam can be adjusted. The focal length is longer as the pressure in the liquid chamber is smaller and the convergence angle is smaller. Conversely, the greater the pressure in the liquid chamber, the greater the convergence angle and the shorter the focal length. This approach enables the focal length of the microlens 2 array to be tunable.

It should be noted that, according to the formula of the impact force applied to the first piston 151 and the second piston 161: FT — MV indicates that the intensity of the liquid applied to the piston is proportional to the flow rate of the liquid, and V1 is set as the flow rate of the liquid when the first piston 151 is closed, and V2 is set as the flow rate of the liquid when the second piston 161 is closed. The first piston 151 and the second piston 161 are closed in the following two cases.

(1) When the second piston 161 is closed and locked, the first piston 151 can be closed at a high instantaneous speed, and it is considered that the amount of the liquid to be injected in a very short time is small and the pressure of the sealing liquid is low.

(2) After the second piston 161 is locked, liquid can be continuously introduced through the first piston 151, the liquid volume in the filling cavity 18 can be calculated through the action time of the liquid V1, the pressure of the liquid in the filling cavity 18 is further improved, and when the liquid in the filling cavity 18 reaches a designed value, the first piston 151 is locked at an instantaneous high speed.

Specifically, with reference to fig. 12, 13, and 14, when a liquid is injected into the optical device 1, the film layer 21 expands due to the pressure of the liquid, and the method of method 2 can theoretically realize a deformed film layer 21 having an arbitrary curvature, thereby obtaining a lens 2 having an arbitrary curvature. Of course, in practical circumstances it is necessary to take into account the limit of resistance to compression of the membrane layer 21, but in general a deformable membrane of the desired curvature can be achieved by varying the liquid flow rate of the first flow channels 13.

Wherein the deformation height of the film layer 21 and the liquid flow rate of the first flow channel 13 satisfy the following formula,

v1 is the liquid flow rate, t is the time for the liquid to flow into the filling chamber 18 when the liquid flow rate is V1, S is the cross-sectional area of the first flow channel 13 perpendicular to the liquid flow direction, h is the desired deformation height of the membrane layer 21, and R is the designed radius of curvature of the lens 2. That is, the amount of the liquid introduced is precisely controlled by changing the flow rate of the liquid and the time of introduction, thereby obtaining the lens 2 of a desired curvature.

Assuming that the volume of the circular filling cavity 18 of fig. 13 is W0, when the second piston 161 is closed, the amount of liquid in the cavity is W0. When the liquid flow rate is V2, and the cross-sectional area perpendicular to the fluid flow direction in the first flow channel 13 of fig. 13 is S, the fluid inflow volume is W2 × t × S after the time t elapses, and the first piston 151 is closed, so that the total closed volume is V2 × t × S + W0. The liquid is considered incompressible, the deformation of the film layer 21 is considered to be approximately circular arc, the amount of liquid outside the filling cavity 18 is W, the portion and the deformed film layer 21 can be equivalent to a spherical segment model with the volume W as shown in fig. 14, and according to the requirement of the curvature radius R of the designed optical device 1 and the geometric relationship of the graph (d is the designed width value of the filling cavity), the required deformation height h of the film layer 21 can be calculated, and the required deformation height h meet the following functional relationship.

4h²-8Rh+d²＝0

The required liquid volume W can be calculated further according to the segment formula. The functional relationship between them is as follows.

So that a lens 2 of a desired curvature can be obtained by precisely controlling the amount of liquid entering.

In another embodiment of the present invention, referring to fig. 12, the liquid can be further expanded by the heater, so as to dynamically change the curvature of the film 21, and finally achieve the tunable focal length of the lens 2.

Specifically, a heating cavity is further formed between the first substrate 11 and the second substrate 12, the heating cavity is surrounded at the periphery of the filling cavity 18, and is isolated from the filling cavity 18, the first flow channel 13 and the second flow channel 14, and the lens 2 further includes a first heater (not shown in the figure), which is filled in the heating cavity and is used for heating the temperature of the adjusting liquid so as to further change the deformation curvature of the film layer 21, so as to realize the zooming function of the adjustable lens 2.

Example two:

with further reference to fig. 15 and 16, the optical device 1 may be a filter 3, thereby realizing a liquid-based tunable FP (Fabry-perot cavity) filter 3. The Fabry-Perot cavity is composed of two parallel mirror surfaces, and light is input into the cavity through an optical fiber and is reflected between the two mirror surfaces for multiple times. By adjusting the separation between the two mirror surfaces, light of one wavelength is selected to pass through the cavity, while other wavelength components are blocked. The separation of the two mirrors can be changed either mechanically by moving the mirrors directly or indirectly by changing the refractive index of the material in the cavity. According to the principle, the cavity 18 is filled with liquid, the temperature of the liquid is adjusted through electric heating, the refractive index of the liquid is changed, and tuning of the transmission wavelength is further achieved. In this embodiment the cavity does not need to be deformed and the first 11 and second 12 substrates filling both sides of the cavity 18 are base materials with negligible deformation.

Specifically, a heating cavity (not shown) is further formed between the first substrate 11 and the second substrate 12, the heating cavity is enclosed in the periphery of the filling cavity 18, and is isolated from the filling cavity 18, the first flow passage 13 and the second flow passage 14, and the optical device 1 further includes a second heater 31 filled in the heating cavity, and the second heater 31 is used for heating and adjusting the temperature of the liquid to change the refractive index of the liquid.

By adopting the design, the mass manufacturing of the adjustable liquid filter 3 chips can be realized, and the adjustable liquid filter has wide application prospect in the sensing fields of optical communication, adjustable lasers, optical images and the like.

The results of the FP cavity static transmitted light achieved with the above structure are shown in fig. 17, the results of the dynamic transmission achieved with the second heater 31 are shown in fig. 18, the transmitted light moves with the refractive index of the liquid when thermal tuning is used, where L1 is a graph where n is 1.2; l2 is a graph with n being 1.3; l3 is a graph with n being 1.4; l4 is a graph with n being 1.5.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims

1. An optical device, comprising:

a first substrate;

2. The optical device of claim 1, wherein the first resilient component comprises:

the second elastic component includes:

3. The optical device of claim 2, wherein the first and second cantilevers are each cantilevers made of silicon material.

4. The optical device of claim 2, further comprising a device layer between the first substrate and the second substrate, and wherein the first flow channel and the second flow channel open on the device layer; the first piston includes:

the second elastic sheet is connected with the other end of the first piston body and arranged opposite to the first elastic sheet, and the second cantilever extends towards the direction of the first piston body;

a first buckle extends from one side of the device layer towards the first elastic sheet, and the first buckle is buckled with the first elastic sheet; and a second buckle extends from the other side of the device layer towards the second elastic sheet, and the second buckle is buckled with the second elastic sheet.

5. The optical device of claim 4, wherein the second piston comprises:

a second piston body connected with the second cantilever;

6. The optical device of any of claims 1 to 5, wherein the first flow channel comprises:

a first sub-channel in communication with the liquid inlet; and

the second flow passage is used for the second elastic component to extend into.

7. The optical device according to any one of claims 1 to 5, further comprising:

wherein the membrane layer is an expandable membrane layer.

8. The optical device of claim 7, wherein the deformed height of the film layer and the liquid flow rate of the first flow channel satisfy the formula:

9. The optical device of claim 7, wherein a heating cavity is further formed between the first substrate and the second substrate, the heating cavity being enclosed around a periphery of the fill cavity, and the heating cavity being isolated from the fill cavity, the first flow passage, and the second flow passage, the optical device further comprising:

10. The optical device according to any one of claims 1 to 5, wherein a heating cavity is further formed between the first substrate and the second substrate, the heating cavity being enclosed around the periphery of the filling cavity, and the heating cavity being isolated from the filling cavity, the first flow passage and the second flow passage, the optical device further comprising: