CN213302053U - High-performance compact X-ray absorption spectrometer - Google Patents
High-performance compact X-ray absorption spectrometer Download PDFInfo
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- CN213302053U CN213302053U CN202021729781.5U CN202021729781U CN213302053U CN 213302053 U CN213302053 U CN 213302053U CN 202021729781 U CN202021729781 U CN 202021729781U CN 213302053 U CN213302053 U CN 213302053U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
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- 229910052710 silicon Inorganic materials 0.000 claims description 6
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
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- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 abstract description 12
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- 238000001228 spectrum Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
本实用新型提供了一种高性能紧凑型X射线吸收光谱仪，其特征在于，包括环形导轨，环形导轨上设有三个滑动模块，三个滑动模块分别设有各自独立的驱动机构，由每个驱动机构驱动相应的滑动模块沿环形导轨在周向上滑动；三个滑动模块上分别设有光源、弯晶分析器、探测器。与现有技术相比，本实用新型具有高光子收集效率；高机械稳定性；紧凑的运动扫描装置；灵活的采集模式。
The utility model provides a high-performance compact X-ray absorption spectrometer, which is characterized in that it comprises an annular guide rail, three sliding modules are arranged on the annular guide rail, and the three sliding modules are respectively provided with independent driving mechanisms, which are driven by each The mechanism drives the corresponding sliding modules to slide along the annular guide rail in the circumferential direction; the three sliding modules are respectively provided with a light source, a curved crystal analyzer and a detector. Compared with the prior art, the utility model has high photon collection efficiency; high mechanical stability; compact motion scanning device; flexible collection mode.
Description
Technical Field
The utility model relates to an X-ray spectrometer, concretely relates to high performance compact X-ray absorption spectrum appearance.
Background
The X-ray absorption spectrum has the information of element selectivity, site structure symmetry, detectable element valence, electron and structural properties, spin, charge, orbital freedom and the like, and is widely applied to the fields of characterization of energy, catalysis, chemical engineering, biology and the like.
The spectral range of an X-ray Absorption Fine Structure (XAFS) is usually from-50 eV to +600eV on the Absorption edge, and a larger energy range can achieve higher atomic bond length accuracy. Testing XAFS spectra requires energy scanning of the incident light while monitoring the intensity change of the incident light before and after passing through the sample.
At present, the X-ray absorption spectrometer has the following defects:
1. the energy resolution is higher for the flat-crystal based monochromator, but the spatial collection angle is smaller, resulting in a lower photon utilization efficiency. A higher brightness light source (e.g. synchrotron radiation) is usually required.
2. The curved crystal-based monochromator needs to ensure that a light source, a crystal and a detector simultaneously perform scanning motion on a Rowland circle, monochromatic light with different energies is respectively obtained at different spatial positions, and the mechanical structures are too complex when spatial point-to-point scanning is performed.
3. The bend crystal based monochromator scan is based on the bragg diffraction principle, the scan energy range depends on the angular range that can be scanned. The prior art adopts a linear guide rail to scan the spatial position. But the scan angle range is limited by the length of the linear guide, resulting in a limited scan energy range for the spectrometer.
4. The current X-ray absorption spectrometer has poor universality and cannot meet the requirement that the same X-ray absorption spectrometer can realize the switching of multiple light sources and multiple acquisition modes.
Disclosure of Invention
The utility model aims at: an X-ray absorption spectrometer with high photon collection efficiency, high mechanical stability, compact motion scanning device and flexible acquisition mode is provided.
In order to achieve the above object, the technical solution of the present invention is to provide a high performance compact X-ray absorption spectrometer, which is characterized in that the high performance compact X-ray absorption spectrometer comprises an annular guide rail, three sliding modules are arranged on the annular guide rail, the three sliding modules are respectively provided with independent driving mechanisms, and each driving mechanism drives the corresponding sliding module to slide along the annular guide rail in the circumferential direction; the three sliding modules are respectively provided with a light source, a bent crystal analyzer and a detector, the centers of the light source and the bent crystal analyzer are connected through a first connecting rod, the centers of the detector and the bent crystal analyzer are connected through a second connecting rod, and two ends of the first connecting rod are respectively hinged with the centers of the light source and the bent crystal analyzer so as to ensure the relative direction and angle of the light source and the bent crystal analyzer; two ends of the second connecting rod are hinged with the centers of the detector and the bent crystal analyzer respectively, so that the directions and angles of the detector and the bent crystal analyzer are ensured; the front end of the detector is sequentially provided with a slit and a sample, the detector is connected with a signal processing system, the detector successively collects intensity data of X-rays before and after sample insertion, and the signal processing system calculates a difference value of the intensity data read by the detector before and after sample insertion to obtain an X-ray absorption spectrum.
Preferably, the radius of curvature of the ring guide is greater than, equal to, or less than (100% ± 20%) xr, R being the radius of curvature of the rowland circle of the curved crystal analyzer.
Preferably, the annular guide rail is provided with an annular gear; each driving mechanism comprises a driving motor and a driving gear arranged on an output shaft of the driving motor, and the driving gear is meshed with the annular gear; the three sliding modules perform a equidirectional theta-2 theta scanning mode or a reverse theta-theta scanning mode, wherein the equidirectional mode refers to the same rotating direction of the curved crystal analyzer and the detector or the same rotating direction of the light source and the curved crystal analyzer, and the reverse mode refers to the opposite rotating direction of the light source and the detector; the driving motors of the three driving mechanisms respectively adopt the same or different transmission ratios.
Preferably, the light source is an X-ray tube, a target rotating X-ray source, a laser plasma X-ray source, a liquid metal target X-ray source, a diamond micro-focusing X-ray source, a synchrotron radiation X-ray source, or a free electron laser X-ray source.
Preferably, the curved crystal analyzer is a full-focus curved crystal analyzer or a half-focus curved crystal analyzer, and curved crystals are used as monochromators, so that the utilization efficiency of monochromated photons is improved; the curved crystal analyzer is a spherical surface, a hyperboloid or a paraboloid; the number of the bent crystal analyzers is at least 1; the curved crystal analyzer material is a single crystal material.
Preferably, the single crystal material comprises silicon, germanium, quartz, sapphire or highly oriented pyrolytic graphite.
Preferably, the detector is a silicon drift detector, a gas detector, a scintillator detector or a semiconductor detector.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. high photon collection efficiency: the curved crystal is used as a monochromator, a larger spatial receiving angle can be obtained, and the utilization efficiency of monochromated photons is improved.
2. High mechanical stability: the annular guide rail is adopted to fix the light source, the crystal and the detector, so that all the components are mechanically fixed on the circular guide rail when scanning. The scanning motion deviation is avoided, and the motion precision and the mechanical stability of the whole absorption spectrometer are improved.
3. Compact motion scanning device: the annular guide rail and the sliding module are adopted, so that each component can slide along the annular guide rail at a large angle, the Bragg scanning angle range is as high as 20-85 degrees, and the scanning energy range of the spectrometer is expanded. The connecting rod with variable length is adopted, so that the light source, the crystal and the detector have inherent directivity, the design is compact, and the structure is simple.
4. Flexible acquisition mode: the adopted sliding modules move independently and are convenient to control. One sliding module is fixed during scanning, and the other two sliding modules can move in the same direction or in opposite directions, so that a plurality of scanning modes can be realized. If the laser light source corresponds to a high-power X-ray tube or a synchrotron radiation and free electron laser light source, the light source point is required to be fixed, and the crystal and the detector perform equidirectional scanning movement; and corresponding to a low-power X-ray tube, a plurality of crystal analyzers are required to be switched, the crystal analyzers can be selected to be fixed, and the light source and the detector perform reverse scanning movement. The utility model discloses a plurality of scanning mode have greatly expanded X ray absorption spectrum appearance's commonality.
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Fig. 1 is a top view of the present invention;
fig. 2 is a schematic perspective view of the present invention.
Detailed Description
The present invention will be further described with reference to the following specific examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that various changes and modifications of the present invention may be made by those skilled in the art after reading the teachings of the present invention, and these equivalents also fall within the scope of the appended claims.
As shown in fig. 1 and fig. 2, the utility model provides a high performance compact X-ray absorption spectrometer includes light source 1, curved brilliant analyzer 2, detector 3, ring rail 4, three sliding module 5, connecting rod one 6-1, connecting rod two 6-2, slit 7, sample 8 and signal processing system 9.
The light source 1, the curved crystal analyzer 2 and the detector 3 are respectively arranged on three sliding modules 5, and the three sliding modules 5 are movably fixed on the annular guide rail 4. The radius of curvature of the ring guide 4 is equal to the radius of curvature of the rowland circle of the bend analyzer 2. The ring-shaped guide rail 4 is provided with a ring gear, and ring gears with different modules can be used according to actual needs. Each sliding module 5 is equipped with a motor, and the motors equipped on the three sliding modules 5 have different transmission ratios. The driving gear on the output shaft of each motor is engaged with the ring gear so that the three sliding modules 5 can slide in the circumferential direction along the ring rail 4 under the driving of the corresponding motor.
The light source 1 is connected with the center of the curved crystal analyzer 2 through a connecting rod two 6-2, and the detector 3 is connected with the center of the curved crystal analyzer 2 through a connecting rod one 6-1.
The light source 1 can be selected from an X-ray tube, a rotating target X-ray source, a liquid metal target X-ray source, a diamond micro-focusing X-ray source, a synchrotron radiation X-ray source or a free electron laser X-ray source and the like. The curved crystal analyzer 2 may be a spherical surface, a hyperboloid surface or a paraboloid surface; the material can be selected from silicon, germanium, quartz, sapphire or highly oriented pyrolytic graphite, etc.; may be a full focus type Johansson or a half focus type Johann; the curved crystal is used as a monochromator, so that the utilization efficiency of monochromated photons is improved.
The detector 3 may be a silicon drift detector, a gas detector, a scintillator detector, a semiconductor detector, or the like. The front end of the detector 3 is provided with a slit 7 and a sample 8 in sequence. The detector 3 is connected to a signal processing system 9. The detector 3 collects intensity data of the X-rays before and after the sample 8 is inserted. The signal processing system 9 calculates a difference value of the intensity data read by the detector 3 before and after the sample insertion to obtain an X-ray absorption spectrum.
When the X-ray absorption spectrum measurement is carried out, the light source 1 emits X-rays, the X-rays are subjected to monochromatization after passing through the curved crystal analyzer 2, and scanning movement with different energies is carried out by moving the sliding module 5 at the relative position of the annular guide rail 4. For example, corresponding to a high-power X-ray tube or a synchrotron radiation and free electron laser light source, the light source 1 needs to be fixed, and the curved crystal analyzer 2 and the detector 3 need to perform a co-directional θ -2 θ scanning motion, such as: keeping the position of the light source 1 unchanged, rotating the curved crystal analyzer 2 by an angle theta along the clockwise direction, and simultaneously rotating the detector 3 by an angle 2 theta along the clockwise direction; or keeping the position of the light source 1 unchanged, the curved crystal analyzer 2 rotates by an angle theta along the counterclockwise direction, and the detector 3 rotates by an angle 2 theta along the counterclockwise direction. And corresponding to the low-power X-ray tube, a plurality of curved crystal analyzers 2 are required to be switched, and the curved crystal analyzers 2 can be selected to be fixed, and the light source 1 and the detector 3 perform reverse theta-theta scanning movement, such as: keeping the position of the light source 1 unchanged, rotating the curved crystal analyzer 2 by an angle theta along a clockwise direction, and simultaneously rotating the detector 3 by the angle theta along a reverse direction (anticlockwise); or keeping the position of the light source 1 unchanged, the curved crystal analyzer 2 rotates by theta degrees in the counterclockwise direction, and the detector 3 rotates by theta degrees in the reverse direction (clockwise). Corresponding to the situation that the detector cannot move, the detector 3 needs to be fixed, and the light source 1 and the curved crystal analyzer 2 perform the same-direction theta-2 theta scanning motion, such as: keeping the position of the detector 3 unchanged, rotating the curved crystal analyzer 2 by an angle theta along the clockwise direction, and simultaneously rotating the light source 1 by an angle 2 theta along the clockwise direction; or keeping the position of the detector 3 unchanged, the curved crystal analyzer 2 rotates by an angle theta along the counterclockwise direction, and simultaneously the light source 1 rotates by an angle 2 theta along the counterclockwise direction.
The detector 3 collects intensity data of the X-rays before and after the sample 8 is inserted. After insertion of the sample 8, the monochromatic X-rays are absorbed and the rest of the light is detected by the subsequent detector 3. Finally, the signal of the detector 3 is connected to a signal processing system 9, and the signal processing system 9 calculates the difference of the intensity data read by the detector 3 before and after the sample insertion to obtain an X-ray absorption spectrum.
Claims (7)
1. A high-performance compact X-ray absorption spectrometer is characterized by comprising an annular guide rail (4), wherein three sliding modules (5) are arranged on the annular guide rail (4), the three sliding modules (5) are respectively provided with independent driving mechanisms, and each driving mechanism drives the corresponding sliding module (5) to slide along the annular guide rail (4) in the circumferential direction; the three sliding modules (5) are respectively provided with a light source (1), a bent crystal analyzer (2) and a detector (3), the centers of the light source (1) and the bent crystal analyzer (2) are connected through a first connecting rod (6-1), the centers of the detector (3) and the bent crystal analyzer (2) are connected through a second connecting rod (6-2), and two ends of the first connecting rod (6-1) are respectively hinged with the centers of the light source (1) and the bent crystal analyzer (2) to ensure the relative direction and angle of the light source (1) and the bent crystal analyzer (2); two ends of the second connecting rod (6-2) are hinged with the centers of the detector (3) and the bent crystal analyzer (2) respectively, so that the directions and angles of the detector (3) and the bent crystal analyzer (2) are ensured; the front end of the detector (3) is sequentially provided with a slit (7) and a sample (8), the detector (3) is connected with a signal processing system (9), the detector (3) successively collects intensity data of X-rays before and after the sample (8) is inserted, and the signal processing system (9) calculates a difference value of the intensity data read by the detector (3) before and after the sample is inserted to obtain an X-ray absorption spectrum.
2. A high performance compact X-ray absorption spectrometer as claimed in claim 1 wherein the radius of curvature of the annular guide (4) is greater than, equal to or less than (100% ± 20%) xr, R being the radius of curvature of the rowland circle of the curved crystal analyzer (2).
3. A high performance compact X-ray absorption spectrometer as claimed in claim 1, characterised in that said ring guide (4) is provided with a ring gear; each driving mechanism comprises a driving motor and a driving gear arranged on an output shaft of the driving motor, and the driving gear is meshed with the annular gear; the three sliding modules (5) perform a homodromous theta-2 theta scanning mode or a reverse theta-theta scanning mode, the homodromous means that the rotation directions of the curved crystal analyzer (2) and the detector (3) are the same or the rotation directions of the light source (1) and the curved crystal analyzer (2) are the same, and the reverse means that the rotation directions of the light source (1) and the detector (3) are opposite; the driving motors of the three driving mechanisms respectively adopt the same or different transmission ratios.
4. The high performance compact X-ray absorption spectrometer according to claim 1, wherein the light source (1) is an X-ray tube, a rotating target X-ray source, a laser plasma X-ray source, a liquid metal target X-ray source, a diamond micro-focusing X-ray source, a synchrotron radiation X-ray source, or a free electron laser X-ray source.
5. The high-performance compact X-ray absorption spectrometer as claimed in claim 1, wherein the curved crystal analyzer (2) is a full-focus curved crystal analyzer or a half-focus curved crystal analyzer, and curved crystals are adopted as monochromators, so that the utilization efficiency of monochromated photons is improved; the curved crystal analyzer (2) is a spherical surface, a hyperboloid or a paraboloid; the number of the bent crystal analyzers (2) is at least 1; the curved crystal analyzer (2) is made of a single crystal material.
6. The high performance compact X-ray absorption spectrometer as claimed in claim 5, wherein the single crystal material comprises silicon, germanium, quartz, sapphire or highly oriented pyrolytic graphite.
7. The high performance compact X-ray absorption spectrometer of claim 1, wherein the detector is a silicon drift detector, a gas detector, a scintillator detector, or a semiconductor detector.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112083023A (en) * | 2020-08-18 | 2020-12-15 | 上海科技大学 | High-performance compact X-ray absorption spectrometer |
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| CN112083023A (en) * | 2020-08-18 | 2020-12-15 | 上海科技大学 | High-performance compact X-ray absorption spectrometer |
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