CN213266723U - Modular electrolytic tank frame suitable for high-purity electronic chemical production - Google Patents
Modular electrolytic tank frame suitable for high-purity electronic chemical production Download PDFInfo
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Abstract
The utility model relates to a module formula electrolysis trough frame suitable for high-purity electronic chemicals production, module formula electrolysis trough frame can be dismantled the combination by high-altitude self-locking module and form, the contact surface of self-locking module and electrolytic liquid all coats and has expanded sealing material. The utility model discloses a but the electrolysis trough frame monolithic dismouting, it is good to need not whole to compress tightly sealed and leakproofness, and the electrolysis in-process does not take place the seepage phenomenon, is applicable to the production module formula electrolysis trough frame of high-purity electronic chemistry article.
Description
Technical Field
The utility model belongs to the technical field of the electrolysis trough, concretely relates to module formula electrolysis trough frame suitable for high-purity electronic chemicals production.
Background
The electrolysis/electrodialysis method mainly adopts a combined electrolytic cell structure, a common electrolytic cell consists of a plurality of plate frames and a unified bracket, polymer materials are adopted to perform gasket between the plate frames, and then the gasket is fastened and sealed through hydraulic pressure, threads or other fastening measures at one end of the bracket. In the sealing mode, the thickness of the sealing material clamped and filled between different plate frames is not uniform, and the problem of gaps among a plurality of plate frames cannot be solved by a single one-point or multi-point fastening and sealing measure, so that liquid leakage is caused; various gases are easily generated in the process of carrying out electrolysis/electrodialysis reaction on different plate frame materials, so that the gases accumulated in a short time can generate vibration between the plate frames, the vibration can aggravate the mutual abrasion between the sealing material and the plate frames to generate displacement, and finally leakage is caused; usually, the plate frame can be fixed on the support through a plurality of long screws, if one of them plate frame material of needs replacement, then probably need remove one end from with at most half plate frame in the whole group of material in the maintenance in-process all, in addition to having wasted manpower and materials greatly, still probably produce new non-sealing point between the originally complete sealed plate frame material to lead to the seepage.
In response to the above problems, workers in the industry have for many years made improvements in the sealing conditions of conventional plate and frame cells. CN1399689A provides an electrolysis apparatus, wherein the circulating frame extends beyond the edge of the metal in the fluid, so that the circulating frame and/or gasket of the first electrolytic tank is formed by the same elastic material as that of the circulating frame and/or gasket of the adjacent second electrolytic tank, so that the circulating frame can be directly connected to the adjacent non-metal separator, but the invention adopts a sealing mode of pressing two ends, and although the elastic material is adopted, the situation that the pressure at different points between different plate frames is not uniform to cause leakage is inevitable. CN2466166Y provides a strong sealing fixed combined electrolytic cell false bottom, which is formed by connecting an upper assembly part provided with a diaphragm wide hole and a lower assembly key provided with an anode slag hole through bamboo nails, the false bottom is made of common plastic materials, has poor acid and alkali resistance and cleanliness, is integrally designed, and is not easy to disassemble, assemble and maintain. US2009/0155671a1 provides a form of sealing between two sheet frames, which comprises two contact portions distributed at a distance in the same direction, and each of which is in close contact with two sheet frames, and which uses an alloy material with superplasticity that is post-processed by compressive stress, and which provides a greater mechanical compression resistance for sealing under higher temperature conditions, but such sealing materials are alloy materials and are not suitable for sealing conditions with certain concentrations of aqueous acid and alkali solutions or with certain requirements for metal ion impurities in the solutions. CN201545918U provides an aluminium cell cover plate structure, it comprises wave plate, tip frame and handle, is favorable to the apron atress performance, has reduced the holistic frame structure of preparation apron, in the in-process of lapping each other, is favorable to the cooperation between the apron, has strengthened the sealing performance of electrolysis cell, but this method only provides the sealed mode of upper cover plate, does not have holistic leakproofness, and the sealed atress of wave structure receives the influence of wave seal plate material processing homogeneity, is unfavorable for stable large-scale production use. CN102976774A provides a heat preservation and sealing material for inert anode aluminum electrolytic cell and a preparation method thereof, the material comprises a compact layer of corundum castable, a slurry prepared from the slurry as a transition layer and a heat preservation layer of light castable, the method integrates the two materials, solves the problem of cracking caused by unmatched expansion coefficients at high temperature, but the sealing material is an aluminum oxide material and is not suitable for the electrolysis process needing acid and alkali resistant materials. CN105887139A provides a controllable anode covering and sealing structure for aluminum electrolysis cell, which comprises a structural frame covered on the electrolysis cell and a plurality of sealing plates laid on the structural frame, and the scheme adopts an integral sealing manner, and only an upper cover plate exists, and the integral sealing property is to be examined.
On the other hand, wet electronic chemicals, which are used in the manufacturing process for photolithography processes in display/semiconductor chip integrated circuits, require extremely high purity, often ion impurities at ppb level or less; the particle impurities are required to have different particle sizes according to different application scenes, the particle sizes of 0.5 μm and below are generally controlled, and as the line width of the application field is more and more fine, the application end has higher requirements on the particle sizes and the particle numbers of the particle impurities, so that the leakage phenomenon possibly generated in the conventional electrolysis/electrodialysis process can undoubtedly affect the product quality, and how to eliminate the influence is one of the keys for ensuring the product quality. CN102828198A provides a method for preparing high-purity quaternary ammonium hydroxide by electrolyzing organic ammonium salt by a perfluorinated ion exchange membrane method for chlor-alkali, wherein an electrolytic cell which is provided with a perfluorinated ion exchange membrane between electrodes and mainly comprises an anode chamber, an anode, the perfluorinated ion exchange membrane, a cathode chamber and a cathode chamber is used.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a but monolithic dismouting need not whole to compress tightly sealed and the leakproofness is good, does not take place the module formula electrolysis trough frame that is applicable to high-purity electronic chemicals production of seepage phenomenon among the electrolysis process.
In order to solve the technical problem, the utility model provides a pair of module formula electrolysis trough frame suitable for high-purity electronic chemicals production, module formula electrolysis trough frame can be dismantled the combination by high-class self-locking module and form, the contact surface of self-locking module and electrolytic liquid all coats and has expanded sealing material.
Furthermore, the self-locking module is of a plate frame structure and comprises a first self-locking module and a second self-locking module which are positioned in the middle of the modular electrolytic tank frame, and a third self-locking module and a fourth self-locking module which are positioned on two sides of the modular electrolytic tank frame; the self-locking module I and the self-locking module II, the self-locking module III and the self-locking module I, and the self-locking module II and the self-locking module IV are connected in pairs through mortise and tenon structures respectively to form a modular electrolytic tank frame with a plate frame structure.
Furthermore, the number of the first self-locking modules and the second self-locking modules can be increased according to production requirements when the modular electrolytic tank frame is assembled.
Furthermore, ion exchange membranes are fixed on the edges of the inner walls of the first self-locking module and the second self-locking module through sealing gaskets, and gaps between the sealing gaskets and the inner walls of the first self-locking module and the second self-locking module are adjustable.
Furthermore, protruding tenons are arranged on the front side edge and the rear side edge of the plate frame structure of the first self-locking module and the inner side edge of the plate frame structure of the fourth self-locking module, the thickness of the upper end of each tenon is slightly larger than that of the lower end of each tenon, and an inclined structure is formed; and mortises matched with the tenons are formed in the edges of the front side and the rear side of the plate frame structure of the second self-locking module and the edge of the inner side of the plate frame structure of the third self-locking module.
Further, the inclination angle of the tenon is 5 °.
Furthermore, platforms protruding outwards are arranged on the edges above the tenons of the first self-locking module and the fourth self-locking module, and a first buckle fixing groove is formed in the left end and the right end of each platform; the top ends of the mortises of the second self-locking module and the third self-locking module are lower than the top end of the plate frame structure, step-shaped structures matched with the protruding platforms respectively are formed with the top ends of the plate frame structure, and buckle fixing grooves II corresponding to the buckle fixing grooves I are formed in the positions, close to the upper ends, of the surfaces of the left side and the right side of the plate frame structure of the second self-locking module and the third self-locking module; and when the self-locking module is combined, the first buckle fixing groove and the second buckle fixing groove are fixed through a fastening buckle with a spring arranged inside.
Further, the expansion sealing material is a multilayer sealing material, and the cross-sectional structure of the expansion sealing material is sequentially provided with a microporous membrane permeation layer, a support net layer, a water swelling material layer, a support net layer and a water-proof sealing material layer from the application surface to the binding surface.
Furthermore, the microporous membrane permeable layer is made of polytetrafluoroethylene or soluble polytetrafluoroethylene material, the thickness of the microporous membrane permeable layer is 50-500 mu m, and the pore diameter range of micropores is 0.1-5 mu m; the supporting net layer is made of polypropylene fiber woven materials, and the thickness of the supporting net layer is 50-500 mu m; the water swelling material layer is made of polysaccharide or high water absorption synthetic polymer, and the thickness of the water swelling material layer is 50-500 mu m; the water-proof sealing material layer is a polypropylene or polyethylene film layer, and the thickness of the water-proof sealing material layer is 50-500 mu m.
The beneficial effects of the utility model are that:
1. the modular electrolytic tank frame of the utility model is formed by detachably combining self-locking modules with equal height, the modules are automatically locked under the action of gravity, the integral pressing and sealing are not needed, and the condition that the traditional electrolytic tank pressing type can not be disassembled and assembled by a single sheet is greatly improved; and the contact surfaces of the self-locking modules and the electrolytic liquid are coated with expansion sealing materials, and in the process of producing products by electrolytic reaction, because a large amount of liquid exists in the adjacent modules, the sealing structure between the self-locking modules and the adjacent modules is more sealed along with the increase of the quality of the liquid contained in the modules, and the leakage is prevented on the premise of ensuring the cleanliness of the products.
2. The utility model discloses a from the locking module is fashionable, and buckle fixed slot one and buckle fixed slot two on the locking module are fixed through the inside fastening buckle that is provided with the spring, and the spring fastening can provide certain vibrations buffering, is in the same place two kinds of self-locking module are fixed to avoid because the reaction process produces gaseous vibrations that arouse volume change in the twinkling of an eye and lead to in the moment, and the condition emergence of the seepage that leads to in the space between the possible sheet frame that vibrations produced from this kind.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and embodiments.
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is an exploded view of the present invention.
Fig. 3 is a schematic structural diagram of the first self-locking module of the present invention.
Fig. 4 is a schematic structural diagram of the self-locking module ii of the present invention.
Fig. 5 is a schematic structural diagram of a third self-locking module of the present invention.
Fig. 6 is a schematic structural diagram of the self-locking module of the present invention.
Fig. 7 is a schematic cross-sectional structure view of the intumescent sealing material of the invention.
Detailed Description
As shown in fig. 1-2, the modular electrolytic tank frame suitable for the production of high-purity electronic chemicals is formed by detachably combining self-locking modules with equal height, and the contact surfaces of the self-locking modules and electrolytic liquid are coated with expansion sealing materials. The self-locking modules are of plate frame structures, adopt stainless steel materials or other materials meeting the production cleanliness as basic frames, and comprise a first self-locking module 1, a second self-locking module 2, a third self-locking module 3 and a fourth self-locking module 4, wherein the first self-locking module and the second self-locking module are positioned in the middle of the modular electrolytic tank frame, and the third self-locking module and the fourth self-locking module are positioned on two sides of the modular electrolytic tank frame; the self-locking module I1 and the self-locking module II 2, the self-locking module III 3 and the self-locking module I1, and the self-locking module II 2 and the self-locking module IV 4 are connected in pairs through mortise and tenon structures respectively to form a modular electrolytic tank frame with a plate frame structure. The number of the first self-locking modules 1 and the second self-locking modules 2 can be increased according to production requirements when the modular electrolytic tank frame is assembled, for example, the third self-locking modules 3 are adopted to be matched with the first self-locking modules 1 at two ends of the integral modular electrolytic tank frame, or the fourth self-locking modules 4 are adopted to be matched with the second self-locking modules 2.
The self-locking module I1 and the self-locking module II 2 are fixed with ion exchange membranes on the inner wall edges through sealing gaskets, and gaps between the sealing gaskets and the inner walls of the self-locking module I and the self-locking module II are adjustable, so that the installation of most of currently used ion exchange membranes with supporting structures and ion exchange membranes without supporting structures and the application of electrolysis/electrodialysis processes are met.
With reference to fig. 3-6, protruding tenons 5 are respectively arranged on the front and rear side edges of the plate frame structure of the first self-locking module 1 and the inner side edge of the plate frame structure of the fourth self-locking module 4, the thickness of the upper end of each tenon is slightly greater than that of the lower end of each tenon to form an inclined structure, and the inclination angle is 5 degrees; the front and rear edges of the plate frame structure of the second self-locking module 2 and the inner side edge of the plate frame structure of the third self-locking module 3 are provided with mortises 6 matched with the tenons 5. The upper edges of the tenons of the first self-locking module 1 and the fourth self-locking module 4 are respectively provided with a platform 7 protruding outwards, and the left end and the right end of the platform 7 are provided with a first buckle fixing groove 8; the top ends of the mortises 5 of the self-locking modules II 2 and III 3 are lower than the top end of the plate frame structure, step-shaped structures respectively matched with the protruded platforms 5 are formed with the top ends of the plate frame structure, and buckle fixing grooves II 9 corresponding to the buckle fixing grooves I8 are formed in the positions, close to the upper ends, of the left side surfaces and the right side surfaces of the plate frame structure of the self-locking modules II 2 and III 3; when the self-locking module is combined, the first buckle fixing groove 8 and the second buckle fixing groove 9 are fixed through a fastening buckle 10 with a spring arranged inside.
As shown in fig. 7, the swelling sealing material is a multilayer sealing material, and the cross-sectional structure of the swelling sealing material is, in order from the application surface (the surface exposed to and in contact with the electrolytic product), i.e., the contact surface 11 with the electrolyte, to the attachment surface (the surface attached to the first, second, third, and fourth surfaces of the self-locking module), i.e., the surface attached to the plate frame and the card slot contact surface 12, a microporous membrane permeation layer 13, a first support mesh layer 14, a water swelling material layer 15, a second support mesh layer 16, and a water-blocking sealing material layer 17. The microporous membrane permeable layer 13 is made of polytetrafluoroethylene or soluble polytetrafluoroethylene material, the thickness of the microporous membrane permeable layer is 50-500 mu m, and the pore diameter range of micropores is 0.1-5 mu m; the first support net layer 14 and the second support net layer 16 are made of polypropylene fiber woven materials, and the thickness of the polypropylene fiber woven materials is 50-500 mu m; the water swelling material layer 15 is made of polysaccharide or high water absorption synthetic polymer, and the thickness of the water swelling material layer is 50-500 mu m; the water-proof sealing material layer 17 is a polypropylene or polyethylene film layer, and the thickness of the water-proof sealing material layer is 50-500 mu m. Wherein, each layer of material can not generate the dissolution of anions and cations with ppb level (< 100 ppb) in the aqueous solution under the condition of a certain temperature range (20-80 ℃).
Example 1
Production of tetramethylammonium hydroxide by single-membrane two-chamber electrolysis process
The method comprises the steps that a first self-locking module 1, a second self-locking module 2, a third self-locking module 3 and a fourth self-locking module 4 are adopted, the four self-locking modules are combined according to the combination sequence of the third self-locking module 3, the first self-locking module 1, the second self-locking module 2 and the fourth self-locking module 4, and a cation exchange membrane is added between the first self-locking module 1 and the second self-locking module 2. The self-locking module I1 and the self-locking module II 2 are respectively matched with a cathode and an anode of a pair of electrolysis electrodes according to production requirements, typically, the anode electrolysis electrode can be inserted into the self-locking module I1, and the cathode electrolysis electrode can be inserted into the self-locking module II 2. According to different types of adopted tetramethylammonium salts, the cathode can be made of materials such as nickel/titanium and the like, the anode can be made of materials such as stainless steel/titanium and the like, and the opening position and the sealing form are distributed according to different electrode materials and power requirements.
Assembling according to the combination sequence, and installing the fastening buckle 10 to obtain the modular electrolytic cell frame, wherein all sealing areas and the inner area of the plate frame adopt the sealing material shown in figure 7 and cover the surface of the plate frame material according to the contact surface.
Adding a circulating aqueous solution of 10-30 wt% of tetramethylammonium salt into the self-locking module I1, adding a circulating aqueous solution of 5-20 wt% of tetramethylammonium hydroxide into the self-locking module II 2, performing circulating electrolysis at a voltage within the range of 5-30V and a constant current of 1000-5000A, continuously obtaining an aqueous solution of 15-30 wt% of tetramethylammonium hydroxide as a product from the liquid obtained by circulating in the self-locking module II 2 after a certain time, and simultaneously continuously supplementing the required aqueous solution of the raw tetramethylammonium salt into the self-locking module I1.
Example 2
Production of tetramethylammonium hydroxide by multi-membrane multi-chamber electrolysis process
The self-locking module I1, the self-locking module II 2, the self-locking module III 3 and the self-locking module IV 4 are adopted, and the four modules can be combined according to the following three sequences:
the first sequence is as follows: self-locking module III 3-self-locking module I1-self-locking module II 2- [ (self-locking module I1-self-locking module II 2) ] n-self-locking module IV 4
And a second sequence: and combining the self-locking module III 3 with the self-locking module I1- [ (the self-locking module II 2-the self-locking module I1) ] n-the self-locking module III 3.
And the sequence is three: and combining the self-locking module IV 4 with a combined mode of the self-locking module I2- [ (the self-locking module II 1-the self-locking module I2) ] n-the self-locking module IV 4.
A cation exchange membrane is added between one pair of the self-locking modules I1 and II 2, and an anion exchange membrane is added between the other pair of the self-locking modules II 2 and I1 corresponding to the cation exchange membrane. The self-locking module is respectively matched with the cathode and the anode of one or more pairs of electrolysis electrodes according to production requirements, typically, the anode electrolysis electrode can be inserted into the self-locking module I1, and the cathode electrolysis electrode can be inserted into the self-locking module II 2. According to different types of adopted tetramethylammonium salts, the cathode can be made of materials such as nickel/titanium and the like, the anode can be made of materials such as stainless steel/titanium and the like, and the opening position and the sealing form are distributed according to different electrode materials and power requirements.
Assembling according to the combination sequence, and installing the fastening buckle 10 to obtain an electrolytic tank frame formed by combining one or more groups of self-locking modules I1 and two self-locking modules II 2 or one or more groups of self-locking modules I1, wherein all sealing areas and the internal area of the plate frame adopt the sealing materials shown in figure 7 and cover the surface of the plate frame material according to the contact surface.
Adding a circulating aqueous solution of 10-30 wt% of tetramethylammonium salt into a certain self-locking module (anode), adding a circulating aqueous solution of 5-20 wt% of tetramethylammonium hydroxide into another self-locking module (cathode), performing circulating electrolysis at a voltage within the range of 5-30V and a constant current of 1000-5000A, continuously obtaining an aqueous solution of 15-40 wt% of tetramethylammonium hydroxide from the liquid obtained by circulating in the self-locking module (cathode) after a certain time, and simultaneously continuously supplementing the required aqueous solution of the raw material tetramethylammonium salt into the self-locking module (anode).
The modular electrolytic tank frame of the utility model is formed by detachably combining self-locking modules with equal height, the modules are automatically locked under the action of gravity, the integral pressing and sealing are not needed, and the condition that the traditional electrolytic tank pressing type can not be disassembled and assembled by a single sheet is greatly improved; and the contact surfaces of the self-locking modules and the electrolytic liquid are coated with expansion sealing materials, and in the process of producing products by electrolytic reaction, because a large amount of liquid exists in the adjacent modules, the sealing structure between the self-locking modules and the adjacent modules is more sealed along with the increase of the quality of the liquid contained in the modules, and the leakage is prevented on the premise of ensuring the cleanliness of the products.
The utility model discloses a when self-locking module is combined, buckle fixed slot 8 and buckle fixed slot two 9 on the self-locking module are fixed through the inside fastening buckle that is provided with the spring, and the spring fastening can provide certain vibrations buffering, is in the same place two kinds of self-locking module are fixed to avoid because the reaction process produces the vibrations that gaseous volume change leads to in the twinkling of an eye that arouses, and the condition emergence of the seepage that leads to in the space between the possible sheet frame that vibrations produced from this kind.
The above description is illustrative and not restrictive. The number of the modules of the electrolytic tank frame included in the utility model is not limited to the illustrated number. Many modifications and variations of the present invention will be apparent to those skilled in the art in light of the above teachings, which will fall within the spirit and scope of the invention.
Claims (9)
1. The modular electrolytic tank frame is characterized in that the modular electrolytic tank frame is formed by detachably combining self-locking modules with equal height, and the contact surfaces of the self-locking modules and electrolytic liquid are coated with expansion sealing materials.
2. The modular cell frame adapted for the production of high purity electronic chemicals of claim 1 wherein said self-locking modules are of a panel frame construction comprising a first self-locking module, a second self-locking module located in the middle of said modular cell frame and a third self-locking module, a fourth self-locking module located on either side of said modular cell frame; the self-locking module I and the self-locking module II, the self-locking module III and the self-locking module I, and the self-locking module II and the self-locking module IV are connected in pairs through mortise and tenon structures respectively to form a modular electrolytic tank frame with a plate frame structure.
3. The modular cell frame adapted for use in the production of high purity electronic chemicals of claim 2, wherein the modular cell frame is assembled to increase the number of first self-locking modules and second self-locking modules as needed for production.
4. The modular cell frame for high purity elecfronic chemical production according to claim 2, wherein said self-locking modules one and two have ion exchange membranes fixed to their inner wall edges by gaskets, and the clearances between said gaskets and the inner walls of said self-locking modules one and two are adjustable.
5. The modular cell frame suitable for high purity electronic chemical production of claim 2, wherein the frame structure of the first self-locking module has protruding tenons at the front and rear edges and the frame structure of the fourth self-locking module has an inner edge, the thickness of the upper end of the tenon is slightly greater than that of the lower end, forming an inclined structure; and mortises matched with the tenons are formed in the edges of the front side and the rear side of the plate frame structure of the second self-locking module and the edge of the inner side of the plate frame structure of the third self-locking module.
6. The modular cell frame adapted for use in high purity electronic chemical production of claim 5 wherein the angle of inclination of said tenons is 5 °.
7. The modular electrolytic tank frame suitable for high-purity electronic chemical production according to claim 2 or 5, wherein the upper edges of the tenons of the first self-locking module and the fourth self-locking module are provided with platforms protruding outwards, and the left and right ends of each platform are provided with first buckle fixing grooves; the top ends of the mortises of the second self-locking module and the third self-locking module are lower than the top end of the plate frame structure, step-shaped structures matched with the protruding platforms respectively are formed with the top ends of the plate frame structure, and buckle fixing grooves II corresponding to the buckle fixing grooves I are formed in the positions, close to the upper ends, of the surfaces of the left side and the right side of the plate frame structure of the second self-locking module and the third self-locking module; and when the self-locking module is combined, the first buckle fixing groove and the second buckle fixing groove are fixed through a fastening buckle with a spring arranged inside.
8. The modular cell frame suitable for the production of high purity electronic chemicals of claim 1, wherein the swelling sealing material is a multi-layer sealing material, and the cross-sectional structure of the sealing material is, from the application surface to the fitting surface, a microporous membrane permeation layer, a supporting mesh layer, a water swelling material layer, a supporting mesh layer, and a water-proof sealing material layer.
9. The modular cell frame suitable for high purity electronic chemical production of claim 8 wherein said microporous membrane permeable layer is made of polytetrafluoroethylene, or soluble polytetrafluoroethylene material, having a thickness of 50-500 μm and a pore size in the range of 0.1-5 μm; the supporting net layer is made of polypropylene fiber woven materials, and the thickness of the supporting net layer is 50-500 mu m; the water swelling material layer is made of polysaccharide or high water absorption synthetic polymer, and the thickness of the water swelling material layer is 50-500 mu m; the water-proof sealing material layer is a polypropylene or polyethylene film layer, and the thickness of the water-proof sealing material layer is 50-500 mu m.
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