CN213259444U

CN213259444U - Target frame for maintaining rotary target

Info

Publication number: CN213259444U
Application number: CN202021897449.XU
Authority: CN
Inventors: 胥小勇; 颜建师; 涂培堤
Original assignee: Fujian Waneng Technology Co ltd
Current assignee: Fujian Waneng Technology Co ltd
Priority date: 2020-09-03
Filing date: 2020-09-03
Publication date: 2021-05-25
Anticipated expiration: 2030-09-03

Abstract

The utility model discloses a target frame that rotatory target material maintenance was maintained, including the chassis, the chassis includes two parallel arrangement's diaphragm, two the both ends of diaphragm all are connected with the connecting plate, be equipped with the spout on the diaphragm, it is equipped with two sliders to slide in the spout, the upper end of slider is equipped with the base, be equipped with the stand on the base, insert on the base and be equipped with the fastening screw that is located both sides around the stand, be equipped with the free end and the screw hole screw-thread fit that are located the screw hole and the fastening screw of spout both sides on the diaphragm, the both sides face of stand all is equipped with a plurality of layers and places the board, it places the seat to place to be equipped with on the board, it is. Compared with the prior art, the utility model the advantage lie in: the rotary target is convenient to move, can be prevented from falling and can be placed in different lengths.

Description

Target frame for maintaining rotary target

Technical Field

The utility model relates to a magnetron sputtering equipment technical field specifically indicates a target frame that rotatory target material maintenance was maintained.

Background

The rotary target, also called magnetron sputtering rotary cylindrical cathode target, has been widely used in the production of industrially preparing large-area functional thin films. The rotary target is based on the magnetron sputtering technology, and the appearance of the rotary target just meets the requirement of industrially preparing large-area high-quality functional films. The rotary target not only inherits the advantages of the magnetron sputtering technology that higher deposition rate is obtained under lower working pressure and more uniform film with higher adhesive force is obtained under lower substrate temperature, but also has outstanding advantages compared with the traditional plane target.

The rotary target needs maintenance when not using, at present, after dismantling the rotary target from magnetron sputtering equipment, only just randomly look for a support and place temporarily, do not have the placer that matches specially, this not only has the potential safety hazard that the rotary target probably falls to the ground and injures people, still causes the target damage easily, and some simple racks that have now generally weld as an organic wholely, can only place the rotary target of certain length.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome above technical defect, provide a be convenient for remove, can prevent that rotatory target from dropping and can place the rotatory target maintenance's of different length target frame.

In order to solve the technical problem, the utility model provides a technical scheme does: the utility model provides a target frame that rotatory target material maintenance was maintained, includes the chassis, the chassis includes two parallel arrangement's diaphragm, two the both ends of diaphragm all are connected with the connecting plate, be equipped with the spout on the diaphragm, it is equipped with two sliders to slide in the spout, the upper end of slider is equipped with the base, be equipped with the stand on the base, insert on the base and be equipped with the fastening screw that is located both sides around the stand, be equipped with the free end and the screw hole screw-thread fit that are located the screw hole and the fastening screw of spout both sides on the diaphragm, the both sides face of stand all is equipped with a plurality of layers and places the board, it places the seat to be equipped with on the board to.

As an improvement, the sliding groove is a T-shaped groove, and the sliding block is a T-shaped sliding block.

As an improvement, two limiting columns which are respectively positioned at two sides of the placing seat are arranged on the placing plate, studs are arranged at the upper ends of the limiting columns, the diameter of each stud is smaller than that of the corresponding limiting column, a pressing plate is inserted into the upper ends of the two studs, nuts used for pressing the pressing plate are connected to the studs in a threaded mode, a pressing seat is arranged at the bottom of each pressing plate, and a clamping groove corresponding to the placing groove is formed in the bottom of the pressing seat.

As an improvement, rubber pads are arranged in the placing grooves and the clamping grooves, and anti-skid grains are arranged on the rubber pads.

As the improvement, the bottom of diaphragm is equipped with the walking wheel that can lock.

Compared with the prior art, the utility model the advantage lie in: the utility model discloses a target frame that rotatory target maintenance was maintained is through setting up the spout on the diaphragm, and be equipped with two sliders in the spout, be convenient for according to the distance between two stands on two slides of length adjustment of rotatory target, the distance between two stands of being convenient for fix in the screw hole of twisting the fastening screw messenger fastening screw soon, thereby can place a plurality of rotatory targets in two standing grooves of placing the seat, but the setting of pressing the seat carries on spacing fixed to the upper end of rotating target, can prevent rocking and dropping of target, and the clamp plate card is convenient for press the dismouting of seat on spacing post and through the nut fastening, can lock the setting of walking wheel and be convenient for the removal of whole target frame.

Drawings

Fig. 1 is a schematic structural diagram of a target holder for maintaining a rotary target.

Fig. 2 is an enlarged schematic view of a in fig. 1.

Fig. 3 is an enlarged schematic view of the cross-sectional structure of the cross plate of the present invention.

As shown in the figure: 1. chassis, 2, diaphragm, 3, connecting plate, 4, spout, 5, slider, 6, base, 7, stand, 8, fastening screw, 9, screw hole, 10, place the board, 11, place the seat, 12, standing groove, 13, spacing post, 14, double-screw bolt, 15, clamp plate, 16, pressure seat, 17, draw-in groove, 18, rubber pad, 19, walking wheel.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

The following describes the present invention with reference to the accompanying drawings. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

In order to make the content of the present invention more clearly understood, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the attached drawings in the embodiment of the present invention.

With reference to the accompanying drawings 1-3, a target frame for maintaining and maintaining a rotary target comprises a base frame 1, wherein the base frame 1 comprises two parallel transverse plates 2, two transverse plates 2 are connected with connecting plates 3 at two ends, a sliding groove 4 is formed in each transverse plate 2, two sliding blocks 5 are arranged in each sliding groove 4 in a sliding mode, a base 6 is arranged at the upper end of each sliding block 5, a stand column 7 is arranged on each base 6, fastening screws 8 located on the front side and the rear side of each stand column 7 are inserted into the base 6, free ends of the screw holes 9 and the fastening screws 8 located on two sides of each sliding groove 4 are arranged on the transverse plates 2 in a threaded fit mode, a plurality of layers of placing plates 10 are arranged on two side faces of each stand column 7, a placing seat 11 is arranged on each placing plate 10, and a plurality of.

The sliding groove 4 is a T-shaped groove, and the sliding block 5 is a T-shaped sliding block.

The placing plate 10 is provided with two limiting columns 13 which are respectively located on two sides of the placing seat 11, studs 14 are arranged at the upper ends of the two limiting columns 13, the diameter of each stud 14 is smaller than that of the corresponding limiting column 13, a pressing plate 15 is inserted at the upper ends of the two studs 14, nuts used for pressing the pressing plates 15 are in threaded connection with the studs 14, a pressing seat 16 is arranged at the bottom of each pressing plate 15, and a clamping groove 17 corresponding to the placing groove 12 is formed in the bottom of each pressing seat 16.

Rubber pads 18 are arranged in the placing grooves 12 and the clamping grooves 17, and anti-skid grains are arranged on the rubber pads 18.

And the bottom of the transverse plate 2 is provided with a lockable travelling wheel 19.

The utility model discloses when concrete implementation, it is fixed to remove appointed place and locking with the device, distance between two stands on the length removal diaphragm according to rotatory target, and twist the distance of twisting in fastening screw makes fastening screw's free end precession different screw holes be convenient for fix between two stands, place rotatory target on the seat of placing on two stands, and pass the double-screw bolt card with the clamp plate on two spacing posts, accomplish the fixed of clamp plate through twisting the nut on the double-screw bolt, the draw-in groove of pressing the seat bottom can clamp fixedly to the upper end of rotation target, can loosen the walking wheel once more, it can to appointed place of depositing to move whole device.

The present invention and the embodiments thereof have been described above, but the description is not limited thereto, and the embodiment shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.

Claims

1. A target frame that rotatory target material maintenance was maintained, includes chassis (1), its characterized in that: the bottom frame (1) comprises two transverse plates (2) which are arranged in parallel, two ends of the two transverse plates (2) are connected with connecting plates (3), the transverse plate (2) is provided with a sliding chute (4), two sliding blocks (5) are arranged in the sliding chute (4) in a sliding way, the upper end of the sliding block (5) is provided with a base (6), the base (6) is provided with an upright post (7), fastening screws (8) positioned at the front side and the rear side of the upright post (7) are inserted on the base (6), the transverse plate (2) is provided with screw holes (9) positioned at two sides of the chute (4), the free end of the fastening screw (8) is in threaded fit with the screw holes (9), the two side faces of the upright post (7) are provided with a plurality of layers of placing plates (10), the placing plates (10) are provided with placing seats (11), and the placing seats (11) are provided with a plurality of placing grooves (12).

2. A target holder for rotary target maintenance according to claim 1, wherein: the sliding groove (4) is a T-shaped groove, and the sliding block (5) is a T-shaped sliding block.

3. A target holder for rotary target maintenance according to claim 1, wherein: the utility model discloses a pressing device for the pressure welding of the pressure welding machine, including place board (10), be equipped with two spacing posts (13) that are located respectively and place seat (11) both sides on placing board (10), two the upper end of spacing post (13) all is equipped with double-screw bolt (14), the diameter of double-screw bolt (14) is less than the diameter of spacing post (13), two clamp plate (15) are inserted to the upper end of double-screw bolt (14), threaded connection has the nut that is used for pressfitting clamp plate (15) on double-screw bolt (14), the bottom of clamp plate (15) is equipped with presses seat (16), the bottom of pressing seat (16) is equipped with draw-in groove (17.

4. A target holder for rotary target maintenance according to claim 3, wherein: rubber pads (18) are arranged in the placing grooves (12) and the clamping grooves (17), and anti-skid grains are arranged on the rubber pads (18).

5. A target holder for rotary target maintenance according to claim 1, wherein: and the bottom of the transverse plate (2) is provided with a lockable travelling wheel (19).