CN213253765U - Inert gas dehydration tank group and system - Google Patents

Abstract

The utility model provides an inert gas dehydration jar group, include: the device comprises a deoxygenation tank and a dehydration tank, wherein the deoxygenation tank is connected with the dehydration tank through a pipeline; a tank group input pipeline connected with the deoxygenation tank; and the tank group output pipeline is connected with the dehydration tank. The gas to be treated is firstly deoxidized and then dehydrated, and because the deoxidizer is easy to react with oxygen to generate trace water in the process of the deoxidization, the dehydration treatment is put after the deoxidization treatment, so that the influence of the moisture of the deoxidization treatment on the gas purity is avoided; on the other hand, the dehydration process of the dehydrating agent is a physical adsorption process, so that the problem of impurity gas generated by chemical reaction dehydration is solved. The utility model also provides an inert gas dewatering system can use multiunit inert gas dewatering jar group to dewater including multiunit inert gas dewatering jar group, and the partial pressure of being convenient for guarantees the gas dehydration effect.

Description

Inert gas dehydration tank group and system

The technical field is as follows:

the utility model relates to a gaseous purification technology field especially relates to an inert gas dehydration jar group and system.

Background art:

a large amount of experimental gas (N) is usually required in experiments of high-end scientific research subjects₂Ar, He, Xe), which are expensive, and can be purified and reused with a common raw material gas in order to reduce costs. If the used high-purity inert gas cannot be recycled, not only is a huge cost paid, but also waste of the inert gas is caused. The recovered inert gas is not reused because it needs to be purified again and is not purified again.

In the gas purification process, dehydration is an indispensable process, in order to guarantee the dehydration effect, chemical agents are generally required to be added in the prior art, and the dehydration is completed by utilizing the chemical reaction between the chemical agents and water, but the chemical reaction between the chemical agents and the water often generates impurity gas, although the dehydration work is completed, the impurity gas also influences the gas purity, the impurity gas is required to be removed again in the subsequent step, the removal process is complex, and the gas purity is difficult to guarantee.

Therefore, there is a need in the art for an inert gas dehydration tank set and system to solve at least one of the above problems.

In view of this, the present invention is proposed.

The utility model has the following contents:

an object of the utility model is to provide an inert gas dehydration jar group and system to solve at least one above-mentioned technical problem.

Specifically, the utility model provides an inert gas dehydration jar group, include:

the deoxidizing tank is filled with a deoxidizing agent and is used for separating oxygen in gas;

the dehydrating tank is filled with dehydrating agent for adsorbing original moisture in gas and generated in a deoxidation process, and the deoxidation tank is connected with the dehydrating tank through a pipeline;

a tank group input pipeline connected with the deoxygenation tank;

and the tank group output pipeline is connected with the dehydration tank.

By adopting the scheme, the gas to be treated is firstly input into the deoxygenation tank through the tank group input pipeline for deoxygenation treatment, and then input into the dehydration tank for dehydration treatment, on one hand, because the deoxidizer is easy to react with oxygen to generate trace water in the deoxygenation treatment process, the dehydration treatment is put after the deoxygenation treatment, and the influence on the gas purity caused by neglecting the water in the deoxygenation treatment is avoided; on the other hand, the dehydration process of the dehydrating agent is a physical adsorption process, so that the problem of impurity gas generated by chemical reaction dehydration is solved.

Further, the deoxidizer is a carbon-palladium composite deoxidizer; the dehydrating agent is a molecular sieve.

Further, the deoxidizer is attached to the inner wall of the deoxidation tank, and the inner wall of the deoxidation tank is provided with a convex rib.

Adopt above-mentioned scheme, the deoxidier is attached to on the inner wall of deoxidation jar, the fin can increase the area of contact of input gas and deoxidation jar's inner wall, improves the deoxidation effect.

Further, a drying pipe is arranged inside the dehydration tank, the outer diameter of the drying pipe is smaller than the inner diameter of the dehydration tank, the dehydrating agent is arranged in the drying pipe, the drying pipe is provided with a vent hole penetrating from the inner side of the drying pipe to the outer side of the drying pipe, and the drying pipe is used for drying input gas.

By adopting the scheme, the inner space inside the dehydrating tank is large, the dehydrating agent cannot be adsorbed in the whole space inside the dehydrating tank, and the dehydrating agent is arranged in the drying pipe, so that the gas passes through the drying pipe, the using amount of the dehydrating agent is reduced, and the using efficiency of the dehydrating agent is improved.

Preferably, the side wall of the drying tube is provided with a plurality of vent holes, and the vent holes are uniformly distributed along the side wall of the drying tube.

Adopt above-mentioned scheme, the air vent setting of drying tube is on the lateral wall, and the air vent that sets up at the lateral wall has improved dehydration effect through prolonging gaseous dwell time in the drying tube, has solved and has avoided gaseous direct from the drying tube through the poor problem of dehydration effect.

Furthermore, a flow limiting plate is further arranged inside the dewatering tank and arranged at the gas inlet end of the drying pipe and used for limiting the speed of gas entering the drying pipe, and the flow limiting plate is connected with the inner wall of the dewatering tank.

Preferably, the flow restriction plate is provided with a flow restriction hole.

By adopting the scheme, the flow limiting plate is used for limiting the speed of gas entering the drying tube, so that the phenomenon that the gas passes through the drying tube at an excessively high speed is avoided, and the dehydration effect is reduced.

Further, the tank set input pipeline is provided with an input valve, the tank set output pipeline is provided with an output valve, and a separation valve is arranged between the deoxygenation tank and the dehydration tank.

With the scheme, the input valve and the output valve are respectively used for controlling the input and the output of the gas, and the separation valve is used for controlling the passing amount of the gas between the deoxygenation tank and the dehydration tank.

The utility model also provides an inert gas dewatering system, inert gas dewatering system includes at least a set of foretell inert gas dehydration jar group, inert gas dewatering system still includes main input pipeline and main output pipeline, jar input pipeline is connected with main input pipeline, jar output pipeline is organized and is connected with main output pipeline.

Adopt above-mentioned scheme, inert gas dewatering system can use multiunit inert gas dewatering jar group to dewater when gas flow is too big including multiunit inert gas dewatering jar group, and the partial pressure of being convenient for guarantees gas dehydration effect.

Further, the main input pipeline is provided with a main air inlet valve, and the main output pipeline is provided with a main air outlet valve.

By adopting the scheme, the main air inlet valve is used for controlling the air input of the whole system, and the input valve of the inert gas dehydration tank group is used for selecting whether to be connected to the dehydration tank group, so that the use flexibility of the system is improved.

Furthermore, the inert gas dehydration system also comprises a vacuum tube, the vacuum tube comprises a main vacuum tube and sub vacuum tubes, the number of the sub vacuum tubes corresponds to the number of the inert gas dehydration tank groups in the inert gas dehydration system, and the sub vacuum tubes are connected with the main vacuum tube.

By adopting the scheme, the vacuum tube is used for pumping air in the inert gas dehydration system before the air is introduced into the system, so that on one hand, the purity of the introduced air is prevented from being reduced by various gases in the air; on the other hand, the inert gas dehydration system after vacuum pumping is in a negative pressure state, and under the action of atmospheric pressure, gas can flow into the system quickly when being introduced.

Further, the main pumping pipe is provided with a main pumping valve, and the sub pumping pipe is provided with a sub pumping valve.

By adopting the scheme, when the whole inert gas dehydration system is vacuumized, gas is pumped out of the system through the sub-pumping valve and then the main pumping valve.

To sum up, the utility model discloses following beneficial effect has:

1. the utility model provides a pair of inert gas dehydration jar group, the gas that needs to be handled firstly inputs the deoxidation jar through jar group input pipeline, carries out deoxidation treatment, inputs the dehydration jar again and carries out dehydration treatment, on one hand, because the deoxidier reacts with oxygen easily in the in-process of deoxidation treatment and generates trace water, consequently put dehydration treatment after deoxidation treatment, avoid the moisture of deoxidation treatment to neglect and influence gas purity; on the other hand, the dehydration process of the dehydrating agent is a physical adsorption process, so that the problem of impurity gas generated by chemical reaction dehydration is solved;

2. the utility model provides a pair of inert gas dehydration jar group, the inner space of dehydration jar is great, and dehydrating agent often can not guarantee to adsorb the whole space of dehydration jar inside, dehydrating agent sets up in the drying tube, lets gas pass through the drying tube again, reduces the dehydrating agent quantity, improves dehydrating agent availability factor;

3. the utility model provides a pair of inert gas dehydration tank group, the air vent of drying tube sets up on the lateral wall, and the air vent that sets up in the lateral wall improves the dehydration effect through prolonging the dwell time of gas in the drying tube, has solved and has avoided gas to pass through the poor problem of dehydration effect directly from the drying tube;

4. the utility model provides an inert gas dehydration system, the inert gas dehydration system can include a plurality of inert gas dehydration tank sets, when the gas flow is too large, the inert gas dehydration tank sets are used for dehydration, the partial pressure is convenient, and the gas dehydration effect is ensured;

5. the utility model provides an inert gas dehydration system, the vacuum tube is used for taking out the air in the system before the inert gas dehydration system inserts gas, on one hand, various gases in the air are prevented from reducing the purity of the inserted gas; on the other hand, the inert gas dehydration system after vacuum pumping is in a negative pressure state, and under the action of atmospheric pressure, gas can flow into the system quickly when being introduced.

Description of the drawings:

in order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic view of an embodiment of an inert gas dehydration tank set according to the present invention;

FIG. 2 is a schematic view of one embodiment of the inert gas dehydration system of the present invention;

FIG. 3 is a longitudinal cross-sectional view of one embodiment of the deoxygenator tank;

FIG. 4 is a transverse cross-sectional view of one embodiment of the deoxygenator tank;

FIG. 5 is a longitudinal cross-sectional view of one embodiment of the dewatering tank;

FIG. 6 is a cross-sectional view A-A of FIG. 5;

FIG. 7 is a cross-sectional view taken along line B-B of FIG. 5;

FIG. 8 is a cross-sectional view of C-C of FIG. 5;

figure 9 is a longitudinal cross-sectional view of another embodiment of the dewatering tank.

Description of reference numerals:

through the above reference sign explanation, combine the embodiment of the utility model, can more clearly understand and explain the technical scheme of the utility model.

1. A deoxygenation tank; 11. a rib; 2. a dehydration tank; 21. a drying tube; 211. a vent hole; 22. a restrictor plate; 221. a flow restriction orifice; 23. a fixed mount; 3. a tank set input line; 31. an input valve; 4. a tank group output pipeline; 41. an output valve; 5. a partition valve; 6. a main input line; 61. a total intake valve; 7. a main output line; 71. a main gas outlet valve; 8. vacuumizing a tube; 81. a main pumping pipe; 811. a main suction valve; 82. a sub-pumping pipe; 821. a sub-pumping valve;

the specific implementation mode is as follows:

reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in this specification and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

The present invention will be described in detail below by way of examples.

As shown in fig. 1, the utility model provides an inert gas dehydration tank group, including:

the oxygen removing device comprises an oxygen removing tank 1, wherein a deoxidizer is filled in the oxygen removing tank 1 and is used for separating oxygen in gas;

the dehydration tank 2 is filled with a dehydrating agent for adsorbing original moisture in gas and generated in a deoxidation process, and the deoxidation tank 1 is connected with the dehydration tank 2 through a pipeline;

a tank group input pipeline 3, wherein the tank group input pipeline 3 is connected with the deoxygenation tank 1;

and the tank group output pipeline 4 is connected with the dehydration tank 2.

By adopting the scheme, the gas to be treated is firstly input into the deoxygenation tank 1 through the tank group input pipeline 3 for deoxygenation treatment, and then input into the dehydration tank 2 for dehydration treatment, on one hand, because the deoxidizer is easy to react with oxygen in the deoxygenation treatment process to generate trace water, the dehydration treatment is put after the deoxygenation treatment, and the moisture in the deoxygenation treatment is prevented from being neglected to influence the gas purity; on the other hand, the dehydration process of the dehydrating agent is a physical adsorption process, so that the problem of impurity gas generated by chemical reaction dehydration is solved.

In the specific implementation process, the deoxidizer usually includes a hydrogen element, and the hydrogen element is easy to combine with the oxygen element to generate water.

In the specific implementation process, the deoxidizer is a carbon-palladium composite deoxidizer; the dehydrating agent adopts a molecular sieve.

In a preferred embodiment of the present invention, the carbon-palladium composite deoxidizer is an adsorbent of type BY-402, made BY beijing beige oxygen engineering technology ltd.

In specific implementation, the molecular sieve can be a 3A type, 4A type or 13X type molecular sieve, and the like.

In a preferred embodiment of the present invention, the molecular sieve is 13X lithium type molecular sieve.

In the specific implementation process, the molecular sieve is a porous aluminosilicate crystal, also called zeolite, natural or artificially synthesized, and has a large number of cavities in the crystal structure, the cavities are interconnected by regular and uniform pore channels with the order of magnitude of molecular size, the cavities are usually occupied by adsorbed water and crystal water, and macromolecules are repelled outside the cavities, the molecular sieve has a large surface area, generally 600 plus one square meters per gram, has a large adsorption capacity, has adsorption capacity for polarized molecules and polarizable molecules, water level is strong to polarize the molecules, and the diameter of water molecules is smaller than the pore diameter of the molecular sieve, so that the molecular sieve is easy to adsorb.

As shown in fig. 1, 3 and 4, in the implementation process, the deoxidizer is attached to the inner wall of the deoxygenation tank 1, and the inner wall of the deoxygenation tank 1 is provided with a convex rib 11.

Adopt above-mentioned scheme, the deoxidier is attached to on the inner wall of deoxidation jar 1, the contact area of input gas and deoxidation jar 1's inner wall can be increased to fin 11, improves the deoxidation effect.

In a specific implementation process, the convex ribs 11 can be arranged on the inner wall of the deoxidation tank 1 in the transverse direction, the longitudinal direction or the oblique direction.

In a preferred embodiment of the present invention, the rib 11 is longitudinally disposed on the inner wall of the deoxidation tank 1, and the rib 11 extends from the upper edge to the lower edge of the inner wall of the deoxidation tank 1.

In the specific implementation process, the convex ribs 11 are arranged in a plurality of strips, and the convex ribs 11 are uniformly distributed along the inner wall of the deoxidation tank 1.

As shown in fig. 1 and 5, in a specific implementation process, a drying pipe 21 is disposed inside the dehydration tank 2, an outer diameter of the drying pipe 21 is smaller than an inner diameter of the dehydration tank 2, the dehydrating agent is disposed inside the drying pipe 21, the drying pipe 21 is provided with a vent hole 211 penetrating from an inner side to an outer side of the drying pipe 21, and the drying pipe 21 is used for drying the input gas.

Adopt above-mentioned scheme, 2 inside inner spaces of dehydration jar are great, and the dehydrating agent often can not guarantee to adsorb the whole space of 2 inside dehydration jars, the dehydrating agent sets up in drying tube 21, lets gas pass through drying tube 21 again, by air vent 211 discharge drying tube 21, reduces the dehydrating agent quantity, improves dehydrating agent availability factor.

In a preferred embodiment of the present invention, the cross section of the dewatering tank 2 is circular, the cross section of the drying pipe 21 is also circular, and the axis of the dewatering tank 2 and the axis of the drying pipe 21 are located on the same straight line.

As shown in fig. 5 and 7, in a specific implementation process, a plurality of vent holes 211 are provided on a side wall of the drying tube 21, and the vent holes 211 are uniformly arranged along the side wall of the drying tube 21.

Adopt above-mentioned scheme, the vent hole 211 of drying tube 21 sets up on the lateral wall, and the setting has improved dehydration effect through the dwell time of gas in drying tube 21 that has prolonged at the vent hole 211 of lateral wall, has solved and has avoided gas direct from the drying tube 21 in through the poor problem of dehydration effect.

In the specific implementation process, an opening is arranged at the gas inlet end of the drying tube 21, and the gas outlet end is the vent hole 211 on the side wall of the drying tube 21.

As shown in fig. 9, in an alternative embodiment of the present invention, the opening of the drying pipe 21 is connected with the gas inlet of the dewatering tank 2.

As shown in fig. 5 and 6, in the specific implementation process, a flow restriction plate 22 is further disposed inside the dewatering tank 2, the flow restriction plate 22 is disposed at the gas inlet end of the drying pipe 21 and is used for restricting the speed of the gas entering the drying pipe 21, and the flow restriction plate 22 is connected to the inner wall of the dewatering tank 2.

In the specific implementation process, the flow restriction plate 22 is provided with a flow restriction hole 221, the gas entering the drying tube 21 enters the drying tube 21 through the flow restriction hole 221, and is dehydrated through the dehydrating agent in the drying tube 21, and then is discharged out of the drying tube 21 through the vent hole 211 in the side wall of the drying tube 21.

In practice, the gas inflow may be limited by varying the size and number of flow-restricting orifices 221.

By adopting the scheme, the flow limiting plate 22 is used for limiting the speed of the gas entering the drying pipe 21, so that the phenomenon that the gas passes through the drying pipe 21 too fast is avoided, and the dehydration effect is reduced.

As shown in fig. 5 and 8, in the specific implementation process, a fixing frame 23 is further disposed inside the dewatering tank 2, and the fixing frame 23 is connected with the bottom of the drying pipe 21.

In the specific implementation process, the fixing frame 23 is also connected with the inner wall of the dewatering tank 2.

By adopting the above scheme, the stability of the drying tube 21 cannot be ensured by the single-point fixing of the current-limiting plate 22, and the fixing frame 23 and the current-limiting plate 22 simultaneously fix the drying tube 21, thereby improving the stability of the drying tube 21.

As shown in fig. 1, in the specific implementation process, the tank group input pipeline 3 is provided with an input valve 31, the tank group output pipeline 4 is provided with an output valve 41, and a separation valve 5 is arranged between the deoxygenation tank 1 and the dehydration tank 2.

With the above-described arrangement, the input and output valves are used to control the input and output of gas, respectively, and the partition valve 5 is used to control the throughput of gas between the deoxygenation tank 1 and the dehydration tank 2.

As shown in fig. 1 and 2, the utility model also provides an inert gas dewatering system, inert gas dewatering system includes at least a set of foretell inert gas dehydration jar group, inert gas dewatering system still includes main input pipeline 6 and main output pipeline 7, jar group input pipeline 3 is connected with main input pipeline 6, jar group output pipeline 4 is connected with main output pipeline 7.

Adopt above-mentioned scheme, inert gas dewatering system can use multiunit inert gas dewatering jar group to dewater when gas flow is too big including multiunit inert gas dewatering jar group, and the partial pressure of being convenient for guarantees gas dehydration effect.

In a specific implementation, the main input line 6 is provided with a main inlet valve 61, and the main output line 7 is provided with a main outlet valve 71.

By adopting the scheme, the main air inlet valve 61 is used for controlling the air input of the whole system, and the input valve 31 of the inert gas dehydration tank group is used for selecting whether to be connected to the dehydration tank 2 group, so that the use flexibility of the system is improved.

In a specific implementation process, the inert gas dehydration system further comprises a vacuum tube 8, the vacuum tube 8 comprises a main vacuum tube 81 and sub vacuum tubes 82, the number of the sub vacuum tubes 82 corresponds to the number of inert gas dehydration tank groups in the inert gas dehydration system, and the sub vacuum tubes 82 are connected with the main vacuum tube 81.

By adopting the scheme, the vacuum-pumping pipe 8 is used for pumping air in the inert gas dehydration system before the air is introduced into the system, so that on one hand, the purity of the introduced air is prevented from being reduced by various gases in the air; on the other hand, the inert gas dehydration system after vacuum pumping is in a negative pressure state, and under the action of atmospheric pressure, gas can flow into the system quickly when being introduced.

In the specific implementation, the main pumping pipe 81 is provided with a main pumping valve 811, and the sub pumping pipe 82 is provided with a sub pumping valve 821.

With the above scheme, when the whole inert gas dehydration system is vacuumized, the gas is pumped out of the system through the sub-pumping valve 821 and then through the main pumping valve 811.

In a specific implementation, the input valve 31, the output valve 41, the partition valve 5, the total intake valve 61, the total exhaust valve 71, the total suction valve 811 and the sub suction valve 821 may be manual valves or electromagnetic valves.

In a preferred embodiment of the present invention, the input valve 31, the output valve 41, the partition valve 5, the main intake valve 61, the main exhaust valve 71, the main suction valve 811 and the sub suction valve 821 are all solenoid valves.

In a specific implementation, the input valve 31, the output valve 41, the partition valve 5, the total intake valve 61, the total exhaust valve 71, the total suction valve 811 and the sub suction valve 821 may be one-way valves.

In a specific implementation process, the inert gas dehydration system further comprises a moisture detector, and the moisture detector receives the gas output by the main output pipeline 7 and is used for monitoring the moisture content in the gas.

In a specific implementation process, the moisture detector may be an infrared moisture meter or an on-line solid moisture meter.

It should be noted that, for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall into the protection scope of the claims of the present invention.

Claims (10)

1. An inert gas dehydration tank stack comprising:

the oxygen removal tank (1) is filled with a deoxidizer and is used for separating oxygen in gas;

the dehydration tank (2) is filled with a dehydrating agent for adsorbing the original moisture in the gas and generated in the deoxidation process, and the deoxygenation tank (1) is connected with the dehydration tank (2) through a pipeline;

the tank group input pipeline (3), the tank group input pipeline (3) is connected with the deoxygenating tank (1);

the tank set output pipeline (4), the tank set output pipeline (4) with the dehydration tank (2) is connected.

2. The set of inert gas dehydration tanks of claim 1 characterized in that: the deoxidizer is attached to the inner wall of the deoxidation tank (1), and the inner wall of the deoxidation tank (1) is provided with a convex rib (11).

3. The set of inert gas dehydration tanks of claim 2 characterized in that: the inside drying tube (21) that is provided with of dehydration jar (2), drying tube (21) external diameter is less than dehydration jar (2) internal diameter, the dehydrating agent sets up in drying tube (21), drying tube (21) are provided with and run through air vent (211) to the outside by drying tube (21) inboard, drying tube (21) are used for carrying out the drying to the gas of input.

4. The set of inert gas dehydration tanks of claim 3 characterized in that: the plurality of the vent holes (211) are formed in the side wall of the drying tube (21), and the vent holes (211) are uniformly distributed along the side wall of the drying tube (21).

5. The set of inert gas dehydration tanks of claim 4 characterized in that: the inside of the dehydration tank (2) is also provided with a flow limiting plate (22), the flow limiting plate (22) is arranged at the gas inlet end of the drying pipe (21) and used for limiting the speed of gas entering the drying pipe (21), and the flow limiting plate (22) is connected with the inner wall of the dehydration tank (2).

6. The inert gas dehydration tank set according to any of claims 1 to 5, characterized in that: tank group input pipeline (3) are provided with input valve (31), tank group output pipeline (4) are provided with output valve (41), be provided with between deoxygenation jar (1) and dewatering tank (2) and separate valve (5).

7. An inert gas dehydration system characterized by: the inert gas dehydration system comprises at least one set of inert gas dehydration tanks according to any of claims 1 to 6, further comprising a main input line (6) and a main output line (7), the tank set input line (3) being connected to the main input line (6), the tank set output line (4) being connected to the main output line (7).

8. The inert gas dehydration system according to claim 7, characterized in that: the main input pipeline (6) is provided with a main air inlet valve (61), and the main output pipeline (7) is provided with a main air outlet valve (71).

9. The inert gas dehydration system according to claim 8, characterized in that: the inert gas dehydration system further comprises a vacuum tube (8), the vacuum tube (8) comprises a main vacuum tube (81) and sub vacuum tubes (82), the number of the sub vacuum tubes (82) corresponds to the number of inert gas dehydration tank groups in the inert gas dehydration system, and the sub vacuum tubes (82) are connected with the main vacuum tube (81).

10. The inert gas dehydration system according to claim 9, characterized in that: the main pumping pipe (81) is provided with a main pumping valve (811), and the sub pumping pipe (82) is provided with a sub pumping valve (821).

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