CN213236853U

CN213236853U - Automatic levelness adjusting device of plasma chemical vapor deposition equipment

Info

Publication number: CN213236853U
Application number: CN202022055703.8U
Authority: CN
Inventors: 黄中山; 王虎斌
Original assignee: SGS Ningbo Semiconductor Technology Co Ltd
Current assignee: SGS Ningbo Semiconductor Technology Co Ltd
Priority date: 2020-09-18
Filing date: 2020-09-18
Publication date: 2021-05-18
Anticipated expiration: 2030-09-18

Abstract

The utility model discloses an automatic levelness adjusting device of plasma chemical vapor deposition equipment, which comprises a damping box, a top seat, an S7-300PLC controller, a mounting plate and a fixing screw rod; four angle fixed mounting of shock attenuation box bottom have supporting mechanism, the shock attenuation box bottom is close to supporting mechanism's position department fixed mounting has the universal wheel, the top of shock attenuation box is equipped with the footstock. The utility model discloses set up clamping screw, concave type mount, spring and roof, after equipment placed the mounting panel on, can twist and move clamping screw, then clamping screw drives concave type mount and removes, fixes two sets of concave type mount cards in the both sides of equipment, then compression spring, the roof top that makes the spring front end is fixed at the front and back side of equipment to can be with equipment fixed mounting on the mounting panel, the device that makes through this kind of fixed mode can install the equipment of different grade type size, performance is better.

Description

Automatic levelness adjusting device of plasma chemical vapor deposition equipment

Technical Field

The utility model relates to a boats and ships technical field specifically is an automatic regulating apparatus of plasma chemical vapor deposition equipment levelness.

Background

Plasma chemical vapor deposition (plasma chemical vapor deposition) refers to a technology of activating a reaction gas by plasma to promote a chemical reaction on a substrate surface or a near-surface space to generate a solid film, and is divided into radio frequency plasma, direct current plasma, microwave plasma CVD and the like according to a method for generating the plasma.

The existing automatic adjusting device for the levelness of the plasma chemical vapor deposition equipment has the defects that:

1. the automatic adjusting device for the levelness of the existing plasma chemical vapor deposition equipment lacks the function of damping and buffering, and easily damages some electric appliance parts inside the plasma chemical vapor deposition equipment when being influenced by external vibration.

2. The existing automatic adjusting device for the levelness of the plasma chemical vapor deposition equipment is generally used for equipment of a specific model and cannot meet the requirement of installing equipment of different models, so that the existing problem is solved by providing the automatic adjusting device for the levelness of the plasma chemical vapor deposition equipment.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an automatic regulating apparatus of plasma chemical vapor deposition equipment levelness to solve the problem that provides among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: an automatic levelness adjusting device of plasma chemical vapor deposition equipment comprises a damping box, a top seat, an S7-300PLC controller, a mounting plate and a fixing screw rod; four corners of the bottom of the damping box are fixedly provided with supporting mechanisms, universal wheels are fixedly arranged at the positions, close to the supporting mechanisms, of the bottom of the damping box, the top of the shock absorption box is provided with a top seat, the central position of the front side of the top seat is fixedly provided with an S7-300PLC controller, the top of the top seat is fixedly provided with a mounting plate through an electric push rod, the electric push rod is electrically connected with an S7-300PLC controller through a lead, FLS-CH10 horizontal sensors are fixedly arranged at four corners of the bottom of the mounting plate, the FLS-CH10 level sensor is electrically connected with the S7-300PLC controller through a lead, the mounting panel is characterized in that welding plates are fixedly mounted on two sides of the top of the mounting panel, a concave fixing frame is fixedly mounted on one side of each welding plate through a fixing screw, and top plates are fixedly mounted at two ends of the interior of the concave fixing frame through springs.

Preferably, the shock pad has been placed to the inside of shock attenuation box, four angles at shock attenuation box top are equipped with the through-hole.

Preferably, four angles of footstock bottom fixed mounting have the inserted bar, and fixed mounting has the clamp plate between the bottom of inserted bar, and the clamp plate is located the inside of shock attenuation box.

Preferably, the outer side end of the fixing screw rod is fixedly provided with a screwing block, and the inner side end of the fixing screw rod is provided with a bearing seat.

Preferably, a protective pad is adhered to the front side of the top plate, and a connecting rod is fixedly mounted on one side of the top plate.

Preferably, a sliding groove is formed in one side of the inner portion of the concave fixing frame, a sliding block is slidably mounted in the sliding groove, and the sliding block is fixedly connected with the connecting rod.

Preferably, the supporting mechanism comprises a solenoid, a supporting screw rod and a base, the supporting screw rod is fixedly installed at the bottom end of the solenoid, and the base is fixedly installed at the bottom end of the supporting screw rod.

Preferably, the top of the front face of the S7-300PLC controller is provided with a display screen, the bottom of the front face of the S7-300PLC controller is provided with a control key, and one side of the S7-300PLC controller is connected with a plug through a wire.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses set up shock attenuation box and footstock, when the external world vibrations appear, on the vibration transmission arrived the device, shock attenuation box and footstock on the device can cushion vibrations, avoided vibrations to transmit on the equipment to cause the damage to some electrical components of equipment inside.

2. The utility model discloses set up clamping screw, concave type mount, spring and roof, after equipment placed the mounting panel on, can twist and move clamping screw, then clamping screw drives concave type mount and removes, fixes two sets of concave type mount cards in the both sides of equipment, then compression spring, the roof top that makes the spring front end is fixed at the front and back side of equipment to can be with equipment fixed mounting on the mounting panel, the device that makes through this kind of fixed mode can install the equipment of different grade type size, performance is better.

Drawings

Fig. 1 is a front view of the present invention;

fig. 2 is a top view of the present invention;

fig. 3 is a schematic structural view of the shock-absorbing box and the top seat in fig. 1 according to the present invention;

fig. 4 is an enlarged schematic view of the present invention at a in fig. 2;

fig. 5 is an enlarged schematic view of the supporting mechanism in fig. 1 according to the present invention.

In the figure: 1. a shock-absorbing box; 101. a shock pad; 102. a through hole; 2. a support mechanism; 201. a solenoid; 202. a support screw; 203. a base; 3. a universal wheel; 4. a top seat; 401. inserting a rod; 402. pressing a plate; 5. s7-300PLC controller; 501. a display screen; 502. a control key; 503. a plug; 6. an electric push rod; 7. an FLS-CH10 level sensor; 8. mounting a plate; 9. welding the plate; 10. fixing the screw rod; 1001. a bearing seat; 1002. twisting the block; 11. a concave fixing frame; 1101. a chute; 1102. a slider; 12. a spring; 13. a top plate; 1301. a protective pad; 1302. a connecting rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-5, the present invention provides an embodiment: an automatic levelness adjusting device of plasma chemical vapor deposition equipment comprises a damping box 1, a top seat 4, an S7-300PLC controller 5, a mounting plate 8 and a fixing screw 10; four corners of the bottom of the shock absorption box 1 are welded with the supporting mechanisms 2, universal wheels 3 are welded at positions, close to the supporting mechanisms 2, of the bottom of the shock absorption box 1, the universal wheels 3 are convenient for the device to move, then the device can be fixed through the supporting mechanisms 2, a top seat 4 is arranged at the top of the shock absorption box 1, when external shock is transmitted to the device, the shock absorption box 1 can effectively buffer the shock in cooperation with the top seat 4, the damage to equipment installed on the device caused by the excessively severe shock is avoided, an S7-300PLC controller 5 is fixedly installed at the central position of the front side of the top seat 4 through bolts, the S7-300PLC controller 5 is used for setting a horizontal value, a mounting plate 8 is fixedly installed at the top of the top seat 4 through an electric push rod 6, the mounting plate 8 is used for installing the equipment, the electric push rod 6 is electrically connected with the S7-300PLC controller 5, FLS-CH10 horizontal sensors 7 are fixedly installed at four corners of the bottom of the mounting plate 8 through bolts, the FLS-CH10 horizontal sensors 7 are electrically connected with the S7-300PLC controller 5 through leads, four groups of FLS-CH10 horizontal sensors 7 measure the horizontal values of the four corners of the mounting plate 8, then data are transmitted to the S7-300PLC controller 5, when the detection values of the four groups of FLS-CH10 horizontal sensors 7 do not accord with the set values, the S7-300PLC controller 5 automatically controls the electric push rods 6 corresponding to the FLS-CH10 horizontal sensors 7 to lift until the detection values of the four groups of FLS-CH10 horizontal sensors 7 accord with the set values, the S7-300PLC controller 5 controls the electric push rods 6 to stop working, at the moment, the mounting plate 8 is in a horizontal state, welding plates 9 are welded at two sides of the top of the mounting plate 8, one side of welded plate 9 has concave type mount 11 through fixing screw 10 fixed mounting, fixing screw 10 is all installed at welded plate 9 both ends department, there is roof 13 at the inside both ends of concave type mount 11 through spring 12 welding, after the equipment was placed on mounting panel 8, twist fixing screw 10, fixing screw 10 drives concave type mount 11 and removes, make two sets of concave type mounts 11 cards fix equipment in the both sides of equipment, then under the effect of spring 12, make roof 13 firm top fix equipment in the front and back side of equipment, through this kind of fixed mode, the device that makes can install the equipment of any model size.

Further, the shock pad 101 has been placed to the inside of shock attenuation box 1, and the effect of buffering can be played to vibrations to shock pad 101, and four angles at shock attenuation box 1 top are equipped with through-hole 102, and through-hole 102 is convenient for inserted bar 401 to pass through and extend to the inside of shock attenuation box 1.

Further, four angles welding of footstock 4 bottom have inserted bar 401, and the welding has clamp plate 402 between inserted bar 401's the bottom, and clamp plate 402 is located shock attenuation box 1's inside, and through buffering in vibrations, remaining effort passes through clamp plate 402 and transmits footstock 4, and footstock 4 has certain range of movement, and the clamp plate 402 all can contact with shock pad 101 once removing to can be quick offset remaining effort.

Further, the outer end of the fixing screw 10 is welded with a screwing block 1002, the screwing block 1002 is convenient for a person to screw the fixing screw 10 by hand, a bearing seat 1001 is arranged at the inner end of the fixing screw 10, and the fixing screw 10 is connected with the concave fixing frame 11 through the bearing seat 1001, so that the concave fixing frame 11 can be driven to move back and forth in the process of screwing the fixing screw 10 by the person.

Further, the protection pad 1301 is pasted to the front side of roof 13, and the protection pad 1301 plays the protection effect, avoids roof 13 directly to push up and cause wearing and tearing to equipment on equipment, and one side fixed mounting of roof 13 has connecting rod 1302, and roof 13 passes through connecting rod 1302 and is connected with slider 1102.

Further, one side of the inside of concave type mount 11 is equipped with spout 1101, and the inside slidable mounting of spout 1101 has slider 1102, and slider 1102 and connecting rod 1302 fixed connection, in the in-process that roof 13 removed, slider 1102 slides in spout 1101 along with roof 13 together, plays limiting displacement to roof 13, avoids roof 13 to appear the skew when removing.

Further, the supporting mechanism 2 comprises a screw tube 201, a supporting screw 202 and a base 203, the supporting screw 202 is fixedly installed at the bottom end of the screw tube 201 through a thread structure, the base 203 is welded at the bottom end of the supporting screw 202, after the device is moved to a proper position, the supporting screw 202 can be screwed, and then the base 203 at the bottom end of the supporting screw 202 is supported on the ground, so that the device is fixedly supported.

Further, the display screen 501 is arranged at the top of the front face of the S7-300PLC controller 5, the display screen 501 is used for displaying the set level and the level detected by the FLS-CH10 level sensor 7, the control key 502 is arranged at the bottom of the front face of the S7-300PLC controller 5, the control key 502 is used for personnel to control the S7-300PLC controller 5, one side of the S7-300PLC controller 5 is connected with the plug 503 through a wire, and the S7-300PLC controller 5 is connected with a power supply through the plug 503.

The working principle is as follows: when in use, the device is moved to a proper position according to use requirements, then the supporting screw 202 is screwed, the base 203 at the bottom end of the supporting screw 202 is supported on the ground, so that the device is fixedly supported, then equipment is placed on the mounting plate 8, the fixing screw 10 is screwed, the fixing screw 10 drives the concave fixing frames 11 to move, two groups of concave fixing frames 11 are clamped at two sides of the equipment to fix the equipment, then the top plate 13 is firmly propped against the front side and the rear side of the equipment to fix the equipment under the action of the spring 12, the device can be used for mounting the equipment with any type and size by the fixing mode, then the level value is set by the control key 502, four groups of FLS-CH10 level sensors 7 measure the level values of four corners of the mounting plate 8, and then data are transmitted to the S7-300PLC controller 5, when the detection values of the four groups of FLS-CH10 horizontal sensors 7 do not accord with the set value, the S7-300PLC controller 5 automatically controls the electric push rods 6 corresponding to the FLS-CH10 horizontal sensors 7 to lift until the detection values of the four groups of FLS-CH10 horizontal sensors 7 accord with the set value, the S7-300PLC controller 5 controls the electric push rods 6 to stop working, and at the moment, the mounting plate 8 is in a horizontal state.

The details of the present invention are well known to those skilled in the art.

Finally, it is to be noted that: the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting, and although the present invention has been described in detail with reference to the examples, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified and replaced with equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should be covered by the scope of the claims of the present invention.

Claims

1. The utility model provides an automatic regulating apparatus of plasma chemical vapor deposition equipment levelness which characterized in that: comprises a damping box (1), a top seat (4), an S7-300PLC controller (5), a mounting plate (8) and a fixing screw (10); the damping box is characterized in that supporting mechanisms (2) are fixedly mounted at four corners of the bottom of the damping box (1), universal wheels (3) are fixedly mounted at positions, close to the supporting mechanisms (2), of the bottom of the damping box (1), a top seat (4) is arranged at the top of the damping box (1), an S7-300PLC controller (5) is fixedly mounted at the central position of the front side of the top seat (4), a mounting plate (8) is fixedly mounted at the top of the top seat (4) through an electric push rod (6), the electric push rod (6) is electrically connected with the S7-300PLC controller (5) through a lead, FLS-CH10 horizontal sensors (7) are fixedly mounted at four corners of the bottom of the mounting plate (8), the FLS-CH10 horizontal sensors (7) are electrically connected with the S7-300PLC controller (5) through leads, welding plates (9) are fixedly mounted at two sides of the top of the mounting plate (8), one side of the welding plate (9) is fixedly provided with a concave fixing frame (11) through a fixing screw rod (10), and two ends of the inner part of the concave fixing frame (11) are fixedly provided with a top plate (13) through springs (12).

2. The automatic levelness adjusting device for plasma chemical vapor deposition equipment according to claim 1, wherein: shock attenuation pad (101) have been placed to the inside of shock attenuation box (1), four angles at shock attenuation box (1) top are equipped with through-hole (102).

3. The automatic levelness adjusting device for plasma chemical vapor deposition equipment according to claim 1, wherein: four angles of footstock (4) bottom fixed mounting have inserted bar (401), and fixed mounting has clamp plate (402) between the bottom of inserted bar (401), and clamp plate (402) are located the inside of shock attenuation box (1).

4. The automatic levelness adjusting device for plasma chemical vapor deposition equipment according to claim 1, wherein: the outer side end of the fixing screw rod (10) is fixedly provided with a screwing block (1002), and the inner side end of the fixing screw rod (10) is provided with a bearing seat (1001).

5. The automatic levelness adjusting device for plasma chemical vapor deposition equipment according to claim 1, wherein: a protective pad (1301) is pasted on the front side of the top plate (13), and a connecting rod (1302) is fixedly mounted on one side of the top plate (13).

6. The automatic levelness adjusting device for plasma chemical vapor deposition equipment according to claim 1, wherein: one side of the interior of the concave fixing frame (11) is provided with a sliding groove (1101), a sliding block (1102) is slidably mounted in the sliding groove (1101), and the sliding block (1102) is fixedly connected with a connecting rod (1302).

7. The automatic levelness adjusting device for plasma chemical vapor deposition equipment according to claim 1, wherein: the supporting mechanism (2) comprises a solenoid (201), a supporting screw rod (202) and a base (203), the supporting screw rod (202) is fixedly installed at the bottom end of the solenoid (201), and the base (203) is fixedly installed at the bottom end of the supporting screw rod (202).

8. The automatic levelness adjusting device for plasma chemical vapor deposition equipment according to claim 1, wherein: the top of the front face of the S7-300PLC controller (5) is provided with a display screen (501), the bottom of the front face of the S7-300PLC controller (5) is provided with a control key (502), and one side of the S7-300PLC controller (5) is connected with a plug (503) through a wire.