CN213210081U

CN213210081U - A calibration device for hydrogen sensor

Info

Publication number: CN213210081U
Application number: CN202022482313.9U
Authority: CN
Inventors: 孙飞
Original assignee: Suzhou Shangqin Optoelectronic Technology Co ltd
Current assignee: Suzhou Shangqin Optoelectronic Technology Co ltd
Priority date: 2020-10-30
Filing date: 2020-10-30
Publication date: 2021-05-14
Anticipated expiration: 2030-10-30

Abstract

The utility model discloses a calibration device for hydrogen sensor, including the testboard, set up DC power supply on the testboard, just DC power supply's positive pole and negative pole all set up on the testboard, and still set up the test tube on the testboard, the test tube is T type setting, just including three through-hole on the test tube, just through-hole department sets up rapid fixture respectively, and is three hydrogen sensor, intake pipe and outlet duct are connected respectively through rapid fixture to the through-hole, just the diameter of test tube is 40 millimeters, just still be provided with the air supply on the testboard, the air supply includes hydrogen concentration 2% nitrogen-hydrogen mixture gas pitcher and nitrogen gas jar. Through this calibration device promptly, can carry out the letting in of hydrogen and nitrogen gas, the person of facilitating the use utilizes this equipment to carry out the demarcation of hydrogen sensor, has saved the time, has also practiced thrift the cost.

Description

A calibration device for hydrogen sensor

Technical Field

The utility model relates to a calibration equipment field especially relates to a compound calibration device that is used for hydrogen sensor.

Background

MOCVD (metal organic source chemical vapor deposition equipment) is a technique for performing compound deposition using a vapor source in a high-temperature chamber. The method is characterized in that a substrate (such as sapphire, silicon wafers and the like) is placed on a graphite plate, and III/V group gas of a periodic table of chemical elements is introduced at a certain temperature and under a certain pressure, so that the III/V group gas can synthesize a compound on the surface of the substrate, and the compound can deposit along a substrate crystalline phase (commonly called epitaxial growth). In order to monitor whether hydrogen leaks from a reaction cavity, the equipment adopts a hydrogen sensor produced by American IST to carry out real-time monitoring, and a detector can output a 4-20mA signal, wherein the signal corresponds to the detected hydrogen concentration of 0-4%.

The IST manufacturer recommends that the hydrogen sensor needs to be calibrated every 3 months, however, there is a certain difficulty in completing the calibration: the IST factory is in the United states, and has no branch company in China, so the sensor needs to be sent back to the United states, the round-trip period is long, the production is seriously delayed, and the IST charges a very expensive service fee for calibration; if the calibration is not carried out for more than 3 months, the zero point of the sensor can drift, when the zero drift current exceeds 8mA, the equipment can give an alarm, if the alarm occurs during production, the equipment can be shut down, and the product can be scrapped.

Therefore, the present invention is directed to a calibration apparatus for a hydrogen sensor, which solves the above problems.

SUMMERY OF THE UTILITY MODEL

In order to overcome the above disadvantages, an object of the present invention is to provide a calibration device for a hydrogen sensor.

In order to achieve the above purpose, the utility model discloses a technical scheme is: the utility model provides a calibration device for hydrogen sensor, includes the testboard, set up DC power supply on the testboard, just DC power supply's anodal and negative pole all set up on the testboard, and still set up the test tube on the testboard, the test tube is the setting of T type, just including three through-hole on the test tube, just through-hole department sets up rapid fixture respectively, and three hydrogen sensor, intake pipe and outlet duct are connected respectively through rapid fixture to the through-hole, just the diameter of test tube is 40 millimeters, just still be provided with the air supply on the testboard, the air supply includes 2% hydrogen concentration's nitrogen-hydrogen mixture gas pitcher and nitrogen gas jar, just 2% hydrogen concentration's nitrogen-hydrogen mixture gas pitcher and nitrogen gas jar can fill gas into in the test tube through the intake pipe.

Preferably, the number of the air inlet pipes is two, and the two air inlet pipes are respectively connected with a nitrogen-hydrogen mixed gas tank with the hydrogen concentration of 2% and a nitrogen tank. The nitrogen-hydrogen mixed gas with 2 percent of hydrogen concentration and the nitrogen are respectively and independently introduced, the nitrogen is a purging gas, and the nitrogen-hydrogen mixed gas with 2 percent of hydrogen concentration is a calibration gas.

Preferably, the quick clamp is a clamp. The similar removable connection that realizes the test tube through staple bolt, larynx hoop etc. certainly main detachable part is the hydrogen sensor, through the mode of quick detach, reaches the purpose of the demarcation hydrogen sensor of continuity.

Preferably, a sealing ring is further arranged in the quick clamp, and the sealing ring is located on the edge of the through hole. The sealing ring is arranged at the position of the through hole and the position of the to-be-connected piece, so that the connection tightness is ensured, and particularly, the sealing performance is particularly important because gas is mainly introduced.

Preferably, the edge of the through hole is provided with a convex ring, an inclined surface is arranged on the outer side of the convex ring, and the inclined direction of the inclined surface is inclined from outside to inside. Referring to the attached drawings, the inclined surface is matched with the rapid clamp to ensure stable clamping and prevent the internal gas leakage.

Preferably, the hydrogen sensor, the air inlet pipe and the air outlet pipe are respectively provided with a convex ring. And the convex ring is also provided with an inclined plane, namely, the inclined plane is matched with the convex ring on the through hole, so that stable connection is realized.

The utility model relates to a calibration device for hydrogen sensor's beneficial effect is, through this calibration device promptly, can carry out letting in of hydrogen and nitrogen gas, and the person of facilitating the use utilizes this equipment to carry out the demarcation of hydrogen sensor, has saved the time, has also practiced thrift the cost.

Drawings

Fig. 1 is a schematic structural diagram of a test tube of a calibration device for a hydrogen sensor.

Fig. 2 is an exploded view of the connecting portion of the test tube and the hydrogen sensor.

In the figure:

1-test tube, 2-quick clamp, 3-hydrogen sensor, 4-air inlet tube, 5-air outlet tube, 6-convex ring and 7-sealing ring.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.

Referring to fig. 1-2, a calibration device for hydrogen sensor 3 in this embodiment, including the testboard, set up DC power supply on the testboard, and DC power supply's positive pole and negative pole all set up on the testboard, and still set up test tube 1 on the testboard, test tube 1 is the setting of T type, and include three through-hole on the test tube 1, and through-hole department sets up rapid jig 2 respectively, and hydrogen sensor 3 is connected respectively through rapid jig 2 to three through-hole, intake pipe 4 and outlet duct 5, and the diameter of test tube 1 is 40 millimeters, and still be provided with the air supply on the testboard, the air supply includes the mixed gas pitcher of hydrogen concentration 2% and nitrogen gas pitcher, and hydrogen gas pitcher and nitrogen gas pitcher can be through intake pipe 4 with gas filling in the test tube 1.

The number of the air inlet pipes 4 is two, and the two air inlet pipes 4 are respectively connected with the hydrogen tank and the nitrogen tank. Namely facilitating the subsequent introduction of hydrogen and nitrogen respectively.

The quick clamp 2 is a clamp. The similar removable connection that realizes test tube 1 through staple bolt, larynx hoop etc. certainly main removable part is hydrogen sensor 3, through the mode of quick detach, reaches the purpose of the demarcation hydrogen sensor 3 of continuity.

A sealing ring 7 is further arranged in the rapid clamp 2, and the sealing ring 7 is located on the edge of the through hole. The sealing ring 7 is arranged at the position of the through hole and the position of the to-be-connected piece, so that the connection tightness is ensured, particularly, gas is mainly introduced, and the sealing performance is particularly important.

The edge of through-hole sets up to bulge loop 6, and the outside of bulge loop 6 sets up the inclined plane, and the incline direction of inclined plane is from outside to inside slope. Referring to the drawings, the inclined surface is matched with the rapid clamp 2 to ensure stable clamping and prevent the internal gas leakage.

The hydrogen sensor 3, the air inlet pipe 4 and the air outlet pipe 5 are also respectively provided with a convex ring 6. Namely, the convex ring 6 on the through hole is matched to realize stable connection.

The calibration device for the hydrogen sensor 3 has the advantages that the hydrogen and nitrogen can be introduced through the calibration device, so that a user can conveniently calibrate the hydrogen sensor 3 by using the device, the time is saved, and the cost is also saved.

In fig. 1 and 2, a partial schematic view of a connection portion of a hydrogen sensor 3 with a test tube 1 is shown at reference numeral 3.

Firstly, through circuit analysis, the functions of internal circuit elements of the hydrogen sensor 3 of the IST are determined, and the linear change relationship between the signal current 4-20mA of the hydrogen sensor 3 and the concentration of 0-4% hydrogen is found, and the linear relationship between the signal current and the voltage of a test reserved hole of an output signal is also found. See table below.

Concentration of hydrogen	Output signal (mA)	Test terminal voltage (V)
			0％	4	0.1
1％	8	0.2
			2％	12	0.3
3％	16	0.4
			4％	20	0.5

Therefore, in order to fix the hydrogen sensor 3 and introduce the test gas, a simple device is designed, which is composed of a three-way stainless steel tube of KF40, the IST hydrogen detector is fixed on the upper part of the three-way, the left end is connected with the test gas by the gas inlet tube 4, and the gas outlet tube 5 on the right end is a test gas outlet.

The use method of the device comprises the following steps:

the following materials are prepared for completing calibration:

nitrogen, calibration zero, 2% hydrogen and nitrogen mixed gas, linear calibration, a 24V direct current power supply and a universal meter.

The implementation steps are as follows:

firstly, fixing a hydrogen detector on a test board, and connecting the hydrogen detector with a through hole at the upper end of a test tube 1 through a quick clamp 2;

secondly, a 24V direct-current power supply is used for supplying power to the hydrogen sensor 3 for 8-10 hours, and an internal electric control element is ensured to be in a stable state;

thirdly, continuously introducing nitrogen into the gas inlet pipe 4 for about 20min to ensure that the environment where the probe of the detector is located has no hydrogen interference, wherein the current measured by the signal output port by using a universal meter is 4mA, the voltage of the signal output test port is 0.1V, and if the measured numerical value has deviation, the numerical value can be adjusted by using a zero regulator;

fourthly, 2% of hydrogen and nitrogen mixed gas is switched and introduced for about 60s, the current of a signal output port is 12mA, the voltage of a signal output test port is 0.3V, and if the measured numerical value has deviation, the numerical value can be adjusted through a linear gain adjuster (a component inside the hydrogen sensor 3);

fifthly, switching to introduce nitrogen, purging for about 2min, wherein the current of the signal output port is 4mA, and the voltage of the signal output test port is 0.1V;

sixthly, if the zero point is not reset correctly, repeating the third step to the fifth step.

Namely, the calibration of the hydrogen sensor 3 can be realized through the above steps.

The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, so as not to limit the protection scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.

Claims

1. A calibration device for a hydrogen sensor is characterized in that: including the testboard, set up DC power supply on the testboard, just DC power supply's positive pole and negative pole all set up on the testboard, and still set up the test tube on the testboard, the test tube is the setting of T type, just including three through-hole on the test tube, just through-hole department sets up rapid fixture respectively, and is three hydrogen sensor, intake pipe and outlet duct are connected respectively through rapid fixture to the through-hole, just the diameter of test tube is 40 millimeters, just still be provided with the air supply on the testboard, the air supply includes 2% mixed gas jar of nitrogen hydrogen concentration and nitrogen gas jar.

2. A calibration arrangement for a hydrogen sensor according to claim 1, characterized in that: the intake pipe sets up two, and two intake pipes are connected with 2% nitrogen-hydrogen gas mixture jar, nitrogen gas jar of hydrogen concentration respectively.

3. A calibration arrangement for a hydrogen sensor according to claim 1, characterized in that: the rapid clamp is a hoop.

4. A calibration arrangement for a hydrogen sensor according to claim 1, characterized in that: still set up the sealing washer in the quick clamp, just the sealing washer is located the through-hole edge.

5. A calibration arrangement for a hydrogen sensor according to claim 1, characterized in that: the edge of through-hole sets up to the bulge loop, just the outside of bulge loop sets up the inclined plane, just the incline direction on inclined plane is from outside to inside slope.

6. A calibration arrangement for a hydrogen sensor according to claim 1, characterized in that: and the hydrogen sensor, the air inlet pipe and the air outlet pipe are also respectively provided with a convex ring.