CN213209964U

CN213209964U - Device for improving CCD resolution

Info

Publication number: CN213209964U
Application number: CN202022104464.0U
Authority: CN
Inventors: 朱大明; 黄耀波; 王勇
Original assignee: Shanghai Advanced Research Institute of CAS
Current assignee: Shanghai Advanced Research Institute of CAS
Priority date: 2020-09-23
Filing date: 2020-09-23
Publication date: 2021-05-14
Anticipated expiration: 2030-09-23

Abstract

The utility model relates to an improve device of CCD resolution ratio, including the CCD detector, the CCD detector include a chip, with this chip complex window and have the functional part of cooling transmission part and cooling part, the chip with the window becomes an inclination. The utility model discloses can realize CCD detector and promote incident X ray actual space resolution's multiple to showing the X ray detection ability that has improved the single direction. Additionally, the utility model discloses can the best focus plane of matching secondary light focus, avoid the chip to keep away from the partial defocus at facula center, and then realize the optimal adjustment to spatial resolution developments. And simultaneously, the utility model discloses simple structure, compatible good, with low costs, simple operation.

Description

Device for improving CCD resolution

Technical Field

The utility model relates to an X ray optical detection technical field, more specifically relate to a device that improves CCD resolution ratio.

Background

The CCD detector has the advantages of high resolution, high sensitivity, small volume, low power consumption and the like, and is widely applied to the fields of remote sensing mapping, space detection, material science research and the like. The CCD detection technology has wide application range, and occupies a place from the detection of infrared rays, visible light, extreme ultraviolet rays, soft X rays to high-energy rays.

In the research field of matter and life sciences, the special energy range of soft X-rays makes it indispensable in the scientific and technical field. In particular, in recent years, the development of high-coherence and high-brightness synchrotron radiation light sources has led to rapid development of spectroscopy and imaging techniques based on soft X-rays, and has attracted considerable attention in the fields of high-resolution imaging, research on material electronic structures and element excitation, and the like.

CCD detectors are key components currently used in related soft X-ray spectroscopy detection studies. In the existing CCD detector sensing chip unit, since each pixel unit needs to be equipped with corresponding electronic components, such as charge reading and resetting, the minimum physical pixel size of the spectral CCD sensor capable of direct detection by soft X-rays, which is designed and processed under the current advanced manufacturing process, is about 10 μm. Because the universal CCD detector enables the soft X-ray to vertically irradiate the CCD chip to realize direct photoelectric conversion detection, the method for improving the actual spatial resolution of the CCD detector in the prior art mainly focuses on reducing the physical pixel unit size of the CCD sensor so as to improve the photoelectric conversion efficiency and other electronic design aspects. For example, optimizing the electronics transfer path and channel design for each physical pixel, specifically designing adjacent channels for opposite charge transfer reading, can reduce the minimum physical pixel size to 5 μm, thereby doubling the corresponding CCD resolution. However, in the face of the increasing demand for high-resolution soft X-ray spectroscopy detection, it is difficult to further increase the actual spatial resolution of CCD detectors at the current design, manufacturing production level.

In addition, when the CCD detector in the prior art is used for detecting synchrotron radiation soft X-ray inelastic resonance scattered light, in a scattering spectrometer at the front end of the detector, after secondary light scattered by a soft X-ray excitation material is split and focused by a grating, a focal plane often has a large included angle with a vertical plane (90 degrees), which causes mismatching between a conventional vertically placed CCD chip and the focal plane of light to be actually detected, and causes partial defocusing of the chip far from the center of a light spot to deteriorate the actual resolution.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem, the utility model provides an improve device of CCD resolution ratio can double the actual spatial resolution who promotes the CCD detector.

The utility model provides a pair of improve device of CCD resolution ratio, including the CCD detector, the CCD detector include a chip, with this chip complex window and have the functional part of cooling transmission part and cooling part, the chip with the window becomes an inclination.

The inclination angle is greater than or equal to 0 degrees and less than 90 degrees.

The device for improving the CCD resolution further comprises a precision motion part, and the precision motion part is fixedly connected with the CCD detector.

And the precision motion part is welded, screwed or bolted with the CCD detector.

The precise motion part is a multi-degree-of-freedom precise motion adjusting structure integrated in parallel.

The precise motion part is a multi-degree-of-freedom precise motion adjusting structure integrated in series.

The device for improving the CCD resolution further comprises a connecting hose, and the connecting hose is fixedly connected with the window.

The connecting hose is a vacuum corrugated pipe.

The functional component includes a cooling transmission component supporting the chip, the cooling transmission component being in sealed connection with a cooling component.

The functional component also comprises an electronic transmission and control component, and the electronic transmission and control component is hermetically connected with the chip through a circuit.

The utility model discloses a chip of inclination design realizes that the CCD detector promotes incident X ray actual space resolution's multiple to showing the X ray detection ability that has improved the single direction. Additionally, the utility model discloses can adjust the inclination of incident X ray and CCD sensor chip through adjusting the accurate motion part, the focal plane of optimum matching secondary light focus avoids the chip to keep away from the partial defocus at facula center, and then realizes the optimal adjustment to spatial resolution developments. And simultaneously, the utility model discloses simple structure, compatible good, with low costs, simple operation.

Drawings

Fig. 1 is a schematic structural diagram of an apparatus for improving CCD resolution according to the present invention.

Fig. 2 is a schematic diagram of the device for improving CCD resolution according to the present invention.

Detailed Description

The following description of the preferred embodiments of the present invention, with reference to the accompanying drawings, will be provided to better understand the functions and features of the present invention.

As shown in fig. 1, the utility model discloses an improve device of CCD resolution ratio, including CCD detector 1, precision motion part 2 and coupling hose 3, and precision motion part 2 and coupling hose 3 all with CCD detector 1 fixed connection.

The CCD detector 1 includes a chip 11, a cooling transfer part 12, a window 13, a cooling part 14, and an electronic transfer and control part 15. The window 13 is used for vacuum sealing and light transmission, the chip 11 is designed to form a certain inclination angle with the window 13, the inclination angle is greater than or equal to 0 degree and smaller than 90 degrees, and the cooling transmission component 12, the cooling component 14 and the electronic transmission and control component 15 are all functional components matched with the chip 11. The cooling transfer member 12 is used to support the chip 11 and provide low temperature cooling for high performance operation of the chip 11. The high performance operation of chip 11 is usually in the liquid nitrogen environment, receives the influence that X ray's shone and electronics subassembly generate heat simultaneously, carries out the refrigeration conduction of liquid nitrogen and is indispensable to in order to guarantee the effective utilization of inner space, support and refrigerate the conduction subassembly and realize the functional integration. The cooling part 14 is hermetically connected with the cooling transmission part 12 and supplies liquid nitrogen to the refrigeration conduction assembly, and the refrigeration conduction assembly is equivalent to an internal circulation container of the liquid nitrogen. The electronic transmission and control component 15 is an electronic connection and signal output regulation control unit of the chip 11, and is hermetically connected with the chip 11 through a circuit. Due to the inclined design of the chip 11, all the functional components need to be designed adaptively to ensure the overall structure and function operation.

The chip 11 with the tilt design results in a reduced number of effective photons received compared to a non-tilt design. Therefore, the area of the chip may need to be increased in general, but the cost for increasing the area of the chip is far less than the cost for reducing the physical pixel unit size of the CCD detector in the prior art, so that in some practical application scenarios, the resolution improvement brought by the tilt angle design is low-cost and efficient.

The principle of the device of the utility model for improving CCD resolution is shown in figure 2. Wherein, alpha is the grazing incidence angle of incident X ray and chip 11, and the intrinsic resolution of CCD detector is decided by chip 11's pixel size L, then the utility model discloses an actual detection spatial resolution is R = L sin alpha, and in the formula, 0 ° < alpha <90 °. It can be clearly seen that the resolution is improved by 1/sin alpha times. Theoretically, the smaller the angle α, the higher the resolution improvement factor. In a specific use, however, due to the tilted design of the detector chip 11, the number of effective photons it receives decreases, i.e., the smaller α, the smaller the number of actually detected photons. At the same time, too small a also causes the spot to be back away from the focal plane of the secondary light focusing, degrading resolution.

The precision motion part 2 is rigidly connected to the CCD detector 1, for example by means of rigid screws, rigid bolts or welded components. The precision motion part 2 can be a multi-degree-of-freedom precision motion adjusting structure integrated in parallel or in series, and can perform multi-degree-of-freedom precision motion by adjusting the support CCD detector 1 through a motor or manually, wherein the multi-degree-of-freedom precision motion adjusting structure comprises the step of adjusting the angle and the direction of the whole CCD detector 1 and incident X rays. Since the chip 11 forms a fixed angle in the CCD detector 1, if the angle between the whole CCD detector 1 and the incident X-ray changes, the grazing incidence angle α between the chip 11 and the incident X-ray also changes. Therefore, the grazing incidence angle alpha of the chip 11 and the incident X-ray can be dynamically adjusted through the precision motion part 2, the chip 11 can receive enough photon number while ensuring that the alpha is as small as possible, and the chip can be optimally matched with the focal plane of secondary light focusing, so that the optimal resolution is obtained. In a specific application scenario, the focal plane optimally matched for secondary light focusing is related to both the wavelength of incident light and the form of the sample. Therefore, in actual use, the angle of the CCD detector is adjusted according to different incident lights and specific sample forms, so that the center of the light spot is basically consistent with the position far away from the center of the light spot.

Due to the inclination angle design of the chip and the motion adjustment of the CCD detector, no convex connection and assembly around the outside of the window 13 are actually required in order to ensure that the fixed packaging assembly of the window 13 does not block light.

The connecting hose 3 is fixedly connected with a window 13 in the CCD detector 1, and is used for connecting the CCD detector 1 with a detection light source component (not shown). In order to realize the high-vacuum flexible connection of the incident X-ray front end part and the CCD detector 1 and simultaneously ensure that the precision motion of the CCD does not influence the stability of front-end equipment and the vacuum degree of a system, the connecting flexible pipe 3 adopts a vacuum corrugated pipe, and the requirements of different scenes on the vacuum degree are met.

The utility model discloses the design has the chip at certain inclination in the CCD detector to carry the whole of CCD detector on high accuracy multidimension degree moving part, carry moving part through the operation, can further adjust the contained angle of incident X ray and chip, the focal plane of optimum matching secondary light focus avoids the chip to keep away from the partial defocus at facula center, thereby obtains best resolution ratio. And simultaneously, the utility model discloses in the whole accurate motion process of CCD detector, with the front end component with vacuum bellows flexible coupling, guarantee the vacuum and the motion stability of system.

What has been described above is only the preferred embodiment of the present invention, not for limiting the scope of the present invention, but various changes can be made to the above-mentioned embodiment of the present invention. All the simple and equivalent changes and modifications made according to the claims and the content of the specification of the present invention fall within the scope of the claims of the present invention. The present invention is not described in detail in the conventional technical content.

Claims

1. A device for improving CCD resolution, comprising a CCD detector, wherein the CCD detector comprises a chip, a window matched with the chip and a functional component with a cooling transmission component and a cooling component, and is characterized in that the chip and the window form an inclined angle.

2. The apparatus according to claim 1, wherein the inclination angle is greater than or equal to 0 ° and less than 90 °.

3. The apparatus of claim 1, further comprising a precision motion unit, wherein the precision motion unit is fixedly connected to the CCD detector.

4. The device for improving CCD resolution of claim 3, wherein the precision motion part is welded, screwed or bolted to the CCD detector.

5. The device for improving CCD resolution as claimed in claim 3, wherein the precision motion part is a parallel integrated multi-degree-of-freedom precision motion adjusting structure.

6. The device for improving CCD resolution as claimed in claim 3, wherein the precision motion part is a multi-degree-of-freedom precision motion adjusting structure integrated in series.

7. The apparatus of claim 1, further comprising a connection hose, wherein the connection hose is fixedly connected to the window.

8. The device for improving CCD resolution of claim 7, wherein the connecting hose is a vacuum bellows.

9. The device of claim 1, wherein the functional unit comprises a cooling transmission unit for supporting the chip, and the cooling transmission unit is hermetically connected with a cooling unit.

10. The device for improving resolution of CCD of claim 1, wherein said functional unit further comprises an electronic transmission and control unit, said electronic transmission and control unit is connected with said chip by circuit sealing.