CN213206874U

CN213206874U - High-temperature-resistant sealing structure for parylene vacuum deposition system

Info

Publication number: CN213206874U
Application number: CN202022022334.2U
Authority: CN
Inventors: 杨宏武; 李洪; 王军
Original assignee: Jishike Precision Coating Shenzhen Co ltd
Current assignee: Jishike Precision Coating Shenzhen Co ltd
Priority date: 2020-09-16
Filing date: 2020-09-16
Publication date: 2021-05-14
Anticipated expiration: 2030-09-16

Abstract

The utility model discloses a high temperature resistant seal structure for parylene vacuum deposition system, including host computer, vacuum chamber and base, the base is arranged in one side of host computer, and the vacuum chamber level is arranged in the top of base, the one end that the host computer is close to the vacuum chamber is connected with mouth of pipe flange one. The utility model discloses an all be equipped with annular heat-insulating groove on mouth of pipe flange one and mouth of pipe flange two, and it has annular pottery or thermal-insulated cotton to fill in annular heat-insulating groove inside, utilize annular heat-insulating groove position mouth of pipe flange lateral wall thickness to reduce the speed that the heat has reduced the outside transmission of heat on the one hand, on the other hand utilizes the inside annular pottery of annular heat-insulating groove or thermal-insulated cotton thermal-insulated heat preservation effect to have avoided the heat dissipation of mouth of pipe flange to lead to the fact the influence that the temperature reduces to high temperature raw and other materials, because the cooling bath arranges in the outside of annular heat-insulating groove, then avoided the cooling bath cooling to lead to the fact the.

Description

High-temperature-resistant sealing structure for parylene vacuum deposition system

Technical Field

The utility model relates to a vacuum deposition technical field specifically is a high temperature resistant seal structure for parylene vacuum deposition system.

Background

Parylene is a thin film substance obtained by vapor deposition at room temperature, can generate a thin film with any thickness within hundreds of microns, can control the film thickness precision to be 1 micron by utilizing a vacuum deposition technology, in addition, parylene deposited by vacuum has the excellent characteristics of uniformity, shape retention, no micropore and no defect, inactive chemical property and the like, because a catalyst and a solvent are not used in vacuum deposition, the produced thin film is pure, the gas release amount is small, and the parylene thin film has extremely excellent electrical property, chemical stability and biocompatibility and has wide application in the fields of micro-electro-mechanical systems, electronic components, medical equipment and the like.

The parylene films are all manufactured by adopting a vapor deposition method (CVD process), and the process is as follows: the p-xylene dimer is sublimated into gas at 180 ℃ in the equipment main machine system, and is cracked into a p-xylene monomer through high temperature, and then the p-xylene monomer is led into a deposition device in the vacuum chamber to be deposited and polymerized on the surface of a product at room temperature. The process enables the parylene film to have the advantages of no residual stress, complete isomorphism, high uniformity, strong permeability and the like.

Present horizontal deposition system seal structure in parylene vacuum adopts host computer pyrolysis tube and vacuum chamber left side to extend the connecting pipe mouth of pipe and pass through flange seal and connect, because the pyrolysis temperature is the high temperature about 700 ℃, flange seal is less apart from pyrolysis high temperature section distance, and the heat is direct to be come by the pyrolysis tube conduction, flange seal is easy ageing under this high temperature environment, need often to change, there is the gas leakage hidden danger in use simultaneously and easily leads to the product to scrap, for this we have invented one kind and can cool off seal structure and do not influence the high temperature resistant seal structure of raw materials pyrolysis temperature.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a high temperature resistant seal structure for parylene vacuum deposition system to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a high-temperature resistant sealing structure for a parylene vacuum deposition system comprises a host, a vacuum chamber and a base, wherein the base is arranged on one side of the host, the vacuum chamber is horizontally arranged at the top end of the base, one end of the host close to the vacuum chamber is connected with a first pipe orifice flange, one end of the vacuum chamber close to the host is connected with a second pipe orifice flange matched with the first pipe orifice flange, annular heat insulation grooves are formed in the positions, close to one side, of the inner side edge of the outer side wall of the first pipe orifice flange and the second pipe orifice flange, of the inner side edge of the outer side wall of the one side, the first pipe orifice flange and the second pipe orifice flange are mutually aligned, mounting holes are uniformly arranged in an annular equidistant mode at the positions, close to one side, of the outer side wall of the first pipe orifice flange and the, the inside of annular seal groove one is equipped with sealed the pad, mouth of pipe flange one between annular seal groove one and the annular heat-insulating groove is equipped with the feed liquor groove with mouth of pipe flange outside wall one side, mouth of pipe flange one is equipped with the drain tank with the opposite side of mouth of pipe flange outside wall, mouth of pipe flange one between drain tank and the feed liquor groove and mouth of pipe flange outside wall both sides have symmetrical arrangement a pair of cooling bath, mouth of pipe flange one between cooling bath and drain tank and feed liquor groove has equidistant evenly arranged the hole of permeating water with mouth of pipe flange two lateral walls, mouth of pipe flange one at cooling bath position and all demountable installation have the protection casing on mouth of pipe flange outside wall all, the protection casing is the ring form, and the border position department of protection casing inside and outside lateral wall all is equipped with the mounting panel, and all equidistant evenly arranged mounting hole two on the inside and outside mounting panel, and all equidistant arranged with mounting hole two looks complex counter sink on mouth of, one side of the outer side wall of the protective cover is connected with a liquid inlet pipe, the outer side wall of the protective cover on one side of the liquid inlet pipe is connected with a liquid outlet pipe, and the liquid inlet pipe and the liquid outlet pipe are respectively arranged in alignment with the liquid inlet groove and the liquid outlet groove.

Preferably, the cooling groove is circular-arc, and cooling fin has all been arranged to the equidistant uniform in the inside of cooling groove, cooling fin all is circular-arc, and the cooling fin diameter at cooling groove position increases progressively from inside to outside.

Preferably, annular ceramic or heat insulation cotton is placed inside the annular heat insulation groove.

Preferably, the edge positions of the side walls on the two sides in the protective cover are all provided with a second annular sealing groove, a sealing gasket is arranged inside the second annular sealing groove, and the second annular sealing grooves on the two sides are communicated with the inside of the protective cover.

Compared with the prior art, the beneficial effects of the utility model are that:

1: the utility model discloses a with two outsides that extend to host computer and vacuum chamber respectively of mouth of pipe flange one and mouth of pipe flange and be connected, because the long-time use of vacuum chamber needs often unpack apart equipment host computer and vacuum chamber in order to clear up the incomplete membrane on pipeline and part surface, form the clearance between host computer and vacuum chamber on the one hand, be convenient for install the dismantlement to mouth of pipe flange one and mouth of pipe flange two, on the other hand has increased mouth of pipe flange one and has exposed the area in the air with mouth of pipe flange two, increase heat radiating area, promote mouth of pipe flange one and the long-time stability and the life of using of mouth of pipe flange two.

2: the utility model discloses an all be equipped with annular heat-insulating groove on mouth of pipe flange one and mouth of pipe flange two, and it has annular pottery or thermal-insulated cotton to fill in annular heat-insulating groove inside, utilize annular heat-insulating groove position mouth of pipe flange lateral wall thickness to reduce the speed that the heat has reduced the outside transmission on the one hand, the influence of high temperature to the sealed pad in annular seal groove position has been reduced, on the other hand utilizes the annular pottery of annular heat-insulating groove inside or thermal-insulated cotton thermal-insulated heat preservation effect to have avoided the heat dissipation of mouth of pipe flange to cause the influence that the temperature reduces to high temperature raw and other materials, because the cooling bath is arranged in the outside of annular heat-insulating groove, then avoided the cooling bath cooling to seal the influence that.

3: the utility model has the advantages that the cooling grooves are arranged on the outer sides of the first pipe orifice flange and the second pipe orifice flange, and the circular arc cooling fins are uniformly arranged on the cooling groove part, on one hand, the effect of doubly slowing down heat transfer is achieved by matching the reduction of the thickness of the side wall of the pipe orifice flange on the cooling groove part with the reduction of the thickness of the side wall of the pipe orifice flange on the annular heat insulation groove part, the service life of the sealing gasket is prolonged, on the other hand, after cooling liquid circulates in the cooling groove, the cooling liquid is convenient to cool the side wall of the pipe orifice flange on the outer side part of the heat insulation groove by using the cooling liquid, compared with the traditional self-cooling mode, the effect of heat dissipation by using the external cooling liquid is better, the contact area between the pipe orifice flange and the cooling liquid is increased, the heat dissipation effect is improved by increasing the heat dissipation area, the heat dissipation effect and the heat dissipation efficiency are improved.

Drawings

Fig. 1 is a schematic front view of the internal structure of the present invention;

FIG. 2 is a schematic view of an enlarged structure of the first orifice flange and the second orifice flange of the present invention;

FIG. 3 is a schematic front view of a nozzle flange according to the present invention;

FIG. 4 is a schematic structural view of the front side of the orifice flange II of the present invention;

fig. 5 is a schematic top view of the protective cover of the present invention;

FIG. 6 is a schematic side view of the protective cover according to the present invention;

fig. 7 is a schematic view of the internal structure of the two back sides of the pipe orifice flange of the present invention.

In the figure: 1. a host; 2. a pipe orifice flange I; 3. a pipe orifice flange II; 4. a vacuum chamber; 5. a base; 6. a countersunk hole; 7. a first mounting hole; 8. a first annular sealing groove; 9. a second mounting hole; 10. an annular heat insulation groove; 11. a protective cover; 12. mounting a plate; 13. a cooling tank; 14. a liquid outlet pipe; 15. cooling the fins; 16. a liquid inlet pipe; 17. a second annular sealing groove; 18. a liquid inlet tank; 19. water permeable holes; 20. and a liquid outlet groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-7, the present invention provides an embodiment: a high-temperature resistant sealing structure for a parylene vacuum deposition system comprises a host 1, a vacuum chamber 4 and a base 5, wherein the base 5 is arranged on one side of the host 1, the vacuum chamber 4 is horizontally arranged on the top end of the base 5, one end, close to the vacuum chamber 4, of the host 1 is connected with a first pipe orifice flange 2, one end, close to the host 1, of the vacuum chamber 4 is connected with a second pipe orifice flange 3 matched with the first pipe orifice flange 2, annular heat insulation grooves 10 are arranged at positions, close to the inner side edge of the outer side wall of one side of the host 1, of the first pipe orifice flange 2 and the second pipe orifice flange 3, annular ceramic or heat insulation cotton is placed inside the annular heat insulation grooves 10, the first pipe orifice flange 2 and the second pipe orifice flange 3 are arranged in an aligned mode, mounting holes 7 are uniformly arranged in an annular shape at equal intervals at positions, close, the pipe orifice flange I2 and the pipe orifice flange II 3 are convenient to install and fix, one side, close to the pipe orifice flange I2, of the outer side wall of the pipe orifice flange II 3 on the inner side of a mounting hole I7 is provided with a first annular sealing groove 8, a sealing gasket is arranged inside the first annular sealing groove 8, one sides, close to the pipe orifice flange I2, of the outer side walls of the pipe orifice flange I2 and the pipe orifice flange II 3, of the pipe orifice flange I2 between the first annular sealing groove 8 and the annular heat insulation groove 10 are provided with a liquid inlet groove 18, the other sides, close to the outer side walls of the pipe orifice flange I2 and the pipe orifice flange II 3, of the pipe orifice flange I2 between the liquid outlet groove 20 and the liquid inlet groove 18 are symmetrically provided with a pair of cooling grooves 13, the pipe orifice flange I2 and the pipe orifice flange II 3, of the cooling grooves 13 are uniformly provided with water permeable holes 19, the cooling fins 15 are all arc-shaped, the diameters of the cooling fins 15 at the cooling groove 13 are increased from inside to outside, the outer side walls of the pipe orifice flange I2 and the pipe orifice flange II 3 at the cooling groove 13 are detachably provided with the protective cover 11, the protective cover 11 is annular, the edge positions of the inner side wall and the outer side wall of the protective cover 11 are provided with the mounting plates 12, the inner side mounting plate 12 and the outer side mounting plate 12 are uniformly provided with the mounting holes II 9 at equal intervals, the outer side walls of the pipe orifice flange I2 and the pipe orifice flange II 3 are provided with the countersunk holes 6 matched with the mounting holes II 9 at equal intervals, one side of the outer side wall of the protective cover 11 is connected with the liquid inlet pipe 16, the outer side wall of the protective cover 11 at one symmetrical side of the liquid inlet pipe 16 is connected with the liquid outlet pipe 14, the cooling liquid circulating inside the liquid inlet pipe 16 and the liquid outlet pipe, the edge positions of the side walls on two sides in the protective cover 11 are all provided with two annular sealing grooves 17, sealing gaskets are arranged inside the two annular sealing grooves 17, the two annular sealing grooves 17 on two sides are communicated with the inside of the protective cover 11, and the sealing gaskets at the two annular sealing grooves 17 are cooled by cooling liquid.

The working principle is as follows: before use, the pipe orifice flange I2 and the pipe orifice flange II 3 can be fixedly installed by penetrating the bolt through the installation hole I7, the liquid inlet pipe 16 and the liquid outlet pipe 14 can be fixedly installed after being respectively aligned with the liquid inlet groove 18 and the liquid outlet groove 20, the liquid inlet pipe 16 is externally connected with a cooling liquid circulating pump, the liquid outlet pipe 14 can be externally connected with a container for filling and collecting cooling liquid, when the cooling device is needed to be used, high-temperature raw material gas is respectively conveyed to the inside of the vacuum chamber 4 through the pipe orifice flange I2 and the pipe orifice flange II 3, at the moment, the cooling liquid circulating pump is started, cooling liquid is injected into the liquid inlet groove 18 from the liquid inlet pipe 16 and respectively circulates to the inside of the cooling grooves 13 at two sides from the water permeable holes 19 at two sides of the liquid inlet groove 18, the high temperature conducted to the part of the cooling groove 13 is dissipated by the cooling liquid, the cooling liquid absorbing heat finally enters the inside of the liquid outlet groove 20 and is discharged from the liquid outlet, because be equipped with annular heat insulating groove 10 between cooling bath 13 and the pipeline to it has thermal insulation material to fill in annular heat insulating groove 10 is inside, the temperature variation at cooling bath 13 position is difficult for influencing the inside feed gas of pipeline like this, utilize cooling bath 13 to reduce the temperature at an annular seal groove 8 position, avoided the influence of high temperature to sealed the pad, then promote the life of sealed effect and sealing washer, and annular seal groove two 17 at protection casing 11 position directly contacts with the coolant liquid rather than the inside sealed pad, then be difficult for receiving the inside high temperature influence of pipeline.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. A high temperature resistant seal structure for parylene vacuum deposition system, includes host computer (1), vacuum chamber (4) and base (5), base (5) arrange in one side of host computer (1), vacuum chamber (4) level arranges in the top of base (5), its characterized in that: one end of the main body (1) close to the vacuum chamber (4) is connected with a first pipe orifice flange (2), one end of the vacuum chamber (4) close to the main body (1) is connected with a second pipe orifice flange (3) matched with the first pipe orifice flange (2), the positions of the inner side edge of the outer side wall of one side, close to the first pipe orifice flange (2) and the second pipe orifice flange (3), are respectively provided with an annular heat insulation groove (10), the annular heat insulation grooves (10) on the first pipe orifice flange (2) and the second pipe orifice flange (3) are mutually aligned, the positions of the outer side edge of the outer side wall of one side, close to the first pipe orifice flange (2), of the first pipe orifice flange (2) and the second pipe orifice flange (3) are respectively provided with a first mounting hole (7) at equal intervals, one side, close to the first pipe orifice flange (2), of the outer side wall of, the sealing gasket is arranged inside the first annular sealing groove (8), a liquid inlet groove (18) is formed in one side of the outer side wall of the pipe orifice flange (2) and the pipe orifice flange (3) between the first annular sealing groove (8) and the annular heat insulation groove (10), a liquid outlet groove (20) is formed in the other side of the outer side wall of the pipe orifice flange (2) and the pipe orifice flange (3), a pair of cooling grooves (13) are symmetrically arranged on the two sides of the outer side wall of the pipe orifice flange (2) and the pipe orifice flange (3) between the liquid outlet groove (20) and the liquid inlet groove (18), water permeable holes (19) are uniformly arranged on the side walls of the pipe orifice flange (2) and the pipe orifice flange (3) between the cooling grooves (13) and the liquid outlet groove (20) and the liquid inlet groove (18) at equal intervals, and a protective cover (11) is detachably arranged on the outer side walls of the pipe orifice flange (2) and the pipe orifice, protection casing (11) are the ring form, and the border position department of protection casing (11) inside and outside lateral wall all is equipped with mounting panel (12), and all equidistant evenly arranged mounting hole two (9) on inside and outside mounting panel (12), and all equidistant arranged on mouth of pipe flange (2) and mouth of pipe flange two (3) lateral walls with mounting hole two (9) matched with counter sink (6), one side of protection casing (11) lateral wall is connected with feed liquor pipe (16), be connected with drain pipe (14) on protection casing (11) lateral wall of feed liquor pipe (16) symmetry one side, and feed liquor pipe (16) and drain pipe (14) arrange with feed liquor groove (18) and drain groove (20) respectively in an alignment.

2. A high temperature resistant sealing structure for a parylene vacuum deposition system, as claimed in claim 1, wherein: cooling bath (13) are circular-arc, and cooling fin (15) have all been arranged to the inside of cooling bath (13) equidistant evenly, cooling fin (15) all are circular-arc, and cooling fin (15) diameter at cooling bath (13) position increases progressively from inside to outside.

3. A high temperature resistant sealing structure for a parylene vacuum deposition system, as claimed in claim 1, wherein: annular ceramic or heat insulation cotton is placed in the annular heat insulation groove (10).

4. A high temperature resistant sealing structure for a parylene vacuum deposition system, as claimed in claim 1, wherein: the edge positions of the side walls on the two sides in the protective cover (11) are provided with two annular sealing grooves (17), the inside of each annular sealing groove (17) is provided with a sealing gasket, and the two annular sealing grooves (17) on the two sides are communicated with the inside of the protective cover (11).