CN213172551U

CN213172551U - Rotary coating mechanism and continuous coating production line applying same

Info

Publication number: CN213172551U
Application number: CN202020996802.3U
Authority: CN
Inventors: 高文波; 李小彭; 张亚宁
Original assignee: Luoyang Shengbo Vacuum Equipment Co ltd
Current assignee: Luoyang Shengbo Vacuum Equipment Co ltd
Priority date: 2020-06-03
Filing date: 2020-06-03
Publication date: 2021-05-11
Anticipated expiration: 2030-06-03

Abstract

The application relates to the field of vacuum coating, in particular to a rotary coating mechanism and a continuous coating production line applied by the rotary coating mechanism. This application increases the rotatory coating mechanism that can realize the coating film of cylinder work piece in original equipment, increases coating film product kind, both can press from both sides large-scale flat board at the base frame facial make-up, accomplishes the coating film of dull and stereotyped work piece, also can install the cylinder work piece on drum assembly, accomplishes the coating film of cylinder work piece, and the product kind that can plate increases, improve equipment utilization ratio reduces the enterprise and drops into multiple equipment, reduction investment cost.

Description

Rotary coating mechanism and continuous coating production line applying same

[ technical field ] A method for producing a semiconductor device

The application relates to the field of vacuum coating, in particular to a rotary coating mechanism and a continuous coating production line applying the same.

[ background of the invention ]

The existing vacuum coating equipment is generally divided into a single machine and a continuous production line, wherein the single machine is generally suitable for small-size products, special-shaped or cylindrical products and can also be used for manufacturing some flexible or windable products; the latter comprises a winding type continuous production line and a flat plate type continuous production line, wherein the winding type continuous production line is mainly used for flexible or windable products, the whole plated material is usually arranged in a film plating chamber in a whole roll state, the whole material is finally completely received on a winding shaft from an unwinding position through a whole set of winding mechanism after film plating, then the whole roll is taken out, and the plated material needs to be replaced in a broken way after each whole roll is plated; the flat plate continuous production line is mainly suitable for large-size flat plate products, substrates are clamped on a substrate frame in a clamping mode and the like, the substrate frame sequentially passes through a wafer inlet chamber and functional vacuum chambers to complete film coating through transmission, then is discharged from the wafer outlet chamber, and is returned to be mounted again to enter the film coating after the products are unloaded, a plurality of substrate frames are operated all the time on the whole production line, the continuous production of the production line is ensured, and the production line can be broken and stopped unless equipment fails or plating materials are replaced.

However, both of the existing apparatuses are not compatible with the coating of the cylindrical workpiece, and the utilization rate of the apparatus is reduced.

[ summary of the invention ]

In order to solve the technical problem that the existing coating equipment cannot be compatible with the coating of a cylindrical workpiece, the application provides a rotary coating mechanism and a continuous coating production line applying the rotary coating mechanism.

The technical scheme adopted for solving the technical problem is as follows:

the rotary film coating mechanism comprises a substrate frame capable of clamping a substrate workpiece, wherein a roller assembly and a transmission mechanism for driving the roller assembly to rotate are arranged on the substrate frame, the roller assembly comprises a rotating body, a supporting part for supporting the cylindrical workpiece is arranged on the rotating body, and the cylindrical workpiece is supported on the supporting part and can rotate relative to the substrate frame along with the rotating body so as to realize vacuum film coating.

In the rotary film coating mechanism, the outer peripheral side wall of the rotating body is provided with a plurality of suspension parts for suspending and placing the flat plate workpiece.

According to the rotary film coating mechanism, the end part of the suspension part is provided with the bending section which is bent upwards.

The rotary film coating mechanism comprises a rotating body, wherein the rotating body is provided with a plurality of supporting columns, and the supporting columns are uniformly distributed on the same horizontal plane.

According to the rotary film coating mechanism, the supporting column is provided with the limiting groove which is matched and clamped with the bottom edge of the cylindrical workpiece.

As above-mentioned rotatory coating mechanism, the drum subassembly still include with the pivot that the rotation body links to each other, the upper end and the lower extreme of pivot are equipped with support bearing frame and under bracing bearing frame respectively and go up support bearing frame and can dismantle to be connected on the substrate frame.

According to the rotary film coating mechanism, the lower end of the rotating shaft is provided with the first transmission gear which is connected with the rotating shaft and drives the rotating shaft to rotate, and the transmission mechanism comprises the second transmission gear which is matched and meshed with the first transmission gear.

The rotary film coating mechanism further comprises a magnetic fluid sealing device connected with the second transmission gear and a synchronizing wheel driven by a motor to rotate, and the synchronizing wheel is connected to the magnetic fluid sealing device.

The continuous coating production line also comprises the rotary coating mechanism.

Compared with the prior art, the method has the following advantages:

1. this application is through the periphery that will treat the cylinder work piece of coating film and overlap in drum subassembly, make the cylinder work piece rotate along with drum subassembly, realize all-round coating film, mainly be applicable to dull and stereotyped class coating film production line of continuous type or coiling formula continuous production line, increase the rotatory coating film mechanism that can realize the cylinder work piece coating film in original equipment, increase coating film product type, both can the large-scale flat board of clamping on the substrate frame, accomplish the coating film of dull and stereotyped work piece, also can install the cylinder work piece on drum subassembly, accomplish the coating film of cylinder work piece, the product type that can plate increases, the utilization ratio of equipment is improved, reduce the enterprise and put into multiple equipment, and investment cost is reduced.

2. The utility model provides a rotatory coating film mechanism still is equipped with a plurality of portions of hanging on the drum assembly, can correspond to hang in the portion of hanging and place the dull and stereotyped work piece of treating the coating film, can be used to install small-size dull and stereotyped work piece on the substrate frame, further increases coating film product kind, improves equipment utilization greatly.

3. The utility model provides a rotatory coating mechanism, the lower extreme of pivot is equipped with first drive gear, is equipped with on the substrate frame to mesh mutually with first drive gear and drives first drive gear pivoted second drive gear, drives second drive gear through the motor and provides power for rotatory coating mechanism, through the rotatory coating speed of adjustment motor rotational speed adjustment.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a schematic structural view of a drum assembly of the present application;

FIG. 2 is an exploded view of the transmission of the present application;

FIG. 3 is a schematic view of the application of the spin coating mechanism of the present application;

FIG. 4 is a schematic view of a cylindrical workpiece of the present application mounted on a substrate holder;

FIG. 5 is a schematic view of a flat panel workpiece of the present application mounted on a substrate holder;

FIG. 6 is a schematic view of the backside of the substrate holder of the present application.

[ detailed description ] embodiments

The present application will be further described with reference to the following drawings and specific embodiments.

Referring to fig. 1 to 6, a continuous coating production line is provided with a rotary coating mechanism, the rotary coating mechanism includes a substrate frame a, a roller assembly 1 is rotatably disposed on the front surface of the substrate frame a, a cylindrical workpiece b to be coated can be placed on the roller assembly 1, a plurality of clamping mechanisms 6 are disposed on the back surface of the substrate frame a, the clamping mechanisms 6 are disposed at the upper end and the lower end of the substrate frame a, one or more substrate workpieces to be coated can be clamped between the clamping mechanisms 6 at the upper end and the lower end, and the substrate workpieces are large flat plate coating products. By rotating the film coating mechanism, the continuous film coating production line can not only finish the film coating of large-scale flat workpieces, but also finish the film coating of cylindrical workpieces, thereby realizing the film coating of two types of workpieces of different types, improving the utilization rate of equipment and increasing the types of film coating products of the equipment.

Further, the rotary film coating mechanism further comprises a transmission mechanism 2 for driving the roller assembly 1 to rotate, the roller assembly 1 comprises a rotating body 11 and a rotating shaft 12 connected with the rotating body 11, a supporting part 3 for supporting the cylindrical workpiece b is arranged on the rotating body 11, the cylindrical workpiece b is supported on the supporting part 3, and the cylindrical workpiece b rotates along with the rotating body 11 to realize vacuum film coating. In this embodiment, the upper end and the lower end of the rotating shaft 12 are respectively provided with an upper supporting bearing seat 51 and a lower supporting bearing seat 52, and the upper supporting bearing seat 51 is detachably connected to the substrate frame a. The cylindrical workpiece can be arranged on the substrate frame in a purification room like a flat plate workpiece, enters a coating area through a transmission mechanism and then stays in the target area to rotate, or the substrate frame advances while the cylindrical workpiece rotates, or the substrate frame walks in a reciprocating mode near the target area while the cylindrical workpiece rotates, and the substrate frame is determined according to the film thickness and the process requirements in which walking mode is adopted.

In this embodiment, a first transmission gear 13 connected to the rotating shaft 12 to drive the rotating shaft 12 to rotate is disposed at the lower end of the rotating shaft 12, and the first transmission gear 13 transmits power to the roller assembly through a flat key at the shaft end, so that the roller assembly rotates. The transmission mechanism 2 comprises a second transmission gear 21 which is matched and meshed with the first transmission gear 13, a magnetic fluid sealing device 22 which is connected with the second transmission gear 21, and a synchronizing wheel 23 which is driven by a motor to rotate, wherein the synchronizing wheel 23 is connected to the magnetic fluid sealing device 22. The power drives the synchronizing wheel to rotate through the servo motor and the synchronous belt, and then drives the roller component to rotate after the transmission gear is meshed with the transmission gear of the rotary film coating mechanism, and the rotating speed of the rotary film coating mechanism is controlled through the control of the servo motor to coat the film on the cylindrical workpiece on the film coating mechanism.

Further, the support portion 3 includes a plurality of support columns 31 uniformly distributed and located on a horizontal plane of the outer periphery of the rotating body 11. The cylindrical workpiece can be stably placed on the roller body and can rotate along with the roller body. In this embodiment, the supporting column 31 is provided with a limiting groove 311 engaged with the bottom edge of the cylindrical workpiece b. The cylindrical workpiece can be prevented from shaking, and the coating quality of the product is ensured.

In this embodiment, a plurality of suspending portions 4 for suspending and placing the flat plate workpiece c are disposed on the outer peripheral side wall of the rotating body 11, and the end of each suspending portion 4 is provided with an upwardly bent bending section 41. The hanging part can be correspondingly hung to place the flat plate workpiece to be coated, the types of coated products are further increased, the utilization rate of equipment is greatly improved, the bent section can hook the flat plate workpiece, and the flat plate workpiece is prevented from being separated from the rotary coating mechanism to influence coating.

In conclusion, the rotary coating mechanism of the application has the following advantages:

The above description is only for the purpose of illustrating the preferred embodiments of the present application and is not intended to limit the scope of the present application, which is within the scope of the present application, except that the same or similar principles and basic structures as the present application may be used.

Claims

1. Rotatory coating mechanism, including the substrate frame (a) that can adorn the base plate work piece of pressing from both sides, its characterized in that: the vacuum coating device is characterized in that a roller assembly (1) and a transmission mechanism (2) for driving the roller assembly (1) to rotate are arranged on the substrate frame (a), the roller assembly (1) comprises a rotating body (11), a supporting part (3) for supporting a cylindrical workpiece (b) is arranged on the rotating body (11), and the cylindrical workpiece (b) is supported on the supporting part (3) and can rotate relative to the substrate frame (a) along with the rotating body (11) so as to realize vacuum coating.

2. The rotary film coating mechanism according to claim 1, wherein: and a plurality of suspension parts (4) which can be used for suspending and placing the flat plate workpiece (c) are distributed on the outer peripheral side wall of the rotating body (11).

3. The rotary film coating mechanism according to claim 2, wherein: the end part of the hanging part (4) is provided with a bending section (41) which is bent upwards.

4. The rotary film coating mechanism according to claim 1, wherein: the supporting part (3) comprises a plurality of supporting columns (31) which are arranged on the periphery of the rotating body (11) and are uniformly distributed on the same horizontal plane.

5. The rotary film coating mechanism according to claim 4, wherein: and the supporting column (31) is provided with a limit groove (311) which is matched and clamped with the bottom edge of the cylindrical workpiece (b).

6. The rotary film coating mechanism according to claim 1, wherein: roller assembly (1) still include with pivot (12) that rotate body (11) and link to each other, the upper end and the lower extreme of pivot (12) are equipped with support bearing frame (51) and lower support bearing frame (52) respectively and go up support bearing frame (51) and can dismantle and connect on substrate frame (a).

7. The rotary film coating mechanism according to claim 6, wherein: the lower extreme of pivot (12) be equipped with pivot (12) link to each other and drive pivot (12) pivoted first drive gear (13), drive mechanism (2) include with second drive gear (21) of first drive gear (13) cooperation meshing.

8. The rotary film coating mechanism according to claim 7, wherein: the transmission mechanism (2) further comprises a magnetic fluid sealing device (22) connected with the second transmission gear (21) and a synchronizing wheel (23) driven by a motor to rotate, and the synchronizing wheel (23) is connected to the magnetic fluid sealing device (22).

9. Continuous type coating film production line, its characterized in that: comprising a rotary coating mechanism according to any one of claims 1 to 8.