CN213162227U - Reduction furnace bell jar cleaning system - Google Patents
Reduction furnace bell jar cleaning system Download PDFInfo
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- CN213162227U CN213162227U CN202021838026.0U CN202021838026U CN213162227U CN 213162227 U CN213162227 U CN 213162227U CN 202021838026 U CN202021838026 U CN 202021838026U CN 213162227 U CN213162227 U CN 213162227U
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Abstract
The utility model relates to the technical field of polysilicon production, in particular to a reducing furnace bell jar cleaning system, which comprises a wastewater collecting component, a cleaning component and a cleaning component, wherein the wastewater collecting component is used for collecting cleaning wastewater; a desalted water tank for storing desalted water; the lye tank is used for storing lye; the lye tank is communicated with the wastewater collecting component; a liquid inlet of the cleaning device is respectively communicated with a liquid outlet of the desalted water tank, a liquid outlet of the alkali liquor tank and a liquid outlet of the waste liquor tank; the cleaning device can selectively draw liquid from a desalted water tank or an alkali liquor tank or a waste liquor tank; the sedimentation tank is communicated with the wastewater collection component; a liquid inlet of the waste alkali pump can be selectively communicated with a liquid outlet of the sedimentation tank or a liquid outlet of the waste liquid tank; the liquid outlet of the spent caustic pump can be selectively communicated with the caustic pot or communicated with the next process; the waste liquid tank is communicated with the waste water collecting component. Adopt the utility model discloses can promote the security that reduction furnace bell jar washs and waste liquid treatment.
Description
Technical Field
The utility model relates to a polycrystalline silicon production technical field especially relates to a reduction furnace bell jar cleaning system.
Background
Polycrystalline silicon, which is a form of elemental silicon, is an extremely important excellent semiconductor material. The polysilicon is a basic material widely used for manufacturing semiconductor radios, recorders, refrigerators, color TV sets, video recorders, electronic computers and the like in the electronic industry, the polysilicon production mainly adopts an improved Siemens method, a reactor for producing the polysilicon by the improved Siemens method mainly adopts a polysilicon reduction furnace, the method comprises the steps of electrifying and heating a deposition carrier arranged in a polycrystalline silicon reduction furnace, heating mixed gas of high-purity chlorosilane and hydrogen in the polycrystalline silicon reduction furnace to over 1000 ℃ to react to generate silicon, wherein the inner surface of the polycrystalline silicon reduction furnace is blackened by high-temperature mixed gas along with the production of polycrystalline silicon in the process of depositing the silicon on the deposition carrier, meanwhile, polysilicon and byproducts with certain thickness can be deposited on the inner surface of the polysilicon reduction furnace, so that the heat radiation value in the reduction furnace is reduced, the thermal field of the reduction furnace is influenced, and the energy consumption of the reduction furnace is increased. In the production process of the polycrystalline silicon, after the silicon rod production of one furnace is finished each time, the bell jar of the reduction furnace needs to be cleaned before the furnace is reloaded and the production is started.
The existing cleaning method is to adopt a high-pressure cleaning machine, directly wash the silicon and the sodium hydroxide by desalted water and a sodium hydroxide solution through a high-pressure spray gun, generate chemical reaction between the silicon and the sodium hydroxide, completely react the silicon attached to a reduction furnace bell, and mix the cleaned waste liquid into a waste liquid tank. Because residual silicon powder and sodium hydroxide in the waste liquid tank continue to react, hydrogen is released in the reaction, and Si +2NaOH + H2O ═ Na2SiO3+2H2 ═ 97. Hydrogen is enriched in the waste liquid tank, so that flash explosion accidents can happen when meeting static electricity and naked fire, and in addition, waste water and alkali liquor after desalted water cleaning are mixed in the waste liquid tank, so that a large amount of alkaline waste liquid can be increased, and pressure is caused on environmental protection and pollution discharge.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a reducing furnace bell jar cleaning system, main aim at promotes the security of reducing furnace bell jar washing and waste liquid treatment.
In order to achieve the above object, the utility model mainly provides the following technical scheme:
the embodiment of the utility model provides a reducing furnace bell jar cleaning system, which comprises a wastewater collecting component, a desalted water tank, an alkali liquor tank, a cleaning device, a sedimentation tank, an alkali liquor pump and a waste liquor tank;
the wastewater collection member is used for collecting cleaning wastewater;
the desalted water tank is used for storing desalted water; the desalting water tank is provided with a water inlet for supplementing desalting water;
the lye tank is used for storing lye; the alkali liquor tank is communicated with the wastewater collecting component and is used for collecting cleaning wastewater; the lye tank is provided with a lye supplementing port for supplementing desalted water or lye; the alkali liquor tank is provided with a first air inlet; the alkali liquor tank is provided with a first air outlet;
a liquid inlet of the cleaning device is communicated with a liquid outlet of the desalted water tank;
a liquid inlet of the cleaning device is communicated with a liquid outlet of the lye tank;
a liquid inlet of the cleaning device is communicated with a liquid outlet of the waste liquid tank;
the cleaning device can selectively extract liquid from the desalting water tank or the alkali liquor tank or the waste liquor tank to flush the bell jar of the reduction furnace;
the sedimentation tank is communicated with the wastewater collecting component and is used for collecting and settling cleaning wastewater; the sedimentation tank is provided with a vent;
a liquid inlet of the waste alkali pump can be selectively communicated with a liquid outlet of the sedimentation tank or a liquid outlet of the waste liquid tank; the liquid outlet of the spent caustic pump can be selectively communicated with the caustic pot or communicated with the next process;
the waste liquid tank is communicated with the waste water collecting component and is used for collecting cleaning waste water; the waste liquid tank is provided with a second air inlet; and a second air outlet is formed in the waste liquid tank.
Further, the lye tank is communicated with the wastewater collection member through a first pipeline; a first control valve is arranged on the first pipeline;
the sedimentation tank is communicated with the wastewater collection member through a second pipeline; a second control valve is arranged on the second pipeline;
the waste liquid tank is communicated with the waste water collecting component through a third pipeline; and a third control valve is arranged on the third pipeline.
Further, a first regulating valve is arranged at a liquid outlet of the desalted water tank;
a second regulating valve is arranged at the liquid outlet of the alkali liquor tank;
and a third regulating valve is arranged at a liquid outlet of the waste liquid tank.
Further, the cleaning device is communicated with a liquid outlet of the desalted water tank through a fourth pipeline; a fourth control valve is arranged on the fourth pipeline;
the cleaning device is communicated with a liquid outlet of the lye tank through a fifth pipeline; a fifth control valve is arranged on the fifth pipeline;
the fifth pipeline is communicated with a liquid outlet of the waste liquid tank through a sixth pipeline; a sixth control valve is arranged on the sixth pipeline; and the connection part of the sixth pipeline and the fifth pipeline is arranged between the fifth control valve and the second regulating valve.
Further, a liquid inlet of the waste alkali pump is communicated with a liquid outlet of the sedimentation tank through a seventh pipeline; and a seventh control valve is arranged on the seventh pipeline.
Further, a liquid outlet of the spent caustic pump is communicated with the caustic pot through an eighth pipeline; and an eighth control valve is arranged on the eighth pipeline.
Further, a PH detector I is arranged on the lye tank;
and a PH detector II is arranged on the waste liquid tank.
Further, a first liquid level meter is arranged on the desalted water tank;
a liquid level meter II is arranged on the alkali liquor tank;
and a third liquid level meter is arranged on the waste liquid tank.
Further, still include: a control device;
the control device is connected to the caustic soda pump, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve, and the eighth control valve, respectively, so as to perform control.
Further, a first liquid discharging port is formed in the desalted water tank; a first liquid discharge valve is arranged on the first liquid discharge port;
a second liquid outlet is formed in the alkali liquor tank; a second liquid discharge valve is arranged on the second liquid discharge port;
a third liquid outlet is formed in the waste liquid tank; and a third liquid discharge valve is arranged on the third liquid discharge port.
Borrow by above-mentioned technical scheme, the utility model discloses reduction furnace bell jar cleaning system has following advantage at least:
the safety of cleaning the bell jar of the reduction furnace and treating waste liquid can be improved.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
Fig. 1 is a schematic view of a cleaning system for a bell jar of a reduction furnace provided by an embodiment of the present invention.
Shown in the figure:
1 is belt cleaning device, 2 is the demineralized water jar, 3 is the lye tank, 4 is the waste liquid jar, 5 is the sedimentation tank, 6 is the waste alkali pump, 7 is the waste water collecting member, 8 is first pipeline, 9 is the third pipeline, 10 is the second pipeline, 11 is the fourth pipeline, 12 is the fifth pipeline, 13 is the sixth pipeline, 14 is the seventh pipeline, 15 is the eighth pipeline.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the intended purpose of the present invention, the following detailed description is given with reference to the accompanying drawings and preferred embodiments, in order to explain the detailed embodiments, structures, features and effects of the present invention. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
As shown in fig. 1, a reduction furnace bell jar cleaning system according to an embodiment of the present invention comprises a wastewater collection member 7, a desalted water tank 2, an alkali liquor tank 3, a cleaning device 1, a settling tank 5, an alkali waste pump 6 and a waste liquor tank 4;
the waste water collecting member 7 is used for collecting cleaning waste water; the waste water collecting means 7 may be provided separately or on the base of the washing apparatus 1 to collect the washed waste water for circulation to other apparatuses;
the desalted water tank 2 is used for storing desalted water for the cleaning device 1 to use; the desalted water tank 2 is provided with a water inlet for supplementing desalted water;
the lye tank 3 is used for storing lye for the cleaning device 1; the pH value of the waste water can be adjusted to the waste water tank 4; the lye tank 3 is communicated with the wastewater collecting component 7 and is used for collecting cleaning wastewater; the lye tank 3 is provided with a liquid supplementing port for supplementing desalted water or lye so as to control the pH value of the lye pipe; the lye tank 3 is provided with a first gas inlet for introducing nitrogen; the lye tank 3 is provided with a first gas outlet for emptying gas.
A liquid inlet of the cleaning device 1 is communicated with a liquid outlet of the desalted water tank 2; a liquid inlet of the cleaning device 1 is communicated with a liquid outlet of the lye tank 3; a liquid inlet of the cleaning device 1 is communicated with a liquid outlet of the waste liquid tank 4; the cleaning device 1 can selectively extract liquid from the desalted water tank 2 or the lye tank 3 or the waste liquid tank 4 to wash the bell jar of the reduction furnace, and the cleaning device 1 can selectively use different liquids to clean the bell jar of the reduction furnace to obtain different cleaning waste water which is collected by different containers.
The sedimentation tank 5 is communicated with a wastewater collection member 7 and is used for collecting and settling cleaning wastewater; the sedimentation tank 5 is provided with a vent; the deposited silicon powder in the sedimentation tank 5 can be cleaned regularly. The waste liquid can be returned to the lye tank 3 for recycling.
A liquid inlet of the waste alkali pump 6 can be selectively communicated with a liquid outlet of the sedimentation tank 5 or a liquid outlet of the waste liquid tank 4; the liquid outlet of the spent caustic pump 6 can be selectively communicated with a caustic pot or communicated with the next process; the waste liquid in the sedimentation tank 5 can be conveyed to the lye tank 3 through the waste lye pump 6, and the liquid in the waste liquid tank 4 can also be conveyed to the lye tank 3 through the waste lye pump 6; the liquid in the waste liquid tank 4 may be discharged to a site for sewage treatment by the waste alkali pump 6.
The waste liquid tank 4 is communicated with a waste water collecting member 7 and is used for collecting cleaning waste water; a second gas inlet is formed in the waste liquid tank 4 so as to selectively introduce nitrogen; and a second gas outlet is formed in the waste liquid tank 4 so as to facilitate the emptying of gas in the waste liquid tank 4.
The utility model discloses an embodiment provides a reduction furnace bell jar cleaning system can promote the security that reduction furnace bell jar washs and waste liquid treatment.
The utility model discloses a reduction furnace bell jar cleaning system that an embodiment provided can prevent that remaining silica flour and alkali lye mixed reaction when the reduction furnace bell jar washs, produces inflammable, explosive hydrogen, takes place the flash explosion accident.
The utility model discloses a reduction furnace bell jar cleaning system that an embodiment provided separately deposits the mixture of waste water, water and the alkali lye that will wash the reduction furnace bell jar, reduces industrial waste water's handling capacity and discharge.
In operation, in a first step, the cleaning device 1 sprays desalted water on the inner surface of the bell jar. And discharging the mixed liquid of the desalted water and the silicon powder after cleaning into a settling pond 5. And after the water in the sedimentation tank 5 is settled, the water overflows to a production drainage pipe network. After the silicon powder reaches a certain amount in the sedimentation tank 5, manually cleaning the silicon powder in the sedimentation tank 5. The silicon powder washed for the first time enters a sedimentation tank 5 to prevent the silicon powder from contacting with alkali liquor to generate hydrogen. The desalted water is settled by the settling pond 5, so that the method is safe and environment-friendly, and the desalted water can be discharged to a rainwater pipe network, thereby reducing the sewage discharge cost and the treatment cost.
Secondly, spraying sodium hydroxide lye on the inner surface of the bell jar by the cleaning device 1; the silicon powder attached to the inner wall of the bell jar reacts with the sodium hydroxide alkali liquor: si +2NaOH + H2O ═ Na2SiO3+2H2 ═ ≠. The mixed liquid is recycled to the lye tank 3, nitrogen is introduced into the lye tank 3 for protection, and redundant gas is discharged to the air through a flame arrester. The concentration of the alkali liquor in the alkali liquor tank 3 is suitable and can be repeatedly utilized.
Thirdly, the cleaning device 1 sprays desalted water to the inner surface of the bell jar. The residual alkali liquor on the inner wall of the bell jar is cleaned, the part of water and alkali mixed liquor is discharged into the waste liquor tank 4, the PH value in the waste liquor tank 4 is detected, the PH value is 7-9, and the waste liquor can be directly discharged to a sewage treatment pipe network. And thirdly, the diluted alkali liquor after water washing enters a waste liquor tank 4, and the sewage can be directly discharged when the detection index is qualified.
The utility model discloses a reduction furnace bell jar cleaning system that an embodiment provided can prevent that silica flour from reacting with sodium hydroxide and producing hydrogen among the reduction furnace bell jar cleaning process, and the reaction can produce the naked light in the interior remaining high boiling thing of reduction furnace bell jar, explodes hydrogen, sends the incident.
As a preference of the above embodiment, the lye tank 3 is communicated with the wastewater collecting member 7 through the first pipe 8; a first control valve is arranged on the first pipeline 8; the sedimentation tank 5 is communicated with the wastewater collection member 7 through a second pipeline 10; a second control valve is arranged on the second pipeline 10; the waste liquid tank 4 is communicated with the waste water collecting member 7 through a third pipeline 9; the third pipe 9 is provided with a third control valve, and the flow direction of the cleaning wastewater is selected by opening and closing the first control valve, the second control valve and the third control valve, so that the container in the flow direction is selected.
As the optimization of the above embodiment, the liquid outlet of the desalted water tank 2 is provided with a first regulating valve; a second regulating valve is arranged at the liquid outlet of the lye tank 3; the liquid outlet of the waste liquid tank 4 is provided with a third regulating valve to control the liquid outlets of the desalted water tank 2, the lye tank 3 and the waste liquid tank 4.
Further preferably, the cleaning device 1 is communicated with a liquid outlet of the desalted water tank 2 through a fourth pipeline 11; a fourth control valve is arranged on the fourth pipeline 11 to control the on-off of the fourth pipeline 11; the cleaning device 1 is communicated with a liquid outlet of the lye tank 3 through a fifth pipeline 12; a fifth control valve is arranged on the fifth pipeline 12; the fifth pipeline 12 is communicated with a liquid outlet of the waste liquid tank 4 through a sixth pipeline 13; a sixth control valve is arranged on the sixth pipeline 13; the connection part of the sixth pipeline 13 and the fifth pipeline 12 is provided with a fifth control valve and a second regulating valve, so that the liquid inlet of the cleaning device 1 is controlled to be communicated with the desalted water tank 2 or the alkali liquor tank 3 or the waste liquor tank 4 through the fourth control valve, the fifth control valve and the sixth control valve, and the control device can conveniently perform automatic control.
As a preference of the above embodiment, the liquid inlet of the waste alkali pump 6 is communicated with the liquid outlet of the sedimentation tank 5 through a seventh pipeline 14; a seventh control valve is arranged on the seventh pipeline 14; so as to control the liquid inlet of the waste alkali pump 6 to be communicated with the sedimentation tank 5 or communicated with the waste liquid tank 4. Preferably, the liquid outlet of the waste alkali pump 6 is communicated with the alkali liquor tank 3 through an eighth pipeline 15; an eighth control valve is arranged on the eighth pipeline 15, so that the waste alkali pump 6 can convey the liquid in the sedimentation tank 5 or the waste liquid tank 4 to the alkali liquid tank 3; the passage of the eighth pipe 15 can selectively output the liquid to the lye tank 3 or the sewage treatment site.
As a preferable example of the above embodiment, the lye tank 3 is provided with a PH detector i for detecting the PH of the liquid in the lye tank 3; and a PH detector II is arranged on the waste liquid tank 4 and used for detecting the pH value of the liquid in the waste liquid tank 4, so that an operator can conveniently allocate the pH value of the liquid.
As a preference of the above embodiment, the desalted water tank 2 is provided with a first liquid level meter for detecting the liquid level of the desalted water tank 2; a liquid level meter II is arranged on the lye tank 3 and is used for detecting the liquid level of the lye tank 3; a third liquid level meter is arranged on the waste liquid tank 4 and is used for liquid level of the waste liquid tank 4; and the operation control of operators is convenient.
As a preferred aspect of the above embodiment, an embodiment of the present invention provides a reduction furnace bell jar cleaning system, further comprising: a control device; the control device is respectively connected with the waste alkali pump 6, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve and the eighth control valve so as to control, and an operator can conveniently control the system.
As a preference of the above embodiment, the desalted water tank 2 is provided with a first drain port; liquid discharge for the desalted water tank 2; the first liquid discharge port is provided with a first liquid discharge valve for controlling the on-off of the first liquid discharge port; a second liquid outlet is arranged on the lye tank 3; liquid discharge for the lye tank 3; a second liquid discharge valve is arranged on the second liquid discharge port and used for controlling the on-off of the second liquid discharge port; a third liquid outlet is arranged on the waste liquid tank 4; liquid discharge for the waste liquid tank 4; and a third liquid discharge valve is arranged on the third liquid discharge port and used for controlling the on-off of the third liquid discharge port, so that the liquid discharge operation of an operator is facilitated.
Further still, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, with such terms being used only to distinguish one element from another. Without departing from the scope of the exemplary embodiments. Similarly, the terms first, second, etc. do not denote any order or order, but rather the terms first, second, etc. are used to distinguish one element from another. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent change and modification made by the technical spirit of the present invention to the above embodiments are all within the scope of the technical solution of the present invention.
Claims (10)
1. A reducing furnace bell jar cleaning system is characterized by comprising a wastewater collecting component, a desalted water tank, an alkali liquor tank, a cleaning device, a sedimentation tank, an alkali liquor pump and a waste liquor tank;
the wastewater collection member is used for collecting cleaning wastewater;
the desalted water tank is used for storing desalted water; the desalting water tank is provided with a water inlet for supplementing desalting water;
the lye tank is used for storing lye; the alkali liquor tank is communicated with the wastewater collecting component and is used for collecting cleaning wastewater; the lye tank is provided with a lye supplementing port for supplementing desalted water or lye; the alkali liquor tank is provided with a first air inlet; the alkali liquor tank is provided with a first air outlet;
a liquid inlet of the cleaning device is communicated with a liquid outlet of the desalted water tank;
a liquid inlet of the cleaning device is communicated with a liquid outlet of the lye tank;
a liquid inlet of the cleaning device is communicated with a liquid outlet of the waste liquid tank;
the cleaning device can selectively extract liquid from the desalting water tank or the alkali liquor tank or the waste liquor tank to flush the bell jar of the reduction furnace;
the sedimentation tank is communicated with the wastewater collecting component and is used for collecting and settling cleaning wastewater; the sedimentation tank is provided with a vent;
a liquid inlet of the waste alkali pump can be selectively communicated with a liquid outlet of the sedimentation tank or a liquid outlet of the waste liquid tank; the liquid outlet of the spent caustic pump can be selectively communicated with the caustic pot or communicated with the next process;
the waste liquid tank is communicated with the waste water collecting component and is used for collecting cleaning waste water; the waste liquid tank is provided with a second air inlet; and a second air outlet is formed in the waste liquid tank.
2. The reduction furnace bell jar cleaning system according to claim 1,
the alkali liquor tank is communicated with the wastewater collecting component through a first pipeline; a first control valve is arranged on the first pipeline;
the sedimentation tank is communicated with the wastewater collection member through a second pipeline; a second control valve is arranged on the second pipeline;
the waste liquid tank is communicated with the waste water collecting component through a third pipeline; and a third control valve is arranged on the third pipeline.
3. The reduction furnace bell jar cleaning system according to claim 2,
a first regulating valve is arranged at a liquid outlet of the desalted water tank;
a second regulating valve is arranged at the liquid outlet of the alkali liquor tank;
and a third regulating valve is arranged at a liquid outlet of the waste liquid tank.
4. The reduction furnace bell jar cleaning system according to claim 3,
the cleaning device is communicated with a liquid outlet of the desalted water tank through a fourth pipeline; a fourth control valve is arranged on the fourth pipeline;
the cleaning device is communicated with a liquid outlet of the lye tank through a fifth pipeline; a fifth control valve is arranged on the fifth pipeline;
the fifth pipeline is communicated with a liquid outlet of the waste liquid tank through a sixth pipeline; a sixth control valve is arranged on the sixth pipeline; and the connection part of the sixth pipeline and the fifth pipeline is arranged between the fifth control valve and the second regulating valve.
5. The reduction furnace bell jar cleaning system according to claim 4,
a liquid inlet of the waste alkali pump is communicated with a liquid outlet of the sedimentation tank through a seventh pipeline; and a seventh control valve is arranged on the seventh pipeline.
6. The reduction furnace bell jar cleaning system according to claim 5,
a liquid outlet of the waste alkali pump is communicated with the alkali liquor tank through an eighth pipeline; and an eighth control valve is arranged on the eighth pipeline.
7. The reduction furnace bell jar cleaning system according to claim 1,
a PH detector I is arranged on the lye tank;
and a PH detector II is arranged on the waste liquid tank.
8. The reduction furnace bell jar cleaning system according to claim 1,
a first liquid level meter is arranged on the desalted water tank;
a liquid level meter II is arranged on the alkali liquor tank;
and a third liquid level meter is arranged on the waste liquid tank.
9. The reduction furnace bell jar cleaning system of claim 6, further comprising: a control device;
the control device is connected to the caustic soda pump, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve, and the eighth control valve, respectively, so as to perform control.
10. The reduction furnace bell jar cleaning system according to claim 1,
the desalting water tank is provided with a first liquid outlet; a first liquid discharge valve is arranged on the first liquid discharge port;
a second liquid outlet is formed in the alkali liquor tank; a second liquid discharge valve is arranged on the second liquid discharge port;
a third liquid outlet is formed in the waste liquid tank; and a third liquid discharge valve is arranged on the third liquid discharge port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021838026.0U CN213162227U (en) | 2020-08-28 | 2020-08-28 | Reduction furnace bell jar cleaning system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021838026.0U CN213162227U (en) | 2020-08-28 | 2020-08-28 | Reduction furnace bell jar cleaning system |
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| Publication Number | Publication Date |
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| CN213162227U true CN213162227U (en) | 2021-05-11 |
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| CN202021838026.0U Active CN213162227U (en) | 2020-08-28 | 2020-08-28 | Reduction furnace bell jar cleaning system |
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| CN (1) | CN213162227U (en) |
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