CN213147407U - Energy-saving annealing furnace - Google Patents
Energy-saving annealing furnace Download PDFInfo
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- CN213147407U CN213147407U CN202022199801.9U CN202022199801U CN213147407U CN 213147407 U CN213147407 U CN 213147407U CN 202022199801 U CN202022199801 U CN 202022199801U CN 213147407 U CN213147407 U CN 213147407U
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Abstract
The utility model discloses an energy-saving annealing furnace, include: the annealing furnace body comprises a rectangular outer shell and an inner insulating brick layer arranged on the inner surface wall of the rectangular outer shell, a partition plate mechanism is arranged at the center of the upper surface of the annealing furnace body along the direction, the partition plate mechanism partitions the annealing furnace body into a preheating section and an annealing heating section, and the top end of the annealing heating section is in conduction connection with an air suction cover. The utility model discloses in, this energy-saving annealing stove, on the one hand can carry out waste heat utilization to energy-saving annealing stove exhaust flue gas, heat energy has been practiced thrift, on the other hand can preheat the raw materials, improve its stability of being heated and the efficiency of heating, secondly division board mechanism comprises concave seat, electric putter and seal division board, drives seal division board through electric putter and goes up and down, can control preheating section and annealing heating section and switch on each other, the raw materials of being convenient for enters into annealing heating section through preheating section.
Description
Technical Field
The utility model relates to an annealing furnace technical field especially relates to energy-saving annealing furnace.
Background
An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate, the annealing furnace may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. The annealing furnace is completed by an apparatus specifically designed for heating semiconductor wafers. The annealing furnace is an energy-saving periodic operation furnace, has a super energy-saving structure, adopts a fiber structure and saves electricity by 60 percent.
Present annealing stove simple structure lacks the raw materials and preheats the structure, and the raw materials carries the interior direct heating of annealing stove, easily causes the raw materials to damage because of rising temperature too fast too high, secondly does not have fine waste heat recovery structure to annealing stove exhaust high temperature flue gas, easily leads to heat energy extravagant, so can not satisfy user's demand.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an energy-saving annealing furnace, inside division board mechanism that is provided with of annealing furnace body, separate annealing furnace body and form preheating section and annealing heating section, in the in-process that uses, can pass through the cover of breathing in with annealing heating section exhaust flue gas, pipe and blast pipe are discharged into in the preheating section, a preheating raw materials, such structural design, can carry out waste heat utilization to energy-saving annealing furnace exhaust flue gas on the one hand, heat energy has been practiced thrift, on the other hand can preheat the raw materials, improve its stability of being heated and the efficiency of heating, secondly division board mechanism, by concave seat, electric putter and seal division board constitute, it goes up and down to drive seal division board through electric putter, can control preheating section and annealing heating section and switch on each other, be convenient for the raw materials enters into annealing heating section through preheating section.
In order to achieve the above purpose, the utility model adopts the following technical scheme: an energy-saving annealing furnace comprising: an annealing furnace body;
the annealing furnace body comprises a rectangular outer shell and an inner heat-insulating brick layer arranged on the inner surface wall of the rectangular outer shell;
the center of the upper surface of the annealing furnace body along the direction is provided with a partition plate mechanism, the annealing furnace body is partitioned by the partition plate mechanism to form a preheating section and an annealing heating section, the top end of the annealing heating section is in conduction connection with an air suction cover, the air suction cover is connected with a guide pipe, and the outer surface wall of one end, away from the air suction cover, of the guide pipe is connected with an exhaust pipe which is in mutual conduction with the preheating section;
the annealing furnace body has been seted up discharge gate and feed inlet respectively along length direction's both ends, be provided with sealing mechanism on the outer table wall of length direction's both ends along the annealing furnace body.
As a further description of the above technical solution:
the annealing heating section is provided with the combustor on the outside surface wall of length direction's both sides, the annealing heating section is fixed with the air supply fan along the top that lies in the combustor on length direction's the outside surface wall of both sides, and the outlet duct of air supply fan runs through annealing heating section and extends to inside.
As a further description of the above technical solution:
the division board mechanism includes concave type seat, electric putter and seal division board, concave type seat bolt fastening is at annealing stove body upper surface, electric putter inlays on establishing the inside bottom plate of mount pad concave type seat, seal division board sets up the inside at concave type seat, electric putter's bottom and seal division board welded fastening, the bar hole that the sealed division board of cooperation used is seted up to annealing stove body upper surface.
As a further description of the above technical solution:
and the outer surface walls of two sides of the preheating section along the length direction are in conduction connection with an air outlet pipe.
As a further description of the above technical solution:
the sealing mechanism comprises a concave frame, a sealing plate and a hydraulic telescopic rod, the concave frame is welded and fixed on the surface wall of one end of the annealing furnace body along the length direction, the hydraulic telescopic rod is fixed on the surface of the horizontal end of the concave frame through bolts, the bottom end of the hydraulic telescopic rod is fixed on the sealing plate through bolts, and a limiting buffer mechanism is further welded between the sealing plate and the concave frame.
As a further description of the above technical solution:
the limiting buffer mechanism comprises a sleeve, an inserting rod and a limiting disc, the inserting rod is inserted in the sleeve, the bottom end of the inserting rod extends to the outer side of the sleeve, the top end of the inserting rod is located in the sleeve and welded with the limiting disc, and a spring is sleeved on the inserting rod and located in the sleeve.
As a further description of the above technical solution:
and an air suction fan is arranged in the air suction cover.
The utility model provides an energy-saving annealing furnace. The method has the following beneficial effects:
(1) this energy-saving annealing stove, inside division board mechanism that is provided with of annealing stove body, separate annealing stove body and form preheating section and annealing heating section, in the use, can pass through the cover of breathing in with annealing heating section exhaust flue gas, pipe and blast pipe are discharged into in the preheating section, be used for preheating the raw materials, such structural design, can carry out waste heat utilization to energy-saving annealing stove exhaust flue gas on the one hand, heat energy has been practiced thrift, on the other hand can preheat the raw materials, improve its stability of being heated and the efficiency of heating, secondly, division board mechanism, by the concave seat, electric putter and seal division board constitute, it goes up and down to drive seal division board through electric putter, can control preheating section and annealing heating section and switch on each other, be convenient for the raw materials enter into annealing heating section through preheating section.
(2) This energy-saving annealing stove, the position department that lies in feed inlet and discharge gate on annealing stove body is provided with sealing mechanism, can seal annealing stove body, the setting on insulating brick layer in the cooperation, the heat loss of this energy-saving annealing stove has further been reduced, improve its energy-conserving effect, it is provided with spacing buffer gear again between closing plate and the concave type frame, can carry out relative spacing with closing plate and concave type frame, hydraulic telescoping rod drives closing plate lifting movement's stability has been improved, the setting of cooperation spring, make hydraulic telescoping rod drive closing plate move down, spring cushioning through the spring, can reduce its impact, improve the stability of its use.
Drawings
FIG. 1 is a schematic view of the internal structure of an energy-saving annealing furnace according to the present invention;
FIG. 2 is a schematic view of the surface structure of the energy-saving annealing furnace of the present invention;
FIG. 3 is a schematic structural view of the middle partition plate mechanism of the present invention;
fig. 4 is a schematic structural view of the sealing mechanism of the present invention;
fig. 5 is a schematic structural view of the middle limit buffer mechanism of the present invention.
Illustration of the drawings:
1. an annealing furnace body; 2. a rectangular outer housing; 3. an inner insulating brick layer; 4. a partition plate mechanism; 41. a concave seat; 42. an electric push rod; 43. sealing the partition plate; 5. a preheating section; 6. an annealing heating section; 7. a discharge port; 8. a feed inlet; 9. a sealing mechanism; 91. a concave frame; 92. a sealing plate; 93. a hydraulic telescopic rod; 94. a limiting buffer mechanism; 941. a sleeve; 942. a plug rod; 943. a spring; 944. a limiting disc; 10. an air intake cover; 11. a conduit; 12. an exhaust pipe; 13. a burner; 14. air supply fan.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1 to 5, an energy saving type annealing furnace includes: an annealing furnace body 1;
the annealing furnace body 1 comprises a rectangular outer shell 2 and an inner insulating brick layer 3 arranged on the inner surface wall of the rectangular outer shell 2;
a partition plate mechanism 4 is arranged at the center of the upper surface of the annealing furnace body 1 along the direction, the annealing furnace body 1 is partitioned by the partition plate mechanism 4 to form a preheating section 5 and an annealing heating section 6, the top end of the annealing heating section 6 is in conduction connection with an air suction cover 10, the air suction cover 10 is connected with a guide pipe 11, and the outer surface wall of one end, far away from the air suction cover 10, of the guide pipe 11 is connected with an exhaust pipe 12 which is in mutual conduction with the preheating section 5;
the two ends of the annealing furnace body 1 along the length direction are respectively provided with a discharge port 7 and a feed port 8, and the outer surface walls of the two ends of the annealing furnace body 1 along the length direction are provided with sealing mechanisms 9.
The partition plate mechanism 4 comprises a concave seat 41, an electric push rod 42 and a sealing partition plate 43, the concave seat 41 is fixed on the upper surface of the annealing furnace body 1 through bolts, the electric push rod 42 is embedded on a bottom plate inside the concave seat 41 of the installation seat, the sealing partition plate 43 is arranged inside the concave seat 41, the bottom end of the electric push rod 42 is fixed with the sealing partition plate 43 in a welding mode, and a strip-shaped hole matched with the sealing partition plate 43 for use is formed in the upper surface of the annealing furnace body 1.
The outer surface walls of two sides of the preheating section 5 along the length direction are connected with an air outlet pipe in a conducting way.
The sealing mechanism 9 comprises a concave frame 91, a sealing plate 92 and a hydraulic telescopic rod 93, the concave frame 91 is welded and fixed on the surface wall of one end of the annealing furnace body 1 along the length direction, the hydraulic telescopic rod 93 is fixed on the lower surface of the horizontal end of the concave frame 91 through bolts, the bottom end of the hydraulic telescopic rod 93 is fixed on the sealing plate 92 through bolts, and a limiting buffer mechanism 94 is further welded between the sealing plate 92 and the concave frame 91.
The limiting buffer mechanism 94 comprises a sleeve 941, an insertion rod 942 and a limiting disc 944, the insertion of the sleeve 941 is connected with the insertion rod 942, the bottom end of the insertion rod 942 extends to the outer side of the sleeve 941, the top end of the insertion rod 942 is located in the sleeve 941 and welded with the limiting disc 944, and a spring 943 is sleeved in the sleeve 941 on the insertion rod 942.
The inside of the suction cover 10 is provided with a suction fan.
The working principle is as follows: when the energy-saving annealing furnace is used, firstly, raw materials can be conveyed to the preheating section 5 through the feed inlet 8, the feed inlet 8 is sealed through the sealing mechanism 9, when the sealing mechanism 9 is sealed, the sealing plate 92 can be driven to move downwards to seal the feed inlet 8 by controlling the extension of the hydraulic telescopic rod 93, when the sealing plate 92 moves downwards, the insertion rod 942 moves downwards under the driving of the sealing plate 92, the spring 943 contracts, the impact force generated by the downward movement of the sealing plate 92 can be reduced through the elastic buffering of the spring 943, after the raw materials enter the preheating section 5, high-temperature flue gas in the annealing heating section 6 is discharged into the preheating section 5 under the conveying action of the air suction cover 10, the guide pipe 11 and the exhaust pipe 12 to preheat the raw materials, the preheated raw materials can be contracted by controlling the electric push rod 42 to drive the sealing partition plate 43 to lift, and then the raw materials are conveyed, and then the electric push rod 42 is controlled to extend again to drive the sealing partition plate 43 to move downwards, the preheating section 5 and the annealing heating section 6 are sealed in a separated mode, at the moment, the burner 13 and the air supplementing fan 14 are opened and controlled to work, the burner 13 works to heat the raw material, the air supplementing fan 14 can absorb outside air and discharge the air into the annealing heating section 6, sufficient oxygen supply inside the annealing heating section is ensured, the fuel combustion sufficiency is ensured, after the raw material is heated, the sealing mechanism 9 arranged on the discharge port 7 can be opened, and the raw material is conveyed out from the annealing heating section 6.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (7)
1. Energy-saving annealing stove, its characterized in that includes: an annealing furnace body (1);
the annealing furnace body (1) comprises a rectangular outer shell (2) and an inner insulating brick layer (3) arranged on the inner surface wall of the rectangular outer shell (2);
a partition plate mechanism (4) is arranged at the center of the upper surface of the annealing furnace body (1) along the direction, the annealing furnace body (1) is partitioned by the partition plate mechanism (4) to form a preheating section (5) and an annealing heating section (6), the top end of the annealing heating section (6) is in conduction connection with an air suction cover (10), the air suction cover (10) is connected with a guide pipe (11), and the outer surface wall of one end, away from the air suction cover (10), of the guide pipe (11) is connected with an exhaust pipe (12) which is in conduction with the preheating section (5);
the annealing furnace body (1) has been seted up discharge gate (7) and feed inlet (8) respectively along length direction's both ends, be provided with sealing mechanism (9) on annealing furnace body (1) along length direction's both ends exterior wall.
2. The energy-saving annealing furnace according to claim 1, characterized in that burners (13) are arranged on the outer surface walls of the annealing heating section (6) at both sides in the length direction, an air supply fan (14) is fixed above the burners (13) on the outer surface walls of the annealing heating section (6) at both sides in the length direction, and an air outlet pipe of the air supply fan (14) penetrates through the annealing heating section (6) and extends to the inside.
3. The energy-saving annealing furnace according to claim 1, wherein the partition plate mechanism (4) comprises a concave seat (41), an electric push rod (42) and a sealing partition plate (43), the concave seat (41) is fixed on the upper surface of the annealing furnace body (1) through bolts, the electric push rod (42) is embedded in a bottom plate inside the concave seat (41) of the installation seat, the sealing partition plate (43) is arranged inside the concave seat (41), the bottom end of the electric push rod (42) is fixed with the sealing partition plate (43) through welding, and a strip-shaped hole matched with the sealing partition plate (43) for use is formed in the upper surface of the annealing furnace body (1).
4. The energy-saving annealing furnace according to claim 1, wherein the preheating section (5) is connected with an air outlet pipe in a conducting manner on the outer surface wall of both sides in the length direction.
5. The energy-saving annealing furnace according to claim 1, wherein the sealing mechanism (9) comprises a concave frame (91), a sealing plate (92) and a hydraulic telescopic rod (93), the concave frame (91) is welded and fixed on one end surface wall of the annealing furnace body (1) along the length direction, the hydraulic telescopic rod (93) is fixed on the lower surface of the horizontal end of the concave frame (91) through a bolt, the bottom end of the hydraulic telescopic rod (93) is fixed on the sealing plate (92) through a bolt, and a limit buffer mechanism (94) is welded between the sealing plate (92) and the concave frame (91).
6. The energy-saving annealing furnace according to claim 5, characterized in that the limiting buffer mechanism (94) comprises a sleeve (941), a splicing rod (942) and a limiting disc (944), the splicing rod (942) is inserted into the sleeve (941), the bottom end of the splicing rod (942) extends to the outer side of the sleeve (941), the top end of the splicing rod (942) is located inside the sleeve (941) and welded with the limiting disc (944), and a spring (943) is sleeved on the splicing rod (942) located inside the sleeve (941).
7. The energy-saving annealing furnace according to claim 1, characterized in that the inside of the suction hood (10) is provided with a suction fan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022199801.9U CN213147407U (en) | 2020-09-29 | 2020-09-29 | Energy-saving annealing furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022199801.9U CN213147407U (en) | 2020-09-29 | 2020-09-29 | Energy-saving annealing furnace |
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| CN213147407U true CN213147407U (en) | 2021-05-07 |
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| CN202022199801.9U Active CN213147407U (en) | 2020-09-29 | 2020-09-29 | Energy-saving annealing furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115284646A (en) * | 2022-06-29 | 2022-11-04 | 浙江中科玖源新材料有限公司 | Polyimide film annealing equipment |
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- 2020-09-29 CN CN202022199801.9U patent/CN213147407U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115284646A (en) * | 2022-06-29 | 2022-11-04 | 浙江中科玖源新材料有限公司 | Polyimide film annealing equipment |
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