CN213134344U - Novel cylinder scraper for semiconductor pipeline - Google Patents

Novel cylinder scraper for semiconductor pipeline Download PDF

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Publication number
CN213134344U
CN213134344U CN202021515697.3U CN202021515697U CN213134344U CN 213134344 U CN213134344 U CN 213134344U CN 202021515697 U CN202021515697 U CN 202021515697U CN 213134344 U CN213134344 U CN 213134344U
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China
Prior art keywords
scraper
piston rod
cylinder
spring
semiconductor
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CN202021515697.3U
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Chinese (zh)
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崔汉博
崔汉宽
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Shaoxing Gaosheng Semiconductor Technology Co ltd
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Shaoxing Gaosheng Semiconductor Technology Co ltd
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Abstract

The utility model discloses a novel cylinder scraper of semiconductor pipeline, include and ventilate the connecting portion that prevent plug tray interconnect, connecting portion are hollow shell-like structure, the top of connecting portion is equipped with scraper cylinder and the main cavity body connecting pipe that is used for admitting air, main cavity body connecting pipe and connecting portion communicate each other, the piston rod of scraper cylinder is placed down, and there is the piston rod spliced pole piston rod department of scraper cylinder through bolted connection, the part that the piston rod spliced pole passed the connecting portion up end is stepped shaft structure, the below of piston rod spliced pole is connected with the spring fixed pin, piston rod spliced pole and spring fixed pin tight fit, the diameter of the part that the spring fixed pin is connected for stepped shaft structure and its upper portion and piston rod spliced pole is greater than the lower part diameter. The utility model discloses need not to dismantle the pipeline and dredge convenient operation.

Description

Novel cylinder scraper for semiconductor pipeline
Technical Field
The utility model belongs to the technical field of the pipeline mediation technique and specifically relates to a novel cylinder scraper of semiconductor pipeline is related to.
Background
Gas lets in the combustion chamber from the main cavity body and burns in the semiconductor pipeline, and rethread cooling water cools off the cooling, and the pipeline can be stopped up to some impurity of often containing in the gas, leads to ventilating not smooth, influences the result of use, consequently needs an equipment can in time dredge the pipeline, and need not to dismantle the washing to whole device to improve equipment production efficiency.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome above-mentioned prior art not enough, provide a novel cylinder scraper of semiconductor pipeline.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a novel cylinder scraper for a semiconductor pipeline, which comprises a connecting part mutually connected with a ventilation anti-blocking disc, the connecting part is of a hollow shell-shaped structure, a scraper cylinder and a main cavity connecting pipe for air inlet are arranged above the connecting part, the main cavity connecting pipe and the connecting part are communicated with each other, a piston rod of the scraper cylinder is placed downwards, a piston rod connecting post is connected with the piston rod of the scraper cylinder through a bolt, the part of the piston rod connecting post, which penetrates through the upper end surface of the connecting part, is of a stepped shaft structure, a spring fixing pin is connected below the piston rod connecting column, the piston rod connecting column is tightly matched with the spring fixing pin, the spring fixing pin is of a stepped shaft structure, the diameter of the part of the upper part of the spring fixing pin connected with the piston rod connecting column is larger than that of the lower part of the spring fixing pin, the periphery cover of spring fixed pin is equipped with the spring scraper, the upper portion tight fit of spring scraper and spring fixed pin.
And an air joint is arranged on the side wall of the main cavity body connecting pipe and is positioned on one side, away from the scraper cylinder, of the main cavity body connecting pipe.
The part that the piston rod spliced pole passed connecting portion up end is equipped with the shaft shoulder department is equipped with the gasket, the upper end and the gasket of spring scraper are supported and lean on, the round card of spring scraper top is gone into in the space between gasket and the spring fixed pin.
The periphery cover of piston rod spliced pole is equipped with the sealed bucket of piston rod, be equipped with the sealing ring between the upper portion of the sealed bucket of piston rod and the scraper cylinder, the lower part card of the sealed bucket of piston rod is gone into in the corresponding round hole on the connecting portion.
And the scraper cylinder is provided with an air inlet joint and an air outlet joint.
The utility model has the advantages that: when the pipeline meets stifled back, scraper cylinder promotes spring scraper up-and-down motion for the pipeline that the spring scraper meets stifled department is dredged, need not to dismantle the device, and it is more simple and convenient to operate, and the result of use is showing.
Drawings
FIG. 1 is an assembly view of the present invention and the cavity of the vent plate;
FIG. 2 is a partial cross-sectional view of the novel vent plate cavity assembly structure of this experiment;
FIG. 3 is a schematic structural view of the present invention;
fig. 4 is a front view of the present invention;
fig. 5 is a partial cross-sectional view of the present invention;
FIG. 6 is an enlarged view taken at A in FIG. 2;
FIG. 7 is a schematic structural view of the cavity of the vent plate;
FIG. 8 is a schematic structural view of the sleeve;
fig. 9 is a schematic view of the position relationship between the air inlet and the sleeve.
In the figure: the device comprises a main cavity connecting pipe 1, a connecting part 11, an air joint 12, a scraper cylinder 2, an air inlet joint 21, an air outlet joint 22, a piston rod sealing barrel 3, a spring scraper 4, a piston rod connecting column 5, a shaft shoulder 51, a spring fixing pin 6, a sealing gasket 7, an air ventilation disc cavity 8, an air inlet 81, an observation port 82, a groove 83, a sleeve 9, an air vent 91 and a gasket 10.
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific embodiments:
as shown in fig. 1 to 9, a pipeline ventilation device comprises a cylinder scraper and a ventilation anti-blocking disc which are connected through a bolt, wherein a sealing gasket 7 is arranged between the cylinder scraper and the ventilation anti-blocking disc;
the air cylinder scraper comprises a connecting part 11 connected with the ventilating anti-blocking disc, the connecting part 11 is a hollow shell-shaped structure, the cross section of the connecting part 11 is of a similar fan-shaped structure and comprises a big end and a small end, a scraper air cylinder 2 and a main cavity body connecting pipe 1 used for air intake are arranged above the connecting part 11, the scraper air cylinder 2 is located at the small end of the connecting part 11, the main cavity body connecting pipe 1 is located at the big end of the connecting part 11, the main cavity body connecting pipe 1 and the connecting part 11 are communicated with each other, an air connector 12 is arranged on the side wall of the main cavity body connecting pipe 1, the air connector 12 is located on one side, away from the scraper air cylinder 2, of the main cavity body connecting pipe 1, air is introduced into the air connector 12 for accelerating gas circulation, a piston rod of the scraper air cylinder 2 is placed downwards, and is connected with a piston rod connecting column 5 through a, the spring fixing device is characterized in that a gasket 10 is arranged at a shaft shoulder 51, a spring fixing pin 6 is connected below the piston rod connecting post 5, the piston rod connecting post 5 is in tight fit with the spring fixing pin 6, the spring fixing pin 6 is of a stepped shaft structure, the diameter of the part, connected with the piston rod connecting post 5, of the upper portion of the spring fixing pin 6 is larger than that of the lower portion of the spring fixing pin, a spring scraper 4 is sleeved on the periphery of the spring fixing pin 6, the upper end of the spring scraper 4 abuts against the gasket 10, the spring scraper 4 is in tight fit with the upper portion of the spring fixing pin 6, and the uppermost circle of the spring scraper 4; a piston rod sealing barrel 3 is sleeved on the periphery of the piston rod connecting column 5, a sealing ring is arranged between the upper part of the piston rod sealing barrel 3 and the scraper cylinder 2, the lower part of the piston rod sealing barrel 3 is clamped into a round hole corresponding to the small end of the connecting part 11, and the scraper cylinder 2 is provided with an air inlet joint 21 and an air outlet joint 22 for air inlet and outlet of the scraper cylinder 2, so that the spring scraper 4 moves up and down under the action of a push rod of the scraper cylinder 2 to clean a plug in the ventilation anti-blocking disc;
the ventilation anti-blocking disc comprises a ventilation disc cavity 8, six circular grooves 83 are annularly arrayed on the upper portion of the ventilation disc cavity 8, through holes are formed in the lower end faces of the grooves 83, sleeves 9 are arranged in the through holes, the sleeves 9 are of a stepped shaft structure, the upper portions of the sleeves 9 abut against the grooves 83 to prevent the sleeves 9 from sliding off from the through holes, the spring scrapers 4 and the spring fixing pins 6 are located in the sleeves 9, and bolts penetrate through the upper end face of the connecting portion 11 and the sealing gaskets 7 and are screwed into the ventilation disc cavity 8;
the periphery of the vent disc cavity 8 is provided with a plurality of air inlets 81 corresponding to the positions of the through holes, an air inlet channel of each air inlet 81 is communicated with the through holes, the part of the sleeve 9, which is positioned in the groove 83, is provided with a groove ring, the groove ring is positioned on the periphery of the sleeve 9, the side wall of the sleeve 9 is also provided with a plurality of vent holes 91, the vent holes 91 are positioned in the groove rings, the air inlets 81 are communicated with air, the air enters the sleeve 9 through the air inlets 81 and the vent holes 91 to ventilate the vent disc cavity 8 and accelerate the movement of the air, the upper part of the vent disc cavity 8 is provided with an observation port 82, the observation port 82 obliquely extends into the vent disc cavity 8 and extends to the bottom of the vent disc cavity 8, and the air is usually blocked at the position of the sleeve 9 after being transported to the connecting part 11 and the vent disc cavity 8 from the connecting pipe 1, so as to, therefore, the scraper cylinder 2 pushes the spring scraper 4 to move up and down to dredge the sleeve 9, so that the ventilation efficiency is improved.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims (5)

1. The utility model provides a novel cylinder scraper of semiconductor pipeline which characterized in that: comprises a connecting part (11) connected with a ventilation anti-blocking disc, the connecting part (11) is a hollow shell structure, a scraper cylinder (2) and a main cavity body connecting pipe (1) used for air inlet are arranged above the connecting part (11), the main cavity body connecting pipe (1) and the connecting part (11) are mutually communicated, a piston rod of the scraper cylinder (2) is placed downwards, a piston rod connecting column (5) is connected with the piston rod of the scraper cylinder (2) through a bolt, the part of the piston rod connecting column (5) passing through the upper end surface of the connecting part (11) is of a stepped shaft structure, a spring fixing pin (6) is connected below the piston rod connecting column (5), the piston rod connecting column (5) is tightly matched with the spring fixing pin (6), the spring fixing pin (6) is of the stepped shaft structure, and the diameter of the part of the upper part of the spring fixing pin (6) connected with the piston rod connecting column, the periphery cover of spring fixed pin (6) is equipped with spring scraper (4), spring scraper (4) and the upper portion tight fit of spring fixed pin (6).
2. The novel cylinder scraper for semiconductor pipelines as claimed in claim 1, characterized in that: be equipped with air joint (12) on the lateral wall of main cavity body coupling pipe (1), air joint (12) are located one side that scraper cylinder (2) were kept away from in main cavity body coupling pipe (1).
3. The novel cylinder scraper for semiconductor pipelines as claimed in claim 1, characterized in that: the part that connecting portion (11) up end was passed in piston rod spliced pole (5) is equipped with shaft shoulder (51) department is equipped with gasket (10), the upper end and the gasket (10) of spring scraper (4) offset and lean on, the round card of spring scraper (4) top is gone into in the space between gasket (10) and spring fixed pin (6).
4. The novel cylinder scraper for semiconductor pipelines as claimed in claim 1, characterized in that: the periphery cover of piston rod spliced pole (5) is equipped with piston rod sealing barrel (3), be equipped with the sealing ring between the upper portion of piston rod sealing barrel (3) and scraper cylinder (2), the lower part card of piston rod sealing barrel (3) is gone into in the round hole that corresponds on connecting portion (11).
5. The novel cylinder scraper for semiconductor pipelines as claimed in claim 1, characterized in that: and the scraper cylinder (2) is provided with an air inlet joint (21) and an air outlet joint (22).
CN202021515697.3U 2020-07-28 2020-07-28 Novel cylinder scraper for semiconductor pipeline Active CN213134344U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021515697.3U CN213134344U (en) 2020-07-28 2020-07-28 Novel cylinder scraper for semiconductor pipeline

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021515697.3U CN213134344U (en) 2020-07-28 2020-07-28 Novel cylinder scraper for semiconductor pipeline

Publications (1)

Publication Number Publication Date
CN213134344U true CN213134344U (en) 2021-05-07

Family

ID=75734332

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021515697.3U Active CN213134344U (en) 2020-07-28 2020-07-28 Novel cylinder scraper for semiconductor pipeline

Country Status (1)

Country Link
CN (1) CN213134344U (en)

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