CN213119341U - Precision temperature control equipment - Google Patents
Precision temperature control equipment Download PDFInfo
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- CN213119341U CN213119341U CN202021299983.0U CN202021299983U CN213119341U CN 213119341 U CN213119341 U CN 213119341U CN 202021299983 U CN202021299983 U CN 202021299983U CN 213119341 U CN213119341 U CN 213119341U
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- 239000003507 refrigerant Substances 0.000 claims abstract description 88
- 230000005855 radiation Effects 0.000 claims abstract description 72
- 238000010622 cold drawing Methods 0.000 claims abstract description 25
- 230000001105 regulatory effect Effects 0.000 claims description 15
- 238000009423 ventilation Methods 0.000 claims description 7
- 230000001276 controlling effect Effects 0.000 claims description 3
- 238000009924 canning Methods 0.000 abstract description 2
- 230000026683 transduction Effects 0.000 abstract description 2
- 238000010361 transduction Methods 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model discloses an accurate temperature control equipment. This accurate temperature control equipment includes the control by temperature change space, radiation cold drawing and refrigerant unit, the setting of radiation cold drawing is in the control by temperature change space, and the circumference in control by temperature change space is arranged along to the radiation cold drawing, the inside runner that has of radiation cold drawing is in order to let in the refrigerant, the radiation cold drawing is used for adjusting the temperature in the control by temperature change space, the refrigerant unit sets up outside the control by temperature change space, the refrigerant unit is used for providing the refrigerant for the radiation cold drawing, the refrigerant unit is through flow in pipeline and outflow pipeline and radiation cold drawing and is established refrigerant circulation system. The utility model discloses an accurate temperature control equipment to the cold board of radiation is terminal transduction component, carries out temperature control to the control by temperature change space, and the cold board difference in temperature fluctuation of radiation is little, does not have the convection current almost, has realized the high accuracy control by temperature change of windless disturbance, can be applicable to the special occasion that requires high accuracy control by temperature change and can not have obvious air current again, simultaneously, does not need the form that multistage space canning, has reduced the requirement of high accuracy control by temperature change to the space, and the space occupies for a short time.
Description
Technical Field
The utility model relates to a temperature control technical field especially relates to an accurate temperature control equipment.
Background
For the space requiring high-precision temperature control, a scheme of gradually approaching the control precision by adopting a multilayer sheath space is adopted at present. Specifically, a plurality of groups of air conditioning units are respectively responsible for sheath spaces at different levels, the outer sheath space provides a stable and controllable peripheral temperature environment for the inner sheath space, so that the temperature control of the inner sheath space is facilitated, the temperature control precision of the sheath space is gradually improved from the outer sheath space to the inner sheath space, and the temperature control precision is gradually approached.
The existing scheme needs a sheath in a multi-level space, needs a plurality of groups of air conditioning units to work coordinately, has higher requirement on occupied space, and can not meet the requirement that obvious gas flow can not exist in the space of part of precise temperature control spaces because obvious gas flow exists in the temperature control spaces.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a precision temperature control equipment to solve the obvious problem of gas flow in the control by temperature change space that current high accuracy temperature control equipment exists.
The embodiment of the utility model provides an accurate temperature control equipment, including control by temperature change space, radiation cold drawing and refrigerant unit, the radiation cold drawing sets up in the control by temperature change space, just the radiation cold drawing is followed the circumference in control by temperature change space is arranged, the inside runner that has of radiation cold drawing is in order to let in the refrigerant, the radiation cold drawing is used for adjusting temperature in the control by temperature change space, the refrigerant unit sets up outside the control by temperature change space, the refrigerant unit be used for doing the radiation cold drawing provides the refrigerant, the refrigerant unit through inflow pipeline and outflow pipeline with refrigerant circulation system is established to the radiation cold drawing.
According to the utility model discloses an aspect of embodiment, the control by temperature change space includes a plurality of envelope, and a plurality of envelope connect gradually and constitute the control by temperature change space of predetermineeing the shape.
According to the utility model discloses an aspect, the radiation cold drawing sets up in the temperature control space, just the radiation cold drawing sets up on the envelope.
According to the utility model discloses an aspect still includes the dehumidifier of taking a breath, the dehumidifier of taking a breath sets up outside the temperature control space, the dehumidifier of taking a breath is used for doing the dehumidification of taking a breath in the temperature control space.
According to the utility model discloses an aspect still includes one-level refrigerant control system, one-level refrigerant control system includes the low temperature buffer tank, the low temperature buffer tank is connected refrigerant unit with flow in pipeline between the radiation cold drawing.
According to the utility model discloses an aspect, one-level refrigerant control system still includes the medium temperature buffer tank, the medium temperature buffer tank is connected the low temperature buffer tank with flow in pipeline between the radiation cold drawing.
According to the utility model discloses an aspect, one-level refrigerant control system still includes one-level regulation three-way valve and one-level controller, one-level regulation three-way valve is connected the radiation cold plate with outflow pipeline between the refrigerant unit, simultaneously one-level regulation three-way valve with the low temperature buffer tank with inflow tube coupling between the medium temperature buffer tank, one-level controller is used for control the work of one-level regulation three-way valve.
According to the utility model discloses an aspect still includes second grade refrigerant control system, second grade refrigerant control system includes second grade regulation three-way valve and second grade controller, second grade regulation three-way valve is connected radiation cold plate with outflow pipeline between the refrigerant unit, simultaneously the second grade regulation three-way valve with the medium temperature buffer tank with inflow tube coupling between the radiation cold plate, the second grade controller is used for control the work of second grade regulation three-way valve.
According to the utility model discloses an aspect, second grade refrigerant control system still include with second grade controller electric connection's first temperature sensor, first temperature sensor sets up in the temperature control space.
According to the utility model discloses an aspect, second grade refrigerant control system still include with second grade controller electric connection's second temperature sensor, second temperature sensor sets up on the outflow pipeline that the refrigerant export in the medium temperature buffer tank or be connected with it.
The embodiment of the utility model provides an accurate temperature control equipment, use the radiation cold plate as terminal transducing element, carry out temperature control to the control by temperature change space, the fluctuation of the cold plate difference in temperature of radiation is little, almost no convection current, the high accuracy control by temperature change of no wind disturbance has been realized, can be applicable to the special occasion that requires high accuracy control by temperature change and can not have obvious air current again, and simultaneously, compare in the accuse temperature means that current air cycle handled, do not need the form that multistage space is overlapped, the requirement of high accuracy control by temperature change to the space has been reduced, the space occupies for a short time, the upgrading transformation threshold of some old laboratories has been reduced, the obvious problem of gas flow in the control by temperature change space that current high accuracy temperature control equipment exists has been solved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments of the present invention will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of a precision temperature control device according to an embodiment of the present invention.
Fig. 2 is a schematic diagram illustrating the composition of the primary refrigerant control system and the secondary refrigerant control system of the precision temperature control device according to the embodiment of the present invention.
In the drawings:
100-temperature control space, 200-radiation cold plate, 300-refrigerant unit and 400-ventilation dehumidifier;
101-a building envelope;
501-a low-temperature buffer tank, 502-a medium-temperature buffer tank, 503-a first-level regulating three-way valve and 504-a second-level regulating three-way valve;
601-primary controller, 602-secondary controller, 603-first temperature sensor.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the invention, but are not intended to limit the scope of the invention, i.e., the invention is not limited to the described embodiments.
In the description of the present invention, it is to be noted that, unless otherwise specified, the terms "first" and "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; "plurality" means two or more; the terms "inner", "outer", "top", "bottom", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Please refer to fig. 1, the present invention provides a precision temperature control device, including a temperature control space 100, a radiation cold plate 200 and a refrigerant set 300, the radiation cold plate 200 is disposed in the temperature control space 100, and the radiation cold plate 200 is disposed along the circumference of the temperature control space 100, the radiation cold plate 200 is provided with a flow channel inside to let in a refrigerant, the radiation cold plate 200 is used for adjusting the temperature in the temperature control space 100, the refrigerant set 300 is disposed outside the temperature control space 100, the refrigerant set 300 is used for providing a refrigerant for the radiation cold plate 200, and the refrigerant set 300 establishes a refrigerant circulation system with the radiation cold plate 200 through an inflow pipeline and an outflow pipeline. In this embodiment, use radiation cold plate 200 as terminal transduction component, carry out temperature control to control by temperature change space 100, radiation cold plate 200 fluctuation by temperature difference is little, almost there is not the convection current, high accuracy control by temperature change of no wind disturbance has been realized, can be applicable to the special occasion that requires high accuracy control by temperature change and can not have obvious air current, simultaneously, compare in the temperature control means of current air circulation processing, do not need the form of multistage space canning, the requirement of high accuracy control by temperature change to the space has been reduced, the space occupies for a short time, the upgrading transformation threshold of some old laboratories has been reduced.
The radiation cooling plate 200 has a flow channel therein, and has a relatively uniform surface temperature. When a refrigerant with a small difference with the room temperature is introduced, convection caused by a large temperature difference hardly exists on the surface of the radiation cold plate 200, and the temperature control requirements of special occasions requiring precise temperature control and not expecting the existence of air flow are met. In addition, the radial size of the flow channel in the radiation cold plate 200 is large, and the heat inertia is large, so that the stability of the temperature is facilitated. The radiant cooling plate 200 may be made of metal, and may be a plate structure having a channel therein. The coolant can be water.
As an alternative embodiment, the temperature-controlled space 100 includes a plurality of enclosures 101, and the plurality of enclosures 101 are sequentially connected to form the temperature-controlled space 100 of the preset shape.
The enclosure structure 101 of the embodiment has a high heat insulation function, reduces the influence of the ambient temperature on the internal temperature of the temperature control space 100, and realizes high-precision temperature control without a multi-stage space sheath. The enclosure 101 is made of a material with heat insulation performance, and can be designed into a structural form with a middle heat insulation interlayer. The envelope 101 has a high heat insulation function and a certain structural stability, so that the temperature control space 100 has a stable structure.
The shape of the temperature controlled space 100 may be a rectangular parallelepiped shape, a cylindrical shape, or the shape of other common structures, and may be designed adaptively according to the size, shape, configuration, and the like of a conventional laboratory.
As an alternative embodiment, the radiant cold plate 200 is disposed within the temperature controlled space 100 and the radiant cold plate 200 is disposed on the enclosure 101.
The radiant cold plate 200 of the embodiment can shield the enclosure 101 where the radiant cold plate is located, so that the interference of temperature fluctuation around the temperature control space 100 to the interior of the temperature control space 100 through the enclosure 101 can be greatly reduced, and the heat insulation function of the enclosure 101 is enhanced. Thus, the radiant cooling panel 200 may be preferably installed on the building envelope 101 in an orientation where the temperature controlled space 100 is greatly affected by the external temperature according to the actual external environment.
Moreover, the radiation cold plates 200 may be uniformly arranged along the circumferential direction of the temperature control space 100, for example, when the circumferential shape of the temperature control space 100 is square, the radiation cold plates 200 may be disposed on four side surfaces of the temperature control space 100, and meanwhile, the number of the radiation cold plates 200 on the four side surfaces is the same, and the distribution positions are corresponding; when the circumferential shape of the temperature controlled space 100 is a circle, a plurality of radiant cooling plates 200 are arranged at equal intervals along the circumferential direction of the temperature controlled space 100, or a single annular radiant cooling plate 200 is used.
When the number of the radiation cold plates 200 is plural, the plural radiation cold plates 200 may be connected in parallel with each other, or may be connected in series in sequence.
As an alternative embodiment, a ventilation dehumidifier 400 is further included, the ventilation dehumidifier 400 is disposed outside the temperature-controlled space 100, and the ventilation dehumidifier 400 is used for ventilating and dehumidifying the temperature-controlled space 100.
The dehumidifier 400 of the present embodiment can ventilate and dehumidify the temperature-controlled space 100, so that the temperature-controlled space 100 meets the temperature requirement and also meets the requirements of gas ratio and environmental humidity.
Referring to fig. 2, as an alternative embodiment, the radiation cold plate cooling system further includes a primary refrigerant control system, where the primary refrigerant control system includes a low-temperature buffer tank 501, and the low-temperature buffer tank 501 is connected to an inflow pipeline between the refrigerant unit 300 and the radiation cold plate 200.
The refrigerant of the present embodiment flows out of the refrigerant unit 300, and then flows through the low temperature buffer tank 501 and then flows into the radiation cold plate 200. The low temperature buffer tank 501 can smooth the temperature fluctuation caused by the load fluctuation of the refrigerant unit 300.
As an alternative embodiment, the primary refrigerant control system further includes a medium temperature buffer tank 502, and the medium temperature buffer tank 502 is connected to the inflow pipeline between the low temperature buffer tank 501 and the radiation cold plate 200.
The refrigerant unit 300 of the present embodiment sequentially flows through the low temperature buffer tank 501 and the medium temperature buffer tank 502 to communicate with the radiation cold plate 200. After flowing out of the refrigerant unit 300, the refrigerant may flow through the low temperature buffer tank 501 and the medium temperature buffer tank 502, and then flow into the radiation cold plate 200.
As an alternative embodiment, the primary refrigerant control system further includes a primary three-way adjusting valve 503 and a primary controller 601, the primary three-way adjusting valve 503 is connected to the outflow pipeline between the radiation cold plate 200 and the refrigerant unit 300, the primary three-way adjusting valve 503 is connected to the inflow pipeline between the low temperature buffer tank 501 and the medium temperature buffer tank 502, and the primary controller 601 is configured to control the primary three-way adjusting valve 503 to operate.
The primary adjusting three-way valve 503 of this embodiment stabilizes the temperature of the refrigerant in the intermediate-temperature buffer tank 502 by adjusting the ratio of the low-temperature inflow refrigerant to the intermediate-temperature return refrigerant.
In this embodiment, the low temperature buffer tank 501 is configured to control the operation of the primary three-way regulating valve 503 according to the temperature of the refrigerant in the medium temperature buffer tank 502, so as to control whether the medium temperature return refrigerant flows into the medium temperature buffer tank 502 and the flow rate of the medium temperature return refrigerant flowing into the medium temperature buffer tank 502. The moderate temperature buffer tank 502 may smooth the impact of the load fluctuation in the subsequent stage, including the radiation cold plate 200, which is beneficial to improve the control accuracy of the subsequent stage, including the temperature control accuracy of the radiation cold plate 200.
As an optional embodiment, the system further includes a secondary refrigerant control system, the secondary refrigerant control system includes a secondary three-way regulating valve 504 and a secondary controller 602, the secondary three-way regulating valve 504 is connected to an outflow pipeline between the radiation cold plate 200 and the refrigerant unit 300, the secondary three-way regulating valve 504 is connected to an inflow pipeline between the medium-temperature buffer tank 502 and the radiation cold plate 200, and the secondary controller 602 is configured to control the operation of the secondary three-way regulating valve 504.
In this embodiment, because two stages of buffer tanks, namely the low temperature buffer tank 501 and the medium temperature buffer tank 502, are provided, the front and rear ends are isolated, that is, the refrigerant unit 300 and the radiation cold plate 200 control interfere with each other, so as to improve the temperature adjustment precision, and the temperature of the refrigerant in the medium temperature buffer tank 502 can be controlled to ± 0.02 ℃ by matching with the first-stage adjustment three-way valve 503, so that the temperature of the refrigerant flowing into the radiation cold plate 200 is stable, and the radiation cold plate 200 itself has large thermal inertia, so as to further smooth the fluctuation of the temperature of the radiation cold plate 200, further, the second-stage controller 602 controls the flow of the medium temperature refrigerant flowing into the radiation cold plate 200 by controlling the second-stage adjustment three-way valve 504, thereby integrally realizing high-precision control.
As an optional embodiment, the secondary refrigerant control system further includes a first temperature sensor 603 electrically connected to the secondary controller 602, and the first temperature sensor 603 is disposed in the temperature controlled space 100.
The first temperature sensor 603 of this embodiment is disposed in the temperature control space 100, and is configured to monitor the temperature in the temperature control space 100, and feed back the temperature to the secondary controller 602 of the secondary refrigerant control system, so that the secondary refrigerant control system performs regulation, and the radiation cold plate 200 is used as a terminal energy conversion element to control the temperature in the temperature control space 100.
Moreover, the number of the first temperature sensors 603 may be multiple, and the first temperature sensors may be uniformly distributed above the inside of the temperature control space 100, or may be arranged in multiple key temperature collection orientations according to actual requirements.
As an alternative embodiment, the secondary refrigerant control system further includes a second temperature sensor electrically connected to the secondary controller 602, and the second temperature sensor is disposed at the refrigerant outlet of the middle temperature buffer tank 502 or an outflow pipe connected thereto.
The second temperature sensor of this embodiment is disposed at the refrigerant outlet of the medium temperature buffer tank 502 or on the outflow pipeline connected thereto, and is configured to monitor the temperature of the refrigerant flowing out of the medium temperature buffer tank 502 and feed back the temperature to the secondary controller 602 of the secondary refrigerant control system, where the secondary controller 602 transmits temperature information to the primary controller 601, so as to control the temperature of the medium temperature flowing out of the medium temperature buffer tank 502, implement temperature control on the radiation cold plate 200, and finally control the temperature in the temperature control space 100.
It should be understood by those skilled in the art that the foregoing is only illustrative of the present invention, and the scope of the present invention is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (10)
1. The utility model provides a precision temperature control equipment, its characterized in that, includes control by temperature change space, radiation cold drawing and refrigerant unit, the radiation cold drawing sets up in the control by temperature change space, just the radiation cold drawing is followed the circumference in control by temperature change space is arranged, the inside runner that has of radiation cold drawing is in order to let in the refrigerant, the radiation cold drawing is used for adjusting temperature in the control by temperature change space, the refrigerant unit sets up outside the control by temperature change space, the refrigerant unit be used for the radiation cold drawing provides the refrigerant, the refrigerant unit through inflow pipeline and outflow pipeline with the refrigerant circulation system is established to the radiation cold drawing.
2. The precision temperature control apparatus according to claim 1, wherein the temperature control space comprises a plurality of enclosures, and the plurality of enclosures are connected in sequence to form a temperature control space of a preset shape.
3. The precision temperature control apparatus of claim 2, wherein the radiant cold plate is disposed within the temperature controlled space and the radiant cold plate is disposed on the enclosure.
4. The precision temperature control apparatus according to claim 1, further comprising a ventilation dehumidifier, the ventilation dehumidifier being disposed outside the temperature-controlled space, the ventilation dehumidifier being configured to ventilate and dehumidify the temperature-controlled space.
5. The precision temperature control device of claim 1, further comprising a primary refrigerant control system comprising a cryogenic buffer tank connected to an inflow line between the refrigerant set and the radiation cold plate.
6. The precision temperature control device of claim 5, wherein the primary refrigerant control system further comprises a medium temperature buffer tank connected to an inflow line between the low temperature buffer tank and the radiation cold plate.
7. The precise temperature control equipment according to claim 6, wherein the primary refrigerant control system further comprises a primary regulating three-way valve and a primary controller, the primary regulating three-way valve is connected to an outflow pipeline between the radiation cold plate and the refrigerant unit, the primary regulating three-way valve is connected to an inflow pipeline between the low-temperature buffer tank and the medium-temperature buffer tank, and the primary controller is used for controlling the primary regulating three-way valve to operate.
8. The precise temperature control equipment according to claim 7, further comprising a secondary refrigerant control system, wherein the secondary refrigerant control system comprises a secondary regulating three-way valve and a secondary controller, the secondary regulating three-way valve is connected to an outflow pipeline between the radiation cold plate and the refrigerant unit, the secondary regulating three-way valve is connected to an inflow pipeline between the medium-temperature buffer tank and the radiation cold plate, and the secondary controller is used for controlling the operation of the secondary regulating three-way valve.
9. The precision temperature control apparatus of claim 8, wherein the secondary refrigerant control system further comprises a first temperature sensor electrically connected to the secondary controller, the first temperature sensor being disposed in the temperature control space.
10. The precision temperature control apparatus according to claim 9, wherein the secondary refrigerant control system further comprises a second temperature sensor electrically connected to the secondary controller, the second temperature sensor being disposed at a refrigerant outlet in the middle temperature buffer tank or an outflow pipe connected thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021299983.0U CN213119341U (en) | 2020-07-06 | 2020-07-06 | Precision temperature control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021299983.0U CN213119341U (en) | 2020-07-06 | 2020-07-06 | Precision temperature control equipment |
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| CN213119341U true CN213119341U (en) | 2021-05-04 |
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| CN202021299983.0U Active CN213119341U (en) | 2020-07-06 | 2020-07-06 | Precision temperature control equipment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115509275A (en) * | 2022-10-07 | 2022-12-23 | 哈尔滨工业大学 | Multi-mode composite and active gas bath double-layer ultra-precise temperature control device |
| CN115562387A (en) * | 2022-10-07 | 2023-01-03 | 哈尔滨工业大学 | Multi-mode composite low-pressure ultra-precise temperature control device |
| CN115562388A (en) * | 2022-10-07 | 2023-01-03 | 哈尔滨工业大学 | Multi-mode composite and active gas bath ultra-precise temperature control device |
| CN115629634A (en) * | 2022-10-07 | 2023-01-20 | 哈尔滨工业大学 | Multi-mode composite low-pressure double-layer ultra-precise temperature control device |
-
2020
- 2020-07-06 CN CN202021299983.0U patent/CN213119341U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115509275A (en) * | 2022-10-07 | 2022-12-23 | 哈尔滨工业大学 | Multi-mode composite and active gas bath double-layer ultra-precise temperature control device |
| CN115562387A (en) * | 2022-10-07 | 2023-01-03 | 哈尔滨工业大学 | Multi-mode composite low-pressure ultra-precise temperature control device |
| CN115562388A (en) * | 2022-10-07 | 2023-01-03 | 哈尔滨工业大学 | Multi-mode composite and active gas bath ultra-precise temperature control device |
| CN115629634A (en) * | 2022-10-07 | 2023-01-20 | 哈尔滨工业大学 | Multi-mode composite low-pressure double-layer ultra-precise temperature control device |
| CN115629634B (en) * | 2022-10-07 | 2024-03-19 | 哈尔滨工业大学 | Multimode composite low-pressure double-layer ultra-precise temperature control device |
| CN115509275B (en) * | 2022-10-07 | 2024-04-12 | 哈尔滨工业大学 | Multimode composite and active gas bath double-layer ultra-precise temperature control device |
| CN115562388B (en) * | 2022-10-07 | 2024-05-14 | 哈尔滨工业大学 | Multi-mode composite and active gas bath ultra-precise temperature control device |
| CN115562387B (en) * | 2022-10-07 | 2024-05-31 | 哈尔滨工业大学 | Multimode composite low-voltage ultra-precise temperature control device |
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Address after: No. 160, West Fourth Ring North Road, Haidian District, Beijing Patentee after: China Electronics Engineering Design Institute Co.,Ltd. Country or region after: China Address before: No. 160, West Fourth Ring North Road, Haidian District, Beijing Patentee before: CHINA ELECTRONICS ENGINEERING DESIGN INSTITUTE Co.,Ltd. Country or region before: China |