CN213081339U

CN213081339U - MEMS micro-mirror debugging machine platform

Info

Publication number: CN213081339U
Application number: CN202021678661.7U
Authority: CN
Inventors: 程进; 徐乃涛; 孙其梁; 李宋泽
Original assignee: Wuxi Micro Vision Sensor Technology Co ltd
Current assignee: Wuxi Micro Vision Sensor Technology Co ltd
Priority date: 2020-08-12
Filing date: 2020-08-12
Publication date: 2021-04-30
Anticipated expiration: 2030-08-12

Abstract

The utility model discloses a MEMS micro-mirror debugging board, the on-line screen storage device comprises a base, four corners fixedly connected with callus on the sole of base diapire, base roof one side intermediate position is seted up flutedly, base roof keeps away from recess one side intermediate position fixed mounting and has the computer, symmetrical fixedly connected with installation pole, two around the base roof is located to be between computer and the recess be provided with the bobbin between the installation pole, the recess is close to computer one side lateral wall central point and puts fixed mounting and have first cylinder. The utility model discloses, be provided with intelligent MEMS micro-mirror power control input mechanism, actual MEMS micro-mirror power loss is less, and the high flexibility that is provided with the MEMS micro-mirror in addition uses the calling mechanism, can call the MEMS micro-mirror in a flexible way, and the in-service use is fairly convenient, and whole practical application is worth highly.

Description

MEMS micro-mirror debugging machine platform

Technical Field

The utility model relates to a MEMS micro-mirror technical field especially relates to a MEMS micro-mirror debugging board.

Background

MEMS micromirrors, lens assemblies that use micro-electromechanical systems to achieve in-focus imaging. Other types of sensors using MEMS technology have been applied to various areas of our lives, and microphones, gyroscopes, hard disk drives, and medical devices, automobile parts, and aerospace devices, which are not familiar with MEMS technology, are widely used.

At present, MEMS micromirrors are widely used, including low power consumption and large-displacement MEMS micromirrors, the existing MEMS micromirror debugging machine platform lacks an intelligent MEMS micromirror power control input mechanism during actual use, the actual MEMS micromirror power loss is large, in addition, the high-flexibility use calling mechanism of the MEMS micromirror is lacked, the MEMS micromirror cannot be flexibly called, the actual use is inconvenient, and the whole actual application value is not high.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art, and providing a MEMS micro-mirror debugging machine.

In order to achieve the above purpose, the utility model adopts the following technical scheme: an MEMS micro-mirror debugging platform comprises a base, foot pads are fixedly connected at four corners of the bottom wall of the base, a groove is formed in the middle position of one side of the top wall of the base, a computer is fixedly installed at the middle position of one side of the top wall of the base, which is far away from the groove, the top wall of the base is positioned between the computer and the groove and is symmetrically and fixedly connected with mounting rods in a front-back mode, a bobbin is arranged between the two mounting rods, a first air cylinder is fixedly installed at the central position of the side wall of the groove, which is close to one side of the computer, a fixed block is slidably connected to one side of the groove, which is far away from the first air cylinder, the top wall of the fixed block is fixedly connected with a mounting plate, a second air cylinder is fixedly installed at the central position of the top, and an MEMS (micro-electromechanical system) micro-mirror is fixedly arranged below the front side wall of the turntable.

As a further description of the above technical solution:

two the mounting groove has been seted up to the opposite side lateral wall intermediate position in installation pole top, the mounting groove internal rotation is connected with the pivot, two the opposite side lateral wall fixedly connected with bobbin of pivot corresponds one side lateral wall central point and puts.

As a further description of the above technical solution:

the output end of the computer is connected with the input end of the MEMS micro-mirror through a transmission line, and the transmission line is wound with a bobbin.

As a further description of the above technical solution:

and the electric power input end of one side of the computer, which is far away from the winding reel, is fixedly connected with a power supply line.

As a further description of the above technical solution:

the output end of the central position of one side, far away from the computer, of the first air cylinder is fixedly connected with a first movable shaft, and the central position of the side wall, corresponding to one side, of the fixed block, of the side wall, far away from one side of the first air cylinder, of the first movable shaft is fixedly connected with a fixed block.

As a further description of the above technical solution:

the fixed block diapire fixedly connected with direction slider, direction slider diapire sliding connection has the interior diapire of recess, lateral wall central point puts fixedly connected with and sets up the motor output who puts in lateral wall central point before the box behind the carousel.

The utility model discloses following beneficial effect has:

compared with the prior art, the MEMS micro-mirror debugging machine platform is provided with an intelligent MEMS micro-mirror power control input mechanism, the actual MEMS micro-mirror power loss is small, the high-flexibility use calling mechanism of the MEMS micro-mirror is arranged, the MEMS micro-mirror can be flexibly called, the actual use is quite convenient, and the whole practical application value is high.

Drawings

Fig. 1 is a schematic structural diagram of a MEMS micro-mirror debugging platform according to the present invention;

fig. 2 is an enlarged view of a point a in fig. 1 of a MEMS micro-mirror debugging platform according to the present invention;

fig. 3 is an enlarged view of a point B in fig. 1 of a MEMS micro-mirror debugging platform according to the present invention.

Illustration of the drawings: 1. a base; 2. a foot pad; 3. a groove; 4. a first cylinder; 5. a fixed block; 6. mounting a plate; 7. a second cylinder; 8. a second movable shaft; 9. a turntable; 10. a MEMS micro-mirror; 11. a computer; 12. mounting a rod; 13. a bobbin; 14. mounting grooves; 15. a rotating shaft; 16. a transmission line; 17. a first movable shaft; 18. a guide slider; 19. a box body; 20. and a power supply line.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-3, the present invention provides an embodiment: a MEMS micro-mirror debugging machine comprises a base 1, foot pads 2 are fixedly connected at four corners of the bottom wall of the base 1, the supporting function of a device body is achieved, a groove 3 is formed in the middle position of one side of the top wall of the base 1, a computer 11 is fixedly installed at the middle position of one side, far away from the groove 3, of the top wall of the base 1, the computer 11 works, energy can be intelligently supplied to an MEMS micro-mirror 10 through a transmission line 16 according to the load of the MEMS micro-mirror 10, mounting rods 12 are fixedly connected between the top wall of the base 1 and the groove 3 in a front-back symmetrical mode, a winding drum 13 is arranged between the two mounting rods 12, a first air cylinder 4 is fixedly installed at the central position of the side wall, close to the computer 11, of the groove 3, a fixing block 5 is connected to one side, far away from the first air cylinder, the output end of the central position above the second cylinder 7 is fixedly connected with a second movable shaft 8, the top wall of the second movable shaft 8 is fixedly connected with a box 19, the second movable shaft 8 can be driven by the second cylinder 7 to drive the box 19 to lift, the front side wall of the box 19 is provided with a turntable 9, and an MEMS micro-mirror 10 is fixedly mounted below the front side wall of the turntable 9.

The middle position of the side wall of the opposite side above the two mounting rods 12 is provided with a mounting groove 14, the mounting groove 14 is rotationally connected with a rotating shaft 15, the side wall of the opposite side of the two rotating shafts 15 is fixedly connected with a bobbin 13 corresponding to the center position of the side wall of the opposite side, the bobbin 13 is designed in a rotatable manner, the output end of the computer 11 is connected with the input end of the MEMS micro-mirror 10 through a transmission line 16, the transmission line 16 is wound and connected with the bobbin 13, the bobbin 13 plays a role in accommodating the transmission line 16 and is beneficial to calling the transmission line 16, the electric power input end of the side of the computer 11 far away from the bobbin 13 is fixedly connected with a power supply line 20 which can be connected with a power supply so as to supply power to the computer 11, the output end of the center position of the side of the first cylinder 4 far away from the computer, the first loose axle 17 of the first cylinder 4 drive of accessible drives fixed block 5 and removes about in recess 3, and 5 diapire fixedly connected with direction slider 18 of fixed block, 18 diapire sliding connection of direction slider have the interior diapire of recess 3, play the motion guide effect of fixed block 5, and carousel 9 back lateral wall central point puts fixedly connected with and sets up the motor output end of lateral wall central point before 19 box, can drive carousel 9 and rotate.

The working principle is as follows: when in use, the power supply line 20 can be connected with a power supply to supply power to the computer 11, so that the computer 11 works, the MEMS micro-mirror 10 can be intelligently powered by the transmission line 16 according to the load of the MEMS micro-mirror 10, which is beneficial to reduce power consumption, the MEMS micro-mirror 10 can work when powered on, a motor (not shown in the figure) in the box body 19 can be opened to drive an output end (not shown in the figure) of the motor to drive the turntable 9 to rotate, the turntable 9 rotates to drive the MEMS micro-mirror 10 below the front side wall to rotate and adjust, the second air cylinder 7 can drive the second movable shaft 8 to drive the box body 19 to lift, and then realize the lift adjustment work of MEMS micro-mirror 10, also can drive first loose axle 17 through first cylinder 4 and drive fixed block 5 and remove about in recess 3, and the second cylinder 7 is installed to the mounting panel 6 roof fixed connection of fixed block 5 roof, and the fixed block 5 removes about can realizing the left and right adjustment work of MEMS micro-mirror 10.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a MEMS micro-mirror debugging board, includes base (1), its characterized in that: the four corners of the bottom wall of the base (1) are fixedly connected with foot pads (2), a groove (3) is formed in the middle position of one side of the top wall of the base (1), the top wall of the base (1) is far away from the middle position of one side of the groove (3) and is fixedly provided with a computer (11), the top wall of the base (1) is positioned between the computer (11) and the groove (3) and is symmetrically and fixedly connected with mounting rods (12) in the front-back direction, a winding reel (13) is arranged between the two mounting rods (12), a first air cylinder (4) is fixedly arranged at the central position of the side wall of one side, close to the computer (11), of the groove (3), one side, far away from the first air cylinder (4), of the groove (3) is slidably connected with a fixing block (5), a mounting plate (6) is fixedly connected with, the output end of the center position above the second cylinder (7) is fixedly connected with a second movable shaft (8), the top wall of the second movable shaft (8) is fixedly connected with a box body (19), the front side wall of the box body (19) is provided with a turntable (9), and an MEMS micro-mirror (10) is fixedly mounted below the front side wall of the turntable (9).

2. The MEMS micro-mirror debugging platform of claim 1, wherein: two installation pole (12) top side lateral wall intermediate position in opposite directions has seted up mounting groove (14), mounting groove (14) internal rotation is connected with pivot (15), two pivot (15) one side lateral wall fixedly connected with bobbin (13) in opposite directions corresponds one side lateral wall central point and puts.

3. The MEMS micro-mirror debugging platform of claim 1, wherein: the output end of the computer (11) is connected with the input end of the MEMS micro-mirror (10) through a transmission line (16), and the transmission line (16) is wound and connected with a bobbin (13).

4. The MEMS micro-mirror debugging platform of claim 1, wherein: and a power supply line (20) is fixedly connected to the power input end of the computer (11) far away from the bobbin (13).

5. The MEMS micro-mirror debugging platform of claim 1, wherein: the first cylinder (4) is far away from computer (11) one side central point and puts output end fixedly connected with first loose axle (17), first cylinder (4) one side lateral wall fixedly connected with fixed block (5) are kept away from in first loose axle (17) and correspond one side lateral wall central point and put.

6. The MEMS micro-mirror debugging platform of claim 1, wherein: fixed block (5) diapire fixedly connected with direction slider (18), diapire sliding connection of direction slider (18) is diapire in recess (3), lateral wall central point puts fixedly connected with and sets up the motor output who puts lateral wall central point before box (19) behind carousel (9).