CN213079387U

CN213079387U - Two-way pushing head of plasma cleaning machine

Info

Publication number: CN213079387U
Application number: CN202021330688.7U
Authority: CN
Inventors: 郭峰; 刘向东; 彭小巧; 王宇; 国际瑞
Original assignee: Suzhou Aslin Automation Technology Co ltd; Suzhou Uvbeam Photoelectric Technology Co ltd; Kunshan Plaux Electronics Technology Co ltd
Current assignee: Suzhou Aslin Automation Technology Co ltd; Suzhou Uvbeam Photoelectric Technology Co ltd; Kunshan Plaux Electronics Technology Co ltd
Priority date: 2020-07-10
Filing date: 2020-07-10
Publication date: 2021-04-30
Anticipated expiration: 2030-07-10

Abstract

The utility model relates to a two-way pushing head of a plasma cleaning machine, belonging to the technical field of semiconductor processing; the device comprises a mounting seat in sliding connection with a machine table, a connecting block in sliding connection with the mounting seat, a double-head push plate arranged on the connecting block, an elastic device arranged between the connecting block and the mounting seat and a displacement detection device arranged between the connecting block and the mounting seat, wherein the sliding direction of the connecting block is parallel to a material pushing direction, and two ends of the double-head push plate are provided with inwards-concave material pushing notches; the utility model provides a two-way pusher of plasma cleaning machine can make things convenient for operating personnel to learn often and push away the material state, can in time learn after the flitch card dies, avoids damaging flitch and equipment, guarantees more convenient, safety.

Description

Two-way pushing head of plasma cleaning machine

Technical Field

The utility model relates to a two-way pushing head of plasma cleaning machine belongs to semiconductor processing technology field.

Background

When the plasma cleaning machine is used, a material plate cleaned in a cleaning cavity needs to be pushed back into a material box from a chute in the cleaning cavity, the thickness of the material plate and the clearance of the chute are small, the material plate is easy to block in the using process, the existing bidirectional pushing head is of a fixed structure, an operator is difficult to observe the condition of the inside of the cleaning cavity from the outside, the operator is difficult to know the material pushing state from time to time, if the material plate is blocked, the operator can not find the material plate in time, and after the material plate is blocked, equipment continues to work, the material plate or the equipment is easy to damage, so that production accidents.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome not enough among the prior art, provide a two-way pusher head of plasma cleaning machine can make things convenient for operating personnel to learn often and push away the material state, can in time learn after the flitch card dies, avoid damaging flitch and equipment, guarantee more convenient, safety.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a two-way pusher of plasma cleaning machine, its include with board sliding connection's mount pad, with mount pad sliding connection's connecting block, set up the double-end push pedal on the connecting block, set up the resilient means between connecting block and mount pad and set up the displacement detection device between connecting block and mount pad, connecting block sliding direction is parallel with the material pushing direction, double-end push pedal both ends are equipped with the material opening that pushes away of indent.

Further, be equipped with the slide bar along pushing away the material direction on the mount pad, the connecting block can overlap and establish and slide on the slide bar, resilient means is including setting up the spring between connecting block both sides and mount pad, the spring cover is established on the slide bar.

Further, still be equipped with first slide rail on the mount pad, be equipped with on the connecting block and can block the gliding first sliding sleeve on first slide rail, first slide rail extending direction is parallel with the material pushing direction.

Further, the displacement detection device comprises an induction sheet arranged on the connecting block and a displacement sensor arranged on the mounting seat.

Further, the mounting seat is a plurality of settings on supporting beam, supporting beam is equipped with the installation slotted hole along length direction, and the bolt passes installation slotted hole and mounting seat threaded connection, is equipped with the second slide rail that extends along pushing away the material direction on the board, be equipped with on the supporting beam and can block the gliding second sliding sleeve on the second slide rail.

Furthermore, the material pushing notch is in a trapezoidal arrangement, and the vertical distance of the front outer end is larger than that of the inner side.

Compared with the prior art, the utility model discloses the beneficial effect who reaches:

the technical scheme is provided with the displacement monitoring device, so that the material pushing operation condition is known by monitoring the displacement condition of the push plate, an operator can conveniently know the working state and the fault condition at any time, and the next operation can be responded in time;

the technical scheme is provided with the spring, so that the push plate can be reset in time in idle, and the buffer can be provided between the push plate and the flitch to prevent the flitch from being damaged or equipment from being damaged due to rigid contact between the flitch and the push plate after the flitch is clamped;

according to the technical scheme, the supporting cross beams are connected with the mounting seats through the long round holes, the number and the positions of the mounting seats can be conveniently selected according to needs, and the mounting and the use are more convenient.

Drawings

Fig. 1 is a schematic perspective view of a two-way pushing head of a plasma cleaning machine according to an embodiment of the present invention;

fig. 2 is a schematic view of a three-dimensional structure of a two-way pushing head of a plasma cleaning machine according to an embodiment of the present invention.

Description of reference numerals: the device comprises a mounting seat 1, a connecting block 2, a double-head push plate 3, an elastic device 4, a displacement detection device 5, a material pushing notch 6, a sliding rod 7, a spring 8, a first sliding rail 9, a first sliding sleeve 10, an induction sheet 11, a displacement sensor 12, a supporting beam 13, an installation slotted hole 14, a second sliding rail 15 and a second sliding sleeve 16.

Detailed Description

The present invention will be further described with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The two-way pushing head of the plasma cleaning machine comprises a mounting seat 1, a connecting block 2, a double-head pushing plate 3, an elastic device 4 and a displacement detection device 5, wherein the mounting seat 1 is connected with a machine table in a sliding mode, the connecting block 2 is connected with the mounting seat in a sliding mode, the double-head pushing plate 3 is arranged on the connecting block, the elastic device 4 is arranged between the connecting block and the mounting seat, the displacement detection device 5 is arranged between the connecting block and the mounting seat, the sliding direction of the connecting block is parallel to the material pushing direction, and two ends of the double-;

the double-end push plate is used for pushing the material plate in a two-way mode, the material plate is pushed into the material box from the cleaning cavity, when the material plate is normally pushed, the friction force between the material plate and the sliding chute in the cleaning cavity is a fixed value or in a certain range, the expansion amount of the elastic device corresponding to the material plate is a fixed value or in a certain range, the fixed value or the range is marked as a normal working state, and when the displacement detection device senses that the connecting block moves in the range compared with the mounting seat, the pushing head is in a normal pushing state;

if the flitch and the chute are stuck, the resistance between the flitch and the chute is larger, the expansion amount of the elastic device is larger and larger than the expansion amount during normal material pushing, the displacement of the connecting block sensed by the displacement detection device corresponding to the elastic device is also larger than the range corresponding to the normal working state, and the displacement detection device is often connected with a control panel and a display of the equipment, so that the movement condition of the connecting block can be timely fed back to an operator, the operator can conveniently know the material pushing state in real time, know that the material is stuck in real time, and respond to the next operation in real time;

the elastic device can enable the double-end push plate and the connecting block to reset in time when the equipment is idle, and the use is convenient.

A sliding rod 7 is arranged on the mounting seat along the material pushing direction, the connecting block can be sleeved on the sliding rod to slide, the elastic device comprises springs 8 arranged between two sides of the connecting block and the mounting seat, and the springs are sleeved on the sliding rod;

the slide bar provides direction and support for the slip of connecting block, and for convenient use, the spring of connecting block both sides should the coefficient of stiffness unanimously, receives frictional force or resistance during double-end push pedal propelling movement material, and relative deformation takes place for the spring, and when equipment was idle, the spring can in time reset the connecting block double-end push pedal promptly.

The mounting seat is also provided with a first sliding rail 9, the connecting block is provided with a first sliding sleeve 10 which can be clamped and sleeved on the first sliding rail to slide, and the extending direction of the first sliding rail is parallel to the material pushing direction;

the first sliding sleeve of slide rail is the sharp module of standard, and convenient to use can more accurately provide the direction for the removal of connecting block, makes it can only slide and can not take place the skew of other directions.

The displacement detection device comprises an induction sheet 11 arranged on the connecting block and a displacement sensor 12 arranged on the mounting seat;

the displacement sensor is a common standard electronic element, and the displacement sensor in the technical scheme is used for sensing the displacement of the connecting block and determining the pushing state of the pushing head, so that an operator can know the running state of the equipment in time and adjust the equipment in time, and the use safety is ensured.

According to one embodiment, a plurality of mounting seats are arranged on a supporting beam 13, the supporting beam is provided with a mounting long round hole 14 along the length direction, a bolt penetrates through the mounting long round hole to be in threaded connection with the mounting seats, a machine table is provided with a second sliding rail 15 extending along the material pushing direction, and the supporting beam is provided with a second sliding sleeve 16 capable of being clamped and sleeved on the second sliding rail in a sliding manner;

the first sliding sleeve of slide rail is current sharp module, and supporting beam drives the mount pad and the double-end push pedal removes and is used for the propelling movement flitch promptly, and the installation slotted hole makes things convenient for the mounted position of adjustment mount pad in order to adapt to different plasma cleaning machine's installation user demand, and a plurality of ann's pushing heads set up can be simultaneously to a plurality of flitch operations on a supporting beam, improve work efficiency, and supporting beam can be by setting up the drive motion such as hold-in range, electric screw on the board.

In one embodiment, the material clamping gap is trapezoidal, and the vertical distance of the front outer end is greater than that of the inner side;

the butt joint fault-tolerant rate when guaranteeing the ejector pad propelling movement material, card material opening outer end opening is great, and is great with the possible contact distance of material, skew material and unloaded probability when can reduce the propelling movement material, and trapezoidal setting can be when the propelling movement material in addition, and the automatic material direction is regained to opening the inner end on.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be considered as the protection scope of the present invention.

Claims

1. The utility model provides a two-way pushing head of plasma cleaning machine which characterized in that: including with board sliding connection's mount pad (1), with mount pad sliding connection's connecting block (2), set up double-end push pedal (3) on the connecting block, set up resilient means (4) between connecting block and mount pad and set up displacement detection device (5) between connecting block and mount pad, connecting block sliding direction is parallel with the direction of pushing away the material, double-end push pedal both ends are equipped with the material opening (6) that pushes away of indent.

2. The bi-directional pushing head of the plasma cleaning machine according to claim 1, characterized in that: be equipped with slide bar (7) along pushing away the material direction on the mount pad, the connecting block can overlap and establish and slide on the slide bar, resilient means is including setting up spring (8) between connecting block both sides and mount pad, the spring housing is established on the slide bar.

3. The bi-directional pushing head of the plasma cleaning machine according to claim 1, characterized in that: still be equipped with first slide rail (9) on the mount pad, be equipped with on the connecting block and can block gliding first sliding sleeve (10) on first slide rail, first slide rail extending direction is parallel with the material pushing direction.

4. The bi-directional pushing head of the plasma cleaning machine according to claim 1, characterized in that: the displacement detection device comprises an induction sheet (11) arranged on the connecting block and a displacement sensor (12) arranged on the mounting seat.

5. The bi-directional pushing head of the plasma cleaning machine according to claim 1, characterized in that: the mounting seat is a plurality of settings on supporting beam (13), supporting beam is equipped with installation slotted hole (14) along length direction, and the bolt passes installation slotted hole and mounting seat threaded connection, is equipped with on the board along pushing away the second slide rail (15) that the material direction extends, be equipped with on the supporting beam and can block the gliding second sliding sleeve (16) on the second slide rail.

6. The bi-directional pushing head of the plasma cleaning machine according to claim 1, characterized in that: the material pushing notch is in a trapezoidal arrangement, and the vertical distance of the front outer end is larger than that of the inner side.