CN213069471U

CN213069471U - Imaging device and photoetching machine

Info

Publication number: CN213069471U
Application number: CN202021586260.9U
Authority: CN
Inventors: 胡刚; 项宗齐
Original assignee: Hefei Xinqi Microelectronics Equipment Co ltd
Current assignee: Hefei Xinqi Microelectronics Equipment Co ltd
Priority date: 2020-08-03
Filing date: 2020-08-03
Publication date: 2021-04-27
Anticipated expiration: 2030-08-03

Abstract

The utility model discloses an image device and lithography machine, image device includes: the lens cone, optical assembly and motion conversion spare, be formed with the installation cavity in the lens cone, the lens cone is formed with the spacing groove of axial extension, the wall of lens cone is radially run through to the spacing groove, optical assembly sets up in the installation cavity, the optical assembly outside is provided with the moving member, the spacing groove is worn to establish by the moving member to realize optical assembly axial displacement, the motion conversion spare rotationally overlaps and establishes in the outside of lens cone and cooperatees with the moving member, in order to drive the moving member axial displacement in the spacing groove when motion conversion spare rotates relative to the lens cone. The movement conversion piece can separate the rotation of the optical assembly from the movement of the upper direction and the lower direction, and the moving piece is pushed by the rotation of the movement conversion piece, so that the optical assembly can be driven to move up and down, and various adverse effects on the imaging quality of the imaging device caused by the traditional mode of directly using the thread to rotate up and down are avoided.

Description

Imaging device and photoetching machine

Technical Field

The utility model belongs to the technical field of the lithography machine technique and specifically relates to an image device and lithography machine are related to.

Background

The imaging device of the direct-write lithography machine is a core component of the lithography machine, directly influences the performance of the lithography machine, and determines important indexes of line width, uniformity, splicing, multiplying power, image quality and the like of a circuit exposed by the lithography machine.

When using a direct write lithography machine to make a PCB, since the lithography machine generally adopts a multi-head simultaneous exposure method, it is required that each optical head has the same magnification. The multiplying power of different optical heads can be adjusted to be consistent by adjusting the multiplying power lenses of different optical heads. Traditional multiplying power regulation mode is mostly through the screw thread drive multiplying power lens direct rotation from top to bottom, and in the accommodation process multiplying power lens is rotatory on one side from top to bottom, and the original light path of transferring can be destroyed in the rotation of multiplying power lens, increases imaging system's instability. In addition, the imaging diaphragm connected below the magnification barrel also needs to be readjusted because of rotating along with the magnification barrel, which increases workload.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides an imaging device uses this motion converting part can be separated optical assembly's rotation and the motion of two upper and lower directions, promotes the moving member through the rotation of motion converting part to can drive optical assembly and realize reciprocating.

The utility model also provides a lithography machine.

According to the utility model discloses imaging device of first aspect embodiment includes: the optical component comprises a lens barrel, an optical component and a motion conversion part, wherein a mounting cavity is formed in the lens barrel, an axially extending limiting groove is formed in the lens barrel, the limiting groove radially penetrates through the wall of the lens barrel, the optical component is arranged in the mounting cavity, a moving part is arranged on the outer side of the optical component, the moving part penetrates through the limiting groove to realize axial movement of the optical component, and the motion conversion part is rotatably sleeved on the outer side of the lens barrel and matched with the moving part to drive the moving part to axially move in the limiting groove when the motion conversion part rotates relative to the lens barrel.

According to the utility model discloses imaging device uses this motion converting part can part the rotatory of optical assembly and the motion of two upper and lower directions, and the rotation through the motion converting part promotes the moving member to can drive optical assembly and realize reciprocating, avoided traditional various harmful effects that the formation of image quality that directly uses the screw thread rotation to adjust for imaging device brought about like this.

According to some embodiments of the present invention, the inner peripheral surface of the movement conversion member is provided with a guide groove extending obliquely in the circumferential direction and the axial direction, and a part of the moving member extends into the guide groove.

According to some embodiments of the invention, the guide groove is helical.

According to some embodiments of the present invention, the moving member is a plurality of and is respectively fitted in the guide groove.

According to some embodiments of the utility model, the moving member is the pin, the one end of pin is fixed optical assembly department, the other end cooperation of pin is in the guide way.

According to some embodiments of the present invention, further comprising: the limiting piece is sleeved on the outer side of the lens barrel and located on one axial side of the motion conversion piece so as to limit the axial movement of the motion conversion piece.

According to some embodiments of the invention, the lens barrel is provided with a limiting step at the other axial side of the motion converting member to limit the axial movement of the motion converting member.

According to some embodiments of the invention, the optical assembly comprises: the lens comprises a multiplying power lens and a lens base, wherein the multiplying power lens is arranged in the lens base, the lens base is arranged in the installation cavity, and the moving piece is arranged on the periphery of the installation cavity.

According to some embodiments of the invention, the lens barrel comprises: the second lens barrel is arranged at one axial end of the first lens barrel and is in threaded connection with the first lens barrel, and the limiting groove is formed in the first lens barrel; the imaging device further comprises a lens diaphragm assembly, and the lens diaphragm assembly is arranged at the other axial end of the first lens barrel and is in threaded connection with the first lens barrel.

According to the utility model discloses second aspect embodiment photoetching machine includes imaging device.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is an exploded view of an image forming apparatus according to an embodiment of the present invention;

fig. 2 is a partial schematic structural view of an image forming apparatus according to an embodiment of the present invention;

fig. 3 is a partial sectional view of an image forming apparatus according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of the first lens barrel according to an embodiment of the present invention.

Reference numerals:

100. an imaging device;

10. a lens barrel; 11. a first barrel; 111. a mounting cavity; 112. a limiting groove; 113. a limiting step; 12. a second barrel;

20. an optical component; 21. a moving member; 22. a power lens; 23. a lens base;

30. a motion converter; 31. a guide groove; 40. a limiting member; 50. and a lens diaphragm assembly.

Detailed Description

Embodiments of the present invention are described in detail below, and the embodiments described with reference to the drawings are exemplary.

An imaging device 100 according to an embodiment of the present invention is described below with reference to fig. 1 to 4, and the present invention also provides a lithography machine including the imaging device 100.

As shown in fig. 1 and 2, the image forming apparatus 100 includes: a lens barrel 10, an optical assembly 20, and a motion converter 30. The lens barrel 10 has a mounting cavity 111 formed therein, and the optical assembly 20 is disposed in the mounting cavity 111, so that the lens barrel 10 can protect the optical assembly 20.

As shown in fig. 2-4, the lens barrel 10 is formed with a limit groove 112 extending axially, the limit groove 112 radially penetrates through the wall of the lens barrel 10, the moving member 21 is disposed outside the optical assembly 20, and the moving member 21 penetrates through the limit groove 112 to realize axial movement of the optical assembly 20. The limiting groove 112 has two limit positions in the axial direction, and the moving member 21 can move between the two limit positions, so that the optical assembly 20 can axially move between the two limit positions, namely, the adjusting range of the optical assembly 20 is between the two limit positions.

As shown in fig. 2 and fig. 3, the motion conversion member 30 is rotatably disposed on the outer side of the lens barrel 10, and the motion conversion member 30 is engaged with the moving member 21 to drive the moving member 21 to axially move in the limiting groove 112 when the motion conversion member 30 rotates relative to the lens barrel 10. By providing the motion converter 30, the rotation of the motion converter 30 can be converted into the axial movement of the moving member 21, so as to drive the optical assembly 20 to move up and down in the axial direction. In addition, the moving part 21 does not rotate when moving up and down, that is, the optical assembly 20 does not rotate relatively, so that the optical assembly 20 only moves up and down and does not rotate when adjusting the magnification, thereby avoiding the loss of imaging performance caused by the rotation of the optical assembly 20.

Therefore, the movement conversion part 30 can separate the rotation of the optical assembly 20 from the movement in the up-down direction, and the movement of the moving part 21 in the axial direction is pushed by the rotation of the movement conversion part 30, so that the optical assembly 20 can be driven to move up and down, and various adverse effects on the imaging quality of the imaging device 100 caused by the traditional method of directly adjusting the optical assembly up and down by using a screw thread are avoided.

As shown in fig. 2 and 3, the inner peripheral surface of the motion conversion member 30 is provided with a guide groove 31 extending obliquely in the circumferential direction and the axial direction, and a part of the moving member 21 protrudes into the guide groove 31. By providing the guide groove 31 in the motion converting member 30, the moving member 21 can move in the guide groove 31 in the axial direction when the motion converting member 30 rotates. So set up for optical assembly 20 that links to each other with moving member 21 can only reciprocate, and need not rotate, thereby can avoid traditional directly using the screw thread to rotate the harmful effects that the adjustment brought for optical assembly 20's formation of image quality from top to bottom.

Wherein the guide groove 31 may be spiral. With this arrangement, when the moving member 21 slides in the guide groove 31, the movement of the moving member 21 in the axial direction can be realized. Also, the speed of the relative movement of the moving member 21 in the axial direction can be controlled according to the pitch and inclination angle of the guide groove 31.

As shown in fig. 1 and 2, the moving member 21 is provided in plurality, and the moving members 21 are fitted in the guide grooves 31, respectively. By providing the plurality of moving members 21 and fitting the plurality of moving members 21 in the guide grooves 31, respectively, the optical assembly 20 is more stable when moving in the axial direction, and the optical assembly 20 does not deviate toward one side when moving. Optionally, there are two moving parts 21, and the two moving parts 21 are spaced outside the optical assembly 20.

Further, the moving member 21 may be a pin, one end of which is fixed at the optical assembly 20 and the other end of which is fitted in the guide groove 31. The pin can facilitate the fixing of the moving member 21 and the optical assembly 20, and is easy to obtain and low in cost. Specifically, the pin may be bonded to the optical assembly 20 or may be screwed.

As shown in fig. 1 to 3, the image forming apparatus 100 further includes: the limiting member 40 is disposed outside the lens barrel 10, and the limiting member 40 is located on one axial side of the motion converting member 30 to limit the axial movement of the motion converting member 30. By arranging the limiting member 40, the tightening pretightening force between the limiting member 40 and the motion converting member 30 is well controlled, so that the motion converting member 30 is ensured not to move on one side and the rotation of the motion converting member 30 is not influenced. In addition, the limiting member 40 is screwed to the lens barrel 10, and a top thread is further disposed on the lens barrel 10, and the top thread limits the rotation of the limiting member 40.

As shown in fig. 2 and 3, the lens barrel 10 is provided with a limit step 113 at the other side in the axial direction of the motion converting member 30 to limit the axial movement of the motion converting member 30. By arranging the limiting step 113, a limiting effect can be achieved on one side of the motion conversion part 30, and the motion conversion part is matched with the limiting part 40 for use, so that the motion conversion part 30 is limited between the limiting step 113 and the limiting part 40, the motion conversion part 30 only rotates and cannot move in the axial direction, and the stability and the accuracy of the optical assembly 20 in the adjusting process can be improved.

As shown in fig. 1 to 3, the optical assembly 20 includes: multiplying power lens 22 and microscope base 23, multiplying power lens 22 set up in microscope base 23, and microscope base 23 sets up in installation cavity 111, and the periphery of microscope base 23 is provided with moving member 21 moreover. The arrangement is such that the power lens 22 and the lens base 23 move up and down in the lens barrel 10 by the moving member 21, thereby adjusting the power. By mounting the power lens 22 on the base 23, the power lens 22 is guaranteed not to be scratched when adjusted.

In addition, when the lens base 23 and the power lens 22 are installed in the lens barrel 10, the lens base 23 and the lens barrel 10 are in clearance fit, but the lens base 23 only moves up and down in the lens barrel 10, and rotation and deviation do not occur, so that the imaging quality of the imaging device 100 can be further improved.

As shown in fig. 1, the lens barrel 10 includes: the lens barrel comprises a first lens barrel 11 and a second lens barrel 12, wherein the second lens barrel 12 is arranged at one axial end of the first lens barrel 11 and is in threaded connection with the first lens barrel 11. The lens barrel 10 includes: the first barrel 11 and the second barrel 12, that is, the barrel 10 is a segment type, and the power lens 22 and the lens mount 23 are both disposed inside the first barrel 11. In addition, the second barrel 12 is disposed at one axial side of the first barrel 11, and the first barrel 11 and the second barrel 12 are in threaded connection, so that disassembly is facilitated.

Furthermore, the imaging device 100 further includes a lens diaphragm assembly 50, and the lens diaphragm assembly 50 is disposed at the other axial end of the first barrel 11 and is in threaded connection with the first barrel 11. The lens stop assembly 50 is a device that plays a role in limiting a light beam or limiting the size of an imaging range in the imaging device 100. In particular, the lens stop assembly 50 may be an edge of a lens, a frame, or a specially provided screen. The limiting groove 112 is formed on the first barrel 11.

In addition, the movement conversion member 30 is arranged to convert rotation into axial movement of the moving member 21 when the movement conversion member 30 rotates, so that the first barrel 11 and the lens diaphragm assembly 50 cannot rotate, and adverse effects on the imaging quality of the imaging device 100 and the lens diaphragm assembly 50 caused by traditional vertical adjustment by directly using screw rotation can be avoided.

The outer circumference of the motion converting member 30 may be provided with a groove or a protrusion, so that it is convenient to manually rotate the motion converting member 30, and the phenomenon that the motion converting member 30 slips is avoided.

According to a second aspect of the present invention, a lithographic apparatus includes an imaging device 100. Wherein, the lithography machine can be a direct-write lithography machine.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An imaging device of a lithography machine, comprising:

the lens barrel is internally provided with a mounting cavity, the lens barrel is provided with an axially extending limiting groove, and the limiting groove radially penetrates through the wall of the lens barrel;

the optical assembly is arranged in the mounting cavity, a moving piece is arranged on the outer side of the optical assembly, and the moving piece penetrates through the limiting groove to realize axial movement of the optical assembly;

the motion conversion part is rotatably sleeved on the outer side of the lens barrel and matched with the moving part so as to drive the moving part to axially move in the limiting groove when the motion conversion part rotates relative to the lens barrel.

2. An imaging apparatus of a lithographic apparatus according to claim 1, wherein an inner peripheral surface of the movement converting member is provided with a guide groove extending obliquely in a circumferential direction and an axial direction, and a part of the moving member protrudes into the guide groove.

3. An imaging device of a lithography machine according to claim 2, wherein the guide groove is helical.

4. An imaging device of a lithography machine according to claim 2, wherein said moving member is plural and fitted in said guide groove, respectively.

5. An imaging apparatus of a lithography machine according to claim 2, wherein said moving member is a pin, one end of said pin is fixed at said optical assembly, and the other end of said pin is fitted in said guide groove.

6. An imaging device of a lithography machine according to claim 1, further comprising: the limiting piece is sleeved on the outer side of the lens barrel and located on one axial side of the motion conversion piece so as to limit the axial movement of the motion conversion piece.

7. An imaging device of a lithography machine according to claim 6, wherein the lens barrel is provided with a limit step on the other side of the movement conversion member in the axial direction to limit the axial movement of the movement conversion member.

8. An imaging device of a lithography machine according to claim 1, wherein the optical assembly comprises: the lens comprises a multiplying power lens and a lens base, wherein the multiplying power lens is arranged in the lens base, the lens base is arranged in the installation cavity, and the moving piece is arranged on the periphery of the installation cavity.

9. The imaging device of the lithography machine according to claim 1, wherein the lens barrel comprises: the second lens barrel is arranged at one axial end of the first lens barrel and is in threaded connection with the first lens barrel, and the limiting groove is formed in the first lens barrel;

the imaging device further comprises a lens diaphragm assembly, and the lens diaphragm assembly is arranged at the other axial end of the first lens barrel and is in threaded connection with the first lens barrel.

10. A lithography machine, characterized in that it comprises an imaging device of a lithography machine according to any one of claims 1 to 9.