CN213042868U

CN213042868U - Separation type upper electrode structure convenient to dismouting

Info

Publication number: CN213042868U
Application number: CN202022373790.1U
Authority: CN
Inventors: 徐琥值; 玄龙; 徐凯
Original assignee: Suzhou Yiyishi Electronic Materials Co ltd
Current assignee: Suzhou Yiyishi Electronic Materials Co ltd
Priority date: 2020-10-22
Filing date: 2020-10-22
Publication date: 2021-04-23
Anticipated expiration: 2030-10-22

Abstract

The utility model discloses a separation type upper electrode structure convenient to dismouting, including the go-between, one side of go-between is provided with the dismouting structure, the inside of dismouting structure is provided with rotatory piece, one side of rotatory piece and the one end fixed connection of connecting rod, the other end of connecting rod is provided with the connector, the spring has been cup jointed in the outside of connecting rod, one side of spring is provided with the picture peg, the outside of picture peg is provided with the fixed block, the inside of go-between is provided with the gas supply dish, the surface of gas supply dish is seted up gas jet orifice; this separation type upper portion electrode structure convenient to dismouting is through setting up the dismouting structure for the gas supply dish among the separation type upper portion electrode structure of this dismouting and go-between can dismantle the connection, thereby make things convenient for the change in later stage or maintain, through setting up rotatory piece and connecting rod and connecting groove, make go-between and gas supply dish can be quick change.

Description

Separation type upper electrode structure convenient to dismouting

Technical Field

The utility model relates to an upper portion electrode technical field specifically is a separation type upper portion electrode structure convenient to dismouting.

Background

Electrodes are conductors used to make contact with non-metallic parts of the circuit, such as semiconductors, electrolytes, vacuum or air. This word is william-wheatwell (WamWhewell) under the requirements of the scientist Michael Faraday (Michael Faraday) from two greek words: electron (elektron), meaning amber (the term electricity is derived from the term amber), and hodos, meaning a means created. The electrode in an electrochemical cell is referred to as the anode or cathode the anode is now defined as the electrode where electrons leave the cell and undergo oxidation (indicated by the negative sign "-"), and the cathode is defined as the electrode where electrons enter the cell and undergo reduction (indicated by the plus sign "+"). The electrodes on the cell may be either positive or negative depending on the direction of current through the cell. A galvanic cell is a special type of electrochemical cell, where it is determined which is the anode and which is the cathode, and the anode is always the negative electrode. The primary cell can be discharged, but not charged. Secondary batteries, such as rechargeable batteries, in which the chemical reaction is reversible. When the battery is charged, the anode becomes a positive (+) electrode and the cathode becomes a negative (-) electrode. The same is true of the electrolyzer (electrochemical cell). When the cell is discharged, it behaves like a galvanic cell, with the anode becoming the negative electrode and the cathode becoming the positive electrode. A bipolar electrode is an electrode that serves as the positive electrode of one cell and the negative electrode of the other cell. The upper electrode is mainly used for the parts of the dry etching engineering when small loops are formed on the surface of the glass panel in the production process of the glass panel. The plasma dry etching machine is provided with thousands of gas injection holes along the thickness direction, and can be combined with a plasma electrode in the dry etching process, so that plasma gas is uniformly sprayed in a cabin, and the plasma dry etching machine is a consumable core component for determining the production efficiency of an LCD dry etching project.

In electrode assembly of dry etching equipment, when an etching process is performed, process gas is injected through a gas injection pipe and enters a plurality of gas injection holes formed on an upper electrode, plasma is generated according to a voltage on the upper electrode, and etching of an oxide film, a metal film, or the like on a wafer is formed according to the plasma.

The prior art has the following defects or problems:

the gas supply disk and the connecting ring in the upper electrode structure are integrated, if one of the gas supply disk or the connecting ring is damaged, the whole upper electrode is often required to be replaced, the use is inconvenient, and the waste of resources is easily caused.

SUMMERY OF THE UTILITY MODEL

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a separation type upper portion electrode structure convenient to dismouting, includes the go-between, one side of go-between is provided with the dismouting structure, the inside of dismouting structure is provided with rotatory piece, the one side of rotatory piece and the one end fixed connection of connecting rod, the other end of connecting rod is provided with the connector, the spring has been cup jointed in the outside of connecting rod, one side of spring is provided with the picture peg, the outside of picture peg is provided with the fixed block, the inside of go-between is provided with gaseous supply dish, gaseous jet orifice has been seted up on the surface of gaseous supply dish, the both sides of gaseous supply dish are provided with connecting grooves.

As the utility model discloses a preferred technical scheme, one end of connecting rod and one side fixed connection of connector, the connector is trapezoidal.

As the utility model discloses an optimized technical scheme, the inboard of spring cup joints with the surface of connecting rod, the internal diameter size of spring and the external diameter size phase-match of connecting rod.

As the utility model discloses an optimal technical scheme, the through-hole has been seted up to the inside of picture peg, the connecting rod passes through the through-hole and pegs graft with the picture peg, the external diameter size of connecting rod and the internal diameter size looks adaptation of through-hole.

As the utility model discloses a preferred technical scheme, one side of fixed block and the inside fixed connection of go-between.

As the utility model discloses an optimal technical scheme, the connecting rod passes through the connector and is connected with the coupling groove block, the external diameter of connector and coupling groove's internal diameter size looks adaptation, coupling groove's quantity is two sets of.

As the utility model discloses a preferred technical scheme, the quantity of dismouting structure is two sets of, the go-between passes through the dismouting structure and is connected with the snap fit of gas supply dish.

Compared with the prior art, the utility model provides a separation type upper portion electrode structure convenient to dismouting possesses following beneficial effect:

this separation type upper portion electrode structure convenient to dismouting, through setting up the dismouting structure, make gaseous supply disk and go-between among the separation type upper portion electrode structure of this dismouting dismantle and connect, thereby make things convenient for the change or the maintenance in later stage, through setting up rotatory piece and connecting rod and connecting groove, make go-between and the gaseous supply disk among the separation type upper portion electrode structure of this dismouting can be quick change, and, the process of installation and dismantlement is all very simple and convenient, it is more convenient to use.

Drawings

Fig. 1 is a schematic top plan view of the structure of the present invention;

FIG. 2 is a schematic plan view of the gas supply plate according to the present invention;

FIG. 3 is a schematic plan view of the structure of the present invention;

fig. 4 is a schematic perspective view of the connecting rod of the structure of the present invention.

In the figure: 1. a connecting ring; 2. a disassembly and assembly structure; 3. a gas supply tray; 4. a connecting groove; 5. a gas injection hole; 6. rotating the block; 7. a spring; 8. a connecting rod; 9. inserting plates; 10. a fixed block; 11. a connecting head.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, in this embodiment: the utility model provides a separation type upper portion electrode structure convenient to dismouting, including go-between 1, one side of go-between 1 is provided with dismouting structure 2, dismouting structure 2's inside is provided with rotatory piece 6, one side of rotatory piece 6 and the one end fixed connection of connecting rod 8, the other end of connecting rod 8 is provided with connector 11, spring 7 has been cup jointed in the outside of connecting rod 8, one side of spring 7 is provided with picture peg 9, the outside of picture peg 9 is provided with fixed block 10, the inside of go-between 1 is provided with gaseous supply dish 3, gaseous jet orifice 5 has been seted up on the surface of gaseous supply dish 3, the both sides of gaseous supply dish 3 are provided with connecting groove 4.

In the embodiment, one end of the connecting rod 8 is fixedly connected with one side of the connector 11, and the connector 11 is trapezoidal, so that the connecting rod 8 can be connected with the connecting groove 4 more quickly; the inner side of the spring 7 is sleeved with the outer surface of the connecting rod 8, the inner diameter of the spring 7 is matched with the outer diameter of the connecting rod 8, so that the connecting rod 8 can move back and forth conveniently, and the detachable upper electrode structure can be detached conveniently; a through hole is formed in the inserting plate 9, the connecting rod 8 is inserted into the inserting plate 9 through the through hole, and the outer diameter of the connecting rod 8 is matched with the inner diameter of the through hole, so that the structure of the dismounting structure 2 is more reasonable; one side of the fixed block 10 is fixedly connected with the inside of the connecting ring 1, so that the fixed block 10 can be well fixed, and the use is more convenient; the connecting rods 8 are connected with the connecting grooves 4 in a clamping mode through the connecting heads 11, the outer diameter of the connecting heads 11 is matched with the inner diameter of the connecting grooves 4, the connecting grooves 4 are two in number, the connecting rods 8 can be used conveniently, and the connecting rods 8 can be fixed well to a certain extent through the connecting grooves 4; the quantity of dismouting structure 2 is two sets of, and go-between 1 is connected with 3 blocks of gaseous supply tray through dismouting structure 2, through setting up dismouting structure 2 for go-between 1 among the separation type upper portion electrode structure of this dismouting and gaseous supply tray 3's of being connected is more convenient, convenient to use person's use.

The utility model discloses a theory of operation and use flow: when the user used this separation type upper portion electrode structure convenient to dismouting, thereby at first make connecting rod 8 and coupling groove 4 separation through pulling open rotatory piece 6, then, the user shifts out gas supply dish 3 from go-between 1, the gas supply dish 3 of renewal can, through connecting rod 8, connector 11 and spring 7 and picture peg 9, make this dismouting structure 2 can be quick supply dish 3 with go-between 1 and gas and connect, great having made things convenient for the staff to supply dish 3 or go-between 1 change in the later stage, it is more convenient to use.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a separation type upper portion electrode structure convenient to dismouting which characterized in that: including go-between (1), one side of go-between (1) is provided with dismouting structure (2), the inside of dismouting structure (2) is provided with rotatory piece (6), the one side of rotatory piece (6) and the one end fixed connection of connecting rod (8), the other end of connecting rod (8) is provided with connector (11), spring (7) have been cup jointed in the outside of connecting rod (8), one side of spring (7) is provided with picture peg (9), the outside of picture peg (9) is provided with fixed block (10), the inside of go-between (1) is provided with gas supply dish (3), gas jet orifice (5) have been seted up on the surface of gas supply dish (3), the both sides of gas supply dish (3) are provided with coupling groove (4).

2. A detachable upper electrode structure according to claim 1, wherein: one end of the connecting rod (8) is fixedly connected with one side of the connector (11), and the connector (11) is trapezoidal.

3. A detachable upper electrode structure according to claim 1, wherein: the inner side of the spring (7) is sleeved with the outer surface of the connecting rod (8), and the inner diameter of the spring (7) is matched with the outer diameter of the connecting rod (8).

4. A detachable upper electrode structure according to claim 1, wherein: the through hole has been seted up to the inside of picture peg (9), connecting rod (8) are pegged graft through-hole and picture peg (9), the external diameter size of connecting rod (8) and the internal diameter size looks adaptation of through-hole.

5. A detachable upper electrode structure according to claim 1, wherein: one side of the fixing block (10) is fixedly connected with the inside of the connecting ring (1).

6. A detachable upper electrode structure according to claim 1, wherein: connecting rod (8) are connected with connecting groove (4) block through connector (11), the external diameter size of connector (11) and the internal diameter size looks adaptation of connecting groove (4), the quantity of connecting groove (4) is two sets of.

7. A detachable upper electrode structure according to claim 1, wherein: the number of the dismounting structures (2) is two, and the connecting ring (1) is connected with the gas supply disc (3) in a clamping manner through the dismounting structures (2).