CN213023791U - Laser power attenuator - Google Patents
Laser power attenuator Download PDFInfo
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- CN213023791U CN213023791U CN202022295936.5U CN202022295936U CN213023791U CN 213023791 U CN213023791 U CN 213023791U CN 202022295936 U CN202022295936 U CN 202022295936U CN 213023791 U CN213023791 U CN 213023791U
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- dichroic mirror
- attenuator
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- optical communication
- light beam
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Abstract
The invention provides a laser power attenuator. Comprising a laser and an attenuator, the laser in optical communication with the attenuator; the attenuator comprises a polarization rotator, a dichroic mirror, a knob, a protective cover and an adjustable device, wherein the polarization rotator is in optical communication with the laser, the polarization rotator is a half-wave plate, the knob is arranged on the attenuator and is connected with the polarization rotator, the dichroic mirror is in optical communication with the polarization rotator, the adjustable device is in optical communication with the dichroic mirror, and the protective cover is arranged on the periphery of the attenuator. The invention relates to the technical field of laser, in particular to a variable laser power attenuator.
Description
Technical Field
The utility model relates to a laser technical field especially relates to a laser power attenuator.
Background
Laser beams are widely used for various purposes such as drilling, micro welding, etc. It is generally desirable to be able to vary the power of the lasers so that the same laser can provide a laser beam of variable power. Ultraviolet light beams are particularly difficult to handle because of their destructive nature.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model provides a changeable laser power attenuator.
In order to realize the above functions, the utility model discloses the technical scheme who takes as follows: a laser power attenuator comprising a laser in optical communication with an attenuator, the laser providing a preselected beam of light that is transmitted along a preselected optical path, and the attenuator being for attenuating the beam of light provided by the laser to varying degrees; the attenuator comprises a polarization rotator, a dichroic mirror, a knob, a protective cover and an adjustable device, wherein the polarization rotator is in optical communication with a laser, a light beam emitted by the laser reaches the polarization rotator, the polarization rotator is a half-wave plate, the half-wave plate is rotatably arranged on the attenuator, the knob is arranged on the attenuator and is connected with the polarization rotator, the polarization angle of the polarization rotator is adjusted by rotating the knob, the 'C' axis of the polarization rotator can be rotated from 0 DEG to 45 DEG, so that the polarization state of the light beam emitted by the laser is rotated from 0 DEG to 90 DEG, the dichroic mirror is in optical communication with the polarization rotator, the surface of the dichroic mirror is coated, the light beam output from the polarization rotator is guided to the dichroic mirror, the surface of the dichroic mirror is coated, the dichroic mirror can transmit the P polarization light beam and reflect the S polarization light beam, and the dichroic mirror is oriented at a Brewster angle, the adjustable device is in optical communication with the dichroic mirror, and the protective cover is arranged on the periphery of the attenuator and used for protecting the attenuator.
Further, the tunable device includes a beam stop in optical communication with the dichroic mirror.
Further, the tunable device includes an optional displacement compensator optically connected to the dichroic mirror, preferably, the optional displacement compensator is un-coated uv-grade fused silica, and is used as a substrate for the dichroic mirror, and the optional displacement compensator is installed in a guiding manner to compensate for beam deviation caused by the insertion of the light beam through the dichroic mirror, and also can be used as an optional displacement compensator.
Further, the tunable device includes a beam stop in optical communication with the dichroic mirror, and a first dichroic mirror in optical communication with the dichroic mirror, the first dichroic mirror oriented at brewster' S angle, the dichroic mirror highly reflective for S polarized light beams and highly transmissive for P polarized light beams.
Further, the tunable device comprises a light beam blocking member, a first dichroic mirror, a second dichroic mirror and a third dichroic mirror, wherein the light beam blocking member is in optical communication with the dichroic mirror, the first dichroic mirror is in optical communication with the dichroic mirror, the second dichroic mirror is in optical communication with the first dichroic mirror, the third dichroic mirror is in optical communication with the second dichroic mirror, and the first dichroic mirror, the second dichroic mirror and the third dichroic mirror are oriented at the brewster angle.
Further, the protective cover is provided with a beam stop for blocking any accidental transmission of the beam, in particular for preventing the ultraviolet beam from being transmitted outside the attenuator.
Further, the laser is an ultraviolet laser.
The utility model adopts the above structure to gain beneficial effect as follows: the utility model provides a pair of laser power attenuator, ultraviolet laser for with high polarization contrast and wide power tuning range continuous change laser output power, the cooperation of laser instrument and different attenuators, make the laser power loss to offering the attenuator littleer, in addition, provide higher polarization contrast and also provide the wideer power tuning range of relative incident power simultaneously.
Drawings
Fig. 1 is a block diagram of an embodiment of a laser power attenuator according to the present invention;
FIG. 2 is a block diagram of another embodiment of a laser power attenuator according to the present invention;
FIG. 3 is a perspective view of a power attenuator of a laser power attenuator of the present invention;
FIG. 4 is a left side view of a power attenuator of the laser power attenuator of the present invention;
FIG. 5 is a top view of a power attenuator of the laser power attenuator of the present invention;
FIG. 6 is a block diagram of another embodiment of the laser power attenuator of the present invention
FIG. 7 is a block diagram of another embodiment of the laser power attenuator of the present invention
Fig. 8 is a block diagram of a power attenuator of a laser power attenuator according to the present invention.
The device comprises a laser 1, a laser 2, an attenuator 3, a polarization rotator 4, a dichroic mirror 5, a knob 6, a protective cover 7, an adjustable device 8, a light beam blocking piece 9, an optional displacement compensator 10, a dichroic mirror I, a dichroic mirror II, a dichroic mirror III, a dichroic mirror 13 and a half-wave plate.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-8, the present invention provides a laser power attenuator, comprising a laser 1 and an attenuator 2, wherein the laser 1 is in optical communication with the attenuator 2; the attenuator 2 includes polarization rotator 3, dichroic mirror 4, knob 5, safety cover 6 and adjustable device 7, polarization rotator 3 and laser 1 optics intercommunication, polarization rotator 3 is the half-wave plate, knob 5 is located on the attenuator 2, knob 5 links to each other with polarization rotator 3, dichroic mirror 4 and polarization rotator 3 optics intercommunication, adjustable device 7 and dichroic mirror 4 optics intercommunication, safety cover 6 is located attenuator 2 peripherally.
The adjustable means 7 comprises a beam stop 8, which beam stop 8 is in optical communication with the dichroic mirror 4.
The adjustable means 7 comprises an optional displacement compensator 9, the optional displacement compensator 9 being in optical communication with the dichroic mirror 4.
The tunable device 7 comprises a light beam blocking member 8 and a first dichroic mirror 10, the light beam blocking member 8 is in optical communication with the dichroic mirror 4, and the first dichroic mirror 10 is in optical communication with the dichroic mirror 4.
The adjustable device 7 comprises a light beam blocking piece 8, a first dichroic mirror 10, a second dichroic mirror 11 and a third dichroic mirror 12, the light beam blocking piece 8 is in optical communication with the dichroic mirror 4, the first dichroic mirror 10 is in optical communication with the dichroic mirror 4, the second dichroic mirror 11 is in optical communication with the first dichroic mirror 10, the third dichroic mirror 12 is in optical communication with the second dichroic mirror 11, and the first dichroic mirror 10, the second dichroic mirror 11 and the third dichroic mirror 12 are oriented at the brewster angle.
The protective cover 6 is provided with a beam stop 8.
The laser 1 is an ultraviolet laser 1.
As shown in fig. 1, a laser 1, preferably, an ultraviolet laser 1, provides a linearly polarized ultraviolet laser beam to an attenuator 2, within the attenuator 2, a polarization rotator 3 is provided to rotate the polarization state of the ultraviolet beam from 0 to 90, ideally, the polarization rotator 3 is a half-wave plate, the "C" axis of which can be rotated from 0 to 45 deg., thereby rotating the polarization state of the ultraviolet light beam from 0 to 90 deg., the light beam output from the polarization rotator 3 is directed to the dichroic mirror 4, the dichroic mirror 4 is surface coated to transmit the P-polarized light beam and reflect the S-polarized light beam, preferably, the dichroic mirror 4 is oriented at brewster' S angle, the P-polarized light beam passes through the dichroic mirror 4 and is output by the attenuator 2, while the reflected S-polarized beam is transmitted to an optional beam stop 8, optionally the reflected beam may also be used as output or as additional output.
Fig. 2 provides an alternative embodiment of the attenuator 2 according to the invention. FIG. 2 is similar to FIG. 1, and in FIG. 2 there is provided an ultraviolet laser 1 for transmitting a preselected ultraviolet wavelength beam along a preselected optical path, desirably the transmitted beam is a linearly polarized beam, which is transmitted to an attenuator 2 where it is first incident on an ultraviolet beam polarization rotator 3, which polarization rotator 3 is mounted to selectively rotate the polarization state of the beam by 0-90. The polarization rotator 3 is preferably a rotatably mounted half-wave plate whose "C" axis can be rotated 0-45 to rotate the polarization state of the ultraviolet light beam from 0 to 90. The light beam transmitted from the polarization rotator 3 is directed to a dichroic mirror 4, which dichroic mirror 4 reflects the S-polarized component of the light beam and transmits the P-polarized component of the light beam, the light beam transmitted from the dichroic mirror 4 being offset with respect to the original beam path incident on the attenuator 2. An optional displacement compensator 9, preferably of un-coated uv-grade fused silica, is used for the substrate used by the dichroic mirror 4, the optional displacement compensator 9 being oriented for mounting for compensating beam deviation due to the insertion of the beam through the dichroic mirror 4, and the dichroic mirror 4 may also be used as the beam optional displacement compensator 9.
Fig. 3-5 show in more detail the power attenuator 2 of fig. 2, the polarization rotator 3 being a rotatably mounted half-wave plate which is correspondingly rotated when the knob 5 is rotated so that the polarization state of the incident beam is rotated, the device also being designed as an automated device with sensors and motors to control the power output by sensing the characteristics (i.e. power) of the output beam and activating an electrical rotation system to rotate the polarization state of the incident beam, the dichroic mirror 4 being in optical communication with the incident laser beam of a preselected wavelength. An optional displacement compensator 9 is disposed in optical communication with the dichroic mirror 4, preferably adjacent the dichroic mirror 4, to compensate for any spatial displacement of the incident light beam. Around the power attenuator 2 a protective cover 6 is provided, preferably a beam stop 8 is provided on the protective cover 6, blocking any accidental transmission of the beam, in particular the transmission of the ultraviolet beam outside the attenuator 2.
In operation, as shown in FIG. 2, a laser light, preferably a substantially linearly polarized UV laser beam, is provided by laser 1 and directed to attenuator 2 to achieve the desired output power for a particular application by rotating polarization rotator 3. For example, if it is desired to have about 50% of the power provided by the UV laser 1, then its polarization state will be rotated by about 45, and the laser power transmitted through the optional displacement compensator 9 of FIG. 2 and ultimately output will be about 50% of the output power of the UV laser 1.
Fig. 6 provides another embodiment of a laser beam delivery apparatus according to the present invention. A laser 1, preferably an ultraviolet beam laser 1, is used to deliver a beam of preselected ultraviolet beam wavelength along a beam path, ideally linearly polarized, which is passed to an attenuator 2 and is first incident on a polarization rotator 3 as described in figures 2 and 1, rotating the polarization of the beam as required to achieve the desired output power of the ultraviolet beam. The light beam transmitted from the polarization rotator 3 is transmitted onto the dichroic mirror 4 which has been described previously, the P-polarized light beam is transmitted by the dichroic mirror 4 and transmitted to the beam blocker 8 where it is safely blocked, the S-polarized light beam is reflected by the dichroic mirror 4 and directed to the dichroic mirror one 10, which dichroic mirror one 10 has high reflectivity for the S-polarized light beam and high transmissivity for the P-polarized light beam, and the S-polarized light beam is reflected and directed outside the attenuator 2 as output.
Fig. 7 is another alternative embodiment of a variable power ultraviolet laser beam delivery apparatus according to the present invention, an ultraviolet laser 1 transmits an ultraviolet wavelength beam along a predetermined path to be incident on a polarization rotator 3, on which polarization rotator 3 the polarization state of the light beam is rotated as previously described, after which the light beam is incident on a dichroic mirror 4, in which a P-polarized component of the light beam is transmitted and an S-polarized component is reflected, in which embodiment the P-polarized component is transmitted to a beam blocker 8 and safely blocked, the reflected S-polarized component of the light beam is transmitted to a dichroic mirror 10, which dichroic mirror 10 is mounted at or near the brewster angle with respect to the incident light beam, the S-polarized component of the light beam is reflected again and the P-polarized component is transmitted, the reflected ultraviolet light beam S component is transmitted to be incident on a dichroic mirror 11, at this dichroic mirror two 11 the S component is reflected again and the P component is transmitted, then the reflected uv light beam S component is transmitted incident on a dichroic mirror three 12, which dichroic mirror three 12 reflects again the S component of the uv light beam and transmits the P component. The reflected beam from the dichroic mirror three 12 is output as the attenuator 2. The dichroic mirror 4, the first dichroic mirror 10, the second dichroic mirror 11, and the third dichroic mirror 12 are all preferably mounted at or near brewster angle with respect to the incident light beam.
In operation, 266nm ultraviolet light, generated for example by the fourth harmonic of an Nd: YAG or Nd: YVO4 laser 1, is used as the incident laser beam. Preferably the polarization rotator 3 is a half-wave plate, which is rotated from 0 ° to 45 ° depending on the desired output power, the resulting output power can be varied, so that if the laser 1 provides 5 watts of power and 2.5 watts of output is desired, the polarization rotator 3 (i.e. the half-wave plate) is rotated by about 22.5 °, assuming that the ultraviolet laser 1 provides a linearly polarized light beam, the rotating polarization rotator 3 rotates the polarization state of the light beam by about 45 °, thereby taking half of the input power as output power, the light beam transmitted from the polarization rotator 3 is directed to the dichroic mirror 4, where the S component is reflected and the P component is transmitted, desirably the dichroic mirror 4 can reflect 99% or more, preferably 99.5% or more, of the S-polarized component of the ultraviolet light beam; but only transmits about 96% of the P component of the uv beam and reflects 4% of the P component. The reflected P and S components are transmitted incident on the dichroic mirror-10, which-10 reflects again 99%, preferably 99.5% or more, of the S component of the light beam and transmits approximately 96% of the P component. The reflected light beam from the dichroic mirror one 10 is transmitted to the dichroic mirror two 11, where 99%, preferably 99.5% or more, of the S component of the ultraviolet light beam is reflected again, and approximately 96% of the P component is transmitted. The reflected light beam from the dichroic mirror two 11 is transmitted to the dichroic mirror three 12, where 99%, preferably 99.5% or more, of the S component is reflected again at the dichroic mirror three 12, and about 96% of the P component is transmitted, the reflected component from the dichroic mirror three 12 being finally output as the apparatus. The resulting output beam is collinear with the input beam, i.e. the spatial displacement of the beam is minimal due to reflection by the four dichroic mirrors 4. Optionally, a beam stop 8 is provided in the path of the P component transmitted by the dichroic mirror 4 to safely stop transmitted ultraviolet radiation, optionally, the housing of the attenuator 2 may also serve as the beam stop 8, such housing being sufficient to absorb the ultraviolet beam transmitted by the dichroic mirror one 10, the dichroic mirror two 11 and the dichroic mirror three 12, which is small compared to the amount transmitted by the dichroic mirror 4, the attenuator 2 in fig. 4 having many advantages compared to the conventional attenuator 2 and to the attenuator 2 in fig. 2, the loss of laser power provided to the attenuator 2 being smaller using the attenuator 2 in fig. 3 and 4. In addition, a higher polarization contrast is provided, which is defined as the ratio of the emitted power in the desired polarization to the emitted power in the undesired polarization. In addition, a wider power tuning range with respect to incident power is also provided.
Fig. 8 is another attenuator 2, the attenuator 2 comprising two or more dichroic mirrors 4, preferably three or more, desirably four. Referring to fig. 5, four dichroic mirrors 4 are provided, in optical communication with each other, the light beam to be polarized is directed to the dichroic mirror 4, wherein the S-polarized component is reflected to the first dichroic mirror 10, the S-polarized component is reflected to the second dichroic mirror 11 in the first dichroic mirror 10, the S-component is reflected to the third dichroic mirror 12 in the second dichroic mirror 11, the third dichroic mirror 12 reflects the light beam out of the attenuator 2, desirably the input light beam is incident on the dichroic mirror 4 with the S-polarized component dominant, if small relative to the S-polarized component of the dichroic mirror 4, the optional beam polarization rotator 3 may be used to rotate the polarization of the incident light beam to maximize the S-polarized component incident on the dichroic mirror 4. Preferably, dichroic mirror 4, dichroic mirror one 10, dichroic mirror two 11 and dichroic mirror three 12 are all preferably mounted at or near brewster angle with respect to the incident light beam, and furthermore, an optional beam stop 8 may be provided.
Example 1 gives a comparison of the characteristics of the variable power ultraviolet laser beam delivery apparatus of figures 1, 2, 6 and 7.
Example 1
Comparing FIGS. 1, 2, 6 and 7, the pair usedThe dichroic mirror has a high reflectance in the S polarization and a high transmittance in the P polarization, the highly reflective dichroic mirror has a reflectance of 99% or more in the S polarization in the ultraviolet light beam range, and the highly transmissive dichroic mirror has a transmittance of about 96% in the ultraviolet light beam range; the dichroic mirror characteristic here is RS＝99.5％，RP＝4.0％，TP96.0% and TS0.5%, and an incident angle of about 56 ° at a wavelength of 266 nm.
Referring to example 1, the devices of fig. 6 and 7 outperform the devices of fig. 1 and 2, both the devices of fig. 2 and 7 having collinear input and output paths, with the maximum power of the device of fig. 7 being 98% in example 1, and only 92% in the device of fig. 2. The arrangement of fig. 7 is ten times better than the arrangement of fig. 6 with respect to contrast (polarization purity of the light beam). In addition, the minimum power capability achievable with the device of fig. 7 is superior to that of the device of fig. 2. Finally, the power tuning range of the device of fig. 7 is better than that of fig. 2.
It can be seen that the device of figure 6 is superior to the device of figure 1. The output optical path of both the devices of fig. 1 and 6 are offset from the input path, the maximum output power of the device of fig. 6 is 99% of the incident power, the device of fig. 1 is 96%, the contrast ratio, i.e., the purity of the output beam polarization, is twice that of fig. 1, and in addition, the minimum transmission power achievable by the device of fig. 6 is smaller than that of the device of fig. 1, so the power regulation range of the device of fig. 6 is also superior.
The present invention and the embodiments thereof have been described above, but the description is not limited thereto, and the embodiment shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.
Claims (7)
1. A laser power attenuator, characterized by: comprising a laser and an attenuator, the laser in optical communication with the attenuator; the attenuator comprises a polarization rotator, a dichroic mirror, a knob, a protective cover and an adjustable device, wherein the polarization rotator is in optical communication with the laser, the polarization rotator is a half-wave plate, the knob is arranged on the attenuator and is connected with the polarization rotator, the dichroic mirror is in optical communication with the polarization rotator, the adjustable device is in optical communication with the dichroic mirror, and the protective cover is arranged on the periphery of the attenuator.
2. A laser power attenuator as claimed in claim 1, wherein: the tunable device includes a beam stop in optical communication with the dichroic mirror.
3. A laser power attenuator as claimed in claim 1, wherein: the tunable device includes a selectable displacement compensator in optical communication with the dichroic mirror.
4. A laser power attenuator as claimed in claim 1, wherein: the adjustable device comprises a light beam blocking piece and a first dichroic mirror, the light beam blocking piece is in optical communication with the dichroic mirror, and the first dichroic mirror is in optical communication with the dichroic mirror.
5. A laser power attenuator as claimed in claim 1, wherein: the adjustable device comprises a light beam blocking piece, a first dichroic mirror, a second dichroic mirror and a third dichroic mirror, wherein the light beam blocking piece is in optical communication with the dichroic mirror, the first dichroic mirror is in optical communication with the dichroic mirror, the second dichroic mirror is in optical communication with the first dichroic mirror, the third dichroic mirror is in optical communication with the second dichroic mirror, and the first dichroic mirror, the second dichroic mirror and the third dichroic mirror are oriented at the Brewster angle.
6. A laser power attenuator as claimed in claim 1, wherein: and the protective cover is provided with a light beam blocking piece.
7. A laser power attenuator as claimed in claim 1, wherein: the laser is an ultraviolet laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022295936.5U CN213023791U (en) | 2020-10-15 | 2020-10-15 | Laser power attenuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022295936.5U CN213023791U (en) | 2020-10-15 | 2020-10-15 | Laser power attenuator |
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| Publication Number | Publication Date |
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| CN213023791U true CN213023791U (en) | 2021-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202022295936.5U Active CN213023791U (en) | 2020-10-15 | 2020-10-15 | Laser power attenuator |
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| CN (1) | CN213023791U (en) |
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- 2020-10-15 CN CN202022295936.5U patent/CN213023791U/en active Active
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