CN212998678U - Multistage mud filter screen subassembly - Google Patents

Multistage mud filter screen subassembly Download PDF

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Publication number
CN212998678U
CN212998678U CN202020899120.0U CN202020899120U CN212998678U CN 212998678 U CN212998678 U CN 212998678U CN 202020899120 U CN202020899120 U CN 202020899120U CN 212998678 U CN212998678 U CN 212998678U
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China
Prior art keywords
filter screen
filter
range
screen
mud
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CN202020899120.0U
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Chinese (zh)
Inventor
罗爱斌
周铁军
陈章水
宾启雄
叶水景
严卫东
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Guangdong Vital Micro Electronics Technology Co Ltd
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First Semiconductor Materials Co ltd
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Priority to CN202020899120.0U priority Critical patent/CN212998678U/en
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Abstract

The utility model relates to a filter technical field especially relates to a multistage mud filter screen subassembly, including the filter screen of at least two-layer range upon range of setting, the filter screen is formed with the filter chamber including the filter house that is the taper, filter house inboard, and wherein, range upon range of in the mesh aperture of the filter screen in the outside is less than range upon range of in the mesh aperture of inboard filter screen. The utility model discloses an aspect, the filter screen of range upon range of setting has increased filterable area, improves the filterable effect, and on the other hand, filters the not filter screen in different mesh apertures of granule of equidimension step by step, and the filter screen of accessible inlayer filters the piece of big granule, and the atress, wearing and tearing and the filtration piece volume of the less mesh filter screen of inlayer reduce greatly like this, improve whole shock resistance and filtration performance of filter assembly, and the life of filter assembly increases, realizes the microfiltration of mud; in addition, filtered debris can easily fall off from the filter screen under the action of self weight, so that the filter screen has a self-cleaning effect in the filtering process.

Description

Multistage mud filter screen subassembly
Technical Field
The utility model relates to a filter technical field especially relates to a multistage mud filter screen subassembly.
Background
The existing wafer linear cutting equipment can go through at least two filtering processes in the linear cutting process, wherein one filtering process is a slurry filtering screen of a linear cutting wheel axle box; the second is a slurry filter, most of large-particle impurities are filtered by the two filtering devices, the filtered slurry is re-pumped by a slurry filtering pump of the wire cutting machine to be subjected to wire cutting on a steel wire and the surface of a wafer, and a slurry mixture subjected to wire cutting is subjected to the two filtering processes again to complete the wire cutting of the wafer repeatedly.
The prior art adopts the individual layer filter screen to filter, and the filter effect is relatively poor, and in addition, the filter screen adsorbs the mesh jam that the piece leads to the filter screen easily in filtering process, needs often to change and wash the maintenance, influences production efficiency.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a help improving mud filter effect, reduce the plant maintenance cost, improve production efficiency's a multistage mud filter screen subassembly.
In order to achieve the above object, the utility model provides a multistage mud filter screen subassembly, filter screen including at least two-layer range upon range of setting, the filter screen is including the filter house that is the taper, the filter house inboard is formed with the filter chamber that is used for holding mud, wherein, range upon range of in the outside the mesh aperture of filter screen is less than range upon range of in the inboard the mesh aperture of filter screen.
Optionally, an included angle formed by any side line of the filtering part and the rotating shaft of the filtering part is 3-70 degrees.
Optionally, an included angle formed by any side line of the filtering part and the rotating shaft thereof is 5-40 degrees.
Optionally, an included angle formed by the filter screen stacked on the outer side and the rotating shaft thereof is larger than an included angle formed by the filter screen stacked on the inner side and the rotating shaft thereof.
Optionally, the aperture of the mesh of the filter screen is 0.6-6 mm.
Optionally, a flow gap is formed between at least two layers of the filter screens which are arranged in a stacked manner.
Optionally, the filtering portion is in a horn shape with openings at two ends, and a cover plate is arranged at one end of the filtering portion with a smaller opening caliber, which is sealed and provided with a cover plate.
Optionally, at least two layers of the filter screens are arranged in a stacked manner and are arranged coaxially.
Implement the utility model discloses an embodiment has following technological effect:
the utility model discloses form the filter screen of at least two-layer range upon range of setting, and the mesh aperture of the filter screen of range upon range of and the outside is less than the mesh aperture of the filter screen of range upon range of in the inboard, thereby make mud from the in-process that the side direction flows outside the filter screen in the filter screen, filter the disintegrating slag in the mud step by big to little, on the one hand, the filter screen of range upon range of setting has increased filterable area, improve filterable effect, on the other hand, filter the not granule of equidimension at the filter screen of different mesh apertures step by step, the piece of big granule is filtered to the filter screen of accessible inlayer, the atress of the less mesh filter screen of inlayer like this, wearing and tearing and the piece volume of filtering reduce greatly, improve the whole shock resistance and;
in addition, be the filter house of taper, when the rotation axis and the vertical direction parallel arrangement of filter house, make filterable piece drop from the filter screen under the dead weight effect easily, and avoid producing the secondary adhesion with the filter screen contact at the in-process that drops, make the filter screen have self-cleaning effect in filtering process.
Drawings
Fig. 1 is a schematic structural diagram of a preferred embodiment of the present invention.
Description of reference numerals:
1. filter screen, 11, filter house, 12, filter chamber, 2, flow clearance, 3, apron.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
Referring to fig. 1, the present embodiment provides a multistage slurry filter screen assembly, which includes at least two layers of filter screens 1 stacked together, where the filter screens 1 include a conical filter portion 11, and a filter cavity 12 for accommodating slurry is formed inside the filter portion 11, where the mesh aperture of the filter screen 1 stacked outside is smaller than that of the filter screen 1 stacked inside.
The utility model discloses form the filter screen 1 of at least two-layer range upon range of setting, and range upon range of mesh aperture with the filter screen 1 in the outside is less than the mesh aperture range upon range of in filter screen 1 in the inboard, thereby make mud from the filter screen 1 inboard to the in-process that flows outside filter screen 1, the disintegrating slag in the mud is filtered step by big to little, on the one hand, filter screen 1 of range upon range of setting has increased the filterable area, improve the effect of filtration, on the other hand, filter the granule of equidimension in different mesh apertures filter screen 1 step by step, the piece of big granule is filtered to the filter screen 1 of accessible inlayer, the atress of the less mesh filter screen 1 of inlayer like this, wearing and tearing and the piece volume of filtration reduce greatly, improve the whole shock resistance and filtration performance of filter assembly, the life;
in addition, the filter part 11 that is the taper shape, when the rotation axis of filter part 11 and vertical direction parallel arrangement, make filterable piece drop from filter screen 1 under the dead weight effect easily, and avoid producing the secondary adhesion with filter screen 1 contact in the in-process that drops, make filter screen 1 have the self-cleaning effect in filter process.
Specifically, the filtering portion 11 in this embodiment is in a horn shape with openings at two ends, a cover plate 3 is disposed at a sealing cover at one end of the filtering portion 11 with a smaller opening diameter, so as to prevent slurry from overflowing from the upper portion of the filtering net 1, a filtering cavity 12 for accommodating slurry is formed inside the filtering net 1, during the filtering process, slurry is continuously injected into the filtering cavity 12, pressure inside the filtering cavity 12 is greater than outside pressure to form pressure difference, so that slurry in the filtering cavity 12 automatically passes through the filtering net 1 and flows outwards under the action of the pressure difference, thereby realizing effective filtering of slurry and improving slurry filtering efficiency;
further, in order to ensure the filtering effect and stability of the filter screen 1, and because the filtering part 11 is in the shape of a horn with two open ends, at this time, the included angle formed by any side line of the filtering part 11 and the rotating shaft thereof is 3-70 °, on the one hand, the inner side surface of the filtering part 11 keeps a certain inclined angle, so that the chips adhered to the filtering part 11 fall off under the action of self-gravity, and meanwhile, the inclined angle of the filtering part 11 is in a proper range, thereby preventing the chips from being stacked on the inner side surface of the filtering part 11, and influencing the filtering effect, and further preferably, the included angle formed by any side line of the filtering part 11 and the rotating shaft thereof is 5-40%.
Because in the filtering process, the filtered debris is deposited and gathered downwards, in order to prevent the blocking of the flow gap 2 formed between the filter screens 1, the included angle formed by the filter screens 1 stacked on the outer side and the rotating shaft thereof is larger than the included angle formed by the filter screens 1 stacked on the inner side and the rotating shaft thereof, so that the gap between the two adjacent layers of the filter screens 1 is gradually enlarged.
Specifically, the aperture of the mesh of the filter screen 1 in the embodiment is 0.6-2 mm, so that the filtering of the debris generated by the wafer wire-electrode cutting slurry is realized.
In this embodiment, at least two layers of filter screens 1 arranged in a stacked manner are coaxially arranged, so that a gap with the same interval distance is formed between two adjacent layers of filter screens 1 along the circumferential direction, and the filtering stability of the filter screen 1 assembly is improved, specifically, in this embodiment, four layers of filter screens 1 are included, and the four layers of filter screens 1 are coaxially arranged, wherein, in this embodiment, the aperture of each filter screen 1 is 0.6-0.8 mm, 0.8-2.0 mm, 2.0-3.5 mm, and 3.5-5.5 mm in sequence from the outer side to the inner side.
To sum up, the utility model discloses form the filter screen 1 that at least two-layer range upon range of setting, and range upon range of mesh aperture with the filter screen 1 in the outside is less than the mesh aperture that ranges upon range of filter screen 1 in the inboard, thereby make the in-process that mud flows from filter screen 1 inboard to filter screen 1 outside, the disintegrating slag in the mud is filtered step by step from big to little, on the one hand, the filter screen 1 that ranges upon range of setting has increased the filterable area, improve the effect of filtration, on the other hand, filter the granule of equidimension step by step at the filter screen 1 of different mesh apertures, the piece of big granule is filtered through the filter screen 1 of inlayer, the atress of the less mesh filter screen 1 of inlayer like this, wearing and tearing and the piece volume of filtration reduce greatly, improve the whole shock resistance and filtration performance of filter assembly;
in addition, the trumpet-shaped filtering part 11 enables filtered debris to easily fall off from the filtering net 1 under the action of self weight when the rotating shaft of the filtering part 11 is arranged in parallel with the vertical direction, and avoids the secondary adhesion generated by the contact with the filtering net 1 in the falling process, so that the filtering net 1 has the self-cleaning effect in the filtering process.
In the description of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and replacements can be made without departing from the technical principle of the present invention, and these modifications and replacements should also be regarded as the protection scope of the present invention.

Claims (8)

1. The utility model provides a multistage mud filter screen subassembly, its characterized in that includes the filter screen of at least two-layer range upon range of setting, the filter screen is including the filter house that is the taper, the filter house inboard is formed with the filter chamber that is used for holding mud, wherein, range upon range of in the outside the mesh aperture of filter screen is less than range upon range of in the inboard the mesh aperture of filter screen.
2. The multi-stage mud screen assembly of claim 1, wherein either side line of the screen portion is angled from its axis of rotation by 3-70 °.
3. The multi-stage mud screen assembly of claim 2, wherein either side line of the screen portion is angled from 5-40 ° to its axis of rotation.
4. The multiple stage mud screen assembly of any one of claims 1 to 3, wherein the angle of the outer stacked filter screens to their axis of rotation is greater than the angle of the inner stacked filter screens to their axis of rotation.
5. The multi-stage mud screen assembly of claim 1, wherein the mesh openings of the screens are 0.6-6 mm in diameter.
6. The multi-stage mud screen assembly of claim 1, wherein at least two of said screens are stacked with a flow gap therebetween.
7. The multiple stage mud screen assembly of claim 1, wherein the filter section is flared with openings at both ends, and wherein the end of the filter section having the smaller diameter of the opening is sealed with a cover plate.
8. The multi-stage mud screen assembly of claim 1, wherein at least two of said screens are arranged in a stacked arrangement coaxially.
CN202020899120.0U 2020-05-25 2020-05-25 Multistage mud filter screen subassembly Active CN212998678U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020899120.0U CN212998678U (en) 2020-05-25 2020-05-25 Multistage mud filter screen subassembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020899120.0U CN212998678U (en) 2020-05-25 2020-05-25 Multistage mud filter screen subassembly

Publications (1)

Publication Number Publication Date
CN212998678U true CN212998678U (en) 2021-04-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020899120.0U Active CN212998678U (en) 2020-05-25 2020-05-25 Multistage mud filter screen subassembly

Country Status (1)

Country Link
CN (1) CN212998678U (en)

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Effective date of registration: 20211210

Address after: 511517 workshop a, No.16, Chuangxing Third Road, high tech Zone, Qingyuan City, Guangdong Province

Patentee after: Guangdong lead Microelectronics Technology Co.,Ltd.

Address before: 511517 area B, no.27-9 Baijia Industrial Park, Qingyuan high tech Zone, Guangdong Province

Patentee before: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd.