CN212985631U - Air exhaust system of wafer machine frame box and fan mounting bracket thereof - Google Patents
Air exhaust system of wafer machine frame box and fan mounting bracket thereof Download PDFInfo
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- CN212985631U CN212985631U CN202021799088.5U CN202021799088U CN212985631U CN 212985631 U CN212985631 U CN 212985631U CN 202021799088 U CN202021799088 U CN 202021799088U CN 212985631 U CN212985631 U CN 212985631U
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Abstract
The utility model relates to a fan installing support for wafer board, include: the bracket comprises a bracket main body, a bracket main body and a bracket, wherein the bracket main body is a straight plate-shaped main body comprising a cavity, and an extension part extends out of one end of the bracket main body; the extension portion comprises a cavity; an air inlet portion provided on the extension portion; the air outlet part is arranged at the other end of the bracket main body; wherein, the side of the extending part opposite to the air inlet part forms an obtuse angle with the bracket main body. The utility model discloses still relate to the air exhaust system of a wafer board frame box. The utility model discloses a system upgrades direct current fan for turbofan, avoids other parts of blade friction to produce the piece granule, influences the cleanliness factor, through the transformation of fan installing support, removes the fan down, avoids the fan just to wafer load-bearing platform.
Description
Technical Field
The utility model belongs to the technical field of the wafer board, especially, relate to an air exhaust system of wafer board frame box and fan installing support thereof.
Background
In the prior art, an air inlet of an air exhaust fan of a rack box of a wafer machine and the fan are designed to a layer where a wafer bearing platform is located, and the air exhaust fan uses a direct current fan. Therefore, the direct current fan is used in the box body of the machine frame of the wafer machine platform to exhaust the space where the wafer bearing platform is located, and the direct current fan is directly opposite to the wafer bearing platform. Because the metal protective cover is arranged outside the direct current fan, when the fan fails, for example, a blade shaft is broken and falls off, and the blades rub against the metal protective cover to generate particle fragments. The particle fragments formed by scraping due to the falling of the fan can cause certain damage to the surface of the wafer on the wafer bearing platform, so that the wafer is scrapped; and because a more sensitive fan fault detection means is lacked, the influence range is wide, and the loss is large.
Accordingly, there remains a need for an improved air extraction system and fan mounting bracket for a wafer machine rack enclosure.
SUMMERY OF THE UTILITY MODEL
Accordingly, it is desirable to provide an air exhaust system for a wafer stage rack housing and a fan mounting bracket thereof.
Based on the purpose, the following technical scheme is adopted:
according to the utility model discloses, a fan installing support for wafer board is provided, include:
a bracket main body which is a straight plate-shaped main body including a cavity;
the extension part extends out from one end of the bracket main body and also comprises a cavity;
an air inlet portion provided on the extension portion;
the air outlet part is arranged at the other end of the bracket main body;
wherein, the side of the extending part opposite to the air inlet part forms an obtuse angle with the bracket main body.
Further, the air inlet part is an air inlet opening and is communicated with the cavity of the extension part.
Further, the support main body further comprises an installation part arranged between the air inlet part and the air outlet part, and the fan installation support is fixedly installed on the partition plate of the rack box body of the wafer machine table through the installation part.
Further, the cross section of the extension part is similar to a right trapezoid.
Further, the extension part is integrally formed with the bracket main body, and a cavity of the extension part is communicated with the cavity of the bracket main body.
Further, the air outlet part is an air exhaust opening and is communicated with the cavity of the support main body.
Further, the fan is installed in the air exhaust opening of the air outlet portion.
Further, the fan is a turbofan.
According to the utility model discloses, provide an air exhaust system of wafer board frame box, include:
the rack box body comprises a bottom plate arranged at the bottom of the rack box body, a top plate arranged at the top of the rack box body and a partition plate which divides the rack box body into a plurality of spaces and is arranged in parallel with the top plate and the bottom plate;
the fan mounting bracket as described above;
the mounting base is arranged on the side surface of the partition plate and is fixedly connected with the mounting part of the fan mounting bracket;
the air inlet part of the fan mounting bracket is positioned between the partition plate and the top plate, so that air in a space between the partition plate and the top plate is pumped away by the air inlet part; the air outlet part of the fan mounting bracket is positioned between the bottom plate and the partition plate, and the fan is mounted in the air exhaust opening of the air outlet part, so that the fan exhausts the air exhausted from the air inlet part to the space between the bottom plate and the partition plate.
Further, the fan is a turbofan.
The utility model discloses following beneficial technological effect has: the air exhaust system of the wafer machine table rack box body of the utility model upgrades the direct current fan into the turbine fan, thereby avoiding the blade from rubbing other parts to generate fragment particles and affecting the cleanliness; and the position of the fan is modified through the fan mounting support, the fan is moved to the lower layer of the wafer bearing platform, the fan is prevented from facing the wafer bearing platform, and damage of broken particles to the wafer on the wafer bearing platform when the fan is damaged is fundamentally avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other embodiments can be obtained according to the drawings without creative efforts.
FIG. 1 is a perspective view of a prior art fan mounting bracket;
FIG. 2 is a schematic diagram of a prior art pumping system for a housing of a wafer tool rack;
FIG. 3 is a perspective view of the fan mounting bracket of the present embodiment;
FIG. 4 is a schematic side view of the pumping system of the housing of the wafer tool of the present embodiment;
FIG. 5 is a schematic view of a fan abnormality detection system of the pumping system of the rack box of the wafer machine of the present embodiment;
[ description of reference ]
1: a prior art fan mounting bracket; 11: a fan mount; 12: a main body; 14: an air exhaust opening; 15: one end of the main body; 16: the other end of the main body; 17: mounting holes;
2: a wafer machine frame box body; 21: a base plate; 22: a top plate; 23: a partition plate; 24: a first space; 25: a second space;
3: a fan mounting bracket; 31: a stent body; 32: an extension portion; 33: an air inlet opening; 34: an air exhaust opening; 35: one end of the bracket main body; 36: the other end of the bracket main body; 37: an installation part.
4: a single chip microcomputer;
5: a vortex fan.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the embodiments of the present invention are further described in detail below with reference to the accompanying drawings.
It should be noted that all expressions using "first" and "second" etc. in the embodiments of the present invention are used for distinguishing two entities with the same name but different names or different parameters, and it is understood that "first" and "second" are only used for convenience of expression and should not be understood as limitations to the embodiments of the present invention, and the following embodiments do not describe the embodiments one by one.
Shown in fig. 1 is a prior art fan mounting bracket and shown in fig. 2 is an air extraction system for a wafer tool rack enclosure of the prior art.
The prior art fan mounting bracket 1 for a wafer machine shown in fig. 1 includes a fan mounting member 11 and a main body 12, wherein a bottom of the fan mounting member 11 is provided with a threaded hole (not shown), and the fan mounting member 11 is fixed to the main body 12 by a conventional bolt-and-nut mounting manner.
The body 12 is a rectangular body with a hollow interior, preferably 250mm long, 60mm wide and 13mm high. The fan mounting member 11 is a rectangular member having a hollow inside, and includes two air extraction openings 14 provided in a longitudinal direction on one side surface extending in the longitudinal direction, the air extraction openings 14 being used for mounting the dc fan and having a shape matching the shape of the dc fan, preferably, the main body has a length of 140mm, a width of 60mm, and a height of 13 mm. The fan mount 11 is mounted at one end of the main body 12 to occupy a position approximately 70mm long of the main body 12. Specifically, the fan mount 11 is provided with a ventilation opening on the side opposite to the air-extracting opening 14 and on the side in contact with the main body 12 so that the main body 12 and the fan mount 11 communicate. One side surface of the other end of the main body 12 extending in the length direction is provided with a mounting hole 17 to fix the fan mounting bracket 1 to a wafer stage, and the end of the main body 12 is not closed to enable gas to be discharged.
The wafer machine rack box 2 shown in fig. 2, the rack box 2 comprises a bottom plate 21 arranged at the bottom of the rack box, a top plate 22 arranged at the top of the rack box, and a partition plate 23 which divides the rack box into a first space 24 and a second space 25 and is arranged in parallel with the top plate 22 and the bottom plate 21; the first space 24 houses the wafer carrier platform and the second space 25 houses the powered drive motor. The fan mounting bracket 1 is mounted to the side of the partition 23 through the mounting hole 17 at one end thereof, and the direct current fan of the fan mounting bracket 1 faces the first space 24, and the direct current fan draws the air of the first space 24 to the second space 25 through the fan mounting bracket 1.
Fig. 3 shows the fan mounting bracket of the present embodiment, and fig. 4 shows the pumping system of the wafer machine rack box of the present embodiment.
The fan mounting bracket 3 for a wafer machine shown in fig. 3 comprises:
a holder main body 31, the holder main body 31 being a straight plate-shaped body including a cavity, and one end 35 of the holder main body extending out of the extension 32; the extension 32 contains a cavity; the extension 32 is integrally formed with the holder main body 31 and the cavity of the extension 32 communicates with the cavity of the holder main body 31. Preferably, the stent body 31 is about 400mm long, about 70mm wide, and about 10mm high.
An air intake portion provided on the extension portion 32; the air intake portion is an air intake opening 33 and communicates with the cavity of the extension portion 32.
An air outlet part provided at a side surface of the other end 36 of the holder main body extending in the length direction; the air outlet part is an air exhaust opening 34 and is communicated with the cavity of the bracket main body 31. The fan is mounted in the suction opening 34 of the air outlet portion.
And a mounting part 37 arranged between the air inlet part and the air outlet part, wherein the fan mounting bracket 3 is fixedly mounted on the partition plate 23 of the frame box body 2 of the wafer machine table through the mounting part 37. Preferably, the mounting portion 37 is a plurality of screw holes, and the fan mounting bracket 3 can be fixedly mounted on the partition 23 of the rack box of the wafer machine by means of bolt-nut fit.
Wherein, the side of the extension part 32 opposite to the air inlet part forms an obtuse angle with the bracket main body 31. The side of the extended portion 32 where the air intake portion is located is parallel to the side of the bracket main body 31 extending in the longitudinal direction. That is, the cross section of the extension 32 in the longitudinal direction is a right trapezoid like shape, and preferably, the extension 32 has an upper base length of about 10mm and a lower base length of about 110mm, upper and lower bases width of about 70mm, height of about 10mm on one side, and height of about 30mm on the other side.
Preferably, the fan is a turbofan.
Figure 4 shows the pumping system of the wafer tool rack box in a side view for better illustration of the position. The system comprises:
the rack box body 2, the rack box body 2 includes a bottom plate 21 arranged at the bottom of the rack box body 2, a top plate 22 arranged at the top of the rack box body 2, and a partition plate 23 which divides the rack box body into a first space 24 and a second space 25 and is arranged in parallel with the top plate 22 and the bottom plate 21;
the fan mounting bracket 3 as described above;
a mounting base (not shown) provided on a side surface of the partition plate 23 and fixedly connected to the mounting portion 37 of the fan mounting bracket 3;
wherein the air intake opening 33 of the fan mounting bracket 3 is located in the first space 24 between the partition plate 23 and the top plate 22 so that the air in the space between the partition plate 23 and the top plate 22 is drawn out from the air intake opening 33; the air outlet of the fan mounting bracket 3 is located in the second space 25 between the bottom plate 21 and the partition 23, and the fan is installed in the air exhaust opening 34 of the air outlet so that the fan exhausts the air of the first space 24, which is exhausted from the air intake opening 33, to the second space 25 between the bottom plate 21 and the partition 23.
Preferably, the fan is a turbofan.
In addition, the wafer machine rack boxes shown in fig. 2 and 4 have the same structure, and therefore, the same reference numerals are used for the repeated components.
In another preferred embodiment, the pumping system of the wafer tool rack box also has a fan abnormality detection system, as shown in FIG. 5.
Because the fan adopts the vortex fan, the vortex fan is provided with a pulse signal. Every vortex fan 5 all with singlechip 4 communication connection, a plurality of singlechips 4 are controlled through same controller, and then vortex fan 5 communication connection to control panel. The controller is also in communication connection with an alarm device of the machine. The pulse signal of the vortex fan passes through the pulse circuit (for detecting the rotating speed) and the logic circuit of the single chip microcomputer in sequence, and finally an output signal is formed and sent to the controller. When one fan in one area detects abnormal rotating speed, the output signals are disconnected, the alarm device of the machine station receives the disconnection signals through the controller, and the machine station gives an alarm. The control panel can display the rotating speed of each fan, set the rotating speed upper and lower limit values of the fan, and display the ON/OFF of an alarm signal and a fan signal.
Preferably, the singlechip is 89C52 singlechip.
When two fans fail simultaneously, the machine gives an alarm. The single chip microcomputer is introduced in the embodiment, and the alarm can be given out when any fan fails (the rotating speed is abnormal).
The foregoing is an exemplary embodiment of the present disclosure, but it should be noted that various changes and modifications could be made herein without departing from the scope of the disclosure as defined by the appended claims. Although elements disclosed in the embodiments of the invention may be described or claimed in the singular, the plural is contemplated unless limitation to the singular is explicitly stated.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to suggest that the scope of the disclosure of embodiments of the present invention (including the claims) is limited to these examples; within the idea of embodiments of the invention, also combinations between technical features in the above embodiments or in different embodiments are possible, and there are many other variations of different aspects of embodiments of the invention as described above, which are not provided in detail for the sake of brevity. Therefore, any omission, modification, equivalent replacement, improvement, etc. within the spirit and principle of the embodiments of the present invention should be included in the protection scope of the embodiments of the present invention.
Claims (10)
1. A fan mounting bracket for a wafer machine, comprising:
a bracket body that is a straight plate-shaped body including a cavity;
the extension part extends out from one end of the bracket main body and also comprises a cavity;
an air intake portion disposed on the extension portion;
the air outlet part is arranged at the other end of the bracket main body;
wherein the extension portion side surface opposite to the air intake portion forms an obtuse angle with the bracket main body.
2. The fan mounting bracket of claim 1, wherein the air inlet is an air inlet opening and communicates with the cavity of the extension.
3. The fan mounting bracket of claim 1, wherein the bracket body further comprises a mounting portion disposed between the air inlet portion and the air outlet portion, and the fan mounting bracket is fixedly mounted on a partition of a rack box of a wafer machine through the mounting portion.
4. The fan mounting bracket of claim 1, wherein the extension is right-angle trapezoid-like in cross-section.
5. The fan mounting bracket of claim 1 or 4, wherein the extension is integrally formed with the bracket body and the cavity of the extension communicates with the cavity of the bracket body.
6. The fan mounting bracket of claim 1, wherein the air outlet is an air extraction opening and is in communication with the cavity of the bracket body.
7. The fan mounting bracket of claim 6, wherein the fan is mounted in the air extraction opening of the air outlet portion.
8. The fan mounting bracket of claim 7, wherein the fan is a turbofan.
9. An air extraction system of a wafer machine frame box body is characterized by comprising:
the rack box body comprises a bottom plate arranged at the bottom of the rack box body, a top plate arranged at the top of the rack box body and a partition plate which divides the rack box body into a plurality of spaces and is arranged in parallel with the top plate and the bottom plate;
the fan mounting bracket of any of claims 1-7;
the mounting base is arranged on the side face of the partition plate and is fixedly connected with the mounting part of the fan mounting bracket;
wherein the air inlet portion of the fan mounting bracket is positioned between the partition plate and the top plate such that the air inlet portion draws air from a space between the partition plate and the top plate; the air outlet portion of the fan mounting bracket is positioned between the bottom plate and the partition plate, and the fan is mounted in the air exhaust opening of the air outlet portion, so that the fan exhausts the air exhausted from the air inlet portion to a space between the bottom plate and the partition plate.
10. The air extraction system of claim 9, wherein the fan is a turbofan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021799088.5U CN212985631U (en) | 2020-08-25 | 2020-08-25 | Air exhaust system of wafer machine frame box and fan mounting bracket thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021799088.5U CN212985631U (en) | 2020-08-25 | 2020-08-25 | Air exhaust system of wafer machine frame box and fan mounting bracket thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212985631U true CN212985631U (en) | 2021-04-16 |
Family
ID=75434906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021799088.5U Active CN212985631U (en) | 2020-08-25 | 2020-08-25 | Air exhaust system of wafer machine frame box and fan mounting bracket thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212985631U (en) |
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2020
- 2020-08-25 CN CN202021799088.5U patent/CN212985631U/en active Active
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