CN212952641U

CN212952641U - Plate feeding machine for semiconductor processing

Info

Publication number: CN212952641U
Application number: CN202021979385.8U
Authority: CN
Inventors: 曾庆恒; 温永亮; 曾庆朋
Original assignee: Guangzhou Huachuang Precision Technology Co ltd
Current assignee: Guangzhou Huachuang Precision Technology Co ltd
Priority date: 2020-09-10
Filing date: 2020-09-10
Publication date: 2021-04-13
Anticipated expiration: 2030-09-10

Abstract

The utility model relates to a technical field of semiconductor processing, the problem of the easy card of the pan feeding mouth in the frame of last work or material rest to traditional last trigger that is used for semiconductor processing, which comprises a frame, go up the work or material rest, the pan feeding conveyer belt, lifting unit, push pedal subassembly and exit conveyor, one side that the frame is close to the pan feeding conveyer belt is provided with the pan feeding mouth, pan feeding conveyer belt both sides are provided with the supporting seat, the supporting seat is just right each other, the supporting seat rotates and is connected with the roller, the length direction perpendicular to ground of roller, be provided with the flexible piece on the roller, the interval of pan feeding conveyer belt both sides roller is adjustable, the both sides of pan feeding conveyer belt are provided with the deflector, the deflector sets up towards pan feeding mouth slope, and the interval of the deflector of pan feeding conveyer belt both sides is by keeping away from pan. This application has the pan feeding mouth effect that the last work or material rest of last trigger that uses in semiconductor processing is difficult to the card in the frame.

Description

Plate feeding machine for semiconductor processing

Technical Field

The application relates to the technical field of semiconductor processing, in particular to a plate feeding machine for semiconductor processing.

Background

Semiconductors are widely used in life, wherein semiconductors are widely used to make semiconductor devices, which are electronic devices having electrical conductivity between a good electrical conductor and an insulator, and utilizing the special electrical characteristics of semiconductor materials to perform specific functions, such as generating, controlling, receiving, converting, amplifying signals and performing energy conversion. The conventional operation process for processing and mounting the semiconductor on the printed circuit board comprises three main processes of an upper board, a mounting board and a lower board of the printed circuit board, wherein the upper board is used for placing the printed circuit board into a conveying mechanism, the conveying mechanism conveys the printed circuit board to processing equipment of the semiconductor device, and the processing equipment mounts the semiconductor device on the printed circuit board to finish the processing of the semiconductor device.

Along with the continuous development of science and technology, simultaneously for saving manual work and time cost, people often adopt the trigger to accomplish printed circuit board's upper plate, traditional trigger of going up, including the frame, install pan feeding conveyer belt and ejection of compact drive belt in the frame, be used for placing the last work or material rest of circuit board, be used for pushing out the ejecting mechanism of circuit board and be used for going up the lifting unit who goes up the work or material rest with going up and down. The automatic feeding device comprises a rack, a feeding conveyor belt, a discharging conveyor belt, a feeding rack, a lifting assembly and a pushing plate assembly, wherein a feeding hole is formed in one side, close to the feeding conveyor belt, of the rack, a discharging hole is formed in one side, close to the discharging conveyor belt, of the rack, when a plate feeding machine runs, a plurality of circuit boards are placed on the feeding rack, the feeding rack is placed on the feeding rack, the feeding conveyor belt is conveyed to the feeding hole through the feeding conveyor belt, the feeding rack enters the lifting assembly through the feeding hole, the lifting assembly lifts the feeding rack, when the circuit boards of the feeding rack rise to the same horizontal plane.

To above-mentioned technical problem, the opening size of the pan feeding mouth of trigger frame is fixed in the tradition, and operating personnel will go up the work or material rest and place the easy slope when putting the pan feeding conveyer belt, lead to easily going up the work or material rest and just can't be to the pan feeding mouth when the conveying, lead to going up the work or material rest and blocked the condition at the pan feeding mouth easily, lead to going up the unable entering lifting unit's of work or material rest condition, the inventor thinks that the last work or material rest of trigger in traditional semiconductor processing places the defect outside the pan feeding mouth of being kept off the frame easily appears.

SUMMERY OF THE UTILITY MODEL

Be difficult to the card when the pan feeding conveyer belt in order to go up the work or material rest and put, this application provides a last trigger for semiconductor processing.

The application provides a go up trigger for semiconductor processing adopts following technical scheme:

a plate feeding machine for semiconductor processing comprises a frame, a feeding frame for placing a printed circuit board, a feeding conveyor belt for conveying the feeding frame, a lifting assembly arranged in the frame and used for lifting the feeding frame, a push plate assembly used for pushing out the printed circuit board and a discharging conveyor belt used for conveying the printed circuit board, a feeding port is arranged on one side of the frame close to the feeding conveyor belt, supporting seats are arranged on two sides of the feeding conveyor belt, the supporting seats are opposite to each other, the supporting seats are rotatably connected with rollers, the length directions of the rollers are vertical to the ground, the rollers are provided with flexible parts, the distance between the rollers at two sides of the feeding conveyor belt is adjustable, guide plates are arranged at two sides of the feeding conveyor belt and are obliquely arranged towards the feeding port, and the distance between the guide plates at the two sides of the feeding conveyor belt is gradually reduced from the side far away from the feeding port to the side close to the feeding port.

By adopting the technical scheme, when the plate loading machine operates, the feeding frame is placed on the feeding conveyor belt, so that the side wall of the feeding frame is firstly abutted against the guide plate and then abutted against the rollers on the two sides of the feeding conveyor belt, the feeding frame abutted against the rollers can be opposite to the feeding port, the situation that the feeding frame is clamped at the feeding port and cannot enter the lifting assembly due to being obliquely placed on the feeding conveyor belt is favorably reduced, and the feeding frame can enter the feeding port more stably; through the arrangement of the guide plate, the feeding frame is not easy to incline, so that the side wall of the feeding frame can be better abutted against the roller; simultaneously, through the setting of flexible piece for go up the work or material rest and be difficult to take place rigidity collision with the roller, be favorable to reducing the roller and go up the work or material rest and take place the condition that rigidity collision leads to wearing and tearing, be favorable to prolonging the life of roller and frame.

Preferably, the flexible member is detachably connected to the roller.

Through adopting above-mentioned technical scheme, when the flexible piece damaged, can dismantle the setting of connecting in the roller through the flexible piece for the flexible piece can reduce the condition of roller and last work or material rest direct collision better, makes and goes up the work or material rest and the roller and be difficult to produce wearing and tearing, thereby makes the change frequency decline of going up work or material rest and roller, is favorable to resources are saved.

Preferably, the supporting seats and the rollers are arranged in a plurality, and the supporting seats and the rollers which are respectively arranged on two sides of the feeding conveyor belt are opposite to each other.

Through adopting above-mentioned technical scheme for go up the work or material rest can be better by the roller butt of pan feeding conveyer belt both sides, make and go up the work or material rest and be more difficult to produce the slope, make and go up the work or material rest and can better pass through the pan feeding mouth of frame.

Preferably, the roller rollers on two sides of the linked feeding conveying belt are arranged on the feeding conveying belt and are simultaneously far away from the feeding conveying belt or are simultaneously close to the linking piece of the feeding conveying belt.

Through adopting above-mentioned technical scheme, when the specification of last work or material rest changes, adjust the position of the supporting seat of pan feeding conveyer belt both sides through the linkage piece, make the roller on the supporting seat can with the lateral wall butt of last work or material rest, thereby make and go up the work or material rest behind the roller butt and can just be to the pan feeding mouth of frame, make and go up the work or material rest and can advance better and get into lifting unit through the pan feeding mouth, make the pan feeding conveyer belt that is used for the last trigger of semiconductor processing can convey different last work or material rest better, make the last work or material rest of the adaptable various different dimensions of trigger of going up, be favorable to enlarging the.

Preferably, the linkage piece includes that fixed connection keeps away from the vertical board of second of pan feeding conveyer belt one end in the sliding plate, it has the second screw hole to run through on the vertical board of second, the linkage piece still includes the threaded rod, the threaded rod is equipped with screw thread and threaded rod along the reverse setting of screw thread at length direction's both ends along length direction's both ends, the threaded rod along length direction both ends respectively with be located the vertical board threaded connection of two second of pan feeding conveyer belt both sides.

By adopting the technical scheme, when the position of the supporting seat needs to be adjusted, the two second vertical plates can drive the two sliding plates to slide by rotating the threaded rod through the reverse thread arrangement, so that the supporting seat and the roller are driven to be simultaneously close to the feeding conveying belt or simultaneously far away from the feeding conveying belt, and when the specification of the feeding frame is changed, the roller can be abutted against the feeding frame by rotating the threaded rod; simultaneously, utilize the threaded rod along length direction's both ends respectively with be located two vertical board threaded connection of pan feeding conveyer belt both sides of second for the position of supporting seat and roller mount pad can be finely tuned, is favorable to making the roller that is provided with the flexible piece better and last work or material rest butt, makes the position of work or material rest in the roller can be adjusted better, makes to go up the work or material rest can just to frame pan feeding mouth.

Preferably, the feeding conveyor belt is further provided with an adjusting assembly for adjusting the distance between the supporting seats on the two sides.

By adopting the technical scheme, when the flexible part on the unilateral roller is abraded, the roller can be adjusted through the adjusting assembly to enable the roller to be abutted against the side wall of the feeding frame passing through, so that the feeding frame can be over against the feeding port of the rack; meanwhile, the flexible part does not need to be replaced frequently, and resources are saved.

Preferably, bases are arranged on two sides of the feeding conveyor belt, grooves are formed in the bases, the length direction of each groove is perpendicular to the width direction of the feeding conveyor belt, a sliding plate is further arranged on the feeding conveyor belt and connected to the corresponding groove in a sliding mode, a first vertical plate is arranged on one side, away from the feeding conveyor belt, of the sliding plate, the adjusting assembly comprises a first threaded hole penetrating through the first vertical plate, a bolt is in threaded connection with the first threaded hole, one end, close to the supporting seat, of the bolt is rotatably connected with the supporting seat, and a limiting piece limiting the supporting seat to rotate synchronously along with the bolt is further arranged on the first vertical plate.

By adopting the technical scheme, when the flexible part on the roller on the side baffle is worn and thinned, the flexible part on the roller can be abutted against the passing feeding frame by rotating the bolt, so that the flexible part does not need to be replaced frequently, and resources are saved; the positions of the supporting seat and the roller are adjusted through the arrangement of the bolt in threaded connection with the first vertical plate, so that the positions of the supporting seat and the roller are fixed simultaneously in the adjusting process, and the adjusting operation is simpler and more convenient.

Preferably, one side of the feeding conveyor belt, which is close to the ground, is provided with a second fixing plate, a second through hole penetrates through the second fixing plate, and the inner wall of the second through hole is abutted to the outer circumferential side wall of the threaded rod.

Through adopting above-mentioned technical scheme, through the setting of second fixed plate and second through-hole, be favorable to reducing the arm of force of threaded rod, be favorable to improving the torsional strength of threaded rod, be favorable to prolonging the life of threaded rod.

Preferably, a bearing is fixedly connected in the second through hole, a fixed outer ring of the bearing is fixedly connected with the side wall of the second through hole, and a rotating inner ring of the bearing is fixedly connected with the outer side wall of the threaded rod.

Through adopting above-mentioned technical scheme, simultaneously through the setting of bearing for the threaded rod can rotate more steadily, makes the regulation of supporting seat and roller position more simple and convenient.

In summary, the present application includes at least one of the following beneficial technical effects:

1. through the arrangement of the supporting seat and the rollers, the feeding frame obliquely arranged on the feeding conveying belt can be just opposite to the feeding port of the rack after being abutted by the rollers on two sides of the feeding conveying belt in the width direction, so that the feeding frame can more stably pass through the feeding port;

2. the flexible piece is detachably connected to the roller, so that when the flexible piece is damaged, the roller and the feeding frame are not easy to generate rigid collision by replacing a new flexible piece, and the service life of the roller and the feeding frame is prolonged;

3. supporting seats and rollers on two sides of the feeding conveyor belt are provided with a plurality of sets, so that the feeding frame can be abutted by the rollers on two sides of the feeding conveyor belt better, the feeding frame is not prone to tilting, and the feeding frame can better pass through a feeding port of the rack.

Drawings

Fig. 1 is a schematic structural diagram of a feeder for semiconductor processing according to an embodiment of the present disclosure;

fig. 2 is a schematic internal structural diagram of a feeder for semiconductor processing according to an embodiment of the present disclosure;

FIG. 3 is an enlarged schematic view of section A of FIG. 2;

FIG. 4 is a schematic overall structure diagram of a feeder for semiconductor processing for illustrating a linkage according to an embodiment of the present application;

fig. 5 is an enlarged schematic view of a portion B in fig. 4.

Description of reference numerals: 1. a frame; 10. a feeding port; 11. a lifting assembly; 13. a feeding conveyor belt; 12. a push plate assembly; 121. a cylinder; 122. pushing the plate; 14. a feeding frame; 15. a discharge conveyor belt; 2. a baffle plate; 20. a support leg; 21. a base; 211. a groove; 22. a sliding plate; 23. a first vertical plate; 24. a guide plate; 25. an adjustment assembly; 251. a connecting rod; 252. a bolt; 253. a first threaded hole; 254. a first through hole; 26. a support frame; 3. a supporting seat; 31. a second support plate; 32. a first fixing plate; 33. a roller; 34. a rotating shaft; 35. a flexible member; 4. a linkage member; 41. a threaded rod; 42. a second vertical plate; 43. a second threaded hole; 44. a handle; 5. a second fixing plate; 50. a second through hole; 51. and a bearing.

Detailed Description

The present application is described in further detail below with reference to figures 1-5.

The embodiment of the application discloses a material loading machine for semiconductor processing. Referring to fig. 1 and 2, the automatic feeding and discharging device comprises a frame 1 installed on the ground, a feeding frame 14 used for placing a printed circuit board, a feeding conveyor belt 13 arranged on one side of the frame 1 and used for conveying the feeding frame 14, a discharging conveyor belt 15 arranged on one side of the frame 1, far away from the feeding conveyor belt 13, and used for conveying the printed circuit board, a push plate assembly 12 arranged on the frame 1, and a lifting assembly 11 arranged in the frame 1 and used for lifting the feeding frame 14, wherein a feeding opening 10 is formed in one side of the frame 1, close to the feeding conveyor belt 13, and a discharging opening (not shown in the figure) is formed in one side of the frame 1. Supporting seats 3 are arranged on the two sides of the feeding conveyor belt 13 in the width direction, the supporting seats 3 are rotatably connected with rollers 33 with the axial direction perpendicular to the feeding conveyor belt 13, and adjusting components 25 for adjusting the positions of the supporting seats 3 are further arranged on the two sides of the feeding conveyor belt 13 in the width direction.

Referring to fig. 1 and 2, lifting unit 11 includes the first backup pad (not shown in the figure) that is located frame 1, when lifting unit 11 is in initial state, the one end that first backup pad and pan feeding conveyer belt 13 are close to roller 33 is just right just to and be located pan feeding conveyer belt 13 and be close to roller 33 one end under, first backup pad threaded connection has ball screw (not shown in the figure), lifting unit is still including being fixed in the frame and restricting first backup pad along with the pivoted gag lever post of roller screw (not shown in the figure), it has fourth through-hole (not shown in the figure) to run through on the first backup pad, the fourth through-hole is worn to locate by the one end of gag lever post, lifting unit is still including installing drive ball screw pivoted driving piece (not shown in the figure) in the frame, in this embodiment. The pushing plate assembly 12 includes a cylinder 121 fixed on the frame 1 and facing the discharging conveyor belt 15, and a pushing plate 122 fixedly connected to an end of a piston rod of the cylinder 121 far from the cylinder 121.

Referring to fig. 2 and 3, the plate loading machine for semiconductor processing further includes a support frame 26 fixed on the ground, the support frame 26 includes four support legs 20 fixed on the ground, one ends of the support legs 20 far away from the ground are fixedly connected with two baffles 2, and two support legs 20 are uniformly fixedly connected with each baffle 2. Pan feeding conveyer belt 13 rotates with two baffles 2 respectively along width direction's both sides to be connected, fixedly connected with base 21 on the baffle 2, in this embodiment, base 21 is provided with four, 2 baffle distributions of pan feeding conveyer belt 13 both sides respectively have two bases 21, and two liang of bases 21 on two baffles 2 are just right, base 21 keeps away from the equal sunken recess 211 of one side of baffle 2, the length direction of recess 211 is perpendicular with the width direction of pan feeding conveyer belt 13, equal sliding connection has sliding plate 22 in the recess 211, sliding plate 22 is rectangular platelike, sliding plate 22 is along two lateral wall butts of width direction's both sides and recess 211, one side that baffle 2 was kept away from to sliding plate 22 is close to the equal fixedly connected with first vertical board 23 of one end of pan feeding conveyer belt 13 along length direction.

Referring to fig. 2 and 3, the supporting base 3 includes a second supporting plate 31 movably connected to the first vertical plate 23, the second supporting plate 31 is rectangular, and a length direction of the second supporting plate 31 is perpendicular to the feeding conveyor 13. The adjusting assembly 25 comprises a first threaded hole 253 penetrating through the first vertical plate 23, a bolt 252 is in threaded connection with the first threaded hole 253, a sleeve (not shown in the figure) is fixedly connected to one side, close to the first vertical plate 23, of the second supporting plate 31, one end, far away from the nut, of the bolt 252 extends into the sleeve, a limiting plate (not shown in the figure) is fixedly connected to one end, far away from the nut, of the bolt 252, the bolt 252 limits the bolt 252 to slide out of the sleeve, and a limiting block (not shown in the figure) is fixedly connected to the side wall, close to. The first vertical plate 23 is further provided with a limiting member (not shown in the figure) for limiting the rotation of the second support plate 31 along with the bolt 252, the limiting member comprises two first through holes 254 penetrating through the first vertical plate 23, the two first through holes 254 are symmetrically arranged about the center position of the first vertical plate 23, a connecting rod 251 is slidably connected in each of the two first through holes 254, and one end of the connecting rod 251, which is close to the feeding conveyor 13, is fixedly connected with the second support plate 31.

Referring to fig. 2 and 3, the supporting seat 3 further includes first fixing plates 32 fixedly connected to one side of the second supporting plate 31 far away from the first vertical plate 23 along two ends of the length direction, third through holes (not shown in the figure) are respectively penetrated through the first fixing plates 32, rotating shafts 34 are respectively fixedly connected to central positions of two ends of the rollers 33 along the length direction, and the two rotating shafts 34 are respectively rotatably connected to the two third through holes. The roller 33 is further sleeved with a flexible member 35, and in this embodiment, the flexible member 35 is a rubber sleeve.

Referring to fig. 4 and 5, the support frame 26 is further provided with a linkage member 4 which is used for linking the sliding plates 22 on the two sides of the feeding conveyor belt 13 and sliding simultaneously, the linkage member 4 comprises a second vertical plate 42 fixedly connected to one side of the sliding plate 22 close to the ground and far away from one end of the support seat 3, a second threaded hole 43 is formed in each second vertical plate 42 in a sunken mode, the linkage member 4 further comprises a threaded rod 41 in threaded connection with the second threaded hole 43, external threads are formed in the outer side walls of the two ends of the threaded rod 41 in the length direction in a sunken mode, the threaded rod 41 is arranged in a reverse mode along the external threads at the two ends of the length direction, the two ends of the threaded rod 41 in the length direction are respectively in threaded connection with the second threaded holes 43 in the second vertical plates 42 on the two sides.

Referring to fig. 4 and 5, one side of the baffle 2 close to the ground is fixedly connected with second fixing plates 5, in this embodiment, the number of the second fixing plates 5 is four, and the four second fixing plates 5 are respectively located under the four bases 21, the second fixing plates 5 are all penetrated with second through holes 50, the feeding conveyor belts 13 are opposite to each other along the second through holes 50 on the two second fixing plates 5 in the width direction, bearings 51 are fixedly connected in the second through holes 50, fixed outer rings of the bearings 51 are fixedly connected with the second through holes 50, and the threaded rods 41 penetrate through the feeding conveyor belts 13 and are opposite to the bearings 51 on the two second fixing plates 5 in the width direction and are fixedly connected with rotating inner rings of the bearings 51.

Referring to fig. 2 and 3, the baffle 2 is fixedly connected with guide plates 24, the guide plates 24 on the two baffles 2 are located at one end of the feeding conveyor belt 13 away from the base 21 along the length direction, the two guide plates 24 are obliquely arranged towards the feeding port 10, and the distance between the guide plates 24 on the two sides of the feeding conveyor belt 13 is gradually reduced from one side away from the feeding port 10 to one side close to the feeding port 10.

The implementation principle of the feeding machine for semiconductor processing is as follows: when the position of the feeding frame 14 needs to be corrected, the feeding frame 14 is placed at the middle position of the feeding conveyor belt 13 with the rollers 33 arranged on the two sides, the threaded rod 41 is rotated, the threaded rod 41 drives the second vertical plate 42 and the sliding plate 22 fixedly connected with the second vertical plate 42 to move towards the direction close to the feeding conveyor belt 13, so as to drive the first vertical plate 23 and the supporting seat 3 to move towards the direction close to the feeding conveyor belt 13 until the rollers 33 on the supporting seat 3 abut against the side wall of the feeding frame 14, the feeding conveyor belt 13 is started, the feeding frame 14 is placed on the feeding conveyor belt 13, so that the feeding frame 14 abuts against the guide plate 24 and then abuts against the rollers 33 on the two sides of the feeding conveyor belt 13 in the width direction under the transmission of the feeding conveyor belt 13, the position of the feeding frame 14 can face the feeding port 10 through the abutment of the rollers 33, and the feeding frame 14 abutted against the rollers 33 can pass through the feeding port 10 more smoothly, the situation that the feeding frame 14 is clamped by the feeding port 10 due to the fact that the feeding frame 14 is obliquely placed on the feeding conveying belt 13 is favorably reduced.

Through the arrangement of the flexible part 35, rigid collision is not easy to occur between the roller 33 and the rack 1, abrasion between the roller 33 and the rack 1 is reduced, the service lives of the feeding rack 14 and the roller 33 are prolonged, and the roller 33 and the feeding rack 14 do not need to be replaced frequently.

Through adjustment assembly 25's setting for flexible 35 on the unilateral roller 33 is through the use attenuation back for a long time, makes flexible 35 on the roller 33 can with the lateral wall butt of last work or material rest 14 through adjustment assembly 25, makes flexible 35 need not often to change, is favorable to resources are saved.

Through the setting of deflector 24 for the last work or material rest 14 of placing on pan feeding conveyer belt 13 is difficult to remove to pan feeding conveyer belt 13's edge, makes last work or material rest 14 can be better with roller 33 butt and make last work or material rest 14 after roller 33 butt can be conveyed to lifting unit 11 more accurately on, is favorable to reducing the slope and places the unable circumstances that gets into pan feeding mouth 10 of frame 1 of last work or material rest 14 on pan feeding conveyer belt 13.

Through the setting of link 4, make when the specification of material loading frame 14 changes, can adjust the position of roller 33 through link 4 and make roller 33 and the lateral wall butt of material loading frame 14 for roller 33 can better butt the material loading frame 14 of various different specifications.

Through the reverse arrangement of the external threads at the two ends of the threaded rod 41 in the length direction and the arrangement of the threaded rod 41 in threaded connection with the second vertical plates 42 positioned at the two sides of the feeding conveyor belt 13, the positions of the rollers 33 at the two sides of the feeding conveyor belt 13 can be adjusted simultaneously by rotating the threaded rod 41, so that the adjustment of the positions of the rollers 33 is more convenient; at the same time, the threaded connection can also be finely adjusted so that the rollers 33 can be more accurately adjusted into abutment with the side walls of the loading frame 14.

Through the arrangement of the second fixing plate 5, the second through hole and the bearing 51, the force arm of the threaded rod 41 can be reduced, and the torsional strength of the threaded rod 41 can be increased; meanwhile, the rotation of the threaded rod 41 is more stable and smooth through the arrangement of the bearing 51.

By means of the handle 44, the threaded rod 41 is rotated more conveniently and quickly, and the position of the roller 33 is adjusted more conveniently and quickly.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a go up trigger for semiconductor processing, includes frame (1), last work or material rest (14) that are used for placing printed circuit board, is used for the pan feeding conveyer belt (13) of carrying in the frame (14), installs lifting unit (11) that are used for going up work or material rest (14) in going up and down in frame (1), is used for pushing out printed circuit board's push pedal subassembly (12) and is used for conveying printed circuit board's exit conveyor (15), one side that frame (1) is close to pan feeding conveyer belt (13) is provided with pan feeding mouth (10), its characterized in that: pan feeding conveyer belt (13) both sides are provided with supporting seat (3), supporting seat (3) are just right each other, supporting seat (3) are rotated and are connected with roller (33), the length direction perpendicular to ground of roller (33), be provided with flexible piece (35) on roller (33), the interval of roller (33) of pan feeding conveyer belt (13) both sides is adjustable, the both sides of pan feeding conveyer belt (13) are provided with deflector (24), deflector (24) set up towards pan feeding mouth (10) slope, just the interval of deflector (24) of pan feeding conveyer belt (13) both sides reduces gradually by keeping away from pan feeding mouth (10) one side to being close to pan feeding mouth (10) one side.

2. A plate loading machine for semiconductor processing according to claim 1, characterized in that: the flexible member (35) is detachably connected to the roller (33).

3. A plate loading machine for semiconductor processing according to claim 2, characterized in that: the supporting seats (3) and the rollers (33) are arranged in a plurality, and the supporting seats (3) and the rollers (33) which are respectively positioned on two sides of the feeding conveyor belt (13) are opposite to each other.

4. A plate loading machine for semiconductor processing according to claim 1, characterized in that: the roller feeding device is characterized in that a linkage piece (4) which is used for linking the rollers (33) on the two sides of the feeding conveyor belt (13) and is away from the feeding conveyor belt (13) or close to the feeding conveyor belt (13) is arranged on the feeding conveyor belt (13).

5. A plate loading machine for semiconductor processing according to claim 4, characterized in that: linkage (4) are including fixed connection in sliding plate (22) keep away from the vertical board (42) of second of pan feeding conveyer belt (13) one end, run through second screw hole (43) on the vertical board (42) of second, linkage (4) still include threaded rod (41), threaded rod (41) are equipped with screw thread and threaded rod (41) along the reverse setting of screw thread at length direction both ends along length direction's both ends, threaded rod (41) along length direction's both ends respectively with two vertical board (42) threaded connection of second that are located pan feeding conveyer belt (13) both sides.

6. A plate loading machine for semiconductor processing according to claim 1, characterized in that: and the feeding conveyor belt (13) is also provided with an adjusting component (25) for adjusting the distance between the two side supporting seats (3).

7. A plate loading machine for semiconductor processing according to claim 6, characterized in that: bases (21) are arranged on two sides of the feeding conveyor belt (13), grooves (211) are formed in the bases (21) in a concave mode, the length direction of the groove (211) is vertical to the width direction of the feeding conveyor belt (13), the feeding conveyor belt (13) is also provided with a sliding plate (22), the sliding plate (22) is connected with the groove (211) in a sliding way, a first vertical plate (23) is arranged on one side of the sliding plate (22) far away from the feeding conveyor belt (13), the adjusting assembly (25) comprises a first threaded hole (253) penetrating through the first vertical plate (23), the first threaded hole (253) is in threaded connection with a bolt (252), one end of the bolt (252) close to the supporting seat (3) is rotatably connected with the supporting seat (3), and the first vertical plate (23) is also provided with a limiting piece for limiting the synchronous rotation of the supporting seat (3) along with the bolt (252).

8. A plate loading machine for semiconductor processing according to claim 5, characterized in that: one side that pan feeding conveyer belt (13) is close to ground is provided with second fixed plate (5), it has second through-hole (50) to run through on second fixed plate (5), the inner wall of second through-hole (50) and the circumference lateral wall butt of threaded rod (41).

9. A plate loading machine for semiconductor processing according to claim 8, characterized in that: the bearing (51) is fixedly connected in the second through hole (50), a fixed outer ring of the bearing (51) is fixedly connected with the side wall of the second through hole (50), and a rotating inner ring of the bearing (51) is fixedly connected with the outer side wall of the threaded rod (41).