CN212945632U - Retaining ring clamp - Google Patents
Retaining ring clamp Download PDFInfo
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- CN212945632U CN212945632U CN202021405211.0U CN202021405211U CN212945632U CN 212945632 U CN212945632 U CN 212945632U CN 202021405211 U CN202021405211 U CN 202021405211U CN 212945632 U CN212945632 U CN 212945632U
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- annular step
- annular
- retaining ring
- ring clamp
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Abstract
The utility model relates to a retaining ring clamp, which is of an annular boss step structure; the annular boss step structure comprises a first annular step and a second annular step which are sequentially arranged; the diameter of the first annular step is larger than that of the second annular step; the central lines of the first annular step and the second annular step are overlapped; a clamping block is arranged on the step surface of the second annular step; the clamping blocks are connected with the step surface of the second annular step through a limiting device; the limiting device is arranged on the step surface of the second annular step and is 15-20mm away from the edge of the step surface; the maximum length of the clamping block is larger than the radius of the second annular step. The utility model provides an anchor clamps pass through the selection of clamp splice to the retaining ring clamping position, can improve retaining ring machining efficiency to the surface quality of the retaining ring after the improvement mills, also guaranteed simultaneously that the circularity of retaining ring keeps the ring indeformable promptly.
Description
Technical Field
The utility model relates to a target field, concretely relates to retaining ring anchor clamps.
Background
The retaining ring is used for fixing a wafer in a Chemical Mechanical Polishing (CMP) process in the semiconductor industry, so that the requirement on the roundness of the wafer is very strict, and the deformation amount needs to be controlled within 0.01 mm. The main components of the retaining ring are engineering plastics such as PPS (polyphenylene sulfide), PEEK (polyetheretherketone) and the like, and the plastic ring is very easy to deform during turning and clamping.
CN209425232U discloses a novel retaining ring, which comprises a retaining ring, wherein the upper surface of the retaining ring is provided with at least three first strip-shaped grooves arranged in an inclined manner, and the lower surface of the retaining ring is provided with at least three bolt holes; the retaining ring comprises an annular body made of stainless steel, and a plastic layer is wrapped outside the annular body. The plastic layer wraps the outside ring body made through the stainless steel, and the surface of ring body is equipped with a plurality of strip recesses, and after moulding plastics through the injection molding machine, the connection between plastic layer and the ring body is more stable, has strengthened structural strength, has improved life, has reduced manufacturing cost simultaneously.
CN111347345A discloses a retaining ring and a carrier head for chemical mechanical polishing, the retaining ring is composed of an annular part composed of a metal part and a non-metal part, the non-metal part is molded on the outer peripheral side of the metal part; the annular part comprises a top surface, a bottom surface, an outer side surface and an inner side surface, the top surface is fixedly connected with the bearing head, the bottom surface is abutted against the polishing surface, the outer side surface is arranged on the outer side of the annular part and is connected with the top surface and the bottom surface, the inner side surface is arranged on the inner side of the annular part and is connected with the top surface and the bottom surface, and the bottom surface is provided with a liquid supply groove communicated with the inner side surface and; the top surface is provided with a threaded hole, and the threaded hole is located vertically above the liquid supply tank.
CN101934495A discloses a retaining ring for embedded chemical mechanical polishing, wherein the rigid ring is a circular ring with a rectangular or square axial cross section, the annular groove on the upper surface of the elastic ring has the same diameter as the rigid ring, and the shape and size of the axial cross section are the same. The adhesive ring has the advantages that the adhesive area is increased, the adhesive strength is improved, and the adhesive joint is not arranged on the side surface of the retaining ring because the adhesive is buried in the annular groove, so that the adhesive ring is prevented from being directly contacted with external chemical substances such as deionized water, polishing solution and the like during use, the corrosion to the adhesive is prevented, and the service life of the retaining ring is prolonged. The utility model discloses install on the polishing head of chemical mechanical polishing equipment, play the effect that holds and fix a position the wafer, be applicable to the chemical mechanical polishing.
However, machining centers have low milling efficiency and poor surface quality, and the retaining ring is easily deformed during milling.
SUMMERY OF THE UTILITY MODEL
In view of the problems existing in the prior art, the utility model aims to provide a retaining ring clamp, the utility model provides a clamp can improve machining efficiency to improve the surface quality of the retaining ring after milling, also guaranteed simultaneously that the circularity of retaining ring is the retaining ring indeformable.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a retaining ring clamp, which is of an annular boss step structure;
the annular boss step structure comprises a first annular step and a second annular step which are sequentially arranged;
the diameter of the first annular step is larger than that of the second annular step;
the central lines of the first annular step and the second annular step are overlapped;
a clamping block is arranged on the step surface of the second annular step;
the clamping blocks are connected with the step surface of the second annular step through a limiting device;
the limiting device is arranged on the step surface of the second annular step and is 15-20mm away from the edge of the step surface;
the maximum length of the clamping block is larger than the radius of the second annular step.
The utility model provides an anchor clamps pass through the selection of clamp splice to the retaining ring clamping position, can improve retaining ring machining efficiency to the surface quality of the retaining ring after the improvement mills, also guaranteed simultaneously that the circularity of retaining ring keeps the ring indeformable promptly.
In the utility model, the limiting device is arranged on the step surface of the second annular step at a distance of 15-20mm from the edge of the step surface, and the distance of 15-20mm from the edge of the step surface is the shortest distance from the setting point of the limiting device to the edge of the step surface.
In a preferred embodiment of the present invention, the difference between the diameter of the first annular step and the diameter of the second annular step is 40 to 50mm, for example, 40mm, 41mm, 42mm, 43mm, 44mm, 45mm, 46mm, 47mm, 48mm, 49mm, or 50mm, but not limited to the above-mentioned values, and other values not listed in the range are also applicable.
In a preferred embodiment of the present invention, the height of the second annular step is 10 to 15mm, for example, 10mm, 11mm, 12mm, 13mm, 14mm, or 15mm, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable.
In a preferred embodiment of the present invention, the number of the clamping blocks is at least 2, and may be, for example, 2, 3, 4, 5, or 6, but is not limited to the values listed, and other values not listed in the range are also applicable.
As the utility model discloses preferred technical scheme, the step face of second annular step is equipped with the recess.
In a preferred embodiment of the present invention, the vertical depth of the groove is 5 to 7mm, for example, 5mm, 5.5mm, 6mm, 6.5mm, or 7mm, but is not limited to the above-mentioned values, and other values not shown in the range are also applicable.
As the utility model discloses preferred technical scheme, the bottom surface of recess is the horizontal plane.
As the utility model discloses preferred technical scheme, the central line of recess with the central line coincidence of second annular step.
The utility model discloses in, the perpendicular distance between the step face of clamp splice and first annular step can be adjusted through stop device. The limiting device can be a movable/detachable limiting device such as a bolt. The retaining ring is disposed above the step surface of the first annular step.
Compared with the prior art, the utility model discloses following beneficial effect has at least:
the utility model provides an anchor clamps can improve machining efficiency to improve the surface quality of the retaining ring after milling, also guaranteed the circularity of retaining ring promptly the retaining ring is indeformable simultaneously.
Drawings
Fig. 1 is a schematic view of a retainer ring clamp provided in embodiment 1 of the present invention;
fig. 2 is a schematic view of a retainer ring clamp according to embodiment 3 of the present invention.
In the figure: 1-first annular step, 1.1-step surface of the first annular step, 1.2-side surface of the first annular step, 2-second annular step, 2.1-step surface of the second annular step, 2.2-side surface of the second annular step, 3-clamping block, 4-limiting device and 5-groove.
The present invention will be described in further detail below. However, the following examples are only simple examples of the present invention, and do not represent or limit the scope of the present invention, which is defined by the appended claims.
Detailed Description
To better illustrate the present invention, facilitating the understanding of the technical solutions of the present invention, typical but not limiting embodiments of the present invention are as follows:
example 1
The present embodiment provides a retaining ring clamp, as shown in fig. 1, which has an annular step structure;
the annular boss step structure comprises a first annular step 1 and a second annular step 2 which are sequentially arranged;
the diameter of the first annular step 1 is larger than that of the second annular step 2;
the central lines of the first annular step 1 and the second annular step 2 are overlapped;
a clamping block 3 is arranged on a step surface 2.1 of the second annular step 2;
the clamping block 3 is connected with the step surface 2.1 of the second annular step 2 through a limiting device 4;
the limiting device 4 is arranged on the step surface 2.1 of the second annular step 2 and is 15mm away from the edge of the step surface 2.1;
the maximum length of the clamping block 3 is larger than the diameter of the second annular step 2.
The difference between the diameter of the first annular step 1 and the diameter of the second annular step 2 is 45 mm.
The height of the side surface 2.2 of the second annular step 2 is 10-15 mm.
The number of the clamping blocks 3 is 2.
Example 2
The embodiment provides a retaining ring clamp which is of an annular boss step structure;
the annular boss step structure comprises a first annular step and a second annular step which are sequentially arranged;
the diameter of the first annular step is larger than that of the second annular step;
the central lines of the first annular step and the second annular step are overlapped;
a clamping block is arranged on the step surface of the second annular step;
the clamping blocks are connected with the step surface of the second annular step through a limiting device;
the limiting device is arranged on the step surface of the second annular step and is 20mm away from the edge of the step surface;
the maximum length of the clamping block is larger than the radius of the second annular step.
The difference between the diameter of the first annular step and the diameter of the second annular step is 50 mm.
The height of the side surface of the second annular step is 12 mm.
The clamp splice sets up 3.
Example 3
The present embodiment provides a retaining ring clamp, as shown in fig. 2, which has an annular step structure;
the annular boss step structure comprises a first annular step 1 and a second annular step 2 which are sequentially arranged;
the diameter of the first annular step 1 is larger than that of the second annular step 2;
the central lines of the first annular step 1 and the second annular step 2 are overlapped;
a clamping block 3 is arranged on a step surface 2.1 of the second annular step 2;
the clamping block 3 is connected with the step surface 2.1 of the second annular step 2 through a limiting device 4;
the limiting device 4 is arranged on the step surface 2.1 of the second annular step 2 and is 17mm away from the edge of the step surface 2.1;
the maximum length of the clamping block 3 is larger than the diameter of the second annular step 2.
The difference between the diameter of the first annular step 1 and the diameter of the second annular step 2 is 50 mm.
The height of the side surface 2.2 of the second annular step 2 is 14 mm.
The number of the clamping blocks 3 is 2.
The step surface 2.1 of the second annular step 2 is provided with a groove 5.
The vertical depth of the groove 5 is 5-7 mm.
The diameter of the recess 5 is smaller than the diameter of the second annular step 2.
The centre line of the groove 5 and the centre line of the second annular step 2 coincide.
Example 4
The embodiment provides a retaining ring clamp which is of an annular boss step structure;
the annular boss step structure comprises a first annular step and a second annular step which are sequentially arranged;
the diameter of the first annular step is larger than that of the second annular step;
the central lines of the first annular step and the second annular step are overlapped;
a clamping block is arranged on the step surface of the second annular step;
the clamping blocks are connected with the step surface of the second annular step through a limiting device;
the limiting device is arranged on the step surface of the second annular step and is 20mm away from the edge of the step surface;
the maximum length of the clamping block is larger than the radius of the second annular step.
The difference between the diameter of the first annular step and the diameter of the second annular step is 42 mm.
The height of the side surface of the second annular step is 12 mm.
The clamp splice sets up 3.
And a groove is formed in the step surface of the second annular step.
The vertical depth of the groove is 6 mm.
The bottom surface of the groove is a horizontal plane.
The centerline of the groove and the centerline of the second annular step coincide.
Example 5
The embodiment provides a retaining ring clamp which is of an annular boss step structure;
the annular boss step structure comprises a first annular step and a second annular step which are sequentially arranged;
the diameter of the first annular step is larger than that of the second annular step;
the central lines of the first annular step and the second annular step are overlapped;
a clamping block is arranged on the step surface of the second annular step;
the clamping blocks are connected with the step surface of the second annular step through a limiting device;
the limiting device is arranged on the step surface of the second annular step and is 16mm away from the edge of the step surface;
the maximum length of the clamping block is larger than the radius of the second annular step.
The difference between the diameter of the first annular step and the diameter of the second annular step is 43 mm.
The height of the side surface of the second annular step is 13 mm.
The clamp splice sets up 3.
And a groove is formed in the step surface of the second annular step.
The vertical depth of the groove is 5 mm.
The bottom surface of the groove is a horizontal plane.
The centerline of the groove and the centerline of the second annular step coincide.
By adopting the retaining ring clamp of the embodiment, the machining efficiency can be obviously improved, the surface quality of the retaining ring after milling is improved, and meanwhile, the roundness of the retaining ring, namely the retaining ring is not deformed.
The applicant states that the present invention is described by the above embodiments, but the present invention is not limited to the above detailed structural features, i.e. the present invention can be implemented only by relying on the above detailed structural features. It should be clear to those skilled in the art that any modifications to the present invention, to the equivalent replacement of selected parts and the addition of auxiliary parts, the selection of specific modes, etc., all fall within the scope of protection and disclosure of the present invention.
The above detailed description describes the preferred embodiments of the present invention, but the present invention is not limited to the details of the above embodiments, and the technical idea of the present invention can be within the scope of the present invention, and can be right to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and in order to avoid unnecessary repetition, the present invention does not need to describe any combination of the features.
In addition, various embodiments of the present invention can be combined arbitrarily, and the disclosed content should be regarded as the present invention as long as it does not violate the idea of the present invention.
Claims (8)
1. The retaining ring clamp is characterized in that the retaining ring clamp is of an annular boss step structure;
the annular boss step structure comprises a first annular step and a second annular step which are sequentially arranged;
the diameter of the first annular step is larger than that of the second annular step;
the central lines of the first annular step and the second annular step are overlapped;
a clamping block is arranged on the step surface of the second annular step;
the clamping blocks are connected with the step surface of the second annular step through a limiting device;
the limiting device is arranged on the step surface of the second annular step and is 15-20mm away from the edge of the step surface;
the maximum length of the clamping block is larger than the radius of the second annular step.
2. The retaining ring clamp of claim 1, wherein the difference between the diameter of the first annular step and the diameter of the second annular step is 40-50 mm.
3. The retaining ring clamp of claim 1, wherein the second annular step has a side height of 10-15 mm.
4. The retaining ring clamp of claim 1, wherein at least 2 of the clamp blocks are provided.
5. The retaining ring clamp of claim 1, wherein the step face of the second annular step is provided with a groove.
6. The retaining ring clamp of claim 5, wherein the vertical depth of the groove is 5-7 mm.
7. The retaining ring clamp of claim 5, wherein the bottom surface of the groove is a horizontal surface.
8. The retaining ring clamp of claim 5, wherein a centerline of the groove and a centerline of the second annular step coincide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021405211.0U CN212945632U (en) | 2020-07-16 | 2020-07-16 | Retaining ring clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021405211.0U CN212945632U (en) | 2020-07-16 | 2020-07-16 | Retaining ring clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212945632U true CN212945632U (en) | 2021-04-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021405211.0U Active CN212945632U (en) | 2020-07-16 | 2020-07-16 | Retaining ring clamp |
Country Status (1)
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| CN (1) | CN212945632U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113352231A (en) * | 2021-07-05 | 2021-09-07 | 上海江丰平芯电子科技有限公司 | Chemical mechanical polishing retaining ring and processing method thereof |
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2020
- 2020-07-16 CN CN202021405211.0U patent/CN212945632U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113352231A (en) * | 2021-07-05 | 2021-09-07 | 上海江丰平芯电子科技有限公司 | Chemical mechanical polishing retaining ring and processing method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230907 Address after: Room 403, No. 1608 Bingmashi Road, Fengshan Street, Yuyao City, Ningbo City, Zhejiang Province, 315400 Patentee after: Ningbo Runping Electronic Materials Co.,Ltd. Address before: 201400 room 2427, 5th floor, 111 Fengpu Avenue, Fengpu Industrial Zone, Fengxian District, Shanghai Patentee before: Shanghai jiangfengpingxin Electronic Technology Co.,Ltd. |