CN212925256U - Combined furnace for synthesizing novel carbon fiber by CVD method - Google Patents
Combined furnace for synthesizing novel carbon fiber by CVD method Download PDFInfo
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- CN212925256U CN212925256U CN202020937683.4U CN202020937683U CN212925256U CN 212925256 U CN212925256 U CN 212925256U CN 202020937683 U CN202020937683 U CN 202020937683U CN 212925256 U CN212925256 U CN 212925256U
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Abstract
The utility model discloses a combined furnace for synthesizing novel carbon fiber by a CVD method, which comprises a large high-temperature furnace and a plurality of sub-reaction furnaces arranged in the large high-temperature furnace; the large high-temperature furnace comprises a cylindrical large high-temperature furnace body which is axially and horizontally arranged, a common horizontal exhaust pipe, a transverse thermocouple for measuring the temperature of the central position of the horizontal exhaust pipe, and a heating-heat-preserving unit; the sub-reaction furnace is in a cylinder shape, the cylindrical axis of the sub-reaction furnace is vertical to the cylindrical axis of the large high-temperature furnace, and the sub-reaction furnace is provided with a reaction substrate, a vertical thermocouple for measuring the temperature of the substrate, a heating unit and an exhaust port; the technology realizes the simultaneous synthesis of a plurality of novel carbon fibers in the same equipment, and overcomes the defects of long reaction time, low efficiency, time waste and energy waste of a single CVD reaction furnace; the novel carbon fiber obtained under different reaction conditions has different properties and purposes; because the micro-nano carbon composite material can be grouped and simultaneously subjected to strict controllable synthesis, the micro-nano carbon composite material is particularly suitable for preparing micro-or nano-carbon elements applied to micro-electromechanical systems (MEMS), and the combined furnace is extremely easy to manufacture, popularize and use.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a normal pressure Chemical Vapor Deposition (CVD) reaction device, which is used for synthesizing novel carbon fiber.
[ background of the invention ]
CVD refers to chemical vapor deposition reaction at high temperature, vapor grown carbon fiber is a multifunctional carbon material, and a common synthesis method is to crack a vapor hydrocarbon to deposit carbon on a reaction substrate under the action of a catalyst to grow novel carbon fiber. Since the product is very sensitive to the reaction conditions, such as the composition of the catalyst and its support, the composition and flow of the gases, and the temperature, slight variations in conditions will result in products of completely different microscopic morphology and crystal structure. On the other hand, products obtained under different conditions have different properties and uses, and are particularly applied to micro-mechanical electronic systems (MEMS) as micro or nano elements, so that a synthesis device which is grouped for tight control is urgently needed.
In the prior art, the CVD reaction furnace is synthesized by increasing the number of tests by a single CVD reaction furnace, thus wasting time and energy, and the utility model is designed and manufactured by overcoming the condition.
[ Utility model ] content
The utility model aims at overcoming the defects of the prior art, providing a combined furnace which is composed of a plurality of sub-reaction furnaces and can synthesize a plurality of different vapor-phase growth novel carbon fibers, and the combined furnace is especially suitable for preparing nano and micron elements.
The utility model discloses a realize through following technical scheme:
a combined furnace for synthesizing novel carbon fiber by a CVD method is composed of a plurality of sub-reaction furnaces and is characterized in that: the combined furnace comprises a cylindrical large high-temperature furnace and a plurality of sub-reaction furnaces, wherein the cylindrical large high-temperature furnace is axially and horizontally arranged; the large high-temperature furnace comprises a cylindrical large high-temperature furnace body, a common horizontal exhaust pipe, a transverse thermocouple for measuring the temperature of the central position of the large high-temperature furnace body, a heating-heat-preserving unit and large sealing rubber plugs arranged at openings at two axial ends of the cylindrical furnace body; the sub-reaction furnace is in a cylinder shape, and the axis of the cylinder of the sub-reaction furnace is vertical to the axis of the cylinder of the large high-temperature furnace; the sub-reaction furnaces are provided with reaction substrates, vertical thermocouples for measuring the temperature of the substrates, heating units, small sealing rubber plugs at gas introduction positions, gas guide pipes and exhaust; and the exhaust port faces to the notch of the horizontal exhaust pipe of the large high-temperature furnace.
Preferably, the large high-temperature furnace and the sub-reaction furnace are both made of quartz glass;
preferably, 4 sub-reaction furnaces are arranged in the large high-temperature furnace;
preferably, the bottom of the sub-reaction furnaces is directly opposite to the opening of the exhaust pipe of the large high temperature furnace along the central axis.
Compared with the prior art, the utility model discloses there is following advantage:
n sub-reaction furnaces in the large reaction furnace can simultaneously carry out N tests, so that the time is greatly saved, the gas phase synthesis test period is short, and the efficiency is high; and N sub-reaction furnaces are assisted by the same large high-temperature furnace for heat preservation, and the sub-reaction furnaces can independently control the temperature, so that the energy conservation is facilitated.
[ description of the drawings ]
FIG. 1 is a schematic view of a combination furnace for synthesizing novel carbon fibers by a CVD method.
[ detailed description ] embodiments
Embodiments of the present invention are further described below with reference to the accompanying drawings:
the combined furnace for synthesizing the novel carbon fiber by the CVD method is arranged as shown in figure 1, the adaptive reaction temperature is in the range of 500-1000 ℃, and the combined furnace consists of a plurality of sub-reaction furnaces, including a cylindrical large high-temperature furnace body 2 which is horizontally arranged in the axial direction and a plurality of sub-reaction furnaces A which are arranged in the large high-temperature furnace; the large high-temperature furnace comprises a large high-temperature furnace body 2, a horizontal exhaust pipe 4, a transverse thermocouple 12 for measuring the temperature of the central position of the large high-temperature furnace body, a heating-heat-preserving unit 11 and large sealing rubber plugs 3 arranged at openings at two axial ends of the cylindrical furnace body.
Each sub-reactor has an exhaust port 40 and faces the gap 30 of the horizontal exhaust pipe 4; the sub-reaction furnace (as a sub-reaction furnace A in the figure) is in a cylinder shape, and the axis of the cylinder is vertical to the axis of the cylinder of the large high-temperature furnace body 2; the sub-reaction furnaces are also provided with a reaction substrate 5, a vertical thermocouple 7 for measuring the temperature of the substrate, a heating unit 110, a small sealing rubber plug 6 at a gas introduction position, a gas guide pipe 8 of the sub-reaction furnaces and an exhaust port 40.
The operation method comprises the following steps: laying predetermined catalyst powder on the surface of the reaction substrate 5 of each sub-reaction furnace, introducing inert gas from the gas guide pipe 8 of the sub-reaction furnace, starting the heating-heat preservation unit 11 of the large high-temperature furnace, the heating unit 110 of the sub-reaction furnace and the temperature control system, and the temperature is measured by a transverse thermocouple 12 of the large high-temperature furnace and a vertical thermocouple 7 of the small reaction furnace respectively, when each sub-reaction furnace reaches a certain temperature, gaseous hydrocarbon and hydrogen are introduced, the large sealing rubber plug 3 and the small sealing rubber plug 6 are sealed in the reaction process, the gas is introduced from the gas guide pipe 8 of the sub-reaction furnace, the reaction system is thermally cracked on the reaction substrate 5 to deposit carbon fibers growing on the substrate, the growing tip of the carbon fibers is upward like wheat, the reaction tail gas is diffused through the exhaust port 40 and is exhausted from the notch 30 through the common horizontal exhaust pipe 4, and the pressure of the reaction system is atmospheric pressure. And stopping all heating systems, slowly cooling, taking out the reaction substrate deposited with the carbon fibers, and harvesting the carbon fibers.
The utility model discloses simple structure, the synthesis test is efficient, easily makes and uses widely.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (3)
1. A combined furnace for synthesizing novel carbon fiber by a CVD method is composed of a cylindrical large high-temperature furnace and a plurality of sub-reaction furnaces, and is characterized in that: the combined furnace comprises a cylindrical large high-temperature furnace body (2) which is horizontally arranged in the axial direction and a plurality of sub-reaction furnaces (A) which are arranged in the cylindrical large high-temperature furnace body (2); a transverse thermocouple (12) for measuring the temperature of the central position of the cylindrical large high-temperature furnace body (2), a heating-heat-preserving unit (11), a horizontal exhaust pipe (4) and large sealing rubber plugs (3) at openings at two ends of the cylindrical large high-temperature furnace body are arranged in the cylindrical large high-temperature furnace body; the sub-reaction furnace (A) is in a cylinder shape, and the cylindrical axis of the sub-reaction furnace is vertical to the cylindrical axis of the large high-temperature furnace; the sub-reaction furnaces are provided with exhaust ports (40), and the pipe orifices of the sub-reaction furnaces face to the gaps (30) of the horizontal exhaust pipes (4); the sub-reaction furnace is also provided with a reaction substrate (5), a vertical thermocouple (7) for measuring the temperature of the substrate, a heating unit (110), a small sealing rubber plug (6) at the gas leading-in position, a gas guide pipe (8) and an exhaust port (40).
2. The combination furnace for synthesizing novel carbon fibers by the CVD method according to claim 1, wherein: the furnace wall materials of the large high-temperature furnace and the plurality of sub-reaction furnaces are quartz glass.
3. The combination furnace for synthesizing novel carbon fibers by the CVD method according to claim 1 or 2, wherein: 4 sub-reaction furnaces are arranged in the large high-temperature furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020937683.4U CN212925256U (en) | 2020-05-28 | 2020-05-28 | Combined furnace for synthesizing novel carbon fiber by CVD method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020937683.4U CN212925256U (en) | 2020-05-28 | 2020-05-28 | Combined furnace for synthesizing novel carbon fiber by CVD method |
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| CN212925256U true CN212925256U (en) | 2021-04-09 |
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| CN202020937683.4U Active CN212925256U (en) | 2020-05-28 | 2020-05-28 | Combined furnace for synthesizing novel carbon fiber by CVD method |
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