CN212925159U

CN212925159U - 12 inch physical vapor deposition titanium cavity heating base protection accessory

Info

Publication number: CN212925159U
Application number: CN202021699830.5U
Authority: CN
Inventors: 刘祥超
Original assignee: Shanghai Zhihao Electronic Technology Co ltd
Current assignee: Shanghai Zhihao Electronic Technology Co ltd
Priority date: 2020-08-15
Filing date: 2020-08-15
Publication date: 2021-04-09
Anticipated expiration: 2030-08-15

Abstract

The utility model discloses a 12 inch physical vapor deposition titanium cavity heating base protection accessory, include: the accessory body, the whole ring form structure that is of accessory body sets up and sets up the sculpture on its surface, the sculpture is cross structure and slope setting, through glyptic mode integrated into one piece between sculpture and the accessory body, the inside of sculpture is equipped with recess and is the setting of cross structure, the sculpture is circumference evenly distributed with the center department of accessory body. The utility model discloses a do the carving flower on accessory body surface and handle, increase area of contact can the adhesion attachment more, disperses the stress distribution of these attachments simultaneously, and adnexed attachment is difficult to peel off, reduces the probability that the granule produced, improves the quality of processing procedure, prolongs the cycle of cavity maintenance to improve the rate of utilization of machine, reduce the cost.

Description

12 inch physical vapor deposition titanium cavity heating base protection accessory

Technical Field

The utility model relates to a physical vapor deposition technical field, more specifically are a 12 inches physical vapor deposition titanium cavity heating base protection accessory.

Background

The Physical Vapor Deposition (PVD) technique is a technique of vaporizing a material source, i.e., a solid or liquid surface, into gaseous atoms, molecules or partially ionized ions by a Physical method under a vacuum condition, and depositing a thin film having a specific function on a substrate surface by a low-pressure gas (or plasma) process. The main methods of physical vapor deposition include vacuum evaporation, sputter coating, arc plasma coating, ion coating, and molecular beam epitaxy. Physical vapor deposition techniques have been developed to date to deposit not only metal films, alloy films, but also compound, ceramic, semiconductor, polymer films, and the like.

The existing 12 inch physical vapor deposition titanium chamber heating base protection fittings have limited ability to adhere reaction attachments on the surface, and the attachments can be peeled off from the device along with the accumulation of the adhered attachments, so that particles are generated, the quality of the process is influenced, and the chamber maintenance period is shortened. Therefore, a new technical solution needs to be provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a 12 inches physical vapor deposition titanium cavity heating base protection accessory has solved current physical vapor deposition titanium cavity heating base protection accessory device among the prior art, and the ability of its surface adhesion reaction annex is limited, and along with the accumulation of the attachment of adhesion, these attachments can peel off from the device, produce the granule, influence the quality of processing procedure, shorten the problem of cavity maintenance cycle.

In order to achieve the above object, the utility model provides a following technical scheme: a 12 inch physical vapor deposition titanium chamber heating pedestal protection fitting, comprising: the accessory body, the whole ring form structure that is of accessory body sets up and sets up the sculpture on its surface, the sculpture is cross structure and slope setting, through glyptic mode integrated into one piece between sculpture and the accessory body, the inside of sculpture is equipped with recess and is the setting of cross structure, the sculpture is circumference evenly distributed with the center department of accessory body.

As a preferred embodiment of the present invention, the inside of the carved pattern is provided with four groups of cavities and the cavities are distributed at four corners of the carved cross structure.

As a preferred embodiment of the present invention, the engraved portion is formed with a protrusion and an M-shaped structure is formed between the cavity and the protrusion, and the groove is located on the surface of the protrusion.

As a preferred embodiment of the utility model, the left side of accessory body is equipped with first through-hole and the right side is equipped with the second through-hole, the aperture of second through-hole is greater than and is linked together between first through-hole and the inside cavity of carving patterns and the first through-hole.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses a do the carving flower on accessory body surface and handle, increase area of contact can the adhesion attachment more, disperses the stress distribution of these attachments simultaneously, and adnexed attachment is difficult to peel off, reduces the probability that the granule produced, improves the quality of processing procedure, prolongs the cycle of cavity maintenance to improve the rate of utilization of machine, reduce the cost.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic sectional view of the present invention;

FIG. 3 is an enlarged schematic view of part A of the present invention;

fig. 4 is an enlarged schematic structural diagram of part B of the present invention.

In the figure, the fitting comprises a fitting body-1, an engraving-2, a groove-3, a cavity-4, a protrusion-5, a first through hole-6 and a second through hole-7.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a 12 inch physical vapor deposition titanium chamber heating pedestal protection fitting, comprising: accessory body 1, accessory body 1 wholly is the ring form structure setting and sets up flower 2 at its surface, flower 2 is cross structure and slope setting, through glyptic mode integrated into one piece between flower 2 and the accessory body 1, the inside of flower 2 is equipped with recess 3 and is the cross structure setting, flower 2 is circumference evenly distributed with the center department of accessory body 1, and the setting of flower has increased its area of contact, and the recess of its inside setting has increased the bearing capacity of annex, and the cooperation flower can adhere more annexs, disperses the stress distribution of these attachments simultaneously.

Further improved, as shown in fig. 4: the inside of carving flower 2 is equipped with cavity 4 and cavity 4 is provided with four groups and distributes in the four corners of the cross structure of carving flower 2, and the setting of cavity 4 has increased the attachment bearing capacity of carving flower 2.

Further improved, as shown in fig. 4: the inside of carving 2 forms arch 5 and cavity 4 and protruding 5 between form M type structure, recess 3 is located protruding 5's surface, and recess 3 is located protruding 5 surfaces, has improved the adhesive force.

The utility model discloses a do 2 processing of carving patterns on 1 surface of accessory body, increase area of contact can the adhesion attachment more, disperses the stress distribution of these attachments simultaneously, and adnexed attachment is difficult to peel off, reduces the probability that the granule produced, improves the quality of processing procedure, prolongs the cycle of cavity maintenance to improve the rate of utilization of machine, reduce the cost.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A12 inch physical vapor deposition titanium cavity heating base protection accessory which characterized in that: the method comprises the following steps: accessory body (1), accessory body (1) wholly is ring form structure setting and sets up flower carving (2) on its surface, flower carving (2) are cross structure and slope setting, through glyptic mode integrated into one piece between flower carving (2) and accessory body (1), the inside of flower carving (2) is equipped with recess (3) and is the cross structure setting, flower carving (2) are circumference evenly distributed with the center department of accessory body (1).

2. The 12 inch physical vapor deposition titanium chamber heating pedestal protection fitting of claim 1, wherein: the cavity (4) is arranged in the carved flower (2), and four groups of cavities (4) are arranged in the cavity (4) and distributed at four corners of the cross-shaped structure of the carved flower (2).

3. The 12 inch physical vapor deposition titanium chamber heating pedestal protection fitting of claim 2, wherein: the inside of carving flower (2) forms arch (5) and cavity (4) and protruding (5) between form M type structure, recess (3) are located the surface of arch (5).

4. The 12 inch physical vapor deposition titanium chamber heating pedestal protection fitting of claim 1, wherein: the left side of accessory body (1) is equipped with first through-hole (6) and the right side is equipped with second through-hole (7), be linked together between interior cavity (4) that the aperture of second through-hole (7) is greater than first through-hole (6) and carving flower (2) and first through-hole (6).