CN212906716U - Linear plasma experimental device - Google Patents
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- CN212906716U CN212906716U CN202022290972.2U CN202022290972U CN212906716U CN 212906716 U CN212906716 U CN 212906716U CN 202022290972 U CN202022290972 U CN 202022290972U CN 212906716 U CN212906716 U CN 212906716U
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Abstract
The utility model discloses a linear plasma experimental device, which comprises a plasma source, a plasma source chamber, an auxiliary heating chamber, a target chamber, a material analysis exchange chamber and a sample conveying unit, wherein the plasma source chamber, the auxiliary heating chamber, the target chamber and the material analysis exchange chamber are all connected with a molecular pump; magnet coils are arranged outside the plasma source, the plasma source chamber, the auxiliary heating chamber and the target chamber; an antenna is arranged in the auxiliary heating chamber, the antenna is connected with a heating power supply, the antenna is in a ring shape capable of allowing the plasma beam to pass through, and the antenna is fixed on the inner wall of the auxiliary heating chamber. The utility model discloses a sharp plasma experimental apparatus possesses plasma experimental function, has set up the auxiliary heating room between plasma source room and target chamber, can carry out the secondary heating to the plasma that the plasma source produced, and the environment that provides can the physical process such as transportation, off-target, impurity injection and particle recirculation of plasma in whole scraping layer and divertor of full research.
Description
Technical Field
The utility model relates to a plasma and wall material interact technical field especially relate to a sharp plasma experimental apparatus.
Background
The controlled nuclear fusion energy is hopeful to become the most main energy source in future society, and tokamak is the most main controlled nuclear fusion device. Plasma interaction with wall material (PMI) is one of the most critical issues concerning tokamak device lifetime, safety and economy. During long pulse high power discharges in tokamak diverters, the core generated energy and ions will eventually deposit onto the divertor target plate, and these high flux particle/energy flows pose a serious challenge to the lifetime of the diverters. The high-energy charged particles can cause obvious damage to the wall material, and the high-energy charged particles and the particle flow act synergistically, so that the wall erosion is aggravated, dislocation damage is generated, a large amount of tritium is retained, and the safety and the economy of the fusion reactor are reduced. Furthermore, impurities from sputtering may be transported to the core and contaminate the main plasma, even causing the discharge to be interrupted. Therefore, the scientific problem related to PMI is urgently to be solved.
There are some drawbacks to using existing tokamak devices to develop PMI correlation studies: (1) experiments with tokamak are very expensive and time consuming and, due to their complex irradiation parameters, it is often difficult to understand the relevant physics and to carry out in-depth analyses; (2) the existing tokamaks cannot obtain long-pulse steady-state discharge with the time order of days. (3) Tokamaks do not have sufficient flexibility, are difficult to overcome some uncertain factors, and are difficult to operate under various required experimental conditions; (4) there is still a certain difference between the parameters of Tokamak edge plasma and the parameters of fusion reactor. These drawbacks limit the development of intensive studies on PMI related issues on tokamak.
The PMI and other problems are researched by utilizing a linear plasma experimental device, and compared with the prior Tokamak, the linear plasma experimental device has the following advantages that (1) long pulse (for several days) steady-state discharge is realized; (2) the particle flux can reach the plasma irradiation dose of the tokamak divertor; (3) the cost is lower, and the diagnosis is easier; (4) the engineering design and construction are simpler. The linear plasma experimental device has been applied to research on high particle/heat flow irradiation, material erosion and fuel retention, and the research has achieved remarkable results. In addition, it can also be applied to study the physics of a scraping layer and a divertor with an open magnetic field structure.
At present, several linear plasma experimental devices have been successfully developed in China for researching the problems of PMI and the like, and some results are obtained, but the devices cannot comprehensively research the related physical problems because auxiliary heating cannot be carried out on the plasma, basic parameters such as the plasma temperature and the like are low (1-5eV), and a scraping layer and a divertor plasma environment are not provided.
Therefore, how to change the current situation that the linear plasma experimental apparatus cannot realize auxiliary heating of the plasma in the prior art becomes a problem to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a sharp plasma experimental apparatus to solve the problem that above-mentioned prior art exists, make experimental apparatus can carry out the secondary heating to plasma, for the condition of facilitating of physical research.
In order to achieve the above object, the utility model provides a following scheme: the utility model provides a sharp plasma experimental apparatus, including plasma source, plasma source room, auxiliary heating room, target chamber, material analysis exchange chamber and send a kind unit, the plasma source with the plasma source room links to each other, the plasma source can produce plasma and restraint, and plasma restraints can get into in the plasma source room, the plasma source room the auxiliary heating room with the target chamber is linked together in order, the plasma source set up in the plasma source room is kept away from one side of auxiliary heating room, send a kind unit with the material analysis exchange chamber is linked together, the material analysis exchange chamber with the target chamber is linked together, the plasma source room the auxiliary heating room the target chamber with the material analysis exchange chamber is the vacuum chamber, the plasma source room the auxiliary heating room, The target chamber and the material analysis exchange chamber are both connected with a molecular pump; magnet coils are arranged outside the plasma source, the plasma source chamber, the auxiliary heating chamber and the target chamber; an antenna is arranged in the auxiliary heating chamber and connected with a heating power supply, the antenna is in an annular shape capable of allowing plasma beams to pass through, and the antenna is fixed on the inner wall of the auxiliary heating chamber.
Preferably, the antenna is arranged coaxially with the auxiliary heating chamber, and the antenna is hollow cylindrical.
Preferably, quartz glass is further arranged at the antenna, the quartz glass is in a hollow cylindrical shape, the antenna is sleeved outside the quartz glass, and the antenna is abutted against the quartz glass.
Preferably, the length of the quartz glass is longer than the length of the antenna.
Preferably, the antenna is a split structure, and the antenna comprises two half rings arranged oppositely, a gap is formed between the two half rings, two ends of each half ring are fixed on the ceramic plate by using bolts and are connected with the quartz glass, and the half rings are further connected with the inner wall of the auxiliary heating chamber by using the ceramic plate.
Preferably, the heating power supply is connected with a matcher, the matcher is connected with the antenna through a coaxial cable, and a flange window is arranged at the position where the coaxial cable penetrates through the auxiliary heating chamber.
Preferably, the linear plasma experimental apparatus further comprises a cooling system, the cooling system comprises a cooling medium and a circulating pipeline, the cooling medium can circularly flow along the circulating pipeline, and the cooling system can cool down the plasma source chamber, the auxiliary heating chamber, the target chamber, the material analysis exchange chamber and the magnet coil.
Preferably, a truncated cone is arranged between the plasma source chamber and the auxiliary heating chamber and between the auxiliary heating chamber and the target chamber, and the smaller opening end of the truncated cone is arranged towards the plasma source.
Preferably, a gate valve is arranged between the target chamber and the material analysis exchange chamber; valves are arranged between the plasma source chamber and the molecular pump, between the auxiliary heating chamber and the molecular pump, between the target chamber and the molecular pump, and between the material analysis exchange chamber and the molecular pump.
The utility model discloses for prior art gain following technological effect: the utility model discloses a linear plasma experimental apparatus, including the plasma source, the plasma source room, the auxiliary heating room, the target chamber, material analysis exchange chamber and send a kind unit, the plasma source links to each other with the plasma source room, the plasma source can produce plasma beam, plasma beam can get into in the plasma source room, auxiliary heating room and target chamber are linked together in order, the plasma source sets up in the plasma source room and keeps away from one side of auxiliary heating room, send a kind unit and material analysis exchange chamber to be linked together, material analysis exchange chamber is linked together with the target chamber, the plasma source room, the auxiliary heating room, target chamber and material analysis exchange chamber are the vacuum chamber, the plasma source room, the auxiliary heating room, target chamber and material analysis exchange chamber all are connected with the molecular pump; magnet coils are arranged outside the plasma source, the plasma source chamber, the auxiliary heating chamber and the target chamber; an antenna is arranged in the auxiliary heating chamber, the antenna is connected with a heating power supply, the antenna is in a ring shape capable of allowing the plasma beam to pass through, and the antenna is fixed on the inner wall of the auxiliary heating chamber. The utility model discloses a sharp plasma experimental apparatus possesses plasma experiment function, can produce axle center magnetic field intensity and be 3000 gauss, and magnetic field waviness is less than 3% high degree of consistency magnetic field, and the background vacuum can reach 10-4Pa, by using different plasma sources, can simulate the behavior of PMI and plasma in the divertor region in tokamak. The utility model discloses set up the auxiliary heating room between plasma source room and target chamber, can carry out secondary heating to the plasma that plasma source produced, provide plasma density and be 1018-1020m-3Typical scratch layer and divertor plasma environments with temperatures of 1-30eV and beam spot diameters of 10 cm. The provided environment can fully research physical processes of plasma transportation, off-target, impurity injection, particle recirculation and the like in the whole scraping layer and the divertor. The linear device can provide an environment as close as possible to the actual condition of the tokamak, has great advantages in the physical research of the divertor and has wide application prospect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a linear plasma experimental apparatus of the present invention;
FIG. 2 is an enlarged schematic view of a portion of the structure of FIG. 1;
FIG. 3 is a schematic diagram of the magnetic beach magnetic field configuration of the heating area of the auxiliary heating chamber;
fig. 4 is a schematic structural diagram of an antenna and quartz glass of the linear plasma experimental apparatus of the present invention;
FIG. 5 is a schematic view of a part of the structure of the linear plasma experimental apparatus of the present invention;
the plasma analysis device comprises a plasma source 1, a plasma source chamber 2, an auxiliary heating chamber 3, a target chamber 4, a material analysis exchange chamber 5, a sample sending unit 6, a molecular pump 7, a magnet coil 8, an antenna 9, a heating power supply 10, quartz glass 11, a semi-ring 12, a matcher 13, a flange window 14, a ceramic plate 15, a cutting cone 16, a high field region 17, a low field region 18, a gate valve 19 and a coaxial cable 20.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model aims at providing a sharp plasma experimental apparatus to solve the problem that above-mentioned prior art exists, make experimental apparatus can carry out the secondary heating to plasma, for the condition of facilitating of physical research.
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
Please refer to fig. 1-5, wherein fig. 1 is a schematic structural diagram of a linear plasma experimental apparatus of the present invention, fig. 2 is an enlarged schematic diagram of a partial structure in fig. 1, fig. 3 is a schematic diagram of a magnetic beach magnetic field configuration of a heating region of an auxiliary heating chamber, fig. 4 is a schematic structural diagram of an antenna and quartz glass of the linear plasma experimental apparatus of the present invention, and fig. 5 is a partial structural diagram of the linear plasma experimental apparatus of the present invention.
The utility model provides a linear plasma experimental device, which comprises a plasma source 1, a plasma source chamber 2, an auxiliary heating chamber 3, a target chamber 4, a material analysis exchange chamber 5 and a sample sending unit 6, wherein the plasma source 1 is connected with the plasma source chamber 2, the plasma source 1 can generate plasma beams, the plasma beams can enter the plasma source chamber 2 and the plasma source chamber 2, the auxiliary heating chamber 3 is communicated with the target chamber 4 in sequence, the plasma source 1 is arranged on one side of the plasma source chamber 2 far away from the auxiliary heating chamber 3, the sample feeding unit 6 is communicated with the material analysis exchange chamber 5, the material analysis exchange chamber 5 is communicated with the target chamber 4, the plasma source chamber 2, the auxiliary heating chamber 3, the target chamber 4 and the material analysis exchange chamber 5 are vacuum chambers, and the plasma source chamber 2, the auxiliary heating chamber 3, the target chamber 4 and the material analysis exchange chamber 5 are all connected with a molecular pump 7; magnet coils 8 are arranged outside the plasma source 1, the plasma source chamber 2, the auxiliary heating chamber 3 and the target chamber 4; an antenna 9 is arranged in the auxiliary heating chamber 3, the antenna 9 is connected with a heating power supply 10, the antenna 9 is in a ring shape capable of allowing the plasma beam to pass through, and the antenna 9 is fixed on the inner wall of the auxiliary heating chamber 3.
The plasma source 1 comprises two different plasma sources of lanthanum hexaboride cathode discharge and helicon wave discharge, can meet different experimental requirements, and can be respectively used for researching long-time irradiation damage, fuel retention and experimental research related to divertor physics of materials. By applying differential pumping with molecular pump 7, 10 can be generated-4Pa background vacuum environment to can be in discharge experiment process, drop to 0.01Pa with neutral pressure, satisfy the basic requirement of auxiliary heating experiment, molecular pump 7 can also guarantee the vacuum degree of material analysis exchange room 5, and magnet coil 8 can produce 3000 gauss of magnetic field intensity, and the magnetic field ripple degree is less than 3% high degree of consistency strong magnetic field. It should be emphasized that, the utility model discloses set up auxiliary heating chamber 3, set up antenna 9 in the auxiliary heating chamber 3, antenna 9 is connected with heating power supply 10, and the electromagnetic wave that antenna 9 produced is the same plasma coupling, takes place the resonance with the ion, gives the ion with energy transmission, reaches the purpose of heating the ion. In the present embodiment, the diameters of the plasma source chamber 2 and the auxiliary heating chamber 3 are 400mm, and the diameter of the target chamber 4 is 600 mm.
It should be further noted that, the plasma is heated by the aid of ion cyclotron resonance heating, so as to increase the temperature of the plasma, and the key to successful ion-assisted heating is to construct a "magnetic beach" magnetic field configuration, as shown in fig. 3, which is a schematic diagram of the "magnetic beach" magnetic field configuration, slow waves emitted by the antenna 9 propagate from the antenna 9 (the high field region 17) to the resonance heating region (the low field region 18) to heat the ions, and when the "magnetic beach" magnetic field configuration is shown in fig. 3, the position of the magnet coil 8, the magnetic field strength at the antenna 9, and the magnetic field strength in the low field resonance region are set. In addition, the lower neutral pressure is also beneficial to improving the auxiliary heating efficiency.
In the present embodiment, the antenna 9 is disposed coaxially with the auxiliary heating chamber 3, and the antenna 9 is hollow cylindrical, so as to ensure that the plasma beam can smoothly pass through the auxiliary heating chamber 3, thereby ensuring that the experiment can be performed smoothly.
The quartz glass 11 is further arranged at the antenna 9, the quartz glass 11 is in a hollow cylindrical shape, the antenna 9 is sleeved outside the quartz glass 11, the antenna 9 is abutted against the quartz glass 11, the quartz glass 11 can be used for avoiding the antenna 9 from being in direct contact with plasma, the antenna 9 is protected, and the energy absorption rate of the plasma beam can be improved to the maximum extent.
In order to further avoid the antenna 9 from contacting with the plasma, the length of the quartz glass 11 is longer than that of the antenna 9, in the present embodiment, the radius of the antenna 9 is matched with that of the quartz glass 11, the length of the antenna 9 is 15cm, the length of the quartz glass 11 is 18cm, and the antenna 9 is tightly attached to the quartz glass 11.
Specifically, the antenna 9 is a split structure, the antenna 9 includes two opposite semi-rings 12, a gap is formed between the two semi-rings 12, two ends of the semi-rings 12 are fixed on a ceramic plate 15 by bolts to form a whole with a quartz glass 11, and then the ceramic plate 15 with a slot is connected with the inner wall of the auxiliary heating chamber 3, the antenna 9 is made of an oxygen-free copper material, the two semi-rings 12 form a double semi-ring (DHT) antenna 9, current flows through the antenna 9 from the same side, and the current direction flowing through the two semi-rings 12 is perpendicular to the magnetic field direction.
More specifically, the heating power source 10 is connected with a matching unit 13, the matching unit 13 is connected with the antenna 9 by a coaxial cable 20, and the flange window 14 is arranged at the position where the coaxial cable 20 passes through the auxiliary heating chamber 3. The heating power supply 10 provides radio frequency power which is excited by the antenna 9 in the form of waves. The matching unit 13 is mainly used for impedance matching, and each part is flexibly connected by a coaxial cable 20, and in the present embodiment, the power of the heating power supply 10 is 50 kW. It should be emphasized here that a plurality of flange windows 14 of different specifications are provided on the entire side wall of the vacuum chamber to meet different requirements and improve the adaptability of the device.
The linear plasma experimental device further comprises a cooling system, wherein the cooling system comprises a cooling medium and a circulating pipeline, the cooling medium can circularly flow along the circulating pipeline, and the cooling system can cool the plasma source chamber 2, the auxiliary heating chamber 3, the target chamber 4, the material analysis exchange chamber 5 and the magnet coil 8 so as to ensure the long-time steady-state discharge of the device. The magnet coil 8 and the heating power source 10 are cooled by deionized water, and other components may be cooled by ordinary tap water. By adopting the deionized water to circularly cool the heating power supply 10, the temperature of the heating power supply 10 during operation can be effectively reduced, and the high efficiency and the safety of the heating power supply during operation can be ensured. In addition, because the conductivity of the deionized water is lower, the leakage power can be reduced to a greater extent, and the experimental safety is ensured.
Skimmers 16(skimmers) are disposed between the plasma source chamber 2 and the auxiliary heating chamber 3 and between the auxiliary heating chamber 3 and the target chamber 4, and the smaller end of the skimmer 16 is disposed toward the plasma source 1. In order to ensure the auxiliary heating effect and reduce the occurrence of secondary ionization in the auxiliary heating chamber 3, so that the energy of the antenna 9 is maximally used for increasing the plasma temperature, the neutral voltage (0.01Pa) needs to be kept low during the experiment to reduce the collision between ions and neutral particles. Therefore, the plasma source chamber 2, the auxiliary heating chamber 3 and the target chamber 4 are separated by a skimmer 16 with the aperture of 12cm, the vacuum pumping is designed by using a three-stage differential pumping mode, one molecular pump 7 is respectively arranged in the plasma source chamber 2 and the target chamber 4, and two molecular pumps 7 are arranged in the auxiliary heating chamber 3, so that the neutral pressure of the auxiliary heating chamber 3 is ensured to be as low as possible.
Further, a gate valve 19 is arranged between the target chamber 4 and the material analysis exchange chamber 5; valves are arranged between the plasma source chamber 2 and the molecular pump 7, between the auxiliary heating chamber 3 and the molecular pump 7, between the target chamber 4 and the molecular pump 7, and between the material analysis exchange chamber 5 and the molecular pump 7, so that the control is convenient.
In application, the magnetic field configuration of "magnetic beach" as shown in fig. 3 is first generated by adjusting the current, the distance, etc. of the magnet coils 8, i.e. the magnetic field strength at the position where the antenna 9 is arranged (high field region 17) is stronger than the magnetic field strength in the low field resonance region (low field region 18). Successful construction of the magnetic beach magnetic field configuration is an important condition for achieving success of auxiliary heating. Through plasma source chamber 2, auxiliary heating room 3, target chamber 4 and the intercepting awl 16 of junction to use tertiary difference to bleed evacuation, through molecular pump 7, in the experimentation, with neutral pressure drop to 0.01Pa, greatly reduce the collision of ion and neutral particle, promote the auxiliary heating effect. When the magnetic field and vacuum are adjusted, the plasma source 1 (helicon wave plasma source 1) is turned on, so that the linear plasma device starts to discharge, generating a plasma beam. The heating power supply 10 is turned on, the radio frequency power provided by the heating power supply 10 is transmitted to the matcher 13 and the antenna 9 through the coaxial cable 20, the antenna 9 is arranged at the flange window 14 in the auxiliary heating chamber 3, the quartz glass 11 is used for avoiding the antenna 9 from being in direct contact with the plasma, the antenna 9 is protected, the energy absorption rate of the plasma beam can be improved to the maximum extent, and the flange window 14 is welded on the cavity wall of the auxiliary heating chamber 3. The antenna 9 is installed inside the auxiliary heating chamber 3, and both ends of the antenna 9 are formed integrally with the quartz glass 11 through the ceramic plate 15 and fixed inside the vacuum auxiliary heating chamber 3. Radio frequency waves consistent with ion cyclotron frequencies in the resonance region are excited through the antenna 9, coupled to the plasma and absorbed by the plasma through cyclotron resonance, and finally heating of ions is achieved successfully.
The utility model discloses a sharp plasma experimental apparatus, PMI and plasma near divertor's action in not only can simulating tokamak, owing to have auxiliary heating chamber 3, cooperate with other parts, can provide density and be 1018-1020m-3Typical scratch layer and divertor plasma environments at temperatures of 1-30 eV. The experimental environment provided by the device is close to the actual condition of Tokamak, the physical processes of transportation, off-target, impurity injection, particle recirculation and the like of plasma in the whole scraping layer and the divertor can be fully researched, and the device has great characteristics in the field of linear plasma experimental devices and can be paid great attention. The utility model discloses have very big using value in aspects such as studying whole scraping layer and divertor physics, have extensive application prospect.
The utility model discloses a concrete example is applied to explain the principle and the implementation mode of the utility model, and the explanation of the above example is only used to help understand the method and the core idea of the utility model; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the concrete implementation and the application scope. In summary, the content of the present specification should not be construed as a limitation of the present invention.
Claims (9)
1. A linear plasma experimental device is characterized in that: comprises a plasma source, a plasma source chamber, an auxiliary heating chamber, a target chamber, a material analysis exchange chamber and a sample sending unit, the plasma source is connected with the plasma source chamber, the plasma source can generate a plasma beam, the plasma beam can enter the plasma source chamber, the plasma source chamber, the auxiliary heating chamber and the target chamber are communicated in sequence, the plasma source is arranged on one side of the plasma source chamber far away from the auxiliary heating chamber, the sample feeding unit is communicated with the material analysis exchange chamber which is communicated with the target chamber, the plasma source chamber, the auxiliary heating chamber, the target chamber and the material analysis exchange chamber are all vacuum chambers, the plasma source chamber, the auxiliary heating chamber, the target chamber and the material analysis exchange chamber are all connected with a molecular pump; magnet coils are arranged outside the plasma source, the plasma source chamber, the auxiliary heating chamber and the target chamber; an antenna is arranged in the auxiliary heating chamber and connected with a heating power supply, the antenna is in an annular shape capable of allowing plasma beams to pass through, and the antenna is fixed on the inner wall of the auxiliary heating chamber.
2. The linear plasma experimental apparatus of claim 1, wherein: the antenna and the auxiliary heating chamber are coaxially arranged, and the antenna is in a hollow cylindrical shape.
3. The linear plasma experimental apparatus of claim 2, wherein: the antenna is characterized in that quartz glass is further arranged at the antenna, the quartz glass is hollow cylindrical, the antenna is sleeved outside the quartz glass, and the antenna is abutted against the quartz glass.
4. The linear plasma experimental apparatus of claim 3, wherein: the length of the quartz glass is longer than that of the antenna.
5. The linear plasma experimental apparatus of claim 3, wherein: the antenna is of a split structure and comprises two semi-rings which are oppositely arranged, a gap is formed between the two semi-rings, two ends of each semi-ring are fixed on a ceramic plate through bolts and are connected with quartz glass, and the semi-rings are connected with the inner wall of the auxiliary heating chamber through the ceramic plate.
6. The linear plasma experimental apparatus of claim 1, wherein: the heating power supply is connected with a matcher, the matcher is connected with the antenna through a coaxial cable, and a flange window is arranged at the position, where the coaxial cable penetrates through the auxiliary heating chamber.
7. The linear plasma experimental apparatus of claim 1, wherein: the plasma source chamber, the auxiliary heating chamber, the target chamber, the material analysis exchange chamber and the magnet coil are cooled down, and the cooling system comprises a cooling medium and a circulating pipeline, wherein the cooling medium can circularly flow along the circulating pipeline, and the cooling system can cool down the plasma source chamber, the auxiliary heating chamber, the target chamber, the material analysis exchange chamber and the magnet coil.
8. The linear plasma experimental apparatus of claim 1, wherein: intercepting cones are arranged between the plasma source chamber and the auxiliary heating chamber and between the auxiliary heating chamber and the target chamber, and the smaller end of the opening of each intercepting cone faces the plasma source.
9. The linear plasma experimental apparatus of claim 1, wherein: a gate valve is arranged between the target chamber and the material analysis exchange chamber; valves are arranged between the plasma source chamber and the molecular pump, between the auxiliary heating chamber and the molecular pump, between the target chamber and the molecular pump, and between the material analysis exchange chamber and the molecular pump.
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| CN202022290972.2U CN212906716U (en) | 2020-10-15 | 2020-10-15 | Linear plasma experimental device |
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| CN202022290972.2U CN212906716U (en) | 2020-10-15 | 2020-10-15 | Linear plasma experimental device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112133165A (en) * | 2020-10-15 | 2020-12-25 | 大连理工大学 | Linear plasma experimental device |
| CN113133174A (en) * | 2021-05-24 | 2021-07-16 | 中国科学院合肥物质科学研究院 | Helicon-ion cyclotron resonance coupling discharge system |
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2020
- 2020-10-15 CN CN202022290972.2U patent/CN212906716U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112133165A (en) * | 2020-10-15 | 2020-12-25 | 大连理工大学 | Linear plasma experimental device |
| CN112133165B (en) * | 2020-10-15 | 2024-06-25 | 大连理工大学 | Linear plasma experimental device |
| CN113133174A (en) * | 2021-05-24 | 2021-07-16 | 中国科学院合肥物质科学研究院 | Helicon-ion cyclotron resonance coupling discharge system |
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