CN212902555U - Dustless circulating air oven - Google Patents
Dustless circulating air oven Download PDFInfo
- Publication number
- CN212902555U CN212902555U CN202021243319.4U CN202021243319U CN212902555U CN 212902555 U CN212902555 U CN 212902555U CN 202021243319 U CN202021243319 U CN 202021243319U CN 212902555 U CN212902555 U CN 212902555U
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- air
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- sliding
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- 238000010438 heat treatment Methods 0.000 claims abstract description 43
- 229920000742 Cotton Polymers 0.000 claims abstract description 8
- 238000001914 filtration Methods 0.000 claims abstract description 4
- 238000005192 partition Methods 0.000 claims abstract description 4
- 238000003825 pressing Methods 0.000 claims description 16
- 238000001035 drying Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Abstract
The utility model discloses a dust-free circulating air oven, which comprises a box body, a circulating heating component, a filtering component and a workpiece placing table; the box body comprises an air heating area, a workpiece baking area and an air channel circulating area; the workpiece baking area is arranged above the air heating area and is divided into a plurality of chambers which are vertically arranged and have uniform size through partition plates; the air channel circulating area is arranged on the left side and the right side of the air heating area and the workpiece baking area and is used for establishing a circulating air channel between the air heating area and the workpiece baking area; the circulating heating assembly is arranged in the air heating zone and comprises a fan and a heating pipe; the filter assembly comprises high-temperature-resistant filter cotton; the high-temperature resistant filter cotton is connected in the air heating zone in a sliding manner; the workpiece placing tables are arranged in the cavities and comprise sliding tables and hinged door plates; the sliding table is used for placing a workpiece and is connected with the chamber in a sliding manner; the hinged door plate is arranged on the front side of the chamber; the utility model discloses can carry out heated air circulation stoving to a plurality of cavities, have the effectual advantage of drying.
Description
Technical Field
The utility model discloses establish and relate to semiconductor processing procedure equipment washing drying equipment technical field, in particular to dustless circulating air oven.
Background
In semiconductor manufacturing, shutter components of semiconductor processing equipment must be cleaned and regenerated periodically or aperiodically to maintain the performance of the semiconductor processing equipment and to extend the service life of the equipment. The washing includes that physics washs and chemical cleaning, after wasing, must dry to the sunshade, current generally adopt the oven to dry, but this kind of oven generally adopts the heat pipe directly to toast the sunshade, because of the shape of sunshade, the material diverse, adopt the heat pipe directly to toast the degree of toasting of the difficult control sunshade, can cause the damage of sunshade if toasting the transition, and, this kind of oven only a cavity at present, if place a plurality of sunshades simultaneously, the not unidimensional of sunshade, the stoving progress of neighbouring sunshade can be influenced to the shape. Therefore, improvements are needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a dustless circulating air oven to solve the above-mentioned problem.
The utility model discloses a following technical scheme realizes above-mentioned purpose:
a dust-free circulating air oven comprises a box body, a circulating heating assembly, a filtering assembly and a workpiece placing table; the box body comprises an air heating area, a workpiece baking area and an air channel circulating area; the workpiece baking area is arranged above the air heating area and is divided into a plurality of chambers which are vertically arranged and have uniform size through partition plates; the air channel circulating area is arranged on the left side and the right side of the air heating area and the workpiece baking area and is used for establishing a circulating air channel between the air heating area and the workpiece baking area; the circulating heating assembly is arranged in the air heating zone and comprises a fan and a heating pipe; the filter assembly comprises high-temperature-resistant filter cotton; the high-temperature-resistant filter cotton is connected in the air heating zone in a sliding manner; the workpiece placing tables are arranged in the cavities and comprise sliding tables and hinged door plates; the sliding table is used for placing a workpiece and is connected with the chamber in a sliding manner; the hinged door panel is arranged on the front side of the chamber.
Furthermore, the workpiece placing table also comprises a slide rail, a handle and a locking block; the sliding rails are arranged on the left side and the right side in the cavity, and the sliding table is connected with the cavity in a sliding mode through the sliding rails; the handle is arranged on the front side of the sliding table; the locking block is hinged to the front side of the box body.
Further, the workpiece placing table further comprises a bracket mounting column and a workpiece placing bracket; the two groups of support mounting columns are arranged and are oppositely arranged on the upper side of the sliding table; the workpiece placing bracket is arranged between the bracket mounting columns.
Furthermore, the workpiece placing table also comprises a pressing plate mounting column and a workpiece pressing plate; the pressing plate mounting column is arranged on the rear side of the bracket mounting column; the workpiece pressing plate is hinged to the pressing plate mounting column.
The beneficial effects of the utility model reside in that: the drying effect is good, and dust-free drying is realized; the utility model discloses a cut apart into a plurality of independent cavities with the work piece toasts the district, and be equipped with the fan, the heating pipe, the mode that adopts heated air circulation heats, at the endless in-process, this circulated air still filters through high temperature resistant filter pulp, it has the dust adhesion on the work piece to avoid in the circulated air, and heated air circulation can concentrate on same place and heat, and mode evenly distributed through the circulated air in a plurality of cavities, save space, and dry more even, it is effectual to dry, the stoving time of every cavity can be pulled out by the staff and suspend, and is convenient and fast.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic view of the present invention showing a partial structure after the hinged door panel is hidden;
FIG. 3 is a schematic view of the explosion structure of the middle box body of the present invention;
fig. 4 is a schematic structural view of the middle sliding table of the present invention.
10. A box body; 11. an air heating zone; 12. a workpiece baking area; 13. an air duct circulation zone; 20. a circulating heating assembly; 21. a fan; 22. heating a tube; 30. a filter assembly; 40. a workpiece placing table; 41. a sliding table; 42. a hinged door panel; 43. a slide rail; 44. a handle; 45. a locking block; 46. a bracket mounting post; 47. a workpiece placing support; 48. a pressing plate mounting post; 49. and pressing the workpiece.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. It should be noted that the drawings of the present invention are simplified and use non-precise ratios, and are only used for the purpose of facilitating and clearly assisting the description of the embodiments of the present invention.
As shown in fig. 1 to 4, a dust-free circulating air oven comprises a box body 10, a circulating heating assembly 20, a filtering assembly 30 and a workpiece placing table 40;
the box body 10 comprises an air heating area 11, a workpiece baking area 12 and an air duct circulating area 13; the workpiece baking area 12 is arranged above the air heating area 11, and the workpiece baking area 12 is divided into a plurality of chambers which are vertically arranged and have uniform size through partition plates; the air channel circulating area 13 is arranged on the left side and the right side of the air heating area 11 and the workpiece baking area 12 and is used for establishing a circulating air channel between the air heating area 11 and the workpiece baking area 12;
the circulating heating assembly 20 is arranged in the air heating zone 11 and comprises a fan 21 and a heating pipe 22; the filter assembly 30 comprises high temperature resistant filter cotton; the high-temperature resistant filter cotton is connected in the air heating zone 11 in a sliding manner; the workpiece placing table 40 is arranged in each cavity and comprises a sliding table 41, a hinged door plate 42, a sliding rail 43, a handle 44, a locking block 45, a support mounting column 46, a workpiece placing support 47, a pressure plate mounting column 48 and a workpiece pressure plate 49; the sliding table 41 is used for placing a workpiece and is connected with the chamber in a sliding manner; the hinged door panel 42 is disposed at the front side of the chamber; the slide rails 43 are arranged on the left side and the right side in the chamber, and the sliding table 41 is connected with the chamber in a sliding manner through the slide rails 43; the handle 44 is provided on the front side of the slide table 41; the locking block 45 is hinged to the front side of the box body 10; two groups of support mounting columns 46 are arranged and are oppositely arranged on the upper side of the sliding table 41; the workpiece placement supports 47 are disposed between the support mounting posts 46; the platen mounting post 48 is disposed on the rear side of the bracket mounting post 46; the workpiece pressing plate 49 is hinged on the pressing plate mounting column 48.
The working principle is as follows: each chamber in the workpiece baking area 12 is slidably connected with a sliding table 41, when the workpiece baking area is needed, the sliding table 41 can be pulled out, a workpiece is placed on a workpiece placing support 47, a pressing plate is used for pressing the workpiece, finally, the sliding table 41 is pushed back, the hinged door plate 42 is locked by a locking block 45, and the power supply is turned on to start baking. The utility model discloses a be equipped with fan 21, heating pipe 22, the mode that adopts heated air circulation heats, fan 21 provides circulation power, the flow order of this circulated air is the air heating district 11, wind channel circulation district 13, every independent cavity in the work piece toasts the district 12, wind channel circulation district 13, and finally get back to the air heating district 11, and, at the endless in-process, this circulated air still filters through high temperature resistant filter pulp, it has the dust adhesion on the work piece to avoid in the circulated air, and heated air circulation can concentrate on same place and heat, and mode evenly distributed through the circulated air is in a plurality of cavities, save space, and dry more even, the stoving time of every cavity can be pulled out by the staff and suspend, and is convenient and fast.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (4)
1. A dustless circulated air oven which characterized in that: comprises a box body, a circulating heating component, a filtering component and a workpiece placing table; the box body comprises an air heating area, a workpiece baking area and an air channel circulating area; the workpiece baking area is arranged above the air heating area and is divided into a plurality of chambers which are vertically arranged and have uniform size through partition plates; the air channel circulating area is arranged on the left side and the right side of the air heating area and the workpiece baking area and is used for establishing a circulating air channel between the air heating area and the workpiece baking area; the circulating heating assembly is arranged in the air heating zone and comprises a fan and a heating pipe; the filter assembly comprises high-temperature-resistant filter cotton; the high-temperature-resistant filter cotton is connected in the air heating zone in a sliding manner; the workpiece placing tables are arranged in the cavities and comprise sliding tables and hinged door plates; the sliding table is used for placing a workpiece and is connected with the chamber in a sliding manner; the hinged door panel is arranged on the front side of the chamber.
2. A dust-free circulating air oven as claimed in claim 1, wherein: the workpiece placing table further comprises a sliding rail, a handle and a locking block; the sliding rails are arranged on the left side and the right side in the cavity, and the sliding table is connected with the cavity in a sliding mode through the sliding rails; the handle is arranged on the front side of the sliding table; the locking block is hinged to the front side of the box body.
3. A dust-free circulating air oven as claimed in claim 2, wherein: the workpiece placing table further comprises a support mounting column and a workpiece placing support; the two groups of support mounting columns are arranged and are oppositely arranged on the upper side of the sliding table; the workpiece placing bracket is arranged between the bracket mounting columns.
4. A dust-free circulating air oven as claimed in claim 3, wherein: the workpiece placing table further comprises a pressing plate mounting column and a workpiece pressing plate; the pressing plate mounting column is arranged on the rear side of the bracket mounting column; the workpiece pressing plate is hinged to the pressing plate mounting column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021243319.4U CN212902555U (en) | 2020-06-30 | 2020-06-30 | Dustless circulating air oven |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021243319.4U CN212902555U (en) | 2020-06-30 | 2020-06-30 | Dustless circulating air oven |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212902555U true CN212902555U (en) | 2021-04-06 |
Family
ID=75281250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021243319.4U Expired - Fee Related CN212902555U (en) | 2020-06-30 | 2020-06-30 | Dustless circulating air oven |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212902555U (en) |
-
2020
- 2020-06-30 CN CN202021243319.4U patent/CN212902555U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210406 |