CN212893987U - Multiple filter equipment - Google Patents
Multiple filter equipment Download PDFInfo
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- CN212893987U CN212893987U CN202021653830.1U CN202021653830U CN212893987U CN 212893987 U CN212893987 U CN 212893987U CN 202021653830 U CN202021653830 U CN 202021653830U CN 212893987 U CN212893987 U CN 212893987U
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- ball valve
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- filtration
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Abstract
The utility model belongs to the field of stripping liquid production equipment, in particular to a multiple filtration device, which comprises a stripping liquid device, a first ball valve, a second ball valve, a first filtration device, a second filtration device, a third filtration device, a fourth filtration device, a wastewater cache tank, a liquid level control valve, a first reflux pump, a second reflux pump and an ultrapure water device, wherein the multiple filtration processes of the stripping liquid are favorably carried out by arranging a plurality of filtration devices and mutually connecting the filtration devices, and the state of the stripping liquid inlet is favorably controlled by arranging the first ball valve and the second ball valve; the filtered wastewater is favorably recycled by arranging the wastewater caching device, so that the environment is prevented from being polluted; the ultrapure water device is beneficial to cleaning the device.
Description
Technical Field
The utility model belongs to peel off liquid production facility field, in particular to multiple filter equipment.
Background
With the continuous development of domestic semiconductors, liquid crystal panels and photoelectric industries, the development of related used chemicals is driven; the stripping liquid is a chemical commonly used in the fields of semiconductors, liquid crystal panels and the like, and the key point in the field of electronic chemical preparation is to control and achieve the required impurity content and granularity; in the production process of the stripping solution, a part of impurities are removed through a filtering process, and the conventional filtering device has the problem of incomplete filtering.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
In order to solve the above problems in the prior art, the present invention provides a multiple filtration device with thorough filtration.
(II) technical scheme
In order to achieve the above object, the utility model discloses a main technical scheme include:
a multiple filtering device comprises a stripping liquid device, a first ball valve, a second ball valve, a first filtering device, a second filtering device, a third filtering device, a fourth filtering device, a waste water cache tank, a liquid level control valve, a first backflow pump, a second backflow pump and an ultrapure water device, wherein one end of the stripping liquid device is connected with the first filtering device through the first ball valve, the third filtering device is connected with the stripping liquid device through the first ball valve, the other end of the stripping liquid device is connected with the liquid level control valve through the second ball valve, the first filtering device is connected with the second filtering device, the third filtering device is connected with the fourth filtering device, the second filtering device and the fourth filtering device are connected with the liquid level control valve, and the first backflow pump, the second backflow pump and the ultrapure water device are connected with the liquid level control valve, and the first filtering device, the second filtering device, the third filtering device and the fourth filtering device are all connected with the wastewater cache tank.
In the multi-filtration device, pressure gauges are arranged on the first filtration device, the second filtration device, the third filtration device and the fourth filtration device.
In the multiple filtering device, a third ball valve is arranged at the joint of the first filtering device and the first ball valve, a fourth ball valve is arranged at the joint of the third filtering device and the first ball valve, a fifth ball valve is arranged at the joint of the first filtering device and the second filtering device, a sixth ball valve is arranged at the joint of the third filtering device and the fourth filtering device, and seventh ball valves are arranged at the joints of the first filtering device, the second filtering device, the third filtering device and the fourth filtering device and the wastewater cache tank.
The multiple filtering device further comprises a flow valve, and the flow valve is connected with the liquid level control valve.
In the above-mentioned multiple filtration device, a first check valve is disposed at a connection position of the second filtration device and the liquid level control valve, and a second check valve is disposed at a connection position of the fourth filtration device and the liquid level control valve.
(III) advantageous effects
The utility model has the advantages that: the multiple filtering processes of the stripping liquid are facilitated by arranging the plurality of filtering devices which are mutually connected, and the liquid inlet state of the stripping liquid is facilitated to be controlled by arranging the first ball valve and the second ball valve; the filtered wastewater is favorably recycled by arranging the wastewater caching device, so that the environment is prevented from being polluted; the ultrapure water device is beneficial to cleaning the device.
Drawings
Fig. 1 is a schematic structural view of the multiple filtration device of the present invention.
[ description of reference ]
1: a stripping solution device;
2: a first ball valve;
3: a second ball valve;
4: a first filtering device;
5: a second filtering device;
6: a third filtering device;
7: a fourth filtration device;
8: a wastewater buffer tank;
9: a liquid level control valve;
10: a first reflux pump;
11: a second reflux pump;
12: an ultrapure water device;
13: a pressure gauge;
14: a third ball valve;
15: a fourth ball valve;
16: a fifth ball valve;
17: a sixth ball valve;
18: a seventh ball valve;
19: a flow valve;
20: a first check valve;
21: a second check valve.
Detailed Description
For better explanation, the present invention is described in detail with reference to the accompanying drawings in order to facilitate understanding.
The utility model discloses the most crucial design lies in: through setting up a plurality of filter equipment, and interconnect, set up waste water buffer memory device, ultrapure water device, first ball valve and second ball valve.
Referring to fig. 1, a multi-filtration apparatus,
the device comprises a stripping liquid device, a first ball valve, a second ball valve, a first filtering device, a second filtering device, a third filtering device, a fourth filtering device, a wastewater cache tank, a liquid level control valve, a first reflux pump, a second reflux pump and an ultrapure water device, wherein one end of the stripping liquid device is connected with the first filtering device through the first ball valve, the third filtering device is connected with the stripping liquid device through the first ball valve, the other end of the stripping liquid device is connected with the liquid level control valve through the second ball valve, the first filtering device is connected with the second filtering device, the third filtering device is connected with the fourth filtering device, the second filtering device and the fourth filtering device are both connected with the liquid level control valve, the first reflux pump, the second reflux pump and the ultrapure water device are all connected with the liquid level control valve, the first filtering device, the third filtering device and the ultrapure water device are connected with the liquid level control valve, and the first filtering, The second filtering device, the third filtering device and the fourth filtering device are all connected with the wastewater cache tank.
Multiple filter equipment's theory of operation: each ball valve is in a closed state in an initial state, firstly, the stripping liquid device is opened, then, the first ball valve is opened, the stripping liquid is conveyed to the first filtering device, the second filtering device, the third filtering device and the fourth filtering device for filtering, the filtered wastewater is conveyed to the wastewater cache tank, and the stripping liquid after the filtering process is finished is conveyed out of the device; opening a first reflux pump and a second reflux pump to remove the stripping liquid in the heavy component removal tower, opening a second ball valve, pumping the stripping liquid back to the first filtering device, the second filtering device, the third filtering device and the fourth filtering device, filtering the stripping liquid, and conveying the stripping liquid out of the devices; and after the filtering process is finished, starting the ultrapure water device, and pumping the water in the ultrapure water device into the first filtering device, the second filtering device, the third filtering device and the fourth filtering device for cleaning and then discharging the water out of the device.
As can be seen from the above description, the multiple filtration processes of the stripping liquid are facilitated by providing a plurality of filtration devices, which are connected to each other, and the control of the liquid inlet state of the stripping liquid is facilitated by providing the first ball valve and the second ball valve; the filtered wastewater is favorably recycled by arranging the wastewater caching device, so that the environment is prevented from being polluted; the ultrapure water device is beneficial to cleaning the device.
Furthermore, pressure gauges are arranged on the first filtering device, the second filtering device, the third filtering device and the fourth filtering device.
As can be seen from the above description, the pressure gauges are disposed on the first filtering device, the second filtering device, the third filtering device and the fourth filtering device, so that the pressure states in the first filtering device, the second filtering device, the third filtering device and the fourth filtering device can be detected conveniently.
Furthermore, a third ball valve is arranged at the joint of the first filtering device and the first ball valve, a fourth ball valve is arranged at the joint of the third filtering device and the first ball valve, a fifth ball valve is arranged at the joint of the first filtering device and the second filtering device, a sixth ball valve is arranged at the joint of the third filtering device and the fourth filtering device, and seventh ball valves are arranged at the joints of the first filtering device, the second filtering device, the third filtering device and the fourth filtering device and the wastewater cache tank.
According to the above description, the third ball valve is arranged at the joint of the first filtering device and the first ball valve, the fourth ball valve is arranged at the joint of the third filtering device and the first ball valve, the fifth ball valve is arranged at the joint of the first filtering device and the second filtering device, the sixth ball valve is arranged at the joint of the third filtering device and the fourth filtering device, and the seventh ball valves are arranged at the joints of the first filtering device, the second filtering device, the third filtering device and the fourth filtering device and the wastewater cache tank, so that the flow state of the stripping liquid can be controlled.
Further, the flow valve is further included and connected with the liquid level control valve.
As can be seen from the above description, by further including a flow valve, the flow valve is connected with the level control valve, which facilitates detection of the flow state in the pipeline.
Furthermore, a first check valve is arranged at the joint of the second filtering device and the liquid level control valve, and a second check valve is arranged at the joint of the fourth filtering device and the liquid level control valve.
As can be seen from the above description, the first check valve is disposed at the connection position of the second filtering device and the liquid level control valve, and the second check valve is disposed at the connection position of the fourth filtering device and the liquid level control valve, so as to prevent the stripping liquid from flowing backwards.
Referring to fig. 1, a first embodiment of the present invention is:
a multiple filtering device comprises a stripping liquid device 1, a first ball valve 2, a second ball valve 3, a first filtering device 4, a second filtering device 5, a third filtering device 6, a fourth filtering device 7, a wastewater cache tank 8, a liquid level control valve 9, a first backflow pump 10, a second backflow pump 11 and an ultrapure water device 12, wherein one end of the stripping liquid device 1 is connected with the first filtering device 4 through the first ball valve 2, the third filtering device 6 is connected with the stripping liquid device 1 through the first ball valve 2, the other end of the stripping liquid device 1 is connected with the liquid level control valve 9 through the second ball valve 3, the first filtering device 4 is connected with the second filtering device 5, the third filtering device 6 is connected with the fourth filtering device 7, the second filtering device 5 and the fourth filtering device 7 are both connected with the liquid level control valve 9, the first backflow pump 10, the second backflow pump, the third backflow pump and the ultrapure water device 7 are connected with the first filtering device 4, the second filtering device 6 is connected with the, The second reflux pump 11 and the ultrapure water device 12 are connected with the liquid level control valve 9, and the first filtering device 4, the second filtering device 5, the third filtering device 6 and the fourth filtering device 7 are connected with the wastewater cache tank 8.
The first filtering device 4, the second filtering device 5, the third filtering device 6 and the fourth filtering device 7 are all provided with a pressure gauge 13, the joint of the first filtering device 4 and the first ball valve 2 is provided with a third ball valve 14, the joint of the third filtering device 6 and the first ball valve 2 is provided with a fourth ball valve 15, the joint of the first filtering device 4 and the second filtering device 5 is provided with a fifth ball valve 16, the joint of the third filtering device 6 and the fourth filtering device 7 is provided with a sixth ball valve 17, the joints of the first filtering device 4, the second filtering device 5, the third filtering device 6 and the fourth filtering device 7 and the wastewater cache tank 8 are all provided with a seventh ball valve 18 and further comprise a flow valve 19, the flow valve 19 is connected with a liquid level control valve 9, the joint of the second filtering device 5 and the liquid level control valve 9 is provided with a first check valve 20, a second check valve 21 is arranged at the joint of the fourth filtering device 7 and the liquid level control valve 9.
The devices are connected by pipelines, the pipelines are 1.6K 1-grade pipelines, the nominal diameter is 25, the joints of the devices are connected by flanges, and the first ball valve 2 is arranged, so that stripping liquid can be conveniently controlled to enter the first filtering device 4, the second filtering device 5, the third filtering device 6 and the fourth filtering device 7; the second ball valve 3 is arranged to control stripping liquid in the first reflux pump 10 and the second reflux pump 11 to be pumped back to the filtering device, and the third ball valve 14 is arranged to control the stripping liquid to enter the first filtering device 4; a fourth ball valve 15 is arranged to control the state of the stripping liquid entering the third filtering device 6; a fifth ball valve 16 is arranged to control the stripping liquid to enter the second filtering device 5; a sixth ball valve 17 is arranged to control the stripping liquid to enter the fourth filtering device 7; a seventh ball valve 18 is arranged, so that the state that stripping liquid enters the wastewater cache tank 8 can be conveniently controlled; the top of the first filtering device 4, the second filtering device 5, the third filtering device 6 and the fourth filtering device 7 are all provided with emptying pipes, so that air in the device is conveniently discharged, and the first reflux pump 10 and the second reflux pump 11 are reflux pumps in the de-weighting tower.
In summary, the multiple filtering device provided by the utility model is provided with a plurality of filtering devices which are mutually connected, thereby being beneficial to performing multiple filtering procedures on the stripping liquid, and being beneficial to controlling the state of the stripping liquid inlet by arranging the first ball valve and the second ball valve; the filtered wastewater is favorably recycled by arranging the wastewater caching device, so that the environment is prevented from being polluted; the ultrapure water device is beneficial to cleaning the device.
The above mentioned is only the embodiment of the present invention, and not the limitation of the patent scope of the present invention, all the equivalent transformations made by the contents of the specification and the drawings, or the direct or indirect application in the related technical field, are included in the patent protection scope of the present invention.
Claims (5)
1. A multiple filtration device is characterized by comprising a stripping liquid device, a first ball valve, a second ball valve, a first filtration device, a second filtration device, a third filtration device, a fourth filtration device, a wastewater cache tank, a liquid level control valve, a first reflux pump, a second reflux pump and an ultrapure water device, wherein one end of the stripping liquid device is connected with the first filtration device through the first ball valve, the third filtration device is connected with the stripping liquid device through the first ball valve, the other end of the stripping liquid device is connected with the liquid level control valve through the second ball valve, the first filtration device is connected with the second filtration device, the third filtration device is connected with the fourth filtration device, the second filtration device and the fourth filtration device are both connected with the liquid level control valve, and the first reflux pump, the second reflux pump and the ultrapure water device are all connected with the liquid level control valve, and the first filtering device, the second filtering device, the third filtering device and the fourth filtering device are all connected with the wastewater cache tank.
2. The multiple filtration device of claim 1, wherein pressure gauges are disposed on the first, second, third and fourth filtration devices.
3. The multiple filtration device according to claim 1, wherein a third ball valve is arranged at the connection position of the first filtration device and the first ball valve, a fourth ball valve is arranged at the connection position of the third filtration device and the first ball valve, a fifth ball valve is arranged at the connection position of the first filtration device and the second filtration device, a sixth ball valve is arranged at the connection position of the third filtration device and the fourth filtration device, and seventh ball valves are arranged at the connection positions of the first filtration device, the second filtration device, the third filtration device and the fourth filtration device and the wastewater cache tank.
4. The multiple filtration device of claim 1, further comprising a flow valve coupled to the level control valve.
5. The multiple filtration device of claim 1, wherein a first check valve is disposed at a connection of the second filtration device and the level control valve, and a second check valve is disposed at a connection of the fourth filtration device and the level control valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021653830.1U CN212893987U (en) | 2020-08-11 | 2020-08-11 | Multiple filter equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021653830.1U CN212893987U (en) | 2020-08-11 | 2020-08-11 | Multiple filter equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212893987U true CN212893987U (en) | 2021-04-06 |
Family
ID=75242799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021653830.1U Active CN212893987U (en) | 2020-08-11 | 2020-08-11 | Multiple filter equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212893987U (en) |
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2020
- 2020-08-11 CN CN202021653830.1U patent/CN212893987U/en active Active
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