CN212874460U - Graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment - Google Patents
Graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment Download PDFInfo
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- CN212874460U CN212874460U CN202021239603.4U CN202021239603U CN212874460U CN 212874460 U CN212874460 U CN 212874460U CN 202021239603 U CN202021239603 U CN 202021239603U CN 212874460 U CN212874460 U CN 212874460U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model discloses a graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment, include: fixing the substrate; the first clamping connection plate and the second clamping connection plate are fixedly connected to the fixed base plate; the first clamping plate and the second clamping plate are parallel along a vertical plane and are arranged at intervals to form a clamping adjusting space between the first clamping plate and the second clamping plate; the first clamping connection plate and the second clamping connection plate are respectively provided with a first clamping connection hole and a second clamping connection hole for penetrating and sleeving the connection rod; the connecting rod is kept in the first clamping hole and the second clamping hole along a vertical plane from the first clamping hole. According to the utility model discloses, it has only realized the detachable stable centre gripping to pushing away boat mechanism through having seted up first joint hole and second joint hole respectively on first joint board and second joint board.
Description
Technical Field
The utility model relates to a solar photovoltaic cell field, in particular to graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment.
Background
The solar photovoltaic cell is a semiconductor device with a light-electricity conversion characteristic, which directly converts solar radiation energy into direct current, and is the most basic unit of photovoltaic electricity, in the process of collecting and converting solar energy, sunlight irradiates on a silicon chip of the solar cell, wherein a part of sunlight can be reflected, even if the silicon surface is designed into a suede surface, although incident light can be reflected for multiple times to increase the light absorption rate, a part of sunlight can be reflected, according to measurement and calculation, the reflection loss rate of light on the silicon surface reaches about 35 percent, the reflection reduction film can greatly improve the utilization rate of the solar cell to the cell, and is beneficial to improving the photo-generated current density and further improving the conversion efficiency, and meanwhile, the passivation of hydrogen in the film on the surface of the cell reduces the surface recombination rate of an emitting junction, reduces dark current and improves the open-circuit voltage, the photoelectric conversion efficiency is improved; the high temperature flash annealing in the burn-through process breaks some of the Si-H, N-H bonds and the liberated H further enhances the passivation of the cell.
The thin film preparation process can be divided into two main categories according to the film forming method: physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD). Plasma Enhanced Chemical Vapor Deposition (PECVD) is one of Chemical Vapor deposition, and PECVD (plasma Enhanced Chemical Vapor deposition), plasma is a mixture of molecules of substances, wherein the molecules of the substances are accelerated in thermal motion, and the gas molecules are ionized due to mutual collision, the substances can be freely moved and consist of interacting positive ions, electrons and neutral particles, and the low deposition temperature is the most outstanding advantage. The PECVD film has excellent electrical properties, good substrate adhesion, and excellent step coverage.
In the field of solar photovoltaic cells, it is well known to use graphite boat pushing and fixing mechanisms with different structural forms to realize the fixed installation of the graphite boat pushing and fixing mechanism. In the fixed mounting's of research and realization graphite boat push away boat mechanism in-process, utility model people discover that the graphite boat among the prior art pushes away boat fixed establishment and has following problem at least:
the existing graphite boat pushing and fixing mechanism is complex in structure, more parts are involved, and the detachable fixed connection between the graphite boat pushing and fixing mechanism and the boat pushing mechanism is complicated.
In view of the above, it is necessary to develop a graphite boat pushing and fixing mechanism suitable for a tubular PECVD apparatus to solve the above problems.
SUMMERY OF THE UTILITY MODEL
To the weak point that exists among the prior art, the utility model discloses a main objective provides a graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment, and it has only realized the detachable stable centre gripping that pushes away boat mechanism through having seted up first joint hole and second joint hole respectively on first joint board and second joint board.
Another object of the utility model is to provide a graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment, it passes through the first adjustment tank rather than the intercommunication is seted up at the edge in first joint hole, has realized the every single move angular adjustment to pushing away the boat mechanism in vertical plane.
Another object of the utility model is to provide a graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment, its second adjustment tank through set up even number and its intercommunication at the edge in second joint hole along its circumference, has realized the adjustment of the swing angle of pushing away the boat mechanism in the horizontal plane.
In order to realize the basis the utility model discloses an above-mentioned purpose and other advantages provide a graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment, include:
fixing the substrate; and
the first clamping and connecting plate and the second clamping and connecting plate are fixedly connected to the fixed base plate;
the first clamping plate and the second clamping plate are parallel along a vertical plane and are arranged at intervals to form a clamping adjusting space between the first clamping plate and the second clamping plate; the first clamping connection plate and the second clamping connection plate are respectively provided with a first clamping connection hole and a second clamping connection hole for penetrating and sleeving the connection rod; the connecting rod is kept in the first clamping hole and the second clamping hole along a vertical plane from the first clamping hole.
Optionally, the aperture of the first clamping hole and the aperture of the second clamping hole are slightly larger than the radial dimension of the connecting rod.
Optionally, the edge in first joint hole sets up rather than the first adjustment tank that communicates, inlay in the first adjustment tank and be equipped with:
a first adjusting wedge; and
a first adjusting part connected with the first adjusting wedge and extending to the outside of the first clamping plate;
the first adjusting wedge block can reciprocate in the first adjusting groove under the adjustment of the first adjusting component to invade or withdraw from the first clamping hole.
Optionally, the lifting direction of the first adjusting wedge block is opposite to the center of the first clamping hole.
Optionally, an even number of second adjusting grooves communicated with the second clamping hole are formed in the edge of the second clamping hole along the circumferential direction of the second clamping hole, the second adjusting grooves are arranged to be composed of at least one adjusting subset, each adjusting subset comprises a pair of second adjusting grooves symmetrically arranged with respect to the second clamping hole, and each second adjusting groove is embedded with:
a second adjusting wedge; and
a second adjusting member connected to the second adjusting wedge and extending to the outside of the second clamping plate;
each second adjusting groove is positioned obliquely below the second clamping hole, and the second adjusting wedge block can slide along the second adjusting groove in a reciprocating mode under the adjustment of the second adjusting component so as to enter or withdraw from the second clamping hole.
Optionally, the sliding direction of the second adjusting wedge block is opposite to the center of the second clamping hole.
Optionally, a detachable plate is detachably connected above the second clamping plate; the second joint board and the department that meets of dismouting board, set up the lower joint groove that is sunken to its inside on the second joint board, set up the last joint groove that is sunken to its inside on the dismouting board, work as when the dismouting board is connected to on the second joint board, go up the joint groove with lower joint groove is in order to form second joint hole.
Optionally, a parallel retaining plate is fixedly connected between the first clamping plate and the second clamping plate.
One of the above technical solutions has the following advantages or beneficial effects: the stable clamping of the boat pushing mechanism is realized only by respectively arranging the first clamping hole and the second clamping hole on the first clamping plate and the second clamping plate.
Another technical scheme in the above technical scheme has the following advantages or beneficial effects: the first clamping hole is provided with a first adjusting groove communicated with the first clamping hole, so that the pitching angle of the boat pushing mechanism in a vertical plane is adjusted.
Another technical scheme in the above technical scheme has the following advantages or beneficial effects: because the edge of the second clamping hole is provided with even number of second adjusting grooves communicated with the second clamping hole along the circumferential direction, the swing angle of the boat pushing mechanism in the horizontal plane is adjusted.
Drawings
In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the drawings of the embodiments will be briefly described below, and it is obvious that the drawings in the following description only relate to some embodiments of the present invention, and are not intended to limit the present invention, wherein:
fig. 1 is a perspective view of a graphite boat pushing and fixing mechanism suitable for a tubular PECVD apparatus according to an embodiment of the present invention when combined with a connecting rod of the boat pushing mechanism;
fig. 2 is a perspective view of a graphite boat pushing and fixing mechanism suitable for a tubular PECVD apparatus according to an embodiment of the present invention;
fig. 3 is a left side view of the graphite boat pushing and fixing mechanism suitable for the tubular PECVD apparatus according to an embodiment of the present invention after the first clamping plate is hidden therein.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the drawings, the shape and size may be exaggerated for clarity, and the same reference numerals will be used throughout the drawings to designate the same or similar components.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the description and in the claims does not indicate any order, quantity, or importance, but rather is used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprise" or "comprises", and the like, means that the element or item listed before "comprises" or "comprising" covers the element or item listed after "comprising" or "comprises" and its equivalents, and does not exclude other elements or items. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, etc., are defined with respect to the configurations shown in the respective drawings, and in particular, "height" corresponds to a dimension from top to bottom, "width" corresponds to a dimension from left to right, "depth" corresponds to a dimension from front to rear, which are relative concepts, and thus may be varied accordingly depending on the position in which it is used, and thus these or other orientations should not be construed as limiting terms.
Terms concerning attachments, coupling and the like (e.g., "connected" and "attached") refer to a relationship wherein structures are secured or attached, either directly or indirectly, to one another through intervening structures, as well as both movable or rigid attachments or relationships, unless expressly described otherwise.
According to an embodiment of the present invention, with reference to the illustration of fig. 1 and fig. 2, it can be seen that the graphite boat pushing and fixing mechanism 11 suitable for the tubular PECVD apparatus includes:
a fixed substrate 111; and
a first clamping plate 112 and a second clamping plate 113 fixedly connected to the fixing substrate 111;
the first clamping connection plate 112 and the second clamping connection plate 113 are arranged in parallel along a vertical plane at intervals to form a clamping adjustment space therebetween; the first clamping plate 112 and the second clamping plate 113 are respectively provided with a first clamping hole 1122 and a second clamping hole for sleeving the connecting rod 121; the connecting rod 121 is held in the first and second snap holes 1122 along a vertical plane from the substantially first snap hole 1122. During the use, will push away connecting rod 121 of boat mechanism and pass from second joint hole and first joint hole 1122 in proper order, can realize the detachable stable centre gripping to connecting rod 121.
In practical use, the aperture of the first snap-fit hole 1122 and the aperture of the second snap-fit hole are slightly larger than the radial dimension of the connecting rod 121. If the radial dimension of the connecting rod 121 is D, the diameters of the first and second snap-in holes 1122 and 2D may be 1.05D, 1.1D, or 1.2D.
In order to further fasten the connecting rod 121 inserted into the first clamping hole 1122 and adjust the pitch angle of the connecting rod 121 in the vertical plane, a first adjusting groove 1121 communicated with the first clamping hole 1122 is formed at the edge of the first clamping hole 1122, and the first adjusting groove 1121 is embedded with:
a first adjusting wedge 1123; and
a first adjusting member connected to the first adjusting wedge 1123 and extending to the outside of the first clamping plate 112;
the first adjusting groove 1121 is located right below the first catching hole 1122, and the first adjusting wedge 1123 can reciprocate in the first adjusting groove 1121 to enter or withdraw from the first catching hole 1122 under the adjustment of the first adjusting member. In an actual use process, the first adjusting component may be a lifting adjusting bolt connected with the first adjusting wedge 1123, the degree of invasion of the first adjusting wedge 1123 into the first clamping hole 1122 can be adjusted by screwing in or screwing out the lifting adjusting bolt, so as to adjust the clamping degree of the first clamping hole 1122 on the connecting rod 121, and meanwhile, the lifting direction of the first adjusting wedge 1123 is set to be opposite to the center of the first clamping hole 1122, so that the connecting rod 121 can be adjusted in a pitching angle in a vertical plane by taking the second clamping hole as a fulcrum while adjusting the degree of invasion of the first adjusting wedge 1123 into the first clamping hole 1122.
In order to further fasten the connection rod 121 inserted into the second engaging hole and adjust the swing angle of the connection rod 121 in the horizontal plane, an even number of second adjustment grooves 1132 communicated with the second engaging hole are opened at the edge of the second engaging hole along the circumferential direction thereof, the second adjustment grooves 1132 are arranged to be composed of at least one adjustment subset, each adjustment subset includes a pair of second adjustment grooves 1132 symmetrically disposed about the second engaging hole, each of the second adjustment grooves 1132 is embedded with:
a second adjustment wedge 1133; and
a second adjusting member connected to the second adjusting wedge 1133 and extending to the outside of the second engaging plate 113;
wherein each of the second adjustment grooves 1132 is located obliquely below the second catching hole, and the second adjustment wedge 1133 is slidably moved back and forth along the second adjustment groove 1132 under adjustment of the second adjustment member to intrude into or withdraw from the second catching hole. In actual use, the second adjustment member may be a wobble adjustment bolt that is coupled to the second adjustment wedge 1133, the degree of intrusion of the second adjusting wedge 1133 into the second clamping hole can be adjusted by screwing in or out the swing adjusting bolt, thereby adjusting the clamping degree of the second clamping hole to the connecting rod 121, and meanwhile, setting the sliding direction of the second adjusting wedge 1133 to be opposite to the center of the second clamping hole, the degree of the second adjusting wedge 1133 intruding into the second clamping hole can be adjusted, the connecting rod 121 can be adjusted in the horizontal plane to adjust the swing angle, the lifting adjusting bolt and the swing adjusting bolt are firmly locked after the adjustment is completed, when the boat pushing mechanism is impacted by gravity to tilt up the rear side of the connecting rod 121, the rear lifting adjusting bolt can ensure that the distance between the graphite boat pushing fixing mechanism 11 and the connecting rod 121 is not changed, so as to ensure that the connecting rod 121 cannot tilt up.
Further, the sliding direction of the second adjusting wedge 1133 is opposite to the center of the second clamping hole, and it can be seen from the embodiment shown in fig. 3 that the second adjusting groove 1132 is arranged to be composed of an adjusting subset including a pair of second adjusting grooves 1132 symmetrically arranged about the second clamping hole, and in this embodiment, the included angle between two connecting lines formed by the two second adjusting grooves 1132 and the center of the second clamping hole is 60 °.
Referring to fig. 1 and 2, a detachable plate 114 is detachably connected to an upper portion of the second engaging plate 113; at the joint of the second clamping plate 113 and the dismounting plate 114, a lower clamping groove 1131 recessed toward the inside of the second clamping plate 113 is formed in the second clamping plate 113, an upper clamping groove 1141 recessed toward the inside of the dismounting plate 114 is formed in the dismounting plate 114, and when the dismounting plate 114 is connected to the second clamping plate 113, the upper clamping groove 1141 and the lower clamping groove 1131 are combined to form the second clamping hole. The connecting rod 121 can be quickly disassembled and assembled through the disassembling and assembling plate 114, and convenience in installing and replacing the connecting rod 121 is improved.
Further, a parallel retaining plate 115 is fixedly connected between the first clamping plate 112 and the second clamping plate 113. The parallel maintaining plate 115 can improve the clamping stability of the first clamping plate 112 and the second clamping plate 113 and stabilize the distance between the first clamping plate 112 and the second clamping plate 113.
The number of apparatuses and the scale of the process described here are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.
While the embodiments of the invention have been disclosed above, it is not limited to the applications listed in the description and the embodiments, which are fully applicable in all kinds of fields of application suitable for this invention, and further modifications may be readily made by those skilled in the art, and the invention is therefore not limited to the specific details and illustrations shown and described herein, without departing from the general concept defined by the claims and their equivalents.
Claims (8)
1. The utility model provides a graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment which characterized in that includes:
a fixed substrate (111); and
a first clamping plate (112) and a second clamping plate (113) which are fixedly connected on the fixed substrate (111);
the first clamping plate (112) and the second clamping plate (113) are arranged in parallel along a vertical plane at intervals to form a clamping adjusting space between the first clamping plate and the second clamping plate; the first clamping plate (112) and the second clamping plate (113) are respectively provided with a first clamping hole (1122) and a second clamping hole for sleeving the connecting rod (121); the connecting rod (121) is held in the first snap hole (1122) and the second snap hole along a vertical plane from the first snap hole (1122).
2. The graphite boat pushing and boat fixing mechanism suitable for the tubular PECVD apparatus as recited in claim 1, wherein the first clamping hole (1122) and the second clamping hole have a diameter larger than the radial dimension of the connecting rod (121).
3. The graphite boat pushing and boat fixing mechanism suitable for the tubular PECVD apparatus as recited in claim 1, wherein a first adjusting groove (1121) communicated with the first clamping hole (1122) is formed at the edge of the first clamping hole, and the first adjusting groove (1121) is embedded with:
a first adjustment wedge (1123); and
a first adjustment member connected to the first adjustment wedge (1123) and extending to the outside of the first engagement plate (112);
wherein the first adjusting groove (1121) is positioned right below the first clamping hole (1122), and the first adjusting wedge block (1123) can reciprocate in the first adjusting groove (1121) under the adjustment of the first adjusting part to intrude or withdraw from the first clamping hole (1122).
4. The graphite boat pusher fixture for tubular PECVD apparatus as recited in claim 3, wherein the first adjusting wedge (1123) is lifted in a direction opposite to the center of the first engaging hole (1122).
5. The graphite boat pushing and boat fixing mechanism suitable for the tubular PECVD apparatus as recited in claim 1, wherein the edge of the second clamping hole is opened with an even number of second adjusting grooves (1132) communicated with the second clamping hole along the circumferential direction, the second adjusting grooves (1132) are arranged to be composed of at least one adjusting subset, each adjusting subset comprises a pair of second adjusting grooves (1132) symmetrically arranged about the second clamping hole, and each second adjusting groove (1132) is embedded with:
a second adjustment wedge (1133); and
a second adjusting member connected to the second adjusting wedge (1133) and extending to the outside of the second catching plate (113);
wherein each of the second adjustment grooves (1132) is located obliquely below the second catching hole, and the second adjustment wedge (1133) is slidably moved back and forth along the second adjustment groove (1132) under adjustment of the second adjustment member to intrude into or withdraw from the second catching hole.
6. The graphite boat pusher fixing mechanism for the tubular PECVD apparatus as recited in claim 5, wherein the sliding direction of the second adjusting wedge (1133) is opposite to the center of the second clamping hole.
7. The graphite boat pusher fixing mechanism for a tubular PECVD apparatus as recited in claim 1, wherein a detachable plate (114) is detachably attached above the second engaging plate (113); second joint board (113) and dismouting board (114) meet the department, set up on second joint board (113) to its inside sunken lower joint groove (1131), set up on dismouting board (114) to its inside sunken last joint groove (1141), work as dismouting board (114) are connected to when on second joint board (113), go up joint groove (1141) with joint groove (1131) closes in order to form down second joint hole.
8. The graphite boat pushing and boat fixing mechanism suitable for the tubular PECVD apparatus as recited in claim 1, wherein a parallel maintaining plate (115) is fixed between the first engaging plate (112) and the second engaging plate (113).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021239603.4U CN212874460U (en) | 2020-06-30 | 2020-06-30 | Graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021239603.4U CN212874460U (en) | 2020-06-30 | 2020-06-30 | Graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment |
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| CN212874460U true CN212874460U (en) | 2021-04-02 |
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| CN202021239603.4U Active CN212874460U (en) | 2020-06-30 | 2020-06-30 | Graphite boat pushes away boat fixed establishment suitable for tubular PECVD equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113479618A (en) * | 2021-05-06 | 2021-10-08 | 北京北方华创微电子装备有限公司 | Loading and unloading system and semiconductor process equipment |
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2020
- 2020-06-30 CN CN202021239603.4U patent/CN212874460U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113479618A (en) * | 2021-05-06 | 2021-10-08 | 北京北方华创微电子装备有限公司 | Loading and unloading system and semiconductor process equipment |
| CN113479618B (en) * | 2021-05-06 | 2023-08-18 | 北京北方华创微电子装备有限公司 | Loading and unloading system and semiconductor process equipment |
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