CN212834018U - Adjustable gas guide device for large-scale vapor deposition furnace - Google Patents
Adjustable gas guide device for large-scale vapor deposition furnace Download PDFInfo
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- CN212834018U CN212834018U CN202021094718.9U CN202021094718U CN212834018U CN 212834018 U CN212834018 U CN 212834018U CN 202021094718 U CN202021094718 U CN 202021094718U CN 212834018 U CN212834018 U CN 212834018U
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- vapor deposition
- gas guide
- product
- adjustable gas
- straight pipe
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- 238000007740 vapor deposition Methods 0.000 title claims abstract description 15
- 230000007704 transition Effects 0.000 claims description 6
- 230000008021 deposition Effects 0.000 abstract description 10
- 239000006229 carbon black Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 29
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 3
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
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Abstract
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202021094718.9U CN212834018U (en) | 2020-06-12 | 2020-06-12 | Adjustable gas guide device for large-scale vapor deposition furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202021094718.9U CN212834018U (en) | 2020-06-12 | 2020-06-12 | Adjustable gas guide device for large-scale vapor deposition furnace |
Publications (1)
Publication Number | Publication Date |
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CN212834018U true CN212834018U (en) | 2021-03-30 |
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Family Applications (1)
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CN202021094718.9U Active CN212834018U (en) | 2020-06-12 | 2020-06-12 | Adjustable gas guide device for large-scale vapor deposition furnace |
Country Status (1)
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CN (1) | CN212834018U (en) |
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2020
- 2020-06-12 CN CN202021094718.9U patent/CN212834018U/en active Active
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: An adjustable gas guide device for large vapor deposition furnace Effective date of registration: 20230111 Granted publication date: 20210330 Pledgee: Hohhot Branch of Shanghai Pudong Development Bank Co.,Ltd. Pledgor: Inner Mongolia Zhongjing Technology Research Institute Co.,Ltd. Registration number: Y2023150000009 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20210330 Pledgee: Hohhot Branch of Shanghai Pudong Development Bank Co.,Ltd. Pledgor: Inner Mongolia Zhongjing Technology Research Institute Co.,Ltd. Registration number: Y2023150000009 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: An adjustable gas guide device for large gas-phase deposition furnaces Granted publication date: 20210330 Pledgee: Hohhot Branch of Shanghai Pudong Development Bank Co.,Ltd. Pledgor: Inner Mongolia Zhongjing Technology Research Institute Co.,Ltd. Registration number: Y2024150000045 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right |