CN212810233U - Cathode electron bombardment type heater - Google Patents

Cathode electron bombardment type heater Download PDF

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Publication number
CN212810233U
CN212810233U CN202022096226.XU CN202022096226U CN212810233U CN 212810233 U CN212810233 U CN 212810233U CN 202022096226 U CN202022096226 U CN 202022096226U CN 212810233 U CN212810233 U CN 212810233U
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China
Prior art keywords
heater
support
electron bombardment
cathode electron
bracket
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CN202022096226.XU
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Chinese (zh)
Inventor
林祖伦
于海波
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Chengdu Chuangyuan Electronics Co ltd
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Chengdu Chuangyuan Electronics Co ltd
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Priority to CN202022096226.XU priority Critical patent/CN212810233U/en
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Abstract

The utility model discloses a negative pole electron bombardment formula heater, including heater silk and two extraction electrodes, the heater silk is reciprocal form of buckling and arranges in the coplanar, and extraction electrode is respectively connected to heater silk both ends point, and the bending point line of heater silk is a circle. The hot wire is fixed on the support through the fixing sheet, the supports are not in direct contact, the working stability and reliability of the cathode in a high-temperature and low-temperature state are guaranteed, and the grouping connection lines of the support points are a plurality of concentric circles. The support is clamped on the porcelain plate through the convex part, and the support clamping ring is arranged at the bottom of the support and further axially limits the support. The utility model discloses ingenious fixed mode to the shape of heater silk, heater silk designs, through the heating methods of electron bombardment formula, makes heater and emitter realize good heat transfer, has solved the problem that lanthanum hexaboride cathode emitter is difficult to the direct heating.

Description

Cathode electron bombardment type heater
Technical Field
The utility model relates to a large-scale developments vacuum electronic equipment field, concretely relates to structure of negative pole electron bombardment formula heater.
Background
The cathode is widely applied to devices such as electronic analysis, ion implantation, ion plating, material treatment, nuclear physics science, technical research and the like. In military, the cathode is the heart of various vacuum microwave electronic devices, vacuum low-light night vision devices, vacuum infrared imaging devices and vacuum ultraviolet imaging devices. Meanwhile, in industrial and medical devices, an X-ray tube, an image intensifier, an accelerator tube, and a display, which use a cathode as an emission source, play a very important role. In scientific research, cathodes are also indispensable key components in various analytical instruments, electron beam processing, electron beam exposure, electron beam evaporation and other equipment.
The lanthanum hexaboride cathode has the advantages of large emission current density, strong poisoning resistance and ion bombardment resistance, small material evaporation rate, long service life and the like, is an ideal electron source in the existing various cathodes, and is particularly suitable for large-scale equipment under the working condition of large emission current.
The lanthanum hexaboride cathode has wide application in large accelerators, nuclear physical science and technology research, electron beam heating, electron beam melting, electron beam coating and the like. For a long time, people have made a great deal of research and development work on the research and development of lanthanum hexaboride cathodes used for small emission current, and the research and development work is successfully applied, and good results are obtained. However, in the research and development of a high-current large-emission lanthanum hexaboride cathode which needs to reach tens, hundreds or thousands of amperes, the technical problem is not broken through at present:
because the working temperature of the lanthanum hexaboride cathode is higher, the normal working temperature reaches 1500-1600 ℃, a large emission area needs large heating power, and the heating difficulty is very high; and the resistivity of the lanthanum hexaboride material is very small, so that a direct heating method is difficult to adopt.
SUMMERY OF THE UTILITY MODEL
For solving the problem that the large heating degree of difficulty of the large-area lanthanum hexaboride cathode is large, the utility model provides a cathode electron bombardment heater which can meet the requirement of the market on a large-emission current cathode.
The utility model discloses a following technical scheme realizes:
the cathode electron bombardment type heater comprises a heater wire and two extraction electrodes, wherein the heater wire is arranged in a reciprocating bending manner in the same plane, and two extraction electrodes are respectively connected with two end points of the heater wire.
On the basis of the technical scheme, the method further comprises the following steps: the connecting line of the bending points of the heater wire is a circle.
In order to keep the heater wire in the same plane, a plurality of supporting points are selected on the heater wire, a support is arranged below the supporting points, the heater wire is fixed on the support through a fixing piece, and the supports are not in direct contact with each other, so that the working stability and reliability of the cathode in a high-temperature and low-temperature state are ensured.
On the basis of the technical scheme, the method further comprises the following steps: the grouping connecting lines of the supporting points are a plurality of concentric circles.
On the basis of the technical scheme, the method further comprises the following steps: the support is clamped on the porcelain plate through the convex part, and the support clamping ring is arranged at the bottom of the support and further axially limits the support.
The heater wire and the extraction electrode are both made of metal tungsten or tungsten-rhenium alloy materials. The support and the fixing piece are made of metal molybdenum.
Compared with the prior art, the utility model, following advantage and beneficial effect have:
1. the utility model discloses ingenious fixed mode to the shape of heater silk, heater silk designs, through the heating methods of electron bombardment formula, makes heater and emitter realize good heat transfer, has solved the problem that lanthanum hexaboride cathode emitter is difficult to the direct heating.
2. The utility model discloses a metal support and stationary blade and the cooperation of heater silk provide reliable support for the heater silk, guarantee that the heater silk is in the coplanar, can carry out even electron bombardment heating to the emitter, further prescribe a limit to the position of support through the porcelain plate, ensure the practicality of heater silk structure in the negative pole.
Drawings
A further understanding of the embodiments of the present invention may be obtained by reference to the following claims and the following description of the preferred embodiments of the invention, which are incorporated in and constitute a part of this specification. Individual features of the different embodiments shown in the figures may be combined in any desired manner in this case without going beyond the scope of the invention. In the drawings:
fig. 1 is a top view of the heater wire of the present invention;
FIG. 2 is a schematic view of a supporting point of the heater wire according to the present invention;
FIG. 3 is a cross-sectional view of the heater wire and the fixing structure of the present invention;
fig. 4 is a schematic view of the position of the fixing plate of the present invention.
Description of reference numerals: 4-thermion filament, 5-bracket, 6-bracket snap ring, 7-ceramic disc, 17-leading-out electrode, 21-supporting point, and 22-fixing piece.
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
To make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the following examples and drawings, and the exemplary embodiments and descriptions thereof of the present invention are only used for explaining the present invention, and are not intended as limitations of the present invention.
Example (b):
as shown in fig. 1, in this embodiment, a cathode electron bombardment type heater includes a heater wire 4 and two extraction electrodes 17, the heater wire 4 is arranged in a reciprocating bent manner in the same plane, and two extraction electrodes 17 are respectively connected to two end points of the heater wire 4.
Preferably: the connecting line of the bending points of the heater wires 4 is a circle.
As shown in figure 2, in order to keep the thermionic filament 4 in the same plane, a plurality of supporting points 21 are selected on the thermionic filament 4, brackets 5 are arranged below the supporting points 21, as shown in figure 4, the thermionic filament 4 is fixed on the brackets 5 through fixing pieces 22, and the brackets 5 are not in direct contact, so that the working stability and reliability of the cathode in a high-temperature and low-temperature state are ensured.
Preferably, the grouping lines of the supporting points 21 are a plurality of concentric circles.
As shown in fig. 3, preferably, the bracket 5 is clamped on the porcelain plate 7 through a convex part, and the bracket snap ring 6 is arranged at the bottom of the bracket 5 to further axially limit the bracket 5.
The heater wire 4 and the extraction electrode 17 are both made of metal tungsten or tungsten-rhenium alloy materials. The bracket 5 and the fixing piece 22 are made of molybdenum metal.
Can see in combination with the embodiment, the utility model discloses ingenious fixed mode to thermionic filament 4's shape, thermionic filament 4 designs, through the heating methods of electron bombardment formula, makes thermionic and emitter realize good heat transfer, has solved the problem that lanthanum hexaboride cathode emitter is difficult to the direct heating. Through the cooperation of metal support 5 and stationary blade 22 and heater silk 4, for heater silk 4 provides reliable support, guarantee that heater silk 4 is in the coplanar, can carry out even electron bombardment heating to the emitter, further prescribe a limit to the position of support 5 through porcelain plate 7, ensure the practicality of heater silk 4 structure in the negative pole.
The above-mentioned embodiments further explain in detail the objects, technical solutions and advantages of the present invention, and it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the scope of the present invention, and all the equivalent structures or equivalent processes that are used in the specification and drawings of the present invention are changed or directly or indirectly used in other related technical fields, and are all included in the scope of the present invention.

Claims (7)

1. The cathode electron bombardment type heater is characterized by comprising a heater wire (4) and two extraction electrodes (17), wherein the heater wire (4) is arranged in a reciprocating bent mode in the same plane, and two extraction electrodes (17) are respectively connected to two end points of the heater wire (4).
2. The cathode electron bombardment type thermionic reactor of claim 1, wherein the bending point of the thermionic filament (4) is a circle.
3. The cathode electron bombardment type thermionic reactor of claim 1, wherein a plurality of support points (21) are selected on the thermionic filament (4), a bracket (5) is arranged below the support points (21), and the thermionic filament (4) is fixed on the bracket (5) through a fixing sheet (22).
4. A cathode electron bombardment thermion according to claim 3, wherein the grouping lines of the supporting points (21) are concentric circles.
5. The cathode electron bombardment heater according to claim 3, wherein the bracket (5) is clamped on the porcelain plate (7) through a convex part, and the bracket clamping ring (6) is arranged at the bottom of the bracket (5) to further axially limit the bracket (5).
6. The cathode electron bombardment type thermionic reactor according to claim 1, wherein the thermionic filament (4) and the extraction electrode (17) are both made of metal tungsten or tungsten-rhenium alloy.
7. The cathode electron bombardment type thermion according to claim 3, wherein the support (5) and the fixing plate (22) are made of metal molybdenum.
CN202022096226.XU 2020-09-22 2020-09-22 Cathode electron bombardment type heater Active CN212810233U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022096226.XU CN212810233U (en) 2020-09-22 2020-09-22 Cathode electron bombardment type heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022096226.XU CN212810233U (en) 2020-09-22 2020-09-22 Cathode electron bombardment type heater

Publications (1)

Publication Number Publication Date
CN212810233U true CN212810233U (en) 2021-03-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022096226.XU Active CN212810233U (en) 2020-09-22 2020-09-22 Cathode electron bombardment type heater

Country Status (1)

Country Link
CN (1) CN212810233U (en)

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