CN212794490U

CN212794490U - Rotor polishing device with RQA detection function

Info

Publication number: CN212794490U
Application number: CN202021822988.7U
Authority: CN
Inventors: 葛献军
Original assignee: Zhejiang Dongjing Intelligent Equipment Co Ltd
Current assignee: Zhejiang Dongjing Intelligent Equipment Co Ltd
Priority date: 2020-08-27
Filing date: 2020-08-27
Publication date: 2021-03-26
Anticipated expiration: 2030-08-27

Abstract

The utility model discloses a rotor polishing device with RQA detection function, which comprises a fixed bracket, an RQA detector arranged on the fixed bracket, a polishing machine and a rotor transmission mechanism; the device also comprises a stroke control mechanism which is arranged on the fixed bracket and controls the RQA detector, the polishing machine and the rotor transmission mechanism. The utility model discloses can replace the manual work to polish and detect the rotor, reduce workman's intensity of labour and to its harm that produces, improve the efficiency of production and personnel's health.

Description

Rotor polishing device with RQA detection function

[ technical field ] A method for producing a semiconductor device

The utility model relates to a burnishing device specifically indicates a rotor burnishing device who possesses RQA detection function.

[ background of the invention ]

The rotor need polish the external surface after processing is accomplished and is polished, and in the prior art, the polishing of rotor is polished mostly by the manual work and is gone on, and the manual work need want to polish when polishing and polishing, then detect the surface to polishing to increase artificial intensity of labour, reduced the efficiency of production, adopt the manual work to polish in addition, can produce the dust on the emery wheel when polishing, easily by the health threat that human body inhales. Therefore, a rotor polishing device with an RQA detection function is provided.

[ summary of the invention ]

The utility model aims at solving the above problems and providing a rotor polishing device with RQA detection function.

In order to achieve the above purpose, the utility model provides a following technical scheme: a rotor polishing device with an RQA detection function comprises a fixed support, an RQA detector, a polishing machine and a rotor transmission mechanism, wherein the RQA detector is installed on the fixed support; the device is characterized by also comprising a stroke control mechanism which is arranged on the fixed bracket and used for controlling the RQA detector, the polishing machine and the rotor transmission mechanism.

Preferably, the stroke control mechanism includes a detection stroke control mechanism, a polishing stroke control mechanism, and a rotor driving stroke control mechanism.

Preferably, the polishing machine comprises a polishing machine fixing seat, a polishing motor arranged on the polishing machine fixing seat, a polishing organ cover, a polishing stroke control mechanism and a polishing wheel arranged on the polishing motor; the polishing wheel is provided with a polishing wheel shell; the polishing wheel shell is fixed on the polishing machine fixing seat; a polishing sliding block is arranged on the polishing machine fixing seat; and the polishing slide rail is matched with the polishing slide block and is fixedly arranged on the fixed support.

Preferably, the polishing stroke control mechanism includes a polishing cylinder and a buffer plate; the polishing cylinder is provided with a floating joint and a graphite copper sleeve; the graphite copper sleeve is connected with the polishing machine fixing seat; and the buffer plate is provided with a buffer rod.

Preferably, the RQA detector comprises a detection bottom plate, a detection fixing frame installed on the detection bottom plate, a detection stroke control mechanism, a speed reducer installed on the detection fixing frame, and a sensor installed on the speed reducer; a detection slide rail and a detection organ cover are arranged on the detection bottom plate; the detection fixing frame is provided with a detection sliding block; the detection fixing frame is matched with the detection sliding block through the detection sliding rail and is arranged on the detection bottom plate; the detection fixing frame is also provided with an adjusting rod; the adjusting rod is provided with a locking rod.

Preferably, the detection stroke control mechanism comprises a detection cylinder and a floating joint fixing plate; the floating joint fixing plate is provided with a detection floating joint; the floating joint fixing plate is connected with the detection fixing frame.

Preferably, the rotor transmission mechanism comprises a stroke fixing frame, a sliding plate arranged on the stroke fixing frame, a sensing switch fixing frame, a rotor transmission stroke control mechanism, a synchronous motor arranged on the sliding plate and a rotor rotating sleeve; the stroke fixing frame is provided with a stroke sliding rail; the stroke slide rail is provided with a stroke slide block which is matched with the stroke slide rail; the stroke sliding block is fixedly arranged on the sliding plate; a synchronous motor fixing plate, a rotating sleeve fixing plate, a guardrail and a stroke organ cover are arranged on the sliding plate; the synchronous motor and the rotor rotating sleeve are fixed on the sliding plate through a synchronous motor fixing plate and a rotating sleeve fixing plate; the synchronous motor is in transmission connection with the rotor rotating sleeve through a synchronous belt; and the induction switch fixing frame is provided with an induction switch.

Preferably, the rotor transmission stroke control mechanism comprises a stroke motor; a stroke lead screw is arranged on the stroke motor; a stroke screw nut seat is arranged on the stroke screw; the stroke lead screw nut seat is connected with the sliding plate;

the utility model has the advantages that: this burnishing device can replace the manual work to polish and detect the rotor, has reduced workman's intensity of labour and to its harm that produces, has improved the efficiency of production and personnel's health.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural diagram of the polishing machine of the present invention.

Fig. 3 is a schematic structural diagram of the polishing stroke control mechanism of the present invention.

Fig. 4 is a schematic structural diagram of the fixing frame of the polishing machine of the present invention.

Fig. 5 is a schematic structural diagram of the RQA detector of the present invention.

Fig. 6 is a schematic structural diagram of the detection stroke control mechanism of the present invention.

Fig. 7 is a schematic structural view of the detection fixing frame of the present invention.

Fig. 8 is a schematic structural diagram of the rotor transmission mechanism of the present invention.

Fig. 9 is a schematic structural diagram of the rotor driving stroke control mechanism of the present invention.

Fig. 10 is a schematic structural view of the stroke fixing frame of the present invention.

Illustration of the drawings: 1, fixing a bracket; 2RQA detector; 201 detecting a bottom plate; 202 detecting the fixing frame; 203 a speed reducer; 204 sensor; 205 detecting a sliding rail; 206 detecting the organ cover; 207 detecting the slide; 208 adjusting the rod; 209 locking lever; 3, polishing the machine; 301 fixing base of polishing machine; 302 polishing the motor; 303 polishing the organ cover; 304 a polishing wheel; 305 a polishing wheel housing; 306 polishing the slider; 307 polishing the slide rail; 4, a rotor transmission mechanism; 401 stroke fixing frame; 402 a sliding plate; 403 induction switch fixing frame; 404 a synchronous motor; 405 a rotor rotating sleeve; 406 travel slide rails; 407 stroke slide block; 408 a synchronous motor fixing plate; 409 a rotating sleeve fixing plate; 410 a guardrail; 411 stroke organ covers; 412 an inductive switch; 413 a rotor holder; 5 detecting a stroke control mechanism; 501, detecting a cylinder; 502 floating joint fixing plates; 503 detecting a floating joint; 6 polishing stroke control mechanism; 601 polishing the cylinder; 602 a buffer plate; 603 floating joints; 604 a graphite copper sleeve; 605 a buffer rod; 7 rotor transmission stroke control mechanism; a 701 stroke motor; 702 stroke lead screw 703 stroke lead screw nut mount.

Detailed Description

The following will further describe a rotor polishing apparatus with RQA detection function according to the present invention with reference to fig. 1-7.

Referring to fig. 1, a rotor polishing apparatus with RQA detection function includes a fixed bracket 1, an RQA detector 2 mounted on the fixed bracket 1, a polishing machine 3, and a rotor transmission mechanism 4; the device is characterized by also comprising a stroke control mechanism which is arranged on the fixed bracket 1 and controls the RQA detector 2, the polishing machine 3 and the rotor transmission mechanism 4; the stroke control mechanism comprises a detection stroke control mechanism 5, a polishing stroke control mechanism 6 and a rotor transmission stroke control mechanism 7; drive RQA detector 2, burnishing machine 3 and rotor drive mechanism 4 respectively through detecting stroke control mechanism 5, polishing stroke control mechanism 6 and rotor drive stroke control mechanism 7 and move, replace the manual work to carry out the polishing and detect to the rotor, improve production efficiency.

Referring to fig. 2, 3 and 4, the polishing machine 3 includes a polishing machine fixing base 301, a polishing motor 302 mounted on the polishing machine fixing base 301, a polishing organ cover 303, a polishing stroke control mechanism 6 and a polishing wheel 304 mounted on the polishing motor 302; the polishing wheel 304 is provided with a polishing wheel housing 305; the polishing wheel shell 305 is fixed on the polishing machine fixing seat 301; a polishing sliding block 306 is arranged on the polishing machine fixing seat 301; the polishing slide block 306 is provided with a polishing slide rail 307 matched with the polishing slide block 306, and the polishing slide rail 307 is fixedly arranged on the fixed bracket 1; the polishing stroke control mechanism 6 comprises a polishing cylinder 601 and a buffer plate 602; the polishing cylinder 601 is provided with a floating joint 603 and a graphite copper sleeve 604; the graphite copper sleeve 604 is connected with the polishing machine fixing seat 301; a buffer rod 605 is arranged on the buffer plate 602; the polishing cylinder 601 drives the floating joint 603 and the graphite copper sleeve 604 to move, the graphite copper sleeve 604 drives the polishing machine fixing seat 301 to move along the polishing sliding rail 307, the polishing machine fixing seat 301 drives the polishing motor 302 and the polishing wheel 304 to move along the polishing sliding rail 307, and the polishing motor 302 drives the polishing wheel 304 to rotate, so that the polishing position can be conveniently adjusted, and the direction suitable for use is enlarged; by installing the polishing organ cover 303 on the polishing fixed seat 301, dust or substances generated by polishing can be prevented from falling into the device, the later use is influenced, and the service life is prolonged; by installing the polishing wheel housing 305 outside the polishing wheel 304, dust generated by polishing can be intensively treated, and the dust is prevented from flying to affect the health of workers and the working environment.

Referring to fig. 5, 6 and 7, the RQA detector 2 includes a detection base plate 201, a detection fixing frame 202 mounted on the detection base plate 201, a detection stroke control mechanism 5, a speed reducer 203 mounted on the detection fixing frame 202, and a sensor 204 mounted on the speed reducer 203; a detection slide rail 205 and a detection organ cover 206 are arranged on the detection bottom plate 201; a detection sliding block 207 is arranged on the detection fixing frame 202; the detection fixing frame 202 is matched with the detection sliding block 207 through the detection sliding rail 205 and is arranged on the detection bottom plate 201; the detection fixing frame 202 is also provided with an adjusting rod 208; a locking rod 209 is arranged on the adjusting rod 208; the detection stroke control mechanism 5 comprises a detection cylinder 501 and a floating joint fixing plate 502; a detection floating joint 503 is installed on the floating joint fixing plate 502; the floating joint fixing plate 503 is connected with the detection fixing frame 202; the detection cylinder 501 is connected with the detection floating joint 503 and drives the floating joint fixing plate 502 to move, the floating joint fixing plate 502 drives the detection fixing frame 202 to move along the detection sliding rail 205, the detection fixing frame 202 drives the speed reducer 203 and the sensor 204 to move along the detection sliding rail 205, and the rotor is detected, so that the rotor can be detected by replacing manpower, and the detection accuracy and the detection efficiency are improved; the detection fixing frame 202 is provided with an adjusting rod 208, the adjusting rod 208 is provided with a locking rod 209, the positions of the sensor 204 and the speed reducer 203 are adjusted by using the adjusting rod 208, and the adjusted position of the adjusting rod 208 can be locked by using the locking rod 209, so that the movement is prevented when the detection is carried out; through installing detection organ cover 206 on detecting bottom plate 201 to can prevent that material such as dust from getting into the device, influencing the later stage of device and using, increase of service life.

Referring to fig. 8, 9 and 10, the rotor transmission mechanism 4 includes a stroke fixing frame 401, a sliding plate 402 mounted on the stroke fixing frame 401, an inductive switch fixing frame 403, a rotor transmission stroke control mechanism 7, a synchronous motor 404 mounted on the sliding plate 402, and a rotor rotating sleeve 405; a stroke slide rail 406 is mounted on the stroke fixing frame 401; the stroke slide rail 406 is provided with a stroke slide block 407 which is matched with the stroke slide rail; the stroke slider 406 is fixedly mounted on the sliding plate 402; the sliding plate 402 is provided with a synchronous motor fixing plate 408, a rotating sleeve fixing plate 409, a guardrail 410 and a stroke organ cover 411; the synchronous motor 404 and the rotor rotating sleeve 405 are fixed on the sliding plate 402 through a synchronous motor fixing plate 408 and a rotating sleeve fixing plate 409; the synchronous motor 404 is in transmission connection with the rotor rotating sleeve 405 through a synchronous belt; a rotor fixing seat 413 is installed on the rotor rotating sleeve 405; the inductive switch fixing frame 403 is provided with an inductive switch 412; the rotor transmission stroke control mechanism 7 comprises a stroke motor 701; a stroke lead screw 702 is arranged on the stroke motor 701; a stroke screw nut seat 703 is arranged on the stroke screw 702; the stroke lead screw nut seat 703 is connected with the sliding plate 402; the stroke motor 701 drives the stroke lead screw 702 to rotate, the stroke lead screw 702 drives the stroke lead screw nut seat 703 to move, the stroke lead screw nut seat 703 drives the sliding plate 402 to move along the stroke slide rail 406, the sliding plate 402 drives the synchronous motor 404, the rotor rotating sleeve 405 and the rotor fixing seat 413 to move along the stroke slide rail 406, the synchronous motor 404 drives the rotor rotating sleeve 405 to rotate through synchronous belt transmission, and the rotor rotating sleeve 405 drives the rotor fixing seat 413 to rotate, so that the rotor can be moved to the polishing machine 3 to polish the rotor instead of manpower, and the polishing quality and the polishing efficiency are improved; by installing the stroke organ cover 411 on the sliding plate 402, dust and other substances can be prevented from entering the device, the later use of the device is influenced, and the service life is prolonged; by installing the inductive switch 412 on the inductive light fixing frame 403, it is possible to know whether each mechanism moves to the corresponding position.

In the working process of the utility model, the manipulator places the rotor on the rotor fixing seat 413 and fixes it, then the synchronous motor 404 drives the rotor rotating sleeve 405 to rotate through the synchronous belt transmission, the rotor rotating sleeve 405 drives the rotor fixing seat 413 to rotate, then the detection cylinder 501 is connected with the detection floating joint 503 and drives the floating joint fixing plate 502 to move, the floating joint fixing plate 502 drives the detection fixing frame 202 to move along the detection slide rail 205, the detection fixing frame 202 drives the speed reducer 203 and the sensor 204 to move along the detection slide rail 205, the sensor 204 is used to detect the rotor surface, then the polishing cylinder 601 drives the floating joint 603 and the graphite copper bush 604 to move, the graphite copper bush 604 drives the fixing seat 301 to move along the polishing slide rail 307, the polishing machine fixing seat 301 drives the polishing motor 302 and the polishing wheel 304 to move along the polishing slide rail 307, the polishing motor 302 drives the polishing wheel 304 to rotate, then the stroke motor 701 drives the stroke screw 702 to rotate, the stroke screw 702 drives the stroke screw nut base 703 to move, the stroke screw nut base 703 drives the sliding plate 402 to move along the stroke slide rail 406, and the sliding plate 402 drives the synchronous motor 404, the rotor rotating sleeve 405 and the rotor fixing base 413 to move along the stroke slide rail 406, so that the polishing wheel 304 is polished.

The above-mentioned embodiment is right the utility model discloses an explanation, it is not right the utility model discloses a limited, any right the scheme after the simple transform of the utility model all belongs to the protection scope of the utility model.

Claims

1. A rotor polishing device with an RQA detection function comprises a fixed support (1), an RQA detector (2) arranged on the fixed support (1), a polishing machine (3) and a rotor transmission mechanism (4); the device is characterized by further comprising a stroke control mechanism which is arranged on the fixed support (1) and used for controlling the RQA detector (2), the polishing machine (3) and the rotor transmission mechanism (4).

2. The rotor polishing device with RQA detection function as claimed in claim 1, wherein: the stroke control mechanism comprises a detection stroke control mechanism (5), a polishing stroke control mechanism (6) and a rotor transmission stroke control mechanism (7).

3. The rotor polishing device with RQA detection function as claimed in claim 1, wherein: the polishing machine (3) comprises a polishing machine fixing seat (301), a polishing motor (302) arranged on the polishing machine fixing seat (301), a polishing organ cover (303), a polishing stroke control mechanism (6) and a polishing wheel (304) arranged on the polishing motor (302); the polishing wheel (304) is provided with a polishing wheel shell (305); the polishing wheel shell (305) is fixed on the polishing machine fixing seat (301); a polishing sliding block (306) is arranged on the polishing machine fixing seat (301); and a polishing sliding rail (307) matched with the polishing sliding block (306) is arranged on the polishing sliding block (306), and the polishing sliding rail (307) is fixedly arranged on the fixed support (1).

4. A rotor polishing device with RQA detection function according to claim 3, characterized in that: the polishing stroke control mechanism (6) comprises a polishing cylinder (601) and a buffer plate (602); the polishing cylinder (601) is provided with a floating joint (603) and a graphite copper sleeve (604); the graphite copper sleeve (604) is connected with the polishing machine fixing seat (301); and a buffer rod (605) is arranged on the buffer plate (602).

5. The rotor polishing device with RQA detection function as claimed in claim 2, wherein: the RQA detector (2) comprises a detection bottom plate (201), a detection fixing frame (202) arranged on the detection bottom plate (201), a detection stroke control mechanism (5), a speed reducer (203) arranged on the detection fixing frame (202) and a sensor (204) arranged on the speed reducer (203); a detection slide rail (205) and a detection organ cover (206) are arranged on the detection bottom plate (201); a detection sliding block (207) is arranged on the detection fixing frame (202); the detection fixing frame (202) is matched with the detection sliding block (207) through a detection sliding rail (205) and is arranged on the detection bottom plate (201); the detection fixing frame (202) is also provided with an adjusting rod (208); the adjusting rod (208) is provided with a locking rod (209).

6. The rotor polishing device with RQA detection function of claim 5, wherein: the detection stroke control mechanism (5) comprises a detection cylinder (501) and a floating joint fixing plate (502); a detection floating joint (503) is arranged on the floating joint fixing plate (502); the floating joint fixing plate (502) is connected with the detection fixing frame (202).

7. The rotor polishing device with RQA detection function as claimed in claim 1, wherein: the rotor transmission mechanism (4) comprises a stroke fixing frame (401), a sliding plate (402) arranged on the stroke fixing frame (401), an inductive switch fixing frame (403), a rotor transmission stroke control mechanism (7), a synchronous motor (404) arranged on the sliding plate (402) and a rotor rotating sleeve (405); a stroke slide rail (406) is mounted on the stroke fixing frame (401); the stroke slide rail (406) is provided with a stroke slide block (407) which is matched with the stroke slide rail; the stroke sliding block (407) is fixedly arranged on the sliding plate (402); a synchronous motor fixing plate (408), a rotating sleeve fixing plate (409), a guardrail (410) and a stroke organ cover (411) are arranged on the sliding plate (402); the synchronous motor (404) and the rotor rotating sleeve (405) are fixed on the sliding plate (402) through a synchronous motor fixing plate (408) and a rotating sleeve fixing plate (409); the synchronous motor (404) is in transmission connection with the rotor rotating sleeve (405) through a synchronous belt; the inductive switch fixing frame (403) is provided with an inductive switch (412).

8. The rotor polishing device with RQA detection function of claim 7, wherein: the rotor transmission stroke control mechanism (7) comprises a stroke motor (701); a stroke lead screw (702) is arranged on the stroke motor (701); a stroke screw nut seat (703) is arranged on the stroke screw (702); the stroke lead screw nut seat (703) is connected with the sliding plate (402).