CN212790469U - Tail gas processing apparatus is used in high-purity aluminium fluoride production - Google Patents
Tail gas processing apparatus is used in high-purity aluminium fluoride production Download PDFInfo
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- CN212790469U CN212790469U CN202021053902.9U CN202021053902U CN212790469U CN 212790469 U CN212790469 U CN 212790469U CN 202021053902 U CN202021053902 U CN 202021053902U CN 212790469 U CN212790469 U CN 212790469U
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Abstract
The utility model discloses a tail gas treatment device for high-purity aluminum fluoride production in the technical field of aluminum fluoride production, which comprises an absorption box, wherein the lower part of the left side wall of the absorption box is communicated with an air inlet pipe, a carrying plate is fixed on the upper part of the inner wall of the absorption box, a plurality of air holes are uniformly formed in the carrying plate, an absorbent is stacked at the top end of the carrying plate, a heating block is fixed at the bottom end of the carrying plate, and a heat insulation plate is slidably connected to the lower position of the inner wall of the absorption box corresponding to the carrying plate; the utility model discloses an add and carry the thing board, absorbent and heating piece etc, the absorbent on carrying the thing board adsorbs the hydrogen fluoride in with waste gas, waste gas after removing the hydrogen fluoride gets into the purge bin and washes the back and discharges, close the solenoid valve on the conveyer pipe and open the first solenoid valve on the connecting pipe, and make the heat insulating board right-hand member peg graft on the absorption box inner wall, heating piece ohmic heating, absorbent hydrogen fluoride desorption on the absorbent, and retrieve after discharging through the recovery tube, be favorable to the separation of hydrogen fluoride, retrieve, it is extravagant to reduce.
Description
Technical Field
The utility model relates to an aluminium fluoride production technical field specifically is a tail gas processing apparatus is used in high-purity aluminium fluoride production.
Background
Aluminum fluoride, chemical formula AlF3Colorless or white crystals. Insoluble in water, insoluble in acids and bases. The properties are stable and can be hydrolyzed under heating. It is mainly used for smelting aluminium to lower melting point and raise electrolyte conductivity, and can be used as inhibitor for side fermentation in alcohol production, as fluxing agent for ceramic glaze and enamel glaze and component of glaze flux, and also can be used as flux for smelting nonferrous metal. Can be prepared by the action of aluminum trichloride, hydrofluoric acid and ammonia water. A large amount of tail gas containing hydrogen fluoride and sulfur dioxide is generated in the production process of the aluminum fluoride.
In the prior art, in the patent with publication number CN209630962U, lime water is prevented from precipitating through stirring, and the absorption effect of the lime water on tail gas is improved, but the lime water not only absorbs sulfur dioxide in the tail gas, but also absorbs hydrogen fluoride, and the device in the patent cannot separate the hydrogen fluoride in the tail gas, so that the waste of resources is caused.
Therefore, the tail gas treatment device for producing the high-purity aluminum fluoride is provided to solve the problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a tail gas processing apparatus is used in high-purity aluminium fluoride production to solve and provide the problem among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a tail gas treatment device for high-purity aluminum fluoride production comprises an absorption box, wherein the lower part of the left side wall of the absorption box is communicated with an air inlet pipe, the upper part of the inner wall of the absorption box is fixedly provided with a carrying plate, the carrying plate is uniformly provided with a plurality of air holes, the top end of the carrying plate is stacked with an absorbent, the bottom end of the carrying plate is fixedly provided with a heating block, the lower part of the inner wall of the absorption box corresponding to the carrying plate is connected with a heat insulation plate in a sliding way, the right end of the heat insulation plate is inserted into the right side wall of the absorption box, the left end of the heat insulation plate extends out of the absorption box and is fixedly provided with a pull rod, the left end of the pull rod is fixedly provided with a pull handle, the top wall of the absorption box is communicated with a connecting pipe with an electromagnetic valve, the bottom end of the connecting pipe is communicated with a collecting cover, one end of the, and one end of the conveying pipe, which is far away from the absorption box, is communicated with a purification box.
Preferably, a supporting plate is fixed on the left side of the absorption box at a position corresponding to the lower part of the heat insulation plate, and the top end of the supporting plate is rotatably connected with a plurality of guide rollers.
Preferably, the purifying box is filled with lime water, and the top wall of the purifying box is communicated with an exhaust pipe.
Preferably, a plurality of baffles are fixed on the inner wall of the purifying box in a staggered manner at positions corresponding to the lime water.
Preferably, a filter cartridge is fixed on the top wall of the purifying box at a position corresponding to the exhaust pipe.
Preferably, the filter cartridge is an activated carbon filter cartridge.
Preferably, the delivery pipe is fixed to the absorption tank.
The utility model has the advantages that:
1. by adding the loading plate, the absorbent, the heating block and the like, the absorbent on the loading plate absorbs the hydrogen fluoride in the waste gas, the waste gas from which the hydrogen fluoride is removed enters the purifying box and is washed and then discharged, the electromagnetic valve on the conveying pipe is closed, the first electromagnetic valve on the connecting pipe is opened, the right end of the heat insulation plate is inserted into the inner wall of the absorbing box, the heating block is electrified and heated, the hydrogen fluoride absorbed on the absorbent is desorbed and is discharged through the recovery pipe and then recovered, the separation and recovery of the hydrogen fluoride are facilitated, and the waste is reduced;
2. by adding the lime water and the baffle, the contact time of the tail gas and the lime water is prolonged, and the full absorption of the tail gas is facilitated.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged schematic view of the structure A of FIG. 1 according to the present invention;
fig. 3 is a schematic view of a three-dimensional structure of the filter cartridge of the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1-absorption box, 2-air inlet pipe, 3-object carrying plate, 4-air vent, 5-absorbent, 6-heating block, 7-collection cover, 8-recovery pipe, 9-connecting pipe, 10-air extractor, 11-conveying pipe, 12-purification box, 13-baffle, 14-lime water, 15-filter cylinder, 16-exhaust pipe, 17-heat insulation plate, 18-pull rod, 19-pull handle, 20-support plate and 21-guide roller.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a tail gas treatment device for producing high-purity aluminum fluoride comprises an absorption box 1. The lower part of the left side wall of the absorption box 1 is communicated with an air inlet pipe 2; and a loading plate 3 is fixed on the upper part of the inner wall of the absorption box 1. The carrying plate 3 is uniformly provided with a plurality of air holes 4; an absorbent 5 is stacked at the top end of the carrying plate 3, and the absorbent 5 is a hydrogen fluoride absorbent; the bottom end of the object carrying plate 3 is fixed with a heating block 6, and the heating block 6 is externally connected with a power supply. The inner wall of the absorption box 1 is connected with a heat insulation plate 17 in a sliding way at a position corresponding to the lower part of the carrying plate 3, and the right end of the heat insulation plate 17 is inserted in the right side wall of the absorption box 1; and the left end of the heat insulation board 17 extends out of the absorption box 1 and is fixed with a pull rod 18, and the left end of the pull rod 18 is fixed with a pull handle 19. The top wall of the absorption box 1 is communicated with a connecting pipe 9 with an electromagnetic valve, the electromagnetic valve is externally connected with a power supply, and the bottom end of the connecting pipe 9 is communicated with a collecting cover 7; and one end of the connecting pipe 9 far away from the absorption box 1 is communicated with an air extractor 10. The air pump 10 is externally connected with a power supply; the left end of the air pump 10 is communicated with a recovery pipe 8. The upper portion of the right side wall of the absorption box 1 is communicated with a conveying pipe 11 with an electromagnetic valve, the electromagnetic valve is externally connected with a power supply, the conveying pipe 11 is fixed with the absorption box 1, and the stability of the conveying pipe 11 is improved. One end of the conveying pipe 11, which is far away from the absorption box 1, is communicated with a purification box 12, and lime water 14 is filled in the purification box 12; and the top wall of the purifying box 12 is communicated with an exhaust pipe 16; the inner wall of the purifying box 12 is fixed with a plurality of baffle plates 13 in a staggered manner corresponding to the position of the lime water, so that the contact time of the tail gas and the lime water is prolonged, and the tail gas can be fully absorbed. A filter cartridge 15 is fixed on the top wall of the purification box 12 at a position corresponding to the exhaust pipe 16, and the filter cartridge 15 is an activated carbon filter cartridge.
A supporting plate 20 is fixed on the left side of the absorption box 1 at a position corresponding to the lower part of the heat insulation plate 17, and a plurality of guide rollers 21 are rotatably connected to the top end of the supporting plate 20, so that when the heat insulation plate 17 is pulled out, the supporting plate 17 can be supported.
The working principle in the embodiment is as follows:
tail gas enters an absorption box 1 from an air inlet pipe 2, then hydrogen fluoride in the tail gas is adsorbed and fixed by an adsorbent 5 through an air vent 4, separation of the hydrogen fluoride and other gases is realized, the tail gas from which the hydrogen fluoride is removed enters a purification box 12 through a conveying pipe 11, the tail gas from which the hydrogen fluoride is removed moves around a baffle 13 under the action of the baffle 13, lime water is emitted conveniently, and the tail gas is filtered by a filter cartridge 15 and then is discharged from an exhaust pipe 16; when the hydrogen fluoride on the adsorbent 5 needs to be desorbed, the tail gas is temporarily input into the absorption box 1 from the gas inlet pipe 2, the pull handle 19 is pushed, the pull rod 18 fixed at the right end of the pull handle 19 is driven to move rightwards along the horizontal direction, then the heat insulation plate 17 fixed with the pull rod 18 is driven to move rightwards along the horizontal direction, the right end of the heat insulation plate 17 is inserted into the right side wall of the absorption box 1, the electromagnetic valve on the conveying pipe 11 is closed, the electromagnetic valve on the connecting pipe 9 is opened, the heating block 6 is started, the adsorbent 5 is heated, the hydrogen fluoride adsorbed on the adsorbent 5 is desorbed, the gas extractor 10 is started, the hydrogen fluoride passes through the collecting cover 7, the connecting pipe 9 and the recovery pipe 8 at one time and is discharged and then recovered through the recovery pipe, the separation and recovery of the hydrogen fluoride are facilitated.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.
Claims (7)
1. The utility model provides a tail gas processing apparatus is used in high-purity aluminium fluoride production, includes absorption box (1), its characterized in that: the absorption box is characterized in that the lower portion of the left side wall of the absorption box (1) is communicated with an air inlet pipe (2), an object carrying plate (3) is fixed on the upper portion of the inner wall of the absorption box (1), a plurality of air holes (4) are uniformly formed in the object carrying plate (3), an absorbent (5) is stacked on the top end of the object carrying plate (3), a heating block (6) is fixed at the bottom end of the object carrying plate (3), a heat insulation plate (17) is slidably connected to the lower position of the inner wall of the absorption box (1) corresponding to the object carrying plate (3), the right end of the heat insulation plate (17) is inserted into the right side wall of the absorption box (1), the left end of the heat insulation plate (17) extends out of the absorption box (1) and is fixed with a pull rod (18), the left end of the pull rod (18) is fixed with a pull handle (19), the absorption box (1) is communicated, and one end of the connecting pipe (9) far away from the absorption box (1) is communicated with an air extractor (10), the left end of the air extractor (10) is communicated with a recovery pipe (8), the upper part of the right side wall of the absorption box (1) is communicated with a conveying pipe (11) with an electromagnetic valve, and one end of the conveying pipe (11) far away from the absorption box (1) is communicated with a purification box (12).
2. The tail gas treatment device for producing high-purity aluminum fluoride according to claim 1, characterized in that: a supporting plate (20) is fixed on the left side of the absorption box (1) at a position corresponding to the lower part of the heat insulation plate (17), and a plurality of guide rollers (21) are rotatably connected to the top end of the supporting plate (20).
3. The tail gas treatment device for producing high-purity aluminum fluoride according to claim 1, characterized in that: lime water (14) is poured into the purifying box (12), and the top wall of the purifying box (12) is communicated with an exhaust pipe (16).
4. The tail gas treatment device for producing high-purity aluminum fluoride according to claim 1, characterized in that: a plurality of baffles (13) are fixed on the inner wall of the purifying box (12) in a staggered manner at positions corresponding to the lime water.
5. The tail gas treatment device for producing high-purity aluminum fluoride according to claim 1, characterized in that: and a filter cylinder (15) is fixed on the top wall of the purification box (12) at a position corresponding to the exhaust pipe (16).
6. The device for treating the tail gas generated in the production of the high-purity aluminum fluoride according to claim 5, wherein: the filter cartridge (15) is an activated carbon filter cartridge.
7. The tail gas treatment device for producing high-purity aluminum fluoride according to claim 1, characterized in that: the conveying pipe (11) is fixed with the absorption box (1).
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113648806A (en) * | 2021-08-11 | 2021-11-16 | 上海协微环境科技有限公司 | Purification device for fluoride in semiconductor process waste gas |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113648806A (en) * | 2021-08-11 | 2021-11-16 | 上海协微环境科技有限公司 | Purification device for fluoride in semiconductor process waste gas |
CN113648806B (en) * | 2021-08-11 | 2023-09-22 | 上海协微环境科技有限公司 | Device for purifying fluoride in waste gas of semiconductor manufacturing process |
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