CN212783390U

CN212783390U - Automatic change semiconductor belt cleaning device

Info

Publication number: CN212783390U
Application number: CN202022117057.3U
Authority: CN
Inventors: 叶林旺; 谭进; 孙键; 李远求; 叶泽贤
Original assignee: Jiangsu Weisenmei Microelectronics Co ltd
Current assignee: Jiangsu Weisenmei Microelectronics Co ltd
Priority date: 2020-09-23
Filing date: 2020-09-23
Publication date: 2021-03-23
Anticipated expiration: 2030-09-23

Abstract

The utility model discloses an automatic change semiconductor cleaning device, including bottom plate, roof, the bottom of bottom plate left end, right-hand member is provided with the supporting leg, the top of bottom plate and the bottom fixed connection of bracing piece, hydraulic cylinder is installed on the right side on bracing piece top, anchor clamps are installed to hydraulic cylinder's output, the second rectangle opening has been seted up at the top of bottom plate. The utility model discloses a start driving motor and can make first pivot drive preceding baffle rotate, also can make first bevel gear drive the second pivot simultaneously and rotate, thereby make the fourth bevel gear rotate, it can make the third bevel gear drive the third pivot through the rotation of fourth bevel gear and rotate, make the backplate rotate at last, current baffle, when backplate and bottom plate keep perpendicular, stop starting driving motor, the water that the nozzle blowout came can splash and spill preceding baffle, on the backplate, flow into in the collecting box through the filter screen at last.

Description

Automatic change semiconductor belt cleaning device

Technical Field

The utility model relates to a semiconductor auxiliary processing technical field specifically is an automatic change semiconductor cleaning device.

Background

The semiconductor is a substance with conductivity between an insulator and a conductor, and the conductivity of the semiconductor is easy to control and can be used as an element material for information processing. Semiconductors are very important from the viewpoint of technological or economic development. The core elements of many electronic products, such as computers, mobile phones, and digital recorders, utilize the conductivity change of semiconductors to process information. The cleaning of the semiconductor wafer is a very delicate work, the requirement of the semiconductor wafer on the cleaning environment is harsh, the cleaning of the surrounding environment needs to be ensured in the cleaning process, meanwhile, the cleaning of the semiconductor wafer is also a time-consuming and labor-consuming work, and how to efficiently clean the semiconductor wafer has important significance for the semiconductor industry. However, when the existing cleaning equipment is used for cleaning semiconductors, water in the cleaning process is splashed around, so that clothes of workers are wetted, and meanwhile, certain waste is caused to the water, so that the cleaning equipment capable of recycling the water is very necessary.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an automatic change semiconductor belt cleaning device to solve the problem that proposes among the above-mentioned background art.

In order to solve the technical problem, the utility model provides a following technical scheme: an automatic semiconductor cleaning device comprises a bottom plate and a top plate, wherein supporting legs are arranged at the bottom of the left end and the bottom of the right end of the bottom plate, the top of the bottom plate is fixedly connected with the bottom of a supporting rod, a hydraulic cylinder is arranged at the right side of the top end of the supporting rod, a clamp is arranged at the output end of the hydraulic cylinder, a second rectangular through hole is formed in the top of the bottom plate, a collecting box is arranged right below the second rectangular through hole and is placed on a connecting plate, the left side and the right side of the connecting plate are fixedly connected with the inner sides of the supporting legs, the top of the left end of the bottom plate is fixedly connected with the bottom of a left supporting plate, the top of the left supporting plate is fixedly connected with the bottom of the left end of the top plate, the inner wall of the through hole formed in the right side of the left supporting plate is fixedly connected with the outer wall of a first, the right end of the first rotating shaft sequentially penetrates through the left side of the front baffle plate and the left side of the right supporting plate to extend to be fixedly connected with the output end of the driving motor, the bottom of the right supporting plate is fixedly connected with the top of the right end of the bottom plate, the top of the right supporting plate is fixedly connected with the bottom of the right end of the top plate, a first bevel gear is mounted on the outer wall of the first rotating shaft and is meshed with a second bevel gear, the back of the second bevel gear is fixedly connected with the front of the second rotating shaft, the outer wall of the second rotating shaft is connected with the inner wall of a through hole formed in the front of the second rotating shaft and a fixed block, the right side of the fixed block is fixedly connected with the left side of the right supporting plate, the back of the second rotating shaft is fixedly connected with the front of a fourth bevel gear, and the fourth bevel gear is meshed with a third, the third bevel gear is arranged on the outer wall of the third rotating shaft, the outer wall of the right end of the third rotating shaft is in rolling connection with the inner wall of a third bearing, the outer wall of the third bearing is fixedly connected with the inner wall of a through hole formed in the left side of the right supporting plate, the left end of the third rotating shaft penetrates through the right side of the rear baffle plate and extends to be in rolling connection with the inner wall of a fourth bearing, and the outer wall of the fourth bearing is fixedly connected with the inner wall of a through hole formed in the right side of the left supporting plate;

the utility model discloses a portable water heater, including roof, water pipe, nozzle, electric telescopic handle, top and the bottom fixed connection of water tank, the left side of water tank communicates the setting with the one end of water pipe, the other end of water pipe runs through the first rectangle opening that the roof top was seted up and extends to and communicate the setting with the top of nozzle, the front of water pipe lower extreme and the back fixed connection of push rod left end, the right side of push rod and electric telescopic handle's left end fixed connection, electric telescopic handle's right side and the left side fixed connection of right branch fagging.

Furthermore, the top of the supporting leg is fixedly connected with the bottom of the bottom plate, the universal wheels are mounted at the bottom of the supporting leg, the supporting leg can play a supporting role, and the universal wheels can facilitate the movement of the device.

Furthermore, the left side of the hydraulic cylinder is fixedly connected with the right side of the top end of the supporting rod, and the distance of the clamp can be adjusted through the arranged hydraulic cylinder.

Furthermore, the number of the clamps is two, the two clamps are symmetrically distributed on two sides by taking the center line of the front surface of the bottom plate as a symmetrical bearing, and the semiconductor can be clamped by the arranged clamps.

Further, driving motor's bottom and the top fixed connection of shock attenuation seat, the bottom of shock attenuation seat and the top fixed connection of fixed plate, the left side of fixed plate and the right side fixed connection of right branch fagging bottom can play absorbing effect through the shock attenuation seat that sets up.

Further, the outer wall of second rectangle opening carries out fixed connection with the outer wall of filter screen, can filter the isolation with the foul of aquatic through the filter screen that sets up.

Further, the material of the water tube is made of a rubber material, and the length of the water tube is set to be long enough.

Compared with the prior art, the utility model discloses the beneficial effect who reaches is: the utility model discloses a start driving motor and can make baffle rotation before first pivot drives, also can make first bevel gear drive the second pivot simultaneously and rotate, thereby make the fourth bevel gear rotate, it can make the third bevel gear drive the third pivot through the rotation of fourth bevel gear and rotate, make the backplate rotate at last, current baffle, when the backplate keeps perpendicular with the bottom plate, stop starting driving motor, at this moment, the water in the water tank leads to pipe, spray out from the nozzle at last and wash the semiconductor, the water that the blowout came can splash and spill preceding baffle, on the backplate, flow into in the collecting box through the filter screen at last.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic view of the top structure of the top plate of the present invention;

FIG. 3 is an enlarged schematic view of the utility model at A;

fig. 4 is a schematic top view of the front and rear baffles of the present invention;

FIG. 5 is a schematic view of the top structure of the bottom plate of the present invention;

in the figure: 1. a base plate; 2. supporting legs; 3. a universal wheel; 4. a connecting plate; 5. a collection box; 6. a left support plate; 7. a support bar; 8. a hydraulic cylinder; 9. a clamp; 10. a top plate; 11. a water tank; 12. a water pipe; 13. a nozzle; 14. a push rod; 15. an electric telescopic rod; 16. a first rectangular through opening; 17. a first bearing; 18. a first rotating shaft; 19. a front baffle; 20. a right support plate; 21. a drive motor; 22. a shock absorbing seat; 23. a fixing plate; 24. a first bevel gear; 25. a second bevel gear; 26. a second rotating shaft; 27. a fixed block; 28. a second bearing; 29. a third bevel gear; 30. a third rotating shaft; 31. a tailgate; 32. a third bearing; 33. a fourth bearing; 34. a second rectangular through opening; 35. filtering with a screen; 36. and a fourth bevel gear.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: an automatic semiconductor cleaning device comprises a bottom plate 1 and a top plate 10, wherein a supporting leg 2 is arranged at the bottom of the left end and the bottom of the right end of the bottom plate 1, the top of the supporting leg 2 is fixedly connected with the bottom of the bottom plate 1, a universal wheel 3 is arranged at the bottom of the supporting leg 2, the supporting leg 2 can play a supporting role, the universal wheel 3 can be arranged to facilitate the movement of the device, the top of the bottom plate 1 is fixedly connected with the bottom of a supporting rod 7, a hydraulic cylinder 8 is arranged at the right side of the top end of the supporting rod 7, the left side of the hydraulic cylinder 8 is fixedly connected with the right side of the top end of the supporting rod 7, the distance of a clamp can be adjusted through the arranged hydraulic cylinder 8, clamps 9 are arranged at the output end of the hydraulic cylinder 8, the number of the clamps 9 is two, the two clamps 9 are symmetrically distributed on two sides by taking the central, the top of the bottom plate 1 is provided with a second rectangular through hole 34, the outer wall of the second rectangular through hole 34 is fixedly connected with the outer wall of the filter screen 35, dirt in water can be filtered and isolated through the arranged filter screen 35, a collecting box 5 is arranged under the second rectangular through hole 34, the collecting box 5 is placed on a connecting plate 4, the left side and the right side of the connecting plate 4 are fixedly connected with the inner side of the supporting leg 2, the top of the left end of the bottom plate 1 is fixedly connected with the bottom of the left supporting plate 6, the top of the left supporting plate 6 is fixedly connected with the bottom of the left end of the top plate 10, the inner wall of the through hole formed in the right side of the left supporting plate 6 is fixedly connected with the outer wall of the first bearing 17, the inner wall of the first bearing 17 is in rolling connection with the outer wall of the left end of the first rotating shaft 18, the right end of the first rotating shaft 18 sequentially penetrates through the left side of, the driving motor 21 can rotate forward or backward, the outer wall of the first rotating shaft 18 is fixedly connected with the inner wall of the through hole formed by the penetration of the front baffle plate 19, the bottom of the driving motor 21 is fixedly connected with the top of the shock absorption seat 22, the bottom of the shock absorption seat 22 is fixedly connected with the top of the fixed plate 23, the left side of the fixed plate 23 is fixedly connected with the right side of the bottom end of the right support plate 20, the shock absorption effect can be achieved through the arranged shock absorption seat 22, the first rotating shaft 18 can drive the front baffle plate 19 to rotate by starting the driving motor 21, meanwhile, the first bevel gear 24 can drive the second rotating shaft 26 to rotate, so that the fourth bevel gear 36 rotates, the third bevel gear 29 can drive the third rotating shaft 30 to rotate by rotating the fourth bevel gear 36, finally, the rear baffle plate 31 rotates, and when the front baffle plate 19 and the rear baffle plate 31 are perpendicular to the bottom plate 1, the driving motor 21, at this time, water in the water tank 11 passes through the water pipe 12 and finally is sprayed from the nozzle 13 to clean the semiconductor, the sprayed water splashes on the front baffle plate 19 and the rear baffle plate 31 and finally flows into the collection tank 5 through the filter screen 35, the bottom of the right support plate 20 is fixedly connected with the top of the right end of the bottom plate 1, the top of the right support plate 20 is fixedly connected with the bottom of the right end of the top plate 10, the outer wall of the first rotating shaft 18 is provided with the first bevel gear 24, the first bevel gear 24 is engaged with the second bevel gear 25, the back of the second bevel gear 25 is fixedly connected with the front of the second rotating shaft 26, the outer wall of the second rotating shaft 26 is in rolling connection with the inner wall of the second bearing 28, the outer wall of the second rotating shaft 26 is fixedly connected with the inner wall of the through hole formed in the front of the fixed block 27, the right side of the fixed block 27 is fixedly connected with the left side of the right support plate, the fourth bevel gear 36 is meshed with the third bevel gear 29, the third bevel gear 29 is installed on the outer wall of the third rotating shaft 30, the outer wall of the right end of the third rotating shaft 30 is in rolling connection with the inner wall of the third bearing 32, the outer wall of the third bearing 32 is fixedly connected with the inner wall of a through hole formed in the left side of the right support plate 20, the left end of the third rotating shaft 30 penetrates through the right side of the rear baffle plate 31 and extends to be in rolling connection with the inner wall of the fourth bearing 33, the outer wall of the third rotating shaft 30 is fixedly connected with the inner wall of a through hole formed by the rear baffle plate 31 in a penetrating mode, and the outer wall of the fourth bearing 33 is fixedly connected with the inner wall of a through hole formed;

the top of roof 10 left end and the bottom fixed connection of water tank 11, the left side of water tank 11 communicates the setting with the one end of water pipe 12, the material of water pipe 12 is made by rubber materials, and the length setting of this water pipe 12 is enough long, the other end of water pipe 12 runs through first rectangle opening 16 that roof 10 top was seted up and extends to and communicate the setting with the top of nozzle 13, the front of water pipe 12 lower extreme and the back fixed connection of the 14 left ends of push rod, the right side of push rod 14 and the left end fixed connection of electric telescopic handle 15, the right side of electric telescopic handle 15 and the left side fixed connection of right branch fagging 20, can make push rod 14 remove about water pipe 12 through electric telescopic handle 15, thereby can make nozzle 13 spray about.

The utility model discloses a theory of operation: when the semiconductor is required to be cleaned, the semiconductor is firstly clamped by the clamp 9, the first rotating shaft 18 can be rotated by starting the driving motor 21, the front baffle plate 19 can be rotated by rotating the first rotating shaft 18, the first bevel gear 24 can be rotated, the second rotating shaft 26 can be rotated by rotating the first bevel gear 24, the fourth bevel gear 36 can be rotated by rotating the second rotating shaft 26, the third bevel gear 29 can be rotated by rotating the fourth bevel gear 36, the third rotating shaft 30 can be rotated by rotating the third bevel gear 29, the rear baffle plate 31 can be rotated by rotating the third rotating shaft 30, when the front baffle plate 19 and the rear baffle plate 31 are vertical to the bottom plate 1, the driving motor 21 is stopped, and when the water in the water tank 11 passes through the water pipe 12 and is finally sprayed from the nozzle 13 to clean the semiconductor, the sprayed water can be sprayed to the front baffle plate 19, The tailgate 31 and finally the collection tank 5 through the sieve 35.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An automatic semiconductor cleaning device comprises a bottom plate (1) and a top plate (10), and is characterized in that: the bottom of the left end and the bottom of the right end of the bottom plate (1) are provided with supporting legs (2), the top of the bottom plate (1) is fixedly connected with the bottom of a supporting rod (7), the right side of the top end of the supporting rod (7) is provided with a hydraulic cylinder (8), the output end of the hydraulic cylinder (8) is provided with a clamp (9), the top of the bottom plate (1) is provided with a second rectangular through hole (34), a collecting box (5) is arranged under the second rectangular through hole (34), the collecting box (5) is arranged on a connecting plate (4), the left side and the right side of the connecting plate (4) are fixedly connected with the inner sides of the supporting legs (2), the top of the left end of the bottom plate (1) is fixedly connected with the bottom of a left supporting plate (6), the top of the left supporting plate (6) is fixedly connected with the bottom of the left end of a top plate (10), the inner wall of the through hole arranged on the right side of the left supporting plate (, the inner wall of the first bearing (17) is in rolling connection with the outer wall of the left end of the first rotating shaft (18), the right end of the first rotating shaft (18) sequentially penetrates through the left side of the front baffle (19) and the left side of the right support plate (20) and extends to be fixedly connected with the output end of the driving motor (21), the bottom of the right support plate (20) is fixedly connected with the top of the right end of the bottom plate (1), the top of the right support plate (20) is fixedly connected with the bottom of the right end of the top plate (10), a first bevel gear (24) is installed on the outer wall of the first rotating shaft (18), the first bevel gear (24) is meshed with a second bevel gear (25), the back of the second bevel gear (25) is fixedly connected with the front face of the second rotating shaft (26), the outer wall of the second rotating shaft (26) is in rolling connection with the inner wall of the second bearing (28), and the outer wall of the second rotating shaft (26) is fixedly connected with the inner wall of a through hole formed, the right side of the fixed block (27) is fixedly connected with the left side of the right support plate (20), the back surface of the second rotating shaft (26) is fixedly connected with the front surface of a fourth bevel gear (36), the fourth bevel gear (36) is meshed with a third bevel gear (29), the third bevel gear (29) is installed on the outer wall of a third rotating shaft (30), the outer wall of the right end of the third rotating shaft (30) is in rolling connection with the inner wall of a third bearing (32), the outer wall of the third bearing (32) is fixedly connected with the inner wall of a through hole formed in the left side of the right support plate (20), the left end of the third rotating shaft (30) penetrates through the right side of the through hole (31) of the rear baffle and extends to be in rolling connection with the inner wall of a fourth bearing (33), and the outer wall of the fourth bearing (33) is fixedly connected with the inner wall of a through hole formed in the right side of the left support plate;

the top of roof (10) left end and the bottom fixed connection of water tank (11), the left side of water tank (11) communicates the setting with the one end of water pipe (12), the other end of water pipe (12) runs through first rectangle opening (16) that roof (10) top was seted up and extends to and communicates the setting with the top of nozzle (13), the front of water pipe (12) lower extreme and the back fixed connection of push rod (14) left end, the right side of push rod (14) and the left end fixed connection of electric telescopic handle (15), the right side of electric telescopic handle (15) and the left side fixed connection of right branch fagging (20).

2. An automated semiconductor cleaning apparatus according to claim 1, wherein: the top of the supporting leg (2) is fixedly connected with the bottom of the bottom plate (1), and the bottom of the supporting leg (2) is provided with a universal wheel (3).

3. An automated semiconductor cleaning apparatus according to claim 1, wherein: the left side of the hydraulic cylinder (8) is fixedly connected with the right side of the top end of the support rod (7).

4. An automated semiconductor cleaning apparatus according to claim 1, wherein: the number of the clamps (9) is two, and the two clamps (9) are symmetrically distributed on two sides by taking the center line of the front surface of the bottom plate (1) as a symmetrical bearing.

5. An automated semiconductor cleaning apparatus according to claim 1, wherein: the bottom of driving motor (21) and the top fixed connection of cushion socket (22), the bottom of cushion socket (22) and the top fixed connection of fixed plate (23), the left side of fixed plate (23) and the right side fixed connection of right branch fagging (20) bottom.

6. An automated semiconductor cleaning apparatus according to claim 1, wherein: the outer wall of the second rectangular through opening (34) is fixedly connected with the outer wall of the filter screen (35).

7. An automated semiconductor cleaning apparatus according to claim 1, wherein: the material of the water pipe (12) is made of a rubber material, and the length of the water pipe (12) is set to be sufficiently long.