CN212779106U - Three-dimensional detection device and detection equipment - Google Patents
Three-dimensional detection device and detection equipment Download PDFInfo
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- CN212779106U CN212779106U CN202022142525.2U CN202022142525U CN212779106U CN 212779106 U CN212779106 U CN 212779106U CN 202022142525 U CN202022142525 U CN 202022142525U CN 212779106 U CN212779106 U CN 212779106U
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Abstract
The utility model discloses a three-dimensional detection device and detection equipment, the three-dimensional detection device comprises a line probe and a point probe, at least one of the line probe and the point probe can be in a detection working state; the line probe can send out multi-point light spots to a plurality of first positions to be detected and detect the heights of the first positions to be detected in a detection working state; and the point probe can send a single-point light spot to a single second position to be detected and detect the height of the second position to be detected in a detection working state. By applying the scheme, on the basis of meeting the measurement requirements of different size characteristics of the sample, the measurement error caused by the need of establishing different coordinate systems can be avoided through structural optimization, and the detection speed can be effectively improved.
Description
Technical Field
The utility model relates to a semiconductor test equipment technical field, concretely relates to three-dimensional detection device, check out test set.
Background
It is known that according to the assembly requirements of a 3D curved surface sample, specific dimensional characteristics of the sample, such as vertical lift, surface profile, rainbow diagram, profile, etc., need to be measured. In the prior art, certain specific size characteristics can only be measured by adopting a specific detection mode, for example, a rainbow diagram can only be measured by using a line probe, and the measurement efficiency is higher by using the line probe based on the characteristic that the whole sample surface needs to be measured; and if the vertical lifting position can only be measured by using a point probe, the measurement and the polishing of a line probe are a line, and the measurement value on a certain point cannot be accurately measured.
The measurement data needs to be measured at different stations or different devices, and the same sample to be measured needs to be established in different coordinate systems, so that the detection speed is reduced, and corresponding measurement errors can be generated.
In view of the above, it is desirable to optimize the structure of the conventional detection apparatus to effectively overcome the above-mentioned defects in the prior art.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a three-dimensional detection device and check out test set on satisfying the different size characteristic measuring basis of sample, can avoid through configuration optimization to establish different coordinate systems and the measuring error who produces to can effectively improve detection speed.
The utility model provides a three-dimensional detection device, which comprises a line probe and a point probe, wherein at least one of the line probe and the point probe can be in a detection working state; the line probe can send out multi-point light spots to a plurality of first positions to be detected and detect the heights of the first positions to be detected in a detection working state; and the point probe can send a single-point light spot to a single second position to be detected and detect the height of the second position to be detected in a detection working state.
Preferably, the three-dimensional detection device further comprises a positioning imaging part, and the positioning imaging part can position the sample position information according to the height information detected by the probe in the detection working state.
Preferably, the positioning imaging component is a CCD positioning imaging component or a cmos positioning imaging component, and an intersection exists between the depth of field of the positioning imaging component, the detection range of the line probe, and the detection range of the point probe.
Preferably, the line probe and the point probe are both dispersive confocal probes.
Preferably, the device further comprises a mounting seat used for being connected with a detection device, and the positioning imaging component, the line probe and the point probe are all fixedly arranged on the mounting seat.
Preferably, the mounting seat comprises a bottom plate and a vertical plate which are fixedly connected, and the vertical plate is perpendicular to the surface of the bottom plate; the line probe is positioned on one side of the vertical plate and is fixedly arranged on the vertical plate; the positioning imaging part and the point probe are positioned on the other side of the vertical plate and are fixedly arranged on the bottom plate, and in the detection projection plane, the positioning imaging part is positioned between the line probe and the point probe.
Preferably, the middle part of the vertical plate is provided with a lightening hole.
The utility model also provides a three-dimensional detection equipment, including detection device and with the relative thing platform of putting that sets up of detection device, detection device adopts as before detection device.
Preferably, the mobile platform is provided with a translation surface, and the mobile platform can drive the object placing platform or the detection device to relatively translate along a direction parallel to the translation surface.
Preferably, the device further comprises a rotating table arranged on the moving table, and the rotating table can drive the object placing table or the detection device to rotate.
Aiming at the prior art, the utility model provides a three-dimensional detection device with a line probe and a point probe, wherein at least one of the line probe and the point probe is in a detection working state, namely, the line probe and the point probe can be selected and started according to the measurement requirement of a sample to be measured; specifically, the line probe in the detection working state can send out multi-point light spots to a plurality of first positions to be detected and detect the heights of the first positions to be detected; and the point probe in the detection working state can send a single-point light spot to a single second position to be detected and detect the height of the second position to be detected. According to the arrangement, the measurement requirements of different size characteristics of the sample to be measured can be met under the same coordinate system, compared with the prior art, the scheme can quickly, accurately and comprehensively measure the characteristics of the sample, and on one hand, the measurement errors caused by the fact that the same sample needs to be measured in different work positions or different equipment needs to be established in different coordinate systems can be avoided; simultaneously, the detection device that this scheme of application provided need not to carry out the station and shifts, has promoted detection speed through reducing the auxiliary operation time from this.
Drawings
FIG. 1 is a schematic view of the overall structure of a three-dimensional inspection apparatus according to an embodiment;
FIG. 2 is an exploded view of the three-dimensional inspection apparatus shown in FIG. 1;
fig. 3 is a schematic structural diagram of the three-dimensional inspection apparatus in the embodiment.
In the figure:
the three-dimensional detection device comprises a three-dimensional detection device 10, a line probe 1, a point probe 2, a positioning imaging part 3, a mounting seat 4, a bottom plate 41, a vertical plate 42 and a lightening hole 421;
a placing table 20, a moving table 30 and a rotating table 40.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1 and 2, fig. 1 is a schematic view of an overall structure of a three-dimensional inspection apparatus according to the present embodiment, and fig. 2 is an exploded view of the three-dimensional inspection apparatus shown in fig. 1.
As shown, the three-dimensional inspection device 10 is used for measuring different dimensional characteristics of a sample, and specifically includes two functional probes: a line probe 1 and a point probe 2, wherein at least one of the line probe 1 and the point probe 2 can be in a detection working state; in the actual measurement process, the line probe 1 and the point probe 2 can be selected to be started or the line probe 1 and the point probe 2 can be started simultaneously according to the specific size characteristics to be measured of different samples.
The line probe 1 is in a detection working state, and can emit multi-point light spots (or called line light spots) to a plurality of first positions to be detected and detect heights of the first positions to be detected, for example, but not limited to, the line probe is used for measuring and obtaining features such as a rainbow diagram. The first plurality of positions to be measured may be positions of a plurality of points on the sample, projections of the plurality of points on the same plane being on the same straight line.
The point probe 2 is in a detection working state, and can emit a single-point light spot to a single second position to be detected and detect the height of the second position to be detected, for example, but not limited to, characteristics such as height for obtaining a vertical lift position by measurement. The second site to be measured may be any site on the sample.
Therefore, the measurement requirements of different size characteristics of the sample to be measured can be met based on the same coordinate system, and the measurement errors caused by the fact that different coordinate systems need to be established for measuring the same sample in different work positions or different devices can be avoided; meanwhile, station transfer is not needed in the measurement of different size characteristics, and the detection speed can be effectively increased by reducing the auxiliary operation time.
In order to further have the image acquisition function, the three-dimensional detection device can also comprise a positioning imaging component 3. As shown in fig. 1 and 2, the positioning imaging unit 3 can position the sample position information according to the height information detected by the probe (line probe 1 or point probe 2) in the detection operation state. Here, the positioning imaging part 3 may be a CCD positioning imaging part or a cmos positioning imaging part, and it should be understood that the scope of the present application is only required to satisfy the feature measurement requirement of the three-dimensional detection device for detecting the object.
Preferably, the depth of field of the positioning imaging unit 3, the detection range of the line probe 1, and the detection range of the point probe 2 intersect with each other. Thus, in at least one height section in which the sample is present, the imaging unit 3 can clearly image the sample in the height section, and the height data in the height section can be stably acquired by the line probe 1 and the point probe 2. In one example, the three constructed detection devices can ensure that the working distances are all in the same horizontal plane, namely, in the same horizontal plane.
When the device is used specifically, taking a CCD positioning imaging component as an example, a detected object (a sample to be detected) is shot by utilizing a positioning CCD (positioning imaging component 3), a coordinate system is established by taking a preset point in an image as an original point to be a two-dimensional coordinate system, then the detected object is scanned by using a line probe 1, and a three-dimensional space coordinate system is established by combining the two-dimensional coordinate system; the line probe 1 and the point probe 2 are respectively triggered to collect point clouds to generate the three-dimensional appearance of the detected object, and the vertical lift position, the surface profile, the rainbow diagram, the profile, the thickness and the like of the detected object can be calculated according to the two-dimensional appearance or the three-dimensional appearance.
In order to obtain better measurement accuracy, the line probe 1 and the point probe 2 in the scheme both adopt a dispersion confocal probe. Therefore, even if the measured object has inclination or warpage, the high-precision measurement can be ensured, and the measurement point is ensured not to change. In addition, the line probe 1 and the point probe 2 are enabled to detect a transparent sample. Of course, an interferometric measuring device or the like may also be employed.
As shown in the figure, the line probe 1, the point probe 2 and the positioning imaging part 3 of the three-dimensional detection device are integrally assembled on a mounting seat 4, and the mounting seat 4 is used as a base component for connecting with a detection device. Please refer to fig. 3, which shows a schematic diagram of a detection apparatus using the three-dimensional detection apparatus.
Wherein, the positioning imaging component 3, the line probe 1 and the point probe 2 are all fixedly arranged on the mounting seat 4 and can be connected by adopting a threaded fastener (not shown in the figure) according to specific configuration positions. The structure is simple and reliable, and the assembly operation is convenient; meanwhile, subsequent overhaul and maintenance are convenient to carry out.
It should be noted that, the mounting seat 4 used as a base member for connecting with the detection device may be implemented in different structural forms as long as the functional requirements of the above-mentioned integrated assembly are met. Such as but not limited to the preferred example illustrated.
As shown in fig. 2, the mounting seat 4 includes a bottom plate 41 for connecting to an equipment body, and a vertical plate 42 perpendicular to a plate surface of the bottom plate 41, so that mounting spaces are formed on both sides of the vertical plate 42. It is understood that the bottom plate 41 and the vertical plate 42 may be integrally formed, or may be assembled and fixed by a welding process after being separately formed, or may be assembled and fixed by a threaded fastener.
Referring to fig. 1, the line probe 1 is located on one side of the vertical plate 42 and is fixedly disposed on the vertical plate 42; the positioning imaging component 3 and the point probe 2 are positioned on the other side of the vertical plate 42 and are both fixedly arranged on the bottom plate 41, and in the detection projection plane, the positioning imaging component 3 is positioned between the line probe 1 and the point probe 2.
The vertical plate 42 has low bearing requirements, so that the weight-reducing holes 421 can be formed in the middle of the vertical plate 42, and the self weight of the product can be controlled to the maximum extent on the basis of meeting the structural rigidity.
In addition to the three-dimensional detection device, the present embodiment also provides a three-dimensional detection apparatus. Referring to fig. 3, the apparatus includes the three-dimensional inspection device 10 and the object stage 20 opposite to the inspection device 10, wherein the object stage 20 is used for placing a sample to be inspected. In practical use, the sample to be detected is preset and fixed on the object placing table 20, and corresponding detection can be performed through the three-dimensional detection device 10.
Here, in order to improve the adaptability of the detection operation, it is preferable to provide a moving stage 30 capable of driving the object placing stage 20 to translate, where the moving stage 30 has a translation surface, as shown in fig. 3, and the moving stage can drive the object placing stage 20 to translate relatively along a direction parallel to the translation surface, that is, the position to be measured of the sample to be measured can be adjusted for the three-dimensional detection apparatus 10.
It can be understood that, in the principle of chromatic dispersion confocal measurement, when the three-dimensional coordinate information of the object to be measured is obtained, the probe on the chromatic dispersion confocal measurement device and the object to be measured are moved relatively to scan, and because the movement between the probe and the object to be measured is relative, one of the probe and the object to be measured can be moved arbitrarily. Therefore, based on the functional requirement of adjusting the relative position of the sample to be detected and the three-dimensional detection device 10 in the plane, the mobile station 30 may also be configured in the reverse direction, specifically, the three-dimensional detection device 10 may be driven to relatively translate in the direction parallel to the translation plane (not shown in the figure), and also may relatively translate in the direction parallel to the translation plane.
In addition, the three-dimensional inspection apparatus further includes a rotating table 40 disposed on the moving table 30, and the rotating table 40 can drive the object placing table 30 to rotate, so as to meet the measurement requirements of different dimensional characteristics. Here, the rotating table 40 may be used to rotate the placing table 30 about a rotation axis perpendicular to the translation plane, or may be used to rotate the placing table 30 about a rotation axis parallel to the translation plane with respect to the three-dimensional inspection apparatus 10.
Of course, in the case of driving the three-dimensional detecting device 10 to adjust the relative position, the rotating platform 40 can drive the three-dimensional detecting device 10 to rotate accordingly.
It should be noted that, in the solution described in this embodiment, the working principle of the functional components such as the line probe 1, the point probe 2, and the positioning imaging component 3 is not the core invention point of this application, and those skilled in the art can select the functional components based on the prior art, so details are not described herein again.
In the description of the present invention, it is to be understood that the indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings and are only for convenience in describing the present invention and simplifying the description, but are not intended to indicate or imply that the indicated devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the scope of the present invention.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.
Claims (10)
1. The three-dimensional detection device is characterized by comprising a line probe and a point probe, wherein at least one of the line probe and the point probe can be in a detection working state;
the line probe can send out multi-point light spots to a plurality of first positions to be detected and detect the heights of the first positions to be detected in a detection working state;
and the point probe can send a single-point light spot to a single second position to be detected and detect the height of the second position to be detected in a detection working state.
2. The three-dimensional detection device according to claim 1, further comprising a positioning imaging component, wherein the positioning imaging component can position the sample position information according to the height information detected by the probe in the detection working state.
3. The three-dimensional detection device according to claim 2, wherein the positioning imaging component is a CCD positioning imaging component or a cmos positioning imaging component, and an intersection exists between a depth of field of the positioning imaging component, a detection range of the line probe, and a detection range of the point probe.
4. The three-dimensional inspection apparatus of claim 3, wherein the line probe and the point probe are both dispersive confocal probes.
5. The three-dimensional detection device according to any one of claims 2 to 4, further comprising a mounting seat for connecting with a detection apparatus, wherein the positioning imaging component, the line probe and the point probe are all fixedly arranged on the mounting seat.
6. The three-dimensional detection device of claim 5, wherein the mounting seat comprises a bottom plate and a vertical plate which are fixedly connected, and the vertical plate is perpendicular to the plate surface of the bottom plate; the line probe is positioned on one side of the vertical plate and is fixedly arranged on the vertical plate; the positioning imaging part and the point probe are positioned on the other side of the vertical plate and are fixedly arranged on the bottom plate, and in the detection projection plane, the positioning imaging part is positioned between the line probe and the point probe.
7. The three-dimensional inspection device of claim 6, wherein a lightening hole is formed in a middle portion of the vertical plate.
8. A three-dimensional inspection apparatus comprising an inspection device and a placement table disposed opposite to the inspection device, wherein the inspection device is the inspection device according to any one of claims 1 to 7.
9. The three-dimensional detection device according to claim 8, further comprising a moving stage having a translation surface, wherein the moving stage can move the object placing stage or the detection device to translate relatively along a direction parallel to the translation surface.
10. The three-dimensional inspection apparatus according to claim 9, further comprising a rotating table disposed on the moving table, wherein the rotating table can rotate the object placing table or the inspection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022142525.2U CN212779106U (en) | 2020-09-25 | 2020-09-25 | Three-dimensional detection device and detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022142525.2U CN212779106U (en) | 2020-09-25 | 2020-09-25 | Three-dimensional detection device and detection equipment |
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| Publication Number | Publication Date |
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| CN212779106U true CN212779106U (en) | 2021-03-23 |
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| CN202022142525.2U Active CN212779106U (en) | 2020-09-25 | 2020-09-25 | Three-dimensional detection device and detection equipment |
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