CN212778216U - Silicon material microwave vacuum dryer - Google Patents
Silicon material microwave vacuum dryer Download PDFInfo
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- CN212778216U CN212778216U CN202021598928.1U CN202021598928U CN212778216U CN 212778216 U CN212778216 U CN 212778216U CN 202021598928 U CN202021598928 U CN 202021598928U CN 212778216 U CN212778216 U CN 212778216U
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Abstract
The utility model discloses a silicon material microwave vacuum drying-machine, including the silicon material that is used for wasing the silicon material wash the case, a plurality of vacuum drying device that are used for drying the silicon material after wasing with be used for realizing the silicon material rinse the arm conveyor that the case and vacuum drying device shifted between the silicon material, vacuum drying device including be equipped with the vacuum drying case of chamber door and with the vacuum pump of vacuum drying case intercommunication, be provided with the microwave heating device that a plurality of is used for heating the silicon material of vacuum drying incasement on the vacuum drying case. The vacuum dryer is high in drying speed, good in drying effect and high in efficiency, and the silicon material is heated more uniformly by the arrangement of the microwave heating device.
Description
Technical Field
The utility model belongs to silicon material stoving field, specifically speaking relates to a silicon material microwave vacuum drying machine.
Background
With the continuous development of semiconductor and solar energy industries, the demand of silicon materials is increasing. The purity of the silicon material is crucial to the quality of a final product, a plurality of impurities are attached to the surface of some silicon materials, the impurities on the surface of some silicon materials are removed by an acid washing method and then cleaned, and the cleaned silicon materials are dried before being put into a furnace to remove moisture attached to the silicon materials. The conventional method is that after the silicon materials are packaged by a turnover box, the silicon materials are packaged into a common oven in a superposition mode, a heater is arranged below the oven, and is subjected to drying treatment by electrifying heating, the conventional oven is adopted for drying, the silicon materials at the bottom layer can be dried quickly, the silicon materials at the middle and upper layers are difficult to dry, meanwhile, water vapor in the oven is difficult to discharge, the drying speed is low, the efficiency is low, the energy consumption is high, the silicon materials in the oven are heated unevenly, and the silicon materials are difficult to adapt to the drying treatment of a large amount of silicon materials.
To the above-mentioned problem, put forward the utility model discloses specially.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problems, a microwave vacuum dryer for silicon materials is proposed. In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a silicon material microwave vacuum drying-machine, washs the case including the silicon material that is used for wasing the silicon material, a plurality of vacuum drying device that are used for drying the silicon material after wasing and be used for realizing that the silicon material washs the arm conveyor that the case and vacuum drying device shifted between the silicon material, vacuum drying device including be equipped with the vacuum drying case of chamber door and with the vacuum pump of vacuum drying case intercommunication, be provided with the microwave heating device that a plurality of is used for heating the silicon material of vacuum drying incasement on the vacuum drying case.
Preferably, a flat pressure valve for balancing the pressure of the vacuum drying box is arranged on the vacuum drying box.
Preferably, a heating device capable of heating the cleaning liquid in the silicon material cleaning tank is arranged in the silicon material cleaning tank.
Preferably, the side wall of the vacuum drying box is provided with a plurality of connecting ports for connecting the microwave heating device, the microwave heating device comprises a microwave heater, a microwave transmission waveguide connected with the microwave generator and a radiator connected with the microwave generator, and the microwave transmission waveguide is connected to the vacuum drying box at the connecting port.
Preferably, the vacuum drying box is provided with a microwave heating protective cover, the microwave heating devices are arranged in the microwave heating protective cover, and the microwave heating protective cover is provided with a ventilation opening.
Preferably, still include the main frame, silicon material washs case and a plurality of vacuum drying device and all sets up in inside the main frame, the main frame is formed by the concatenation of a plurality of subframes, silicon material washs case and a plurality of vacuum drying device and distributes in a plurality of subframes.
Preferably, the main frame is formed by splicing a first sub frame and a second sub frame, the silicon material cleaning box is arranged in the first sub frame, the plurality of vacuum drying devices are arranged in the second sub frame, the mechanical arm conveying device is arranged above the vacuum drying devices and the silicon material cleaning box, the mechanical arm conveying device comprises a material taking component for grabbing silicon materials, a lifting component for driving the material taking component to lift and a horizontal sliding component for driving the lifting component to horizontally slide, the horizontal sliding component comprises a sliding rail, a sliding seat slidably connected to the sliding rail, a first motor fixedly connected to the sliding seat, a gear connected to an output end of the first motor, and a rack meshed with the gear and arranged corresponding to the sliding rail, the lifting component is fixedly connected to the sliding seat, and the lifting component is driven by a chain wheel and a chain, the sliding rail comprises a first sliding rail arranged on the first sub-frame and a second sliding rail arranged on the second sub-frame and capable of being connected with the first sliding rail in a matched mode, the rack comprises a first rack arranged on the first sub-frame and a second rack arranged on the second sub-frame and capable of being connected with the first rack in a matched mode, and a first connecting plate and a second connecting plate which are connected in a matched mode are further arranged at the joint of the first sub-frame and the second sub-frame.
Preferably, still include a plurality of baskets that are used for holding the silicon material of treating drying, the both ends of basket are provided with first toothed disc, be provided with the bracing piece on the first toothed disc, be provided with on the relative both sides wall of vacuum drying incasement and be used for supporting the basket makes its U-shaped seat at vacuum drying incasement internal rotation, the basket passes through motor gear drive and realizes at vacuum drying incasement internal rotation.
Preferably, the material basket is provided with an openable and closable cylindrical structure.
Preferably, a third motor is arranged on the side wall of the vacuum drying box, a rotating shaft is connected to the output end of the third motor, a second gear matched with the first gear disc is connected to the rotating shaft, the rotating shaft penetrates through the vacuum drying box, the third motor is located on the outer side of the vacuum drying box, and the second gear is arranged inside the vacuum drying box.
Preferably, still including the material loading platform that is used for placing the silicon material of treating drying and the ejection of compact placer that is used for placing the silicon material after drying, arm conveyor set up in material loading platform, silicon material wash case, vacuum drying device and ejection of compact placer's top is used for realizing the transfer of silicon material between material loading platform, silicon material wash case, vacuum drying device and ejection of compact placer, be provided with the second chain on the ejection of compact placer, the second chain passes through fourth motor and second sprocket cooperation drive, the material basket is arranged in carry through the second chain on the second chain to the outside.
Has the advantages that:
the utility model provides a silicon material microwave vacuum dryer, thereby this vacuum dryer utilizes the principle design that water boiling point reduces and can be with having the evaporation of residual moisture on surplus warm material surface in the short time under the vacuum condition, it includes the silicon material that can heat washing case, vacuum drying device and arm conveyor, the silicon material that waits to dry is rinsed the incasement at the silicon material and is rinsed soaking, arrange the incasement in vacuum drying after preliminary water bath heating raises the temperature, the silicon material in the vacuum drying case is after microwave heating of microwave heating device, the vacuum drying case is through the evacuation of vacuum pump, the residual moisture on silicon material surface through water bath heating and microwave heating evaporates under the vacuum condition fast and is taken out via the vacuum pump package, reach the fast drying effect, this vacuum dryer drying speed is fast, drying effect is good, high efficiency; secondly, the microwave heating device enables the silicon material to be heated more uniformly, the placing time of the silicon material in the silicon material cleaning box can be reduced, the problem that the silicon material is heated non-uniformly in the silicon material cleaning box is solved by secondary heating of the silicon material through the microwave heating device, the whole silicon material drying period is shortened, and the silicon material drying efficiency is improved; thirdly, the silicon material microwave vacuum dryer is arranged in a segmented mode, so that the silicon material microwave vacuum dryer is convenient to transport.
Drawings
Fig. 1 is a schematic structural diagram of the silicon microwave vacuum dryer of the present invention.
Fig. 2 is a schematic structural view of a vacuum drying box.
Fig. 3 is a sectional schematic structural view of the silicon microwave vacuum dryer of the present invention.
In the figure: 1-main frame, 11-first subframe, 12-second subframe, 2-silicon material washs the case, 3-vacuum drying case, 31-microwave heating safety cover, 33-third motor, 34-second gear, 35-U-shaped seat, 4-ejection of compact placer, 5-vacuum pump, 6-horizontal sliding assembly, 61-first slide rail, 62-second slide rail, 63-first rack, 64-second rack, 7-lifting unit, 8-material loading platform, 9-material basket, 91-first toothed disc, 92-bracing piece.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following description, together with the drawings of the present invention, clearly and completely describes the technical solution of the present invention, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without creative efforts shall all belong to the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustration and not for limitation of the present invention.
As shown in fig. 1, 2 and 3, the silicon microwave vacuum dryer provided in this embodiment includes a main frame 1, a plurality of material baskets 9 for holding silicon materials to be dried, a loading platform 8 for placing silicon materials to be dried, a silicon material cleaning box 2 for cleaning silicon materials, a plurality of vacuum drying devices for drying cleaned silicon materials, a discharging placement device 4 for placing dried silicon materials, and a mechanical arm conveying device for realizing the transfer between the silicon materials loading platform 8, the silicon material cleaning box, the vacuum drying device and the discharging placement device 4, the loading platform 8, the silicon material cleaning box 2, the plurality of vacuum drying devices and the discharging placement device 4 are all disposed inside the main frame 1, and the mechanical arm conveying device is disposed on the upper portion of the main frame 1.
The main frame 1 is formed by splicing a plurality of sub-frames, and the silicon material cleaning box 2 and the plurality of vacuum drying devices are distributed on the plurality of sub-frames. In this embodiment, the main frame 1 is formed by splicing a first sub-frame 11 and a second sub-frame 12, the silicon material cleaning box 2 is arranged in the first sub-frame, the plurality of vacuum drying devices are arranged in the second sub-frame 12, and the silicon material microwave vacuum drying machine is arranged in a segmented manner, so that the silicon material microwave vacuum drying machine is convenient to transport.
The mechanical arm conveying device is arranged above the silicon material feeding table 8, the silicon material cleaning box, the vacuum drying device and the discharging and placing device 4, the mechanical arm conveying device comprises a material taking component for grabbing the silicon material, a lifting component 7 for driving the material taking component to lift and a horizontal sliding component 6 for driving the lifting component 7 to horizontally slide, the horizontal sliding component 6 comprises a sliding rail, a sliding seat connected to the sliding rail in a sliding manner, a first motor fixedly connected to the sliding seat, a gear connected with the output end of the first motor and a rack which is meshed with the gear and is arranged corresponding to the sliding rail, the lifting component 7 is fixedly connected to the sliding seat, the lifting component 7 is driven by a chain wheel and a chain, the horizontal sliding component 6, the lifting component 7 and the material taking component can be seen from the structure of the horizontal sliding component, the lifting component and the material taking component in the utility model with the application number of 202020702230.3.
In this patent, the slide rails in the horizontal sliding assembly 6 include a first slide rail 61 disposed on the first subframe 11 and a second slide rail 62 disposed on the second subframe 12 and capable of being connected with the first slide rail 61 in a matching manner, the rack includes a first rack 63 disposed on the first subframe 11 and a second rack 64 disposed on the second subframe 12 and capable of being connected with the first rack 63 in a matching manner, a first connecting plate and a second connecting plate which are connected with each other in a matching manner are further disposed at the joint of the first subframe 11 and the second subframe 12, the first subframe 11 and the second subframe 12 are connected with each other through the first connecting plate and the second connecting plate, the first slide rail 61 and the second slide rail 62, the first rack 63 and the second rack 64 are connected to realize the splicing of the first sub-frame 11 and the second sub-frame 12, the assembly and the disassembly are convenient, the whole length of the silicon material microwave vacuum dryer is reduced after the disassembly, and the conveying is convenient.
Further, be provided with in the silicon material washs case 2 and carry out the heating device that heats to the washing liquid that the silicon material washs the case 2, the silicon material is at first arranged silicon material in and is washd case 2 and carry out primary heating.
The vacuum drying device comprises a vacuum drying box 3 provided with a box door and a vacuum pump 5 communicated with the vacuum drying box 3, a flat pressure valve for balancing the pressure of the vacuum drying box 3, a plurality of microwave heating devices for heating silicon materials in the vacuum drying box 3 and a microwave heating protective cover 31 are arranged on the vacuum drying box 3, the plurality of microwave heating devices are all arranged in the microwave heating protective cover 31, a vent is arranged on the microwave heating protective cover 31, a plurality of connecting ports for connecting the microwave heating devices are arranged on the side wall of the vacuum drying box 3, each microwave heating device comprises a microwave heater, a microwave transmission waveguide connected with the microwave generator and a radiator connected with the microwave generator, the microwave transmission waveguide is connected on the vacuum drying box 3 at the connecting port, and the silicon materials arranged in the vacuum drying box 3 are heated by the microwave heating devices to ensure that the silicon materials are heated more uniformly, it can reduce the dwell time of silicon material in silicon material washs case 2, under microwave heating device's guarantee, can take out under the inhomogeneous condition of silicon material not heated completely or heating and transport vacuum drying case 3, and silicon material has solved silicon material inhomogeneous problem of being heated in silicon material washs case 2 through microwave heating device secondary heating, reduces the cycle that whole silicon material was dried, improves the efficiency that silicon material was dried.
The material basket 9 is a cylindrical structure capable of being opened and closed, a closed lock used for locking the material basket 9 is arranged at an opening and closing position of the material basket 9, first gear discs 91 are arranged at two ends of the material basket 9, supporting rods 92 are arranged on the first gear discs 91, U-shaped seats used for supporting the material basket 9 to rotate in the vacuum drying box 3 are arranged on two opposite side walls in the vacuum drying box 3, and the material basket 9 is driven by a motor gear to rotate in the vacuum drying box 3.
Further, a third motor 33 is arranged on the side wall of the vacuum drying box 3, a rotating shaft is connected to the output end of the third motor 33, a second gear 34 matched with the first gear disc 91 is connected to the rotating shaft, the rotating shaft penetrates through the vacuum drying box 3, a sealing member for preventing air leakage is arranged at the joint of the rotating shaft and the vacuum drying box 3, the third motor 33 is located on the outer side of the vacuum drying box 3, the second gear 34 is arranged in the vacuum drying box 3, the first gear discs 91 at the two ends of the basket 9 are respectively arranged on the two second gears 34 in the vacuum drying box 3, the basket 9 is rotated in the vacuum drying box 3 under the action of the third motor 33 and the second gear 34, and the uniform heating of silicon materials is realized by matching with a microwave heating device.
Further, be provided with the second chain on ejection of compact placer 4, the second chain passes through fourth motor and the cooperation drive of second sprocket, silicon material accomplishes the stoving back in vacuum drying case 3, arm conveyor transports the basket 9 in vacuum drying case 3 to ejection of compact placer 4 on, the first toothed disc 91 at basket 9 both ends is arranged respectively in on the second chain on ejection of compact placer 4, basket 9 passes through the fourth motor, the drive of second sprocket and second chain realizes containing basket 9 of drying silicon material and outwards carries to silicon material microwave vacuum drying machine's discharge gate department.
When the silicon material microwave vacuum dryer is used, firstly, a material basket 9 containing silicon materials to be dried is placed on a feeding table 8, a mechanical arm conveying device grabs the material basket 9, the material basket 9 is transferred into a silicon material cleaning box 2, the silicon materials to be dried are transferred into a vacuum drying box 3 in the silicon material cleaning box 2 after being heated in a preliminary water bath, after the vacuum drying box 3 is closed, a microwave heating device is opened, treat the silicon material of drying and carry out the secondary heating after, close microwave heating device, to the evacuation of vacuum drying case 3, silicon material surface residual moisture after the heating evaporates fast under vacuum condition and takes out via vacuum pump 5 groups, the silicon material is by fast drying, after the silicon material is dried, vacuum drying case 3 opens the concora crush valve concora crush back, arm conveyor takes out the silicon material again from vacuum drying case 3 in and transports to ejection of compact placer, accomplish the drying process from this.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. The utility model provides a silicon material microwave vacuum drying-machine, its characterized in that, including the silicon material that is used for wasing the silicon material wash the case, a plurality of vacuum drying device that are used for drying the silicon material after wasing and be used for realizing the silicon material mechanical arm conveyor who shifts between silicon material washing case and vacuum drying device, vacuum drying device including be equipped with the vacuum drying case of chamber door and with the vacuum pump of vacuum drying case intercommunication, be provided with a plurality of microwave heating device that is used for heating the silicon material in the vacuum drying case on the vacuum drying case.
2. The microwave vacuum dryer for silicon materials as claimed in claim 1, wherein a heating device capable of heating the cleaning liquid in the silicon material cleaning tank is arranged in the silicon material cleaning tank.
3. The microwave vacuum dryer for silicon materials as claimed in claim 1, wherein the side wall of the vacuum drying box is provided with a plurality of connecting ports for connecting the microwave heating device, the microwave heating device comprises a microwave heater, a microwave transmission waveguide connected with the microwave generator and a radiator connected with the microwave generator, and the microwave transmission waveguide is connected with the vacuum drying box at the connecting ports.
4. The microwave vacuum dryer for silicon materials as claimed in claim 3, wherein the vacuum drying box is provided with a microwave heating protective cover, the microwave heating devices are all arranged in the microwave heating protective cover, and the microwave heating protective cover is provided with a vent.
5. The microwave vacuum dryer for silicon material according to claim 1, further comprising a main frame, wherein the silicon material cleaning box and the plurality of vacuum drying devices are disposed inside the main frame, the main frame is formed by splicing a plurality of sub-frames, and the silicon material cleaning box and the plurality of vacuum drying devices are distributed in the plurality of sub-frames.
6. The microwave vacuum dryer for silicon material according to claim 5, wherein the main frame is formed by splicing a first sub-frame and a second sub-frame, the silicon material cleaning box is arranged in the first sub-frame, a plurality of vacuum drying devices are arranged in the second sub-frame, the robot arm conveying device is arranged above the vacuum drying devices and the silicon material cleaning box, the robot arm conveying device comprises a material taking component for taking silicon material, a lifting component for driving the material taking component to lift and lower, and a horizontal sliding component for driving the lifting component to horizontally slide, the horizontal sliding component comprises a slide rail, a slide seat slidably connected to the slide rail, a first motor fixedly connected to the slide seat, a gear connected to an output end of the first motor, and a rack meshed with the gear and arranged corresponding to the slide rail, the lifting assembly is fixedly connected to the sliding seat and driven by a chain wheel and a chain, the sliding rail comprises a first sliding rail arranged on the first sub-frame and a second sliding rail arranged on the second sub-frame and capable of being connected with the first sliding rail in a matched mode, the rack comprises a first rack arranged on the first sub-frame and a second rack arranged on the second sub-frame and capable of being connected with the first rack in a matched mode, and a first connecting plate and a second connecting plate which are connected with each other in a matched mode are further arranged at the joint of the first sub-frame and the second sub-frame.
7. The microwave vacuum dryer for silicon materials as claimed in claim 1, further comprising a plurality of baskets for holding silicon materials to be dried, wherein first gear discs are arranged at two ends of the baskets, support rods are arranged on the first gear discs, U-shaped seats for supporting the baskets to rotate in the vacuum drying oven are arranged on two opposite side walls in the vacuum drying oven, and the baskets are driven by a motor and gears to rotate in the vacuum drying oven.
8. The microwave vacuum dryer for silicon material as claimed in claim 7, wherein the material basket is provided in a cylindrical structure which can be opened and closed.
9. The microwave vacuum dryer for silicon materials according to claim 7 or 8, wherein a third motor is arranged on the side wall of the vacuum drying box, the output end of the third motor is connected with a rotating shaft, the rotating shaft is connected with a second gear matched with the first gear disc, the rotating shaft penetrates through the vacuum drying box, the third motor is positioned on the outer side of the vacuum drying box, and the second gear is arranged inside the vacuum drying box.
10. The microwave vacuum dryer for silicon materials as claimed in claim 7, further comprising a loading platform for placing the silicon materials to be dried and a discharging placement device for placing the dried silicon materials, wherein the mechanical arm conveying device is arranged above the loading platform, the silicon material cleaning box, the vacuum drying device and the discharging placement device and used for realizing the transfer of the silicon materials among the loading platform, the silicon material cleaning box, the vacuum drying device and the discharging placement device, the discharging placement device is provided with a second chain, the second chain is driven by a fourth motor and a second chain wheel in a matching manner, and the material basket is arranged on the second chain and is conveyed outwards through the second chain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021598928.1U CN212778216U (en) | 2020-08-04 | 2020-08-04 | Silicon material microwave vacuum dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021598928.1U CN212778216U (en) | 2020-08-04 | 2020-08-04 | Silicon material microwave vacuum dryer |
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| Publication Number | Publication Date |
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| CN212778216U true CN212778216U (en) | 2021-03-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021598928.1U Active CN212778216U (en) | 2020-08-04 | 2020-08-04 | Silicon material microwave vacuum dryer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114459209A (en) * | 2022-01-28 | 2022-05-10 | 福建省民爆化工股份有限公司 | Intelligent drying method and device for civil explosive chemical agent |
| CN117864763A (en) * | 2024-03-11 | 2024-04-12 | 常州市昌隆电机股份有限公司 | Motor rotating shaft grabbing and conveying mechanism |
-
2020
- 2020-08-04 CN CN202021598928.1U patent/CN212778216U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114459209A (en) * | 2022-01-28 | 2022-05-10 | 福建省民爆化工股份有限公司 | Intelligent drying method and device for civil explosive chemical agent |
| CN117864763A (en) * | 2024-03-11 | 2024-04-12 | 常州市昌隆电机股份有限公司 | Motor rotating shaft grabbing and conveying mechanism |
| CN117864763B (en) * | 2024-03-11 | 2024-05-17 | 常州市昌隆电机股份有限公司 | Motor rotating shaft grabbing and conveying mechanism |
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