CN212769879U - Double-mode plasma reaction chamber made of ultrafine carbon material - Google Patents
Double-mode plasma reaction chamber made of ultrafine carbon material Download PDFInfo
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- CN212769879U CN212769879U CN202021398493.6U CN202021398493U CN212769879U CN 212769879 U CN212769879 U CN 212769879U CN 202021398493 U CN202021398493 U CN 202021398493U CN 212769879 U CN212769879 U CN 212769879U
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Abstract
The utility model relates to the field of superfine carbon material production equipment, and discloses a superfine carbon material dual-mode plasma reaction chamber, which comprises a reaction chamber body, wherein a generator system and a servo feeding system which are matched with each other are arranged in the reaction chamber body; the generator system comprises a dual-mode ion generator, one end of the dual-mode ion generator is arranged in the reaction chamber body, and the other end of the dual-mode ion generator is arranged outside the reaction chamber body and is electrically connected with a power supply; the servo feeding system comprises a graphite rod and a driving device for driving the graphite rod to move along the length direction of the graphite rod; one end of the graphite rod is arranged in the reaction chamber body, and the other end of the graphite rod is electrically connected with a power supply. The utility model discloses can adjust different modes in order to satisfy different demands produced superfine carbon material according to actual need, and can produce the higher superfine carbon material of quality.
Description
Technical Field
The utility model relates to an ultra-fine carbon material production facility field particularly, relates to ultra-fine carbon material dual mode plasma reaction cavity.
Background
Carbon materials are non-metallic solid materials based on carbon elements, and the industry of carbon material products belongs to the industry of basic raw materials, and the carbon materials are widely applied to the fields of metallurgy, electronics, chemical industry, machinery, sports equipment, medical appliances, energy, aerospace, nuclear industry and military. The superfine powder has surface effect, small size effect, quantum effect and macroscopic quantum tunnel effect, and has several special performances in catalysis, optics, magnetism, mechanics, etc. compared with crystal material of the same composition, so that it has important application in medicine, microelectronic, nuclear technology, etc.
At present, graphite is generally adopted as an anode and a cathode of the existing equipment, and the two graphite electrodes are electrified to form high temperature so as to prepare the ultrafine carbon material; but the product quality is low, the yield and the quality can not be flexibly adjusted, and different modes can not be adjusted according to actual requirements to meet different requirements for producing the ultrafine carbon material.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a superfine carbon material dual mode plasma reaction cavity can adjust different modes in order to satisfy different demands produced superfine carbon material according to actual need, and can produce the higher superfine carbon material of quality.
The embodiment of the utility model is realized like this:
the double-mode plasma reaction chamber of the superfine carbon material comprises a reaction chamber body, wherein a generator system and a servo feeding system which are matched with each other are arranged in the reaction chamber body; the generator system comprises a dual-mode ion generator, one end of the dual-mode ion generator is arranged in the reaction chamber body, and the other end of the dual-mode ion generator is arranged outside the reaction chamber body and is electrically connected with a power supply; the servo feeding system comprises a graphite rod and a driving device for driving the graphite rod to move along the length direction of the graphite rod; one end of the graphite rod is arranged in the reaction chamber body, and the other end of the graphite rod is electrically connected with a power supply; the dual-mode ion generator and the graphite rod are symmetrically arranged along the axis of the reaction chamber body; and the axis of the dual-mode ion generator and the axis of the graphite rod are in the same straight line.
Further, the generator system further comprises a first harness for sealingly securing the dual mode ionizer; the side wall surface of the reaction chamber body is provided with a first through hole, and the first fixing sleeve is fixed on the side wall surface of the reaction chamber body and is communicated with the first through hole in a sealing manner; one end of the dual-mode ion generator sequentially penetrates through the first fixing sleeve and the first through hole and then extends into the reaction chamber body, and the other end of the dual-mode ion generator is fixedly connected with the first fixing sleeve in a sealing mode.
Further, the servo feeding system also comprises a metal bar and a second fixing sleeve for sealing and fixing the servo feeding system; the side wall surface of the reaction chamber body is provided with a second through hole, and the second fixing sleeve is fixed on the side wall surface of the reaction chamber body and is communicated with the second through hole in a sealing manner; one end of the metal rod is fixedly connected with the output end of the driving device, and the other end of the metal rod is fixedly connected with one end of the graphite rod, which is far away from the dual-mode ion generator; and the metal rod and the graphite rod penetrate through the second fixed sleeve.
Further, the reaction chamber body comprises an outer chamber and an inner chamber which are sleeved, and a water-cooling chamber is formed between the outer chamber and the inner chamber; the wall surface of the outer chamber is provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are communicated with the water-cooling chamber.
Furthermore, an online sampling system for online sampling at any time is arranged on the reaction chamber body; the online sampling system comprises a sealing element, a sampling element and a third fixing sleeve, wherein the sealing element and the sampling element are matched for use, the third fixing sleeve is used for sealing and fixing the sealing element, a third through hole is formed in the side wall surface of the reaction chamber body, and the third fixing sleeve is fixed on the side wall surface of the reaction chamber body and is communicated with the third through hole in a sealing manner; the sealing element is fixedly connected with the third fixing sleeve in a sealing way; the sealing element comprises an upper barrel and a lower barrel, and the upper barrel is communicated and fixed with the lower barrel; a sealing ring is fixed at one end of the upper barrel body, which is far away from the lower barrel body, a sealing ring is arranged on the inner wall of the sealing ring, and the inner diameter of the sealing ring is matched with the outer diameter of the sampling part; the lower cylinder body is provided with a sealing valve for sealing the inner chamber and a blocking valve for blocking the sealing valve; the sampling part comprises a fixed rod, a handheld rod is fixed at one end of the fixed rod, and a sampling platform is fixed at the other end of the fixed rod; the sampling piece sequentially penetrates through the third fixing sleeve and the third through hole, and one end of the sampling table extends into the inner cavity.
Furthermore, the sampling piece also comprises a water cooling sleeve, the water cooling sleeve is sleeved outside the fixed rod, a water cooling cavity is formed between the water cooling sleeve and the fixed rod, and a second water inlet and a second water outlet are formed at one end, close to the handheld rod, of the water cooling sleeve; one end of the water cooling sleeve is hermetically connected with the outer wall of the fixed rod, and one end of the water cooling sleeve is hermetically connected with the sampling platform; the sampling platform comprises a sampling surface and a cooling cavity, and the cooling cavity is communicated with the water cooling cavity; and a limiting table is fixed on the outer wall of one end, close to the handheld rod, of the water cooling sleeve.
Further, the sealing valve is arranged at one end, close to the upper cylinder, of the lower cylinder; the sealing valve comprises a first sealing plate, a first sealing sleeve and a first air cylinder for driving the first sealing plate to move along a first preset direction, and the first preset direction is vertically distributed with the central axis of the lower barrel; the outer wall surface of the first sealing plate is used for being in sealing contact with the inner wall surface of the lower cylinder body; a first opening for a first sealing plate to pass through is formed in the wall surface of the lower barrel, one end of the first sealing sleeve is fixedly connected with the wall surface of the lower barrel and communicated with the first opening, a first end wall is arranged at the other end of the first sealing sleeve, and a telescopic rod of the first air cylinder penetrates through the first end wall to be arranged in the first sealing sleeve and is fixedly connected with the first sealing plate; the telescopic rod of the first cylinder is connected with the first end wall in a sliding and sealing manner; a first groove body is formed in the inner wall of the lower barrel in the circumferential direction and communicated with the first opening; the lateral wall of the first groove body and the lateral wall of the first opening are both provided with sealing rings.
Furthermore, the blocking valve is arranged at one end of the lower barrel body, which is far away from the upper barrel body; the blocking valve comprises a second sealing plate, a second sealing sleeve and a second air cylinder for driving the second sealing plate to move along a second preset direction, and the second preset direction is vertically distributed with the central axis of the lower cylinder body; the outer wall surface of the second sealing plate is used for being abutted against the inner wall surface of the lower cylinder; the second sealing plate is made of high-temperature-resistant metal; a second opening for a second sealing plate to pass through is formed in the wall surface of the lower barrel, one end of a second sealing sleeve is fixedly connected with the wall surface of the lower barrel and communicated with the second opening, a second end wall is arranged at the other end of the second sealing sleeve, and a telescopic rod of a second air cylinder penetrates through the second end wall to be arranged in the second sealing sleeve and is fixedly connected with the second sealing plate; the telescopic rod of the second cylinder is connected with the second end wall in a sliding and sealing mode; and a second groove body is formed in the circumferential direction of the inner wall of the lower barrel body and communicated with the second opening.
Has the advantages that:
the utility model discloses a be provided with dual mode ion generator and the graphite rod that cooperate and use, and dual mode ion generator and graphite rod all are connected with the power electricity, can form non-transfer arc mode through setting up dual mode ion generator circular telegram, or set up dual mode ion generator and graphite rod circular telegram simultaneously and form the transfer arc mode and react and generate superfine carbon material, can select different modes according to different demands and produce superfine carbon material; and can produce the ultrafine carbon material with higher quality.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a front view of a dual-mode plasma reaction chamber made of an ultrafine carbon material according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view taken along line A-A of FIG. 1;
FIG. 3 is a cross-sectional view taken along line B-B of FIG. 1;
fig. 4 is a cross-sectional view of an online sampling system according to an embodiment of the present invention.
Icon: 1-a reaction chamber body, 101-an outer chamber, 102-an inner chamber, 103-a water-cooling chamber, 104-a vacuum hole, 105-a gas interface, 106-a temperature measuring interface, 107-a pressure measuring interface, 108-a first water inlet, 109-a first water outlet, 2-a generator system, 21-a dual-mode ion generator, 22-a first fixing sleeve, 221-an inner sleeve, 222-an outer sleeve, 223-a first chamber, 3-a servo feeding system, 301-a driving device, 302-a metal rod, 303-a graphite rod, 304-a second fixing sleeve, a 4-online sampling system, 41-a sealing element, 411-an upper cylinder body, 412-a lower cylinder body, 413-a sealing ring, 42-a sampling element, a fixing rod, 422-a handheld rod, 423-sampling platform, 4231-sampling surface, 4232-cooling cavity, 424-water jacket, 425-water cooling cavity, 426-second water inlet, 427-second water outlet, 428-limit platform, 43-seal valve, 431-first seal plate, 432-first seal sleeve, 433-first cylinder, 434-first opening, 435-first groove body, 44-block valve, 441-second seal plate, 442-second seal sleeve, 443-second cylinder, 444-second opening, 445-second groove body, 45-third fixed sleeve, 5-observation piece, 501-observation opening, 502-observation window and 6-seal ring.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
Examples
Referring to fig. 1 to 4, the present embodiment provides a dual-mode plasma reaction chamber of an ultrafine carbon material, including a reaction chamber body 1, wherein a generator system 2 and a servo feeding system 3 are disposed in the reaction chamber body 1 and used in cooperation; the generator system 2 comprises a dual-mode ion generator 21, one end of the dual-mode ion generator 21 is arranged in the reaction chamber body 1, and the other end of the dual-mode ion generator 21 is arranged outside the reaction chamber body 1 and is electrically connected with a power supply; the dual mode ionizer 21 is a gun body structure; the servo feeding system 3 comprises a graphite rod 303 and a driving device 301 for driving the graphite rod 303 to move along the length direction of the graphite rod; one end of the graphite rod 303 is arranged in the reaction chamber body 1, and the other end of the graphite rod 303 is electrically connected with a power supply; the dual-mode ion generator 21 and the graphite rod 303 are symmetrically arranged along the axis of the reaction chamber body 1; and the axis of the dual-mode ion generator 21 is in the same straight line with the axis of the graphite rod 303. The driving device 301 is a stepping motor, and in other embodiments of the present invention, the driving device 301 may also adopt a linear motor or an air cylinder.
By arranging the dual-mode ion generator 21 and the graphite rod 303 which are used in a matched mode, the non-transferred arc mode can be formed by electrifying the dual-mode ion generator 21, or the transferred arc mode can be formed by electrifying the dual-mode ion generator 21 and the graphite rod 303 at the same time to react to generate the ultrafine carbon material, and different modes can be selected according to different requirements to produce the ultrafine carbon material; the dual mode ionizer 21 can produce an ultrafine carbon material of higher quality.
In the present embodiment, the generator system 2 further comprises a first harness 22 for hermetically holding the dual-mode ionizer 21; a first through hole is formed in the side wall surface of the reaction chamber body 1, and the first fixing sleeve 22 is fixed on the side wall surface of the reaction chamber body 1 and is in sealed communication with the first through hole; one end of the dual-mode ion generator 21 sequentially penetrates through the first fixing sleeve 22 and the first through hole and then extends into the reaction chamber body 1, and the other end of the dual-mode ion generator 21 is fixedly connected with the first fixing sleeve 22 in a sealing manner; the first fixing sleeve 22 comprises an inner sleeve 221 and an outer sleeve 222, the inner sleeve 221 is fixed on the side wall of the inner chamber 102, the outer sleeve 222 is fixed on the side wall of the outer chamber 101, a first chamber 223 is formed between the inner sleeve 221 and the outer sleeve 222, and the first chamber 223 is communicated with the water cooling cavity 425 chamber 103; condensed water is introduced from the first water inlet 108 and enters the water cooling cavity 425 chamber 103, so that the water cooling cavity 425 chamber 103 is kept in a cooling state, the wall surface of the outer chamber 101 is kept in a cooling state, and personnel are prevented from being scalded; the wall surface of the inner chamber 102 is kept in a cooling state, so that the high-temperature graphite steam can be rapidly condensed into the ultrafine carbon material when meeting the cooled wall surface of the inner chamber 102.
In this embodiment, the servo feed system 3 further comprises a metal bar 302 and a second fixing sleeve 304 for hermetically fixing the servo feed system 3; a second through hole is formed in the side wall surface of the reaction chamber body 1, and the second fixing sleeve 304 is fixed on the side wall surface of the reaction chamber body 1 and is in sealed communication with the second through hole; one end of the metal rod 302 is fixedly connected with the output end of the driving device 301, and the other end of the metal rod 302 is fixedly connected with one end of the graphite rod 303 far away from the dual-mode ion generator 21; the metal rod 302 and the graphite rod 303 penetrate through the second fixing sleeve 304, and the driving device 301 is fixedly connected with the second fixing sleeve 304 in a sealing manner; the second fixture sleeve 304 has the same structure as the first fixture sleeve 22; with the generation of the ultrafine carbon material by the graphite rod 303, the graphite rod 303 becomes shorter and shorter, and the driving device 301 can drive the metal rod 302 and the graphite rod 303 to move along the length direction of the graphite rod 303 and close to the dual-mode ion generator 21, so that a certain distance is always kept between the graphite rod 303 and the dual-mode ion generator 21; the double-mode ion generator 21 is in a non-transferred arc mode after being electrified, graphite steam is directly generated by the graphite rod 303 due to high temperature, and an ultrafine carbon material is generated after condensation, meanwhile, high-temperature plasma generated by the double-mode ion generator impacts the graphite rod 303, carbon atoms are stripped from the graphite rod 303 to generate the ultrafine carbon material, so that the carbon atoms can be easily stripped from the graphite rod 303, and the yield of the ultrafine carbon material is higher; when the dual-mode ionizer 21 and the metal rod 302 are simultaneously energized, the dual-mode ionizer 21 serves as a cathode, the graphite rod 303 serves as an anode, a transferred arc mode is formed, and the temperature is very high, so that the graphite rod 303 directly generates graphite steam, and the high-temperature graphite steam is condensed into an ultrafine carbon material when meeting the wall of the cold inner chamber 102, and a finer carbon material can be generated, so that the quality of the ultrafine carbon material is higher.
The reaction chamber body 1 comprises an outer chamber 101 and an inner chamber 102 which are sleeved, and a water-cooling chamber 103 is formed between the outer chamber 101 and the inner chamber 102; a first water inlet 108 and a first water outlet 109 are formed in the wall surface of the outer chamber 101, and the first water inlet 108 and the first water outlet 109 are both communicated with the water cooling chamber 103; condensed water is introduced from the first water inlet 108 and enters the water-cooling chamber 103, so that the water-cooling chamber 103 is kept in a cooling state, the wall surface of the outer chamber 101 is kept in a cooling state, and personnel are prevented from being scalded; the wall surface of the inner chamber 102 is kept in a cooling state, so that the high-temperature graphite steam can be rapidly condensed into the ultrafine carbon material when meeting the cooled wall surface of the inner chamber 102.
In this embodiment, the reaction chamber body 1 is further provided with an online sampling system 4 for online sampling at any time; the online sampling system 4 comprises a sealing element 41, a sampling element 42 and a third fixing sleeve 45, wherein the sealing element 41 and the sampling element 42 are matched with each other, the third fixing sleeve 45 is used for sealing and fixing the sealing element 41, a third through hole is formed in the side wall surface of the reaction chamber body 1, and the third fixing sleeve 45 is fixed on the side wall surface of the reaction chamber body 1 and is communicated with the third through hole in a sealing manner; the sealing element 41 is fixedly connected with the third fixing sleeve 45 in a sealing manner; the third fixing sleeve 45 has the same structure as the first fixing sleeve 22; the sealing element 41 comprises an upper cylinder 411 and a lower cylinder 412, and the upper cylinder 411 is fixedly communicated with the lower cylinder 412; a sealing ring 413 is fixed at one end of the upper cylinder 411, which is far away from the lower cylinder 412, a sealing ring 6 is arranged on the inner wall of the sealing ring 413, and the inner diameter of the sealing ring 413 is matched with the outer diameter of the sampling member 42; the lower cylinder 412 is provided with a sealing valve 43 for sealing the inner chamber 102 and a blocking valve 44 for blocking the sealing valve 43; the sampling piece 42 comprises a fixed rod 421, one end of the fixed rod 421 is fixed with a handheld rod 422, and the other end of the fixed rod 421 is fixed with a sampling platform 423; the sampling member 42 sequentially passes through the third fixing sleeve 45 and the third through hole, and one end of the sampling platform 423 extends into the inner chamber 102.
During sampling, the sampling piece 42 is arranged in the upper cylinder 411 in a penetrating manner through the third fixing sleeve 45 and the third through hole, the sealing valve 43 and the blocking valve 44 are opened, the hand-held rod 422 is held, the sampling platform 423 of the sampling piece 42 is arranged in the inner chamber 102 in a penetrating manner to perform sampling, high-temperature graphite steam is condensed on the sampling surface 4231 of the sampling platform 423, after sampling is completed, the sampling piece 42 is firstly extracted into the upper cylinder 411, the blocking valve 44 and the sealing valve 43 are sequentially closed, and then the sampling piece 42 is taken out from the upper cylinder 411 to obtain a sample; the sealing state is always kept in the whole sampling process, after the sample is taken, the sealing valve 43 is closed to keep the inner chamber 102 in the sealing state, so that the sample can be sampled and detected at any time on line, the quality of the sample can be monitored at any time, and the reaction condition can be adjusted in time to ensure the quality of the sample.
In this embodiment, the sampling member 42 further includes a water cooling jacket 424, the water cooling jacket 424 is sleeved outside the fixing rod 421, a water cooling cavity 425 is formed between the water cooling jacket 424 and the fixing rod 421, and a second water inlet 426 and a second water outlet 427 are formed at one end of the water cooling jacket 424 close to the handheld rod 422; one end of the water cooling jacket 424 is hermetically connected with the outer wall of the fixing rod 421, and one end of the water cooling jacket 424 is hermetically connected with the sampling platform 423; the sampling platform 423 comprises a sampling surface 4231 and a cooling cavity 4232, and the cooling cavity 4232 is communicated with the water cooling cavity 425; a limiting table 428 is fixed on the outer wall of one end, close to the handheld rod 422, of the water cooling jacket 424; the limiting platform 428 is an annular platform, and in other embodiments of the present invention, the limiting platform 428 may also be a rectangular platform; condensed water can be introduced into the water cooling cavity 425 and the cooling cavity 4232 from the second water inlet 426, the temperature in the superfine carbon material reaction cavity is high, the sampling piece 42 extends into the inner cavity 102, the low temperature of the cooling cavity 4232 can enable the sampling surface 4231 to keep low temperature, damage to the sampling platform 423 due to high temperature is avoided, and graphite steam with high temperature in the inner cavity 102 can condense on the sampling surface 4231 after encountering the low-temperature sampling surface 4231, so that sampling can be conveniently completed, the low-temperature water cooling sleeve 424 is always in sealing contact with the inner wall of the sealing ring 413, the sealing ring 413 and the sealing ring 6 can keep low temperature, and leakage caused by high-temperature damage to the sealing ring 413 and the sealing ring 6 is avoided; the stop 428 is engaged with the top end of the sealing ring 413 to allow the sampling member 42 to extend into the inner chamber 102 at a proper position and prevent the sampling member 42 from falling into the inner chamber 102.
In this embodiment, the sealing valve 43 is disposed at one end of the lower cylinder 412 close to the upper cylinder 411; the sealing valve 43 comprises a first sealing plate 431, a first sealing sleeve 432 and a first cylinder 433 for driving the first sealing plate 431 to move along a first preset direction, wherein the first preset direction is vertically distributed with the central axis of the lower cylinder 412; the outer wall surface of the first sealing plate 431 is in sealing contact with the inner wall surface of the lower cylinder 412; a first opening 434 for a first sealing plate 431 to pass through is formed in the wall surface of the lower cylinder 412, one end of a first sealing sleeve 432 is fixedly connected with the wall surface of the lower cylinder 412 and communicated with the first opening 434, the other end of the first sealing sleeve 432 is provided with a first end wall, and a telescopic rod of a first air cylinder 433 penetrates through the first end wall to be arranged in the first sealing sleeve 432 and fixedly connected with the first sealing plate 431; the telescopic rod of the first air cylinder 433 is connected with the first end wall in a sliding and sealing mode; a first groove body 435 is formed in the circumferential direction of the inner wall of the lower cylinder 412, and the first groove body 435 is communicated with the first opening 434; the side wall of the first groove body 435 and the side wall of the first opening 434 are both provided with a sealing ring 6; the first cylinder 433 drives the first sealing plate 431 to move along the vertical direction of the central axis of the lower cylinder 412, when the first cylinder 433 drives the first sealing plate 431 to move through the first opening 434 to the lower cylinder 412 and to be clamped into the first groove 435, the side walls of the first groove 435 and the sealing rings 6 arranged on the side walls of the first opening 434 are sealed with the edge of the first sealing plate 431, so as to seal the lower cylinder 412 and the inner chamber 102.
In this embodiment, the blocking valve 44 is disposed at one end of the lower cylinder 412 far from the upper cylinder 411; the blocking valve 44 includes a second sealing plate 441, a second sealing sleeve 442 and a second cylinder 443 for driving the second sealing plate 441 to move along a second predetermined direction, which is perpendicular to the central axis of the lower cylinder 412; the outer wall surface of the second seal plate 441 is abutted against the inner wall surface of the lower cylinder 412; the second sealing plate 441 is made of high-temperature-resistant metal; a second opening 444 for a second sealing plate 441 to pass through is formed in the wall surface of the lower cylinder 412, one end of the second sealing sleeve 442 is fixedly connected with the wall surface of the lower cylinder 412 and is communicated with the second opening 444, the other end of the second sealing sleeve 442 is provided with a second end wall, and an expansion rod of the second air cylinder 443 penetrates through the second end wall and is arranged in the second sealing sleeve 442 and is fixedly connected with the second sealing plate 441; the telescopic rod of the second air cylinder 443 is connected with the second end wall in a sliding and sealing mode; a second groove body 445 is formed in the circumferential direction of the inner wall of the lower cylinder body 412, and the second groove body 445 is communicated with the second opening 444; the second cylinder 443 drives the second sealing plate 441 to move along the vertical direction of the central axis of the lower cylinder 412, when the second cylinder 443 drives the second sealing plate 441 to move through the second opening 444 into the lower cylinder 412 and be clamped into the second groove body 445, the blocking valve 44 has a blocking effect on the inner chamber 102 and the sealing valve 43, so that flame in the ultra-fine carbon material reaction chamber can be blocked from directly reaching the sealing valve 43, and the sealing valve 43 is prevented from being damaged and leaking; the second sealing plate disposed in the blocking valve 44 is made of high temperature resistant metal material, so as to prevent the sealing valve 43 from being damaged by the flame in the inner chamber 102, and effectively block the sealing valve 43 from being damaged by the flame in the inner chamber 102.
In this embodiment, the first fixing sleeve 22 includes an inner sleeve 221 and an outer sleeve 222, the inner sleeve 221 is fixed on the sidewall of the inner chamber 102, the outer sleeve 222 is fixed on the sidewall of the outer chamber 101, a first chamber 223 is formed between the inner sleeve 221 and the outer sleeve 222, and the first chamber 223 is communicated with the water cooling chamber 425 and the chamber 103. The second fixing sleeve 304 and the third fixing sleeve 45 have the same structure as the first fixing sleeve 22. The first fixture sleeve 22 facilitates sealing and fixing the dual-mode ionizer 21, the second fixture sleeve 304 facilitates sealing and fixing the servo feeding system 3, and the third fixture sleeve 45 facilitates sealing and fixing the on-line sampling system 4.
In this embodiment, one end wall of the reaction chamber body 1 is provided with an observation part 5, the observation part 5 includes an observation port 501, the observation port 501 is opened on one end wall of the reaction chamber body 1, and an observation window 502 is fixed on the observation port 501 in a sealing manner; the observation window 502 is made of transparent material; the reaction of the graphite rod 303 in the inner chamber 102 can be observed through the observation window 502 so as to adjust the parameters of the dual-mode plasma generator and the feeding speed of the graphite rod 303.
In this embodiment, a vacuumizing hole 104 is formed in one end wall of the reaction chamber body 1 away from the observation member 5, and the vacuumizing hole 104 is hermetically connected with an output end of a vacuum machine, so that the interior of the inner chamber 102 is vacuumized conveniently, and the inner chamber 102 is kept in a high-vacuum or slightly-negative-pressure environment suitable for reaction; the side wall of the reaction chamber body 1 is further provided with a gas interface 105 for introducing medium gas and measuring oxygen content, a temperature measurement interface 106 for detecting temperature and a pressure measurement interface 107 for detecting pressure.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The double-mode plasma reaction chamber of the superfine carbon material comprises a reaction chamber body (1), and is characterized in that a generator system (2) and a servo feeding system (3) which are matched with each other are arranged in the reaction chamber body (1);
the generator system (2) comprises a dual-mode ion generator (21), one end of the dual-mode ion generator (21) is arranged in the reaction chamber body (1), and the other end of the dual-mode ion generator (21) is arranged outside the reaction chamber body (1) and is electrically connected with a power supply;
the servo feeding system (3) comprises a graphite rod (303) and a driving device (301) for driving the graphite rod (303) to move along the length direction of the graphite rod; one end of the graphite rod (303) is arranged in the reaction chamber body (1), and the other end of the graphite rod (303) is electrically connected with a power supply;
the dual-mode ion generator (21) and the graphite rod (303) are symmetrically arranged along the axis of the reaction chamber body (1); and the axis of the dual-mode ion generator (21) is in the same straight line with the axis of the graphite rod (303).
2. The bimodal plasma reaction chamber of ultrafine carbon material as claimed in claim 1, wherein said generator system (2) further comprises a first fixture housing (22) for hermetically holding a bimodal ionizer (21); a first through hole is formed in the side wall surface of the reaction chamber body (1), and the first fixing sleeve (22) is fixed on the side wall surface of the reaction chamber body (1) and is communicated with the first through hole in a sealing manner; one end of the dual-mode ion generator (21) sequentially penetrates through the first fixing sleeve (22) and the first through hole and then extends into the reaction chamber body (1), and the other end of the dual-mode ion generator (21) is fixedly connected with the first fixing sleeve (22) in a sealing mode.
3. The ultra-fine carbon material dual-mode plasma reaction chamber as claimed in claim 1, wherein the servo feed system (3) further comprises a metal rod (302) and a second fixing sleeve (304) for sealing and fixing the servo feed system (3); a second through hole is formed in the side wall surface of the reaction chamber body (1), and the second fixing sleeve (304) is fixed on the side wall surface of the reaction chamber body (1) and is communicated with the second through hole in a sealing manner; one end of the metal rod (302) is fixedly connected with the output end of the driving device (301), and the other end of the metal rod (302) is fixedly connected with one end, far away from the dual-mode ion generator (21), of the graphite rod (303); the metal rod (302) and the graphite rod (303) penetrate through the second fixing sleeve (304).
4. The ultra-fine carbon material dual-mode plasma reaction chamber as claimed in claim 1, wherein the reaction chamber body (1) comprises an outer chamber (101) and an inner chamber (102) which are sleeved, and a water cooling chamber (103) is formed between the outer chamber (101) and the inner chamber (102); the wall surface of the outer chamber (101) is provided with a first water inlet (108) and a first water outlet (109), and the first water inlet (108) and the first water outlet (109) are communicated with the water-cooling chamber (103).
5. The ultra-fine carbon material dual-mode plasma reaction chamber as claimed in claim 4, wherein the reaction chamber body (1) is further provided with an online sampling system (4) for online sampling at any time; the online sampling system (4) comprises a sealing element (41), a sampling element (42) and a third fixing sleeve (45) which is used for sealing and fixing the sealing element (41), wherein the sealing element (41) and the sampling element are matched with each other, a third through hole is formed in the side wall surface of the reaction chamber body (1), and the third fixing sleeve (45) is fixed to the side wall surface of the reaction chamber body (1) and is communicated with the third through hole in a sealing manner; the sealing element (41) is fixedly connected with the third fixing sleeve (45) in a sealing way;
the sealing element (41) comprises an upper cylinder body (411) and a lower cylinder body (412), and the upper cylinder body (411) is communicated and fixed with the lower cylinder body (412); a sealing ring (413) is fixed at one end, far away from the lower cylinder (412), of the upper cylinder (411), a sealing ring (6) is arranged on the inner wall of the sealing ring (413), and the inner diameter of the sealing ring (413) is matched with the outer diameter of the sampling piece (42); the lower cylinder (412) is provided with a sealing valve (43) used for sealing the inner chamber (102) and a blocking valve (44) used for blocking the sealing valve (43);
the sampling piece (42) comprises a fixed rod (421), one end of the fixed rod (421) is fixed with a handheld rod (422), and the other end of the fixed rod (421) is fixed with a sampling table (423); the sampling piece (42) sequentially penetrates through the third fixing sleeve (45) and the third through hole, and one end of the sampling platform (423) extends into the inner cavity (102).
6. The dual-mode plasma reaction chamber with the ultrafine carbon material as claimed in claim 5, wherein the sampling member (42) further comprises a water cooling jacket (424), the water cooling jacket (424) is sleeved outside the fixing rod (421), a water cooling cavity (425) is formed between the water cooling jacket (424) and the fixing rod (421), and a second water inlet (426) and a second water outlet (427) are formed at one end of the water cooling jacket (424) close to the handheld rod (422); one end of the water cooling jacket (424) is hermetically connected with the outer wall of the fixing rod (421), and one end of the water cooling jacket (424) is hermetically connected with the sampling platform (423); the sampling platform (423) comprises a sampling surface (4231) and a cooling cavity (4232), and the cooling cavity (4232) is communicated with a water cooling cavity (425); and a limiting table (428) is fixed on the outer wall of one end, close to the handheld rod (422), of the water cooling sleeve (424).
7. The ultra-fine carbon material dual-mode plasma reaction chamber as claimed in claim 5, wherein the sealing valve (43) is disposed at one end of the lower cylinder (412) close to the upper cylinder (411); the sealing valve (43) comprises a first sealing plate (431), a first sealing sleeve (432) and a first cylinder (433) for driving the first sealing plate (431) to move along a first preset direction, and the first preset direction is vertically distributed with the central axis of the lower cylinder (412); the outer wall surface of the first sealing plate (431) is used for being in sealing contact with the inner wall surface of the lower cylinder (412);
a first opening (434) for a first sealing plate (431) to pass through is formed in the wall surface of the lower cylinder (412), one end of a first sealing sleeve (432) is fixedly connected with the wall surface of the lower cylinder (412) and communicated with the first opening (434), a first end wall is arranged at the other end of the first sealing sleeve (432), and a telescopic rod of a first air cylinder (433) penetrates through the first end wall to be arranged in the first sealing sleeve (432) and is fixedly connected with the first sealing plate (431); the telescopic rod of the first air cylinder (433) is connected with the first end wall in a sliding and sealing mode; a first groove body (435) is formed in the circumferential direction of the inner wall of the lower barrel body (412), and the first groove body (435) is communicated with the first opening (434); and the side wall of the first groove body (435) and the side wall of the first opening (434) are both provided with a sealing ring (6).
8. The ultra-fine carbon material dual-mode plasma reaction chamber as claimed in claim 5, wherein the blocking valve (44) is arranged at one end of the lower cylinder (412) far away from the upper cylinder (411); the blocking valve (44) comprises a second sealing plate (441), a second sealing sleeve (442) and a second cylinder (443) for driving the second sealing plate (441) to move along a second preset direction, wherein the second preset direction is perpendicular to the central axis of the lower cylinder (412); the outer wall surface of the second sealing plate (441) is abutted against the inner wall surface of the lower cylinder (412); the second sealing plate (441) is made of high-temperature-resistant metal;
a second opening (444) for a second sealing plate (441) to pass through is formed in the wall surface of the lower cylinder (412), one end of a second sealing sleeve (442) is fixedly connected with the wall surface of the lower cylinder (412) and communicated with the second opening (444), a second end wall is arranged at the other end of the second sealing sleeve (442), and an expansion rod of the second air cylinder (443) penetrates through the second end wall to be arranged in the second sealing sleeve (442) and is fixedly connected with the second sealing plate (441); the telescopic rod of the second cylinder (443) is connected with the second end wall in a sliding and sealing mode; and a second groove body (445) is formed in the circumferential direction of the inner wall of the lower barrel body (412), and the second groove body (445) is communicated with the second opening (444).
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111908445A (en) * | 2020-07-15 | 2020-11-10 | 成都金创立科技有限责任公司 | Superfine carbon material dual-mode plasma reaction device and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111908445A (en) * | 2020-07-15 | 2020-11-10 | 成都金创立科技有限责任公司 | Superfine carbon material dual-mode plasma reaction device and preparation method thereof |
| CN111908445B (en) * | 2020-07-15 | 2023-02-03 | 成都金创立科技有限责任公司 | Superfine carbon material dual-mode plasma reaction device and preparation method thereof |
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