CN212760129U

CN212760129U - Pushing head of plasma cleaning machine

Info

Publication number: CN212760129U
Application number: CN202021356290.0U
Authority: CN
Inventors: 郭峰; 刘向东; 彭小巧; 王宇; 国际瑞
Original assignee: Suzhou Aslin Automation Technology Co ltd; Suzhou Uvbeam Photoelectric Technology Co ltd; Kunshan Plaux Electronics Technology Co ltd
Current assignee: Suzhou Aslin Automation Technology Co ltd; Suzhou Uvbeam Photoelectric Technology Co ltd; Kunshan Plaux Electronics Technology Co ltd
Priority date: 2020-07-10
Filing date: 2020-07-10
Publication date: 2021-03-23
Anticipated expiration: 2030-07-10

Abstract

The utility model relates to a push head of a plasma cleaning machine, belonging to the technical field of semiconductor processing; the pushing device comprises a pushing guide plate and a pushing block arranged in front of the guide plate, wherein a material clamping opening is formed in the pushing block, a bent reinforcing groove is formed in the pushing guide, and the extending direction of the reinforcing groove is parallel to the pushing direction; the utility model provides a plasma cleaning machine cuts somebody's hair, can guarantee structural strength, reduce to push away the material card and die and empty load, improve operating stability, it is more convenient to use.

Description

Pushing head of plasma cleaning machine

Technical Field

The utility model relates to a plasma cleaning machine cuts somebody's hair belongs to semiconductor processing technology field.

Background

The plasma cleaning machine is used for the field of semiconductors, and can be used for cleaning materials such as lead frames, PCBs (printed circuit boards), wafers and ceramics, a push head is arranged in the plasma cleaning machine and used for pushing the materials from a material box into a cleaning station for cleaning, the conventional cleaning push head is plate-shaped, the structural strength is general, the material pushing machine is easy to be stuck due to bending deformation during material pushing, and no-load is caused by the fact that the end part of the conventional cleaning push head is small in contact area with the materials and the materials are easy to be staggered during material pushing.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome not enough among the prior art, provide a plasma cleaning machine pusher, can guarantee structural strength, reduce to push away the material card and die and empty load, improve operating stability, it is more convenient to use.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a plasma cleaning machine pusher, its includes pushes away the material deflector and sets up the ejector pad in deflector the place ahead, be equipped with the card material opening on the ejector pad, it is equipped with the stiffening groove on the material direction to push away, the extending direction in stiffening groove is parallel with the material pushing direction.

Furthermore, the push blocks are detachably connected with the material pushing guide plate, and the plane where the material pushing guide plate is located passes through the material clamping opening.

Furthermore, two adjacent edges of the pushing guide plate are in transition connection through chamfers.

Furthermore, the card material gap is trapezoidal setting and the vertical distance of front end is greater than the vertical distance of rear end.

Further, the thickness of the push block is smaller than the vertical distance between two adjacent materials, and the vertical distance at the rear end of the material clamping gap is larger than the thickness of the materials.

Furthermore, a lightening hole is arranged on the pushing guide plate.

Compared with the prior art, the utility model discloses the beneficial effect who reaches:

the material pushing guide plate of the technical scheme is provided with the reinforcing grooves, so that the structural strength of the pushing head can be enhanced, the deformation is reduced, and the use stability is ensured;

according to the technical scheme, the pushing block is arranged at the front end of the pushing guide plate and detachably connected with the pushing guide plate, the proper pushing block can be selected according to the shape and size of an actual material and the parameters such as the number, the distance and the like of the pushing block are set, so that the applicability is stronger;

the pushing block of the technical scheme is provided with the trapezoidal pushing notch, so that materials can be better butted and clamped, the butting error between the pushing block and the materials is reduced, and no-load is avoided;

the periphery of the material pushing guide plate in the technical scheme is chamfered, so that the material receiving box can be better connected, the material receiving box can conveniently slide in the material receiving box, and the jamming is reduced;

this technical scheme is equipped with the lightening hole, can alleviate the weight of whole pushing head when guaranteeing to push away the material deflector along the structural strength who pushes away the material direction, improves the drive efficiency who pushes away the material.

Drawings

Fig. 1 is a schematic perspective view of a pushing head of a plasma cleaning machine according to an embodiment of the present invention;

fig. 2 is a schematic top view of a partial structure of a pushing head of a plasma cleaning machine according to an embodiment of the present invention;

fig. 3 is a schematic side view of a pushing block of a pushing head of a plasma cleaning machine according to an embodiment of the present invention.

Description of reference numerals: 1-pushing material guide plate, 2-pushing block, 3-clamping material gap, 4-reinforcing groove, 5-chamfer and 6-lightening hole.

Detailed Description

The present invention will be further described with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The pushing head of the plasma cleaning machine comprises a pushing guide plate 1 and a pushing block 2 arranged in front of the guide plate, wherein a material clamping notch 3 is formed in the pushing block, a bent reinforcing groove 4 is formed in the pushing guide, and the extending direction of the reinforcing groove is parallel to the pushing direction;

in semiconductor processing, materials cleaned by a plasma cleaning machine are shaped into a plate, a material box for placing the materials is arranged on the plasma cleaning machine, a plurality of material grooves for clamping and stacking the materials are arranged in the material box, two sides of a material pushing guide plate are inserted into the material grooves after entering the material box each time, the material pushing guide plate moves along the material grooves to play a role in guiding, and a material clamping opening is in contact with the materials in the material grooves to push the materials into a cleaning cavity from the material box; the reinforcing groove can be arranged in the middle of the material pushing guide plate, and the material pushing guide plate can be formed by direct stamping and bending, so that the structural strength of the material pushing guide plate along the material pushing stress direction can be enhanced, and the phenomenon that the material cannot enter a material groove of a material box due to deformation or cannot be stuck after entering the material groove and cannot be contacted with the material is avoided, and the material pushing is unloaded.

The pushing blocks are detachably connected with the pushing guide plate, and the plane where the pushing guide plate is located passes through the material clamping opening;

the push blocks are detachably connected with the pushing guide plate, so that the proper push blocks can be selected conveniently according to the parameters of the shape, the size and the like of the material, the number and the positions of the push blocks are adjusted, the use is convenient, the plurality of push blocks can prevent the material from being damaged due to the fact that the stress is concentrated at one point in the pushing process, and the stress in the pushing process is dispersed uniformly; the plane of the pushing guide plate can ensure the vertical positions of the pushing guide plate and the pushing guide plate through the material clamping opening, and the material in a material groove where the pushing guide plate and the pushing guide plate are located can be pushed by the material clamping opening.

Two adjacent edges of the pushing guide plate are in transition connection through a chamfer 5;

the width that the chamfer passes through can make to push away material deflector front and back both ends is less than the width in the middle of, more conveniently with the silo butt joint in the magazine, insert the silo more smoothly or take out from the silo, reduce the card and die, similar fillet structure also can satisfy the demand.

The material clamping notch is arranged in a trapezoid shape, and the vertical distance of the front end is greater than that of the rear end;

the butt joint fault-tolerant rate when guaranteeing the ejector pad propelling movement material, card material opening front end opening is great, and is great with the possible contact distance of material, skew material and unloaded probability when can reduce the propelling movement material, and trapezoidal setting can be when the propelling movement material, and the automatic material direction returns to the opening rear end on.

The thickness of the push block is smaller than the vertical distance between two adjacent materials, and the vertical distance at the rear end of the material clamping notch is larger than the thickness of the materials;

the thickness of the push block ensures that only one material can be pushed at a time, and the stability and the accuracy of pushing are ensured; the rear end of the clamping opening is ensured to be fully contacted with the material, and the material is propped against the inclined edges at the two sides of the clamping opening, so that the material is deformed.

The material pushing guide plate is provided with a lightening hole 6;

the weight of the pushing guide plate can be reduced, more driving force is used on pushing by the pushing driving device, the driving efficiency is improved, and meanwhile due to the arrangement of the reinforcing grooves, the structural strength of the pushing guide plate in the pushing direction cannot be influenced by the lightening holes.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be considered as the protection scope of the present invention.

Claims

1. The utility model provides a plasma cleaning machine pusher head which characterized in that: including pushing away material deflector (1) and setting ejector pad (2) in deflector the place ahead, be equipped with card material opening (3) on the ejector pad, be equipped with crooked stiffening groove (4) on pushing away the material direction, the extending direction in stiffening groove is parallel with the material pushing direction.

2. The pusher head of a plasma cleaning machine according to claim 1, wherein: the ejector pad be a plurality of with push away material deflector releasable connection and push away the plane that material deflector is located and pass through the card material opening.

3. The pusher head of a plasma cleaning machine according to claim 1, wherein: two adjacent edges of the pushing guide plate are in transition connection through a chamfer (5).

4. The pusher head of a plasma cleaning machine according to claim 1, wherein: the card material opening is trapezoidal setting and the vertical distance of front end is greater than the vertical distance of rear end.

5. The pusher head of a plasma cleaning machine according to claim 4, wherein: the thickness of the push block is smaller than the vertical distance between two adjacent materials, and the vertical distance at the rear end of the material clamping gap is larger than the thickness of the materials.

6. The pusher head of a plasma cleaning machine according to claim 1, wherein: and the material pushing guide plate is provided with a lightening hole (6).