CN212741519U

CN212741519U - A coating anchor clamps for Sagnac type interferometer subassembly

Info

Publication number: CN212741519U
Application number: CN202021763531.3U
Authority: CN
Inventors: 郝雄波; 孙剑; 贾昕胤; 刘学斌; 邹纯博; 李勇; 畅晨光; 韩亚娟
Original assignee: XiAn Institute of Optics and Precision Mechanics of CAS
Current assignee: XiAn Institute of Optics and Precision Mechanics of CAS
Priority date: 2020-08-21
Filing date: 2020-08-21
Publication date: 2021-03-19
Anticipated expiration: 2030-08-21

Abstract

The utility model provides a coating anchor clamps for Sagnac type interferometer subassembly solves current Sagnac type interferometer subassembly and has the problem that the modulation degree reduces when preparation cycle is long, with high costs and use. The coating clamp comprises an interferometer fixing assembly, a coating window assembly and an upper protective cover; in the interferometer fixing assembly, the end face of a clamp flange plate is provided with a sputtering hole; the wedge block is oppositely arranged in the sputtering hole, and the outer side surface of the wedge block is provided with a first limiting hole; the abutting block is arranged on the upper end face of the clamp flange plate, and a second limiting hole is formed in the outer side face of the abutting block; the adjusting supports are fixedly arranged on the upper end face of the clamp flange plate, one end of the adjusting screw rod extends into the first limiting hole and the second limiting hole, and the other end of the adjusting screw rod penetrates through a threaded hole formed in the adjusting supports and is in threaded connection with the adjusting supports; the film coating window assembly comprises four window blades which are sequentially arranged in the sputtering hole end to end; the upper protective cover is arranged on the upper end face of the clamp flange.

Description

A coating anchor clamps for Sagnac type interferometer subassembly

Technical Field

The utility model belongs to the optical coating field, concretely relates to a coating anchor clamps for Sagnac type interferometer subassembly for two half pentagon prism plane of reflection of entity Sagnac type lateral shear interferometer subassembly are fixed during the coating.

Background

The entity Sagnac type lateral shearing interferometer can realize interference spectrum detection with large relative aperture and high sensitivity due to high flux, is often applied to space modulation type and space-time combined modulation type interference spectrum imagers, and is further widely applied to space flight and aviation Fourier transform type remote sensing instruments.

A typical Sagnac-type interferometer assembly consists essentially of an interferometer mount, two half-pentagonal prism glass pieces, an upper glass substrate and a lower glass substrate. The two half pentagonal prisms are glued into a whole through ultraviolet photosensitive glue, glass substrates are respectively bonded on the upper surface and the lower surface of the two half pentagonal prisms to serve as protection pieces, finally the two half pentagonal prisms are bonded with the interferometer mounting base through epoxy glue, and after the surface shape, the shearing quantity and the modulation degree indexes of the two half pentagonal prisms are tested to be qualified, the two half pentagonal prisms are integrated in the spectral imager.

The two half pentagonal prism reflective surfaces of a conventional Sagnac type interferometer assembly have been finished with internal reflective coatings prior to gluing. And after the coating is qualified, carrying out the procedures of testing, half pentagonal prism gluing, testing, glass substrate bonding, testing, interferometer mounting seat bonding, testing and the like. At the moment, the manufacturing processes of the Sagnac interferometer are more than 7, the manufacturing period is more than 1 month, if any one of the processes is unqualified, the parts are scrapped, the project development period is further prolonged, and the cost is increased. In addition, after the Sagnac type interferometer component is integrated in a spectral imager system, the condition that a semi-pentagonal prism reflecting surface film system falls off due to mechanical, thermal shock and salt mist environments exists, so that the modulation degree of the interferometer is reduced, the transfer function of the spectral imager is reduced, and the Sagnac type interferometer component needs to be replaced when the Sagnac type interferometer component is used.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the modulation degree reduces when current Sagnac type interferometer subassembly exists preparation cycle length, with high costs and uses, providing a coating jig for Sagnac type interferometer subassembly.

In order to achieve the above object, the present invention provides the following technical solutions.

A coating clamp for a Sagnac type interferometer assembly comprises an interferometer fixing assembly made of metal, a coating window assembly and an upper protection cover; the interferometer fixing assembly is used for fixing the Sagnac type interferometer assembly and comprises a clamp flange plate, a wedge block, a propping block, an adjusting support, an adjusting screw rod and a flexible plate; the end face of the clamp flange plate is provided with sputtering holes for sputtering an evaporation source; the two groups of wedge blocks are oppositely arranged in the sputtering holes along the Y direction, the inclination angle of each group of wedge blocks is consistent with the field angle of the half-pentagonal prism, and the outer side surface of each group of wedge blocks is provided with a first limiting hole; the abutting block is arranged on the upper end face of the clamp flange plate along the X direction, and a second limiting hole is formed in the outer side face of the abutting block; the adjusting supports are three groups and are fixedly arranged on the upper end face of the clamp flange plate, two groups of adjusting supports are arranged along the Y direction and are positioned on the outer side of the wedge block, and one group of adjusting supports are arranged along the X direction and are positioned on the outer side of the abutting block; the adjusting screws are divided into three groups, one end of each adjusting screw extends into the first limiting hole and the second limiting hole to be matched with the abutting block and the wedge block, and the other end of each adjusting screw penetrates through a threaded hole formed in the adjusting support and is in threaded connection with the adjusting support; the bottom end of the flexible plate is arranged on the upper end face of the clamp flange plate, and the top end of the flexible plate is used for being connected with the interferometer mounting seat; the coating window assembly is used for controlling the size and the position of a coating area of the Sagnac type interferometer assembly and comprises four window blades, namely a first window blade, a second window blade, a third window blade and a fourth window blade; the four window blades are sequentially arranged in the sputtering hole end to end, and the cutting edges and the lower end surface of the clamp flange form a certain included angle, so that a coating area is not shielded in the included angle range; the upper protective cover is arranged on the upper end face of the clamp flange plate and used for wrapping the Sagnac type interferometer assembly and preventing the evaporation source in the film coating machine from sputtering other surfaces of the interferometer.

Furthermore, an installation boss is arranged on a wedge-shaped surface of the wedge block matched with the Sagnac type interferometer component, so that the working surface of the Sagnac type interferometer component is prevented from being scratched.

Furthermore, the sputtering holes are square step holes, stress release holes are formed in four corners of each square step hole, the wedge blocks are arranged at the large ends of the square step holes, and the four window blades are arranged at the small ends of the square step holes.

Furthermore, the included angle between the cutting edges of the four window blades and the lower end face of the clamp flange is more than or equal to 45 degrees.

Furthermore, the included angles between the cutting edges of the four window blades and the lower end face of the clamp flange are 45 degrees.

Further, the flexible plate is flexible L bent plate, and includes curb plate and base plate, be provided with first waist shape hole on the base plate for carry out the unstressed with the anchor clamps ring flange through the screw and be connected, be provided with second waist shape hole on the curb plate for carry out the unstressed with the interferometer mount pad through the screw and be connected.

Further, still including setting up the lower safety cover at anchor clamps ring flange lower extreme terminal surface, lower safety cover is used for wrapping up the interferometer mount pad, avoids the evaporation source to sputter the interferometer mount pad and causes extra stray light.

Furthermore, the tail end of the adjusting screw rod is provided with a spherical bulge which is used for being matched with the first limiting hole and the second limiting hole.

Furthermore, the four window blade blades are matched with the sputtering holes through rabbets and are fixedly connected with the clamp flange plate through screws.

Furthermore, a flange plate spigot is arranged on the peripheral surface of the clamp flange plate and is used for being matched and fixed with a rotating disk of a film coating machine.

Compared with the prior art, the utility model discloses technical scheme has following beneficial effect:

1. the utility model discloses a coating jig for Sagnac type interferometer subassembly allows the half pentagon prism of Sagnac type interferometer subassembly to glue earlier, plates the system internal reflection membrane after the test is qualified again, has avoided the waste of time, the material that causes because of the veneer failure for the preparation cycle and the cost of manufacture of Sagnac type interferometer subassembly reduce by a wide margin. In addition, the clamp can be used for re-coating the Sagnac type interferometer component subjected to film stripping caused by mechanics, thermal shock, salt spray environment and the like, the defect that the modulation degree of the interferometer component is reduced is avoided, and the manufacturing period and the manufacturing cost of the Sagnac type interferometer component are greatly reduced.

2. The utility model discloses behind the fixed Sagnac type interferometer subassembly of coating anchor clamps, with two half pentagonal prism contactless, can not produce extra stress, avoided the fish tail to the interferometer working face.

3. The utility model discloses the regional size of coating film of four window blade control Sagnac type interferometer subassembly plane of reflection of coating film anchor clamps accessible is changed or finely tune, simultaneously through the size of adjustment anchor clamps ring flange, can match the vacuum coating machine of different models, can carry out the coating film to the Sagnac type interferometer subassembly plane of reflection of not unidimensional.

Drawings

FIG. 1 is a schematic diagram of the structure of a Sagnac-type interferometer assembly;

FIG. 2 is a schematic diagram of the shape of a coating fixture for a Sagnac-type interferometer assembly of the present invention;

FIG. 3 is a cross-sectional view of a coating fixture for a Sagnac-type interferometer assembly of the present invention;

FIG. 4 is a schematic structural view of an interferometer fixing assembly in the coating fixture of the present invention;

fig. 5 is a schematic view of the mounting of the interferometer fixture assembly of the present invention with a Sagnac-type interferometer assembly;

FIG. 6 is a schematic structural view of a coating window assembly in the coating fixture of the present invention;

FIG. 7 is a schematic structural view of a window blade in the coating fixture of the present invention;

FIG. 8 is a schematic structural view of a flexible board in the coating fixture of the present invention;

FIG. 9 is a schematic structural view of a pressing block in the coating fixture of the present invention;

fig. 10 is a schematic view of the installation of the adjusting screw in the coating clamp of the present invention.

Reference numerals: 1-an interferometer mount assembly; a 2-Sagnac type interferometer component; 3-upper protective cover; 4-coating the film window assembly; 5-lower protective cover; 11-a clamp flange; 12-a wedge block; 13-adjusting the support; 14-adjusting the screw; 15-a resisting block; 16-a flexible plate; 21-an interferometer mount; 22-a first half pentagonal prism; 23-a second half pentagonal prism; 24-a lower glass substrate; 25-an upper glass substrate; 41-a first window blade; 42-a second window blade; 43-a third window blade; 44-a fourth window blade; 111-flange spigot; 112-sputtering hole, 113-stress releasing hole, 121-mounting boss; 122-a first limit hole; 141-spherical protrusions; 151-second limiting hole; 161-a second kidney shaped aperture; 162-a first kidney-shaped aperture; 221-a half pentagonal prism first reflecting surface; 231-half pentagonal prism second reflecting surface; 241-lower glass substrate leaning surface; 251-upper glass substrate leaning surface; 411-window blade abutment face.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the following embodiments and accompanying drawings.

The utility model provides a coating anchor clamps for Sagnac type interferometer subassembly has solved the problem that the half pentagonal prism plane of reflection of shaped back Sagnac type interferometer subassembly plates the system internal reflection membrane. The fixture has no pollution to a vacuum coating machine, the Sagnac interferometer component is reliably fixed and stress-free clamped through the wedge block, the adjusting screw rod and the flexible plate, the size and the position of a coating area of a coated surface can be controlled through replacing or fine-adjusting the four window blades, waste of time and materials caused by gluing failure of the half-pentagonal prism is avoided, meanwhile, the fixture can re-plate an internal reflection film on the stripped interferometer component, and scrapping caused by reduction of the modulation degree of the interferometer is avoided.

As shown in fig. 1, Sagnac interferometer component 2, as a coated product, is glued before coating of first reflecting surface 221 of half pentagonal prism or second reflecting surface 231 of half pentagonal prism, and is connected with a structural member, and after a coating system of coating two reflecting surfaces by using a coating fixture is qualified, can be directly integrated into a spectral imager system for use. The Sagnac type interferometer component 2 is mainly formed by gluing a first half pentagonal prism 22 and a second half pentagonal prism 23 which have the same optical parameters and have incompletely consistent outlines through ultraviolet photosensitive glue, wherein the upper surface and the lower surface of the two prisms are respectively bonded with an upper glass substrate 25 and a lower glass substrate 24 through epoxy glue, and finally, the lower glass substrate 24 and an interferometer mounting seat 21 are bonded into a whole through the epoxy glue. The interferometer mounting base 21 is provided with a threaded hole for connecting with a spectral imager system and also for connecting with a coating fixture.

As shown in figure 2, the coating clamp for the Sagnac type interferometer assembly comprises an interferometer fixing assembly 1, a coating window assembly 4, an upper protective cover 3 and a lower protective cover 5. Interferometer fixing component 1 is used for reliably fixing Sagnac type interferometer component 2, and coating window component 4 is used for controlling size and position of a coating area of Sagnac type interferometer component 2. The upper protective cover 3 and the lower protective cover 5 prevent an evaporation source of a film coating machine from splashing to a non-coated surface to cause pollution or veiling glare in the film coating process. The coating clamp is made of metal materials, such as 2A12 aluminum alloy and the like, so that pollution to a coating machine and coating failure caused by the pollution during coating are avoided. After the Sagnac type interferometer component 2 is fixed by the coating clamp, the coated area is not shielded within the range of the 90-degree cone angle, and the lower protective cover 5 is positioned outside the range of the 90-degree cone angle of the coated area and cannot prevent an evaporation source from sputtering to the coated area.

As shown in fig. 3, 4 and 5, the interferometer fixing assembly 1 includes 1

clamp flange

11, 2

wedges

12, 3 adjusting supports 13, 3 adjusting

screws

14, 1 abutting

block

15 and 2 flexible plates 16, and is used for reliably fixing the Sagnac type interferometer assembly 2, so that the Sagnac type interferometer assembly 2 can be prevented from being scratched by a half pentagonal prism, and stress-free clamping of the Sagnac type interferometer assembly 2 can be ensured, and the clamp and the interferometer can not displace during the operation of the coater. The terminal surface center department of anchor clamps ring flange 11 is provided with spatters hole 112 for sputter evaporation source, spatter hole 112 and be square step hole, and four corners in square step hole all are provided with stress release hole 113, are provided with ring flange tang 111 on the outer peripheral face of anchor clamps ring flange 11, and anchor clamps ring flange 11 is fixed with the rotary disk cooperation of coating machine through ring flange tang 111, and ring flange tang 111 size can be matchd according to the coating machine of different models, in the embodiment of the utility model, the tang can be diameter 300mm, and the tang height can be 7 mm.

The utility model discloses among the coating anchor clamps, voussoir 12 is two sets of, and along the relative big end that sets up in sputter hole 112 of Y direction, the angle of inclination of every voussoir 12 of group is unanimous with half pentagon prism's opening angle, is 112.5. The wedge-shaped surface of the wedge 12, which is matched with the interferometer component, is provided with two mounting bosses 121, and the outer side surface of the wedge is provided with a first limiting hole 122. The two mounting bosses 121 are respectively contacted with the lower glass substrate leaning surface 241 and the upper glass substrate leaning surface 251 in the Sagnac type interferometer component 2, and are not contacted with the first reflecting surface or the second reflecting surface of the half pentagonal prism, and the mounting bosses 121 avoid the wedge block 12 from being directly contacted with the first half pentagonal prism 22 and the second half pentagonal prism 23, so that the risk of scratching the working surface is avoided. In addition, the height requirement of the 12 bosss of voussoir is greater than the difference in height by the reflection plane of being plated and glass substrate, the embodiment of the utility model provides an, because optical glass size error, gluing error influence, the difference in height by the reflection plane of being plated and glass substrate is at-0.5 mm to 0.8mm within range change, consequently installation boss 121 height design is 0.8mm, guarantees that the clearance between installation boss 121 and the reflection plane is minimum 0.3mm, 1.6mm at most.

As shown in fig. 3 and 9, the fastening block 15 is disposed on the upper end surface of the flange 11 along the X direction, the outer side surface thereof is provided with a second limiting hole 151, the fastening block 15 is in surface contact with the interferometer mounting base 21, and local stress caused by point contact is avoided, in the embodiment of the present invention, the contact area can be 80mm²。

The utility model discloses adjusting support 13 is three groups, all set up on the upper end face of the clamp flange 11 through the fix with screw, wherein two groups set up along the Y direction, and lie in the outside of the voussoir 12, and one group sets up along the X direction, and lie in the outside of the block 15 of keeping up; meanwhile, the adjusting screws 14 are divided into three groups, one end of each adjusting screw extends into the first limiting hole 122 and the second limiting hole 151 to be matched with the abutting block 15 and the wedge block 12, and the other end of each adjusting screw passes through a threaded hole formed in the adjusting support 13 to be in threaded connection with the adjusting support 13. As shown in fig. 10, the end of the adjusting screw 14 is provided with a spherical protrusion 141, the first limiting hole 122 is specifically a blind hole, the size of the blind hole corresponds to the spherical protrusion 141 of the adjusting screw 14, after the Sagnac-type interferometer component 2 is fixed, the front end of the ball head of the adjusting screw 14 extends into the first limiting hole 122, during the coating process, the centrifugal force can be prevented from causing the displacement or collision of the wedge 12 when the rotating disk of the coating machine rotates, similarly, the second limiting hole 151 corresponds to the size of the spherical protrusion 141 of the adjusting screw 14, when the ball head of the adjusting screw 14 extends into the second limiting hole 151, during the coating process, the centrifugal force during the rotation of the rotating disk of the coating machine can be prevented from causing the displacement or collision of the abutting block 15, in the embodiment of the present invention, the diameter of the ball head of the adjusting screw 14 can be 6mm, and the sizes of the second limiting hole 151 and the first limiting hole 122 can. The spherical protrusion 141 may be regarded as a series of discs with different diameters, which are stacked together, and can compensate the machining error of the first limiting hole 122 and the second limiting hole 151, so that the first limiting hole and the second limiting hole are tightly matched. Meanwhile, the contact area is in line contact, the size of the friction area is reduced, and the rotation of the abutting block 15 and the wedge block 12 caused by the screwing of the adjusting screw 14 is avoided.

As shown in fig. 8, flexible plate 16 possesses certain flexibility in the X direction, is convenient for carry out unstressed with Sagnac type interferometer subassembly 2 and is connected, through control root thickness t, steerable flexible size, t value generally are not more than 1mm, the utility model discloses in the concrete embodiment, this flexible plate 16 specifically can be flexible L bent plate, including curb plate and base plate, root thickness t is 0.6 mm. Be provided with first waist shape hole 162 on the base plate, carry out unstressed with anchor clamps ring flange 11 through the screw and be connected, be provided with second waist shape hole 161 on the curb plate, carry out unstressed with interferometer mount pad 21 through the screw and be connected, can avoid entity Sagnac interferometer subassembly to bring extra stress when fixed.

As shown in fig. 6 and 7, the plating window assembly 4 includes four window blades, i.e., a first window blade 41, a second window blade 42, a third window blade 43, and a fourth window blade 44. Four window blades all pass through the tang cooperation with sputtering hole 112, and arrange the tip in square step hole end to end in proper order, are connected with anchor clamps ring flange 11 through the screw at last, and are no longer than 0.1mm by the facing clearance, and blade height h is 0.2mm, and the blade becomes certain contained angle with the installation face, and this contained angle needs more than or equal to 45, in the embodiment of the utility model provides a set for 45, when vacuum coating was avoided to this contained angle, when evaporation source sputtered to the first plane of reflection of half pentagon prism 221 or half pentagon prism second plane of reflection 231, blocked when sputtering because of the evaporation source lead to the regional edge of coating film inhomogeneous and cause the film system later stage to drop. The reflecting surface of the half pentagonal prism can not be coated with a film in a full aperture, shielding is carried out to a certain degree in four directions according to actual requirements, and the shielding ranges in four directions of the first reflecting surface 221 of the half pentagonal prism or the second reflecting surface 231 of the half pentagonal prism can be controlled by controlling the center distance L between the cutting edges of the four window blades and the mounting hole, so that the size and the position of a coating area are controlled, and the shielding range is generally 0.2mm to 3 mm. The size of the film coating area can be finely adjusted within the range of 0.5mm through the screw through holes of the four window blades. The clearance between window blade binding face 411 and the plane of reflection of being plated is no longer than 0.1mm, the embodiment of the utility model provides an, the clearance is 0.02mm, and the plane degree of binding face is superior to 0.01mm, controls its roughness through grinding and is superior to 0.8.

As shown in fig. 2, the completed Sagnac-type interferometer assembly 2 coating jig comprises an upper protective cover 3 and a lower protective cover 5. Go up safety cover 3 and pass through bolted connection with anchor clamps ring flange 11 for wrapping up Sagnac type interferometer subassembly 2, avoid the evaporation source in the coating machine to sputter other surfaces of interferometer, lead to the interferometer to scrap. If the interferometer mounting base 21 needs to penetrate through the clamp flange plate 11 during installation, the part of the clamp flange plate 11 exposed is protected by the lower protection cover 5, and the lower protection cover 5 is connected with the clamp flange plate 11 through screws, so that the phenomenon that an evaporation source is splashed to the interferometer mounting base 21 to cause extra stray light is avoided. After the Sagnac type interferometer component 2 is installed on the coating fixture, only the coated reflecting surface is exposed.

The utility model discloses a concrete application method of coating anchor clamps for Sagnac type interferometer subassembly is as follows:

1) cleaning the Sagnac type interferometer component 2 and the coating clamp by using alcohol, acetone and ether;

2) horizontally placing the clamp flange plate 11, and vertically downwards placing a flange plate spigot 111;

3) placing the first wedge block 12 into the clamp flange 11 from the-Y side and abutting against the-Y side and the + X side of the clamp flange 11;

4) the coated surface (the first reflecting surface 221 of the half pentagonal prism) of the Sagnac type interferometer component 2 vertically falls into the clamp flange 11 downwards, the upper glass substrate 25 abuts against the clamp flange 11 on the X side, and the upper glass substrate 25 and the lower glass substrate 24 abut against the wedge block 12 boss of the wedge block 12 on the-Y side; at this time, the interferometer mounting base 21 passes through the clamp flange 11;

5) a second wedge 12 is placed on the + Y side and against Sagnac-type interferometer assembly 2;

6) an adjusting support 13 and an adjusting screw 14 are arranged on the-Y side and the + Y side, the + Y side adjusting screw 14 is screwed down first, then the-Y side adjusting screw 14 is screwed down, and the position of the Sagnac type interferometer component 2 in the Y direction is fixed;

7) installing an adjusting support 13 and an adjusting screw 14 on the-X side, screwing the-X side adjusting screw 14, attaching the-X side adjusting screw 14 to an interferometer installation seat 21 through a propping block 15, and fixing the position of the Sagnac type interferometer component 2 in the X direction;

8) 2 flexible plates 16 are installed, are connected with the threaded holes of the interferometer installation seat 21 through second waist-shaped holes 162, and are connected with the clamp flange plate 11 through first waist-shaped holes 162;

9) installing an upper protective cover 3, connecting the upper protective cover 3 with a clamp flange plate 11 by using screws, turning over for 180 degrees, and placing the upper protective cover 3 on a workbench;

10) sequentially installing and finely adjusting the positions of a first window blade 41, a second window blade 42, a third window blade 43 and a fourth window blade 44 to ensure the proper shielding range of the plated reflecting surface; the four window blades are connected with the clamp flange plate 11 through 2 screws;

11) installing a lower protective cover 5, and connecting the lower protective cover 5 with the clamp flange plate 11 by using screws;

12) loading the assembled Sagnac type interferometer component 2 coating clamp on a rotating disc of a vacuum coating machine to prepare for starting coating;

13) after the first reflecting surface 221 of the half pentagonal prism is coated, the clamp is loosened, the second reflecting surface 231 film system of the half pentagonal prism is coated after the half pentagonal prism is reassembled according to the steps, the coating of the coated surface is not in sequence, the second reflecting surface 231 film system of the half pentagonal prism can be coated firstly, and then the first reflecting surface 221 film system of the half pentagonal prism can be coated.

Claims

1. A coating anchor clamps for Sagnac type interferometer subassembly which characterized in that: comprises an interferometer fixing component (1) made of metal, a film coating window component (4) and an upper protective cover (3);

the interferometer fixing component (1) is used for fixing a Sagnac type interferometer component (2) and comprises a clamp flange plate (11), a wedge block (12), a pressing block (15), an adjusting support (13), an adjusting screw rod (14) and a flexible plate (16);

the end face of the clamp flange plate (11) is provided with a sputtering hole (112) for sputtering an evaporation source;

the two groups of wedges (12) are oppositely arranged in the sputtering hole (112) along the Y direction, the inclination angle of each group of wedges (12) is consistent with the field angle of the half-pentagonal prism, and the outer side surface of each group of wedges is provided with a first limiting hole (122);

the abutting block (15) is arranged on the upper end face of the clamp flange plate (11) along the X direction, and a second limiting hole (151) is formed in the outer side face of the abutting block;

the adjusting supports (13) are arranged in three groups and are all fixedly arranged on the upper end surface of the clamp flange plate (11), wherein two groups are arranged along the Y direction and are positioned on the outer side of the wedge block (12), and one group is arranged along the X direction and is positioned on the outer side of the abutting block (15);

the adjusting screws (14) are divided into three groups, one end of each adjusting screw extends into the first limiting hole (122) and the second limiting hole (151) and is matched with the abutting block (15) and the wedge block (12), and the other end of each adjusting screw penetrates through a threaded hole formed in the adjusting support (13) and is in threaded connection with the adjusting support (13);

the bottom end of the flexible plate (16) is arranged on the upper end face of the clamp flange plate (11), and the top end of the flexible plate is used for being connected with the interferometer mounting seat (21);

the coating window assembly (4) is used for controlling the size and the position of a coating area of the Sagnac type interferometer assembly (2), and comprises four window blades, namely a first window blade (41), a second window blade (42), a third window blade (43) and a fourth window blade (44); the four window blades are sequentially arranged in the sputtering holes (112) end to end, and the cutting edges and the lower end surface of the clamp flange plate (11) form a certain included angle, so that a coating area is not shielded in the included angle range;

go up safety cover (3) and set up the up end at anchor clamps ring flange (11) for wrap up Sagnac type interferometer subassembly (2), avoid other surfaces that evaporation source sputtered the interferometer in the coating film machine.

2. The coating fixture for a Sagnac-type interferometer component of claim 1, wherein: and a mounting boss (121) is arranged on the wedge-shaped surface of the wedge block (12) matched with the Sagnac type interferometer component (2), so that the working surface of the Sagnac type interferometer component (2) is prevented from being scratched.

3. A coating fixture for a Sagnac-type interferometer component as recited in claim 2, wherein: the splash hole (112) is a square stepped hole, stress release holes (113) are formed in four corners of the square stepped hole, the wedge block (12) is arranged at the large end of the square stepped hole, and the four window blades are arranged at the small end of the square stepped hole.

4. A coating fixture for a Sagnac-type interferometer component as recited in claim 1, 2, or 3, wherein: the included angles between the cutting edges of the four window blades and the lower end face of the clamp flange plate (11) are more than or equal to 45 degrees.

5. The coating fixture for a Sagnac-type interferometer component of claim 4, wherein: the included angles between the cutting edges of the four window blades and the lower end face of the clamp flange plate (11) are 45 degrees.

6. The coating fixture for a Sagnac-type interferometer component of claim 5, wherein: the flexible plate (16) is a flexible L bent plate and comprises a side plate and a base plate, wherein a first waist-shaped hole (162) is formed in the base plate and used for being connected with a clamp flange plate (11) in an unstressed mode through a screw, and a second waist-shaped hole (161) is formed in the side plate and used for being connected with an interferometer mounting seat (21) in an unstressed mode through the screw.

7. The coating fixture for a Sagnac-type interferometer component of claim 6, wherein: still including setting up lower safety cover (5) at anchor clamps ring flange (11) lower terminal surface, lower safety cover (5) are used for wrapping up interferometer mount pad (21), avoid the evaporation source to sputter interferometer mount pad (21) and cause extra stray light.

8. The coating fixture for a Sagnac-type interferometer component of claim 7, wherein: the tail end of the adjusting screw rod (14) is provided with a spherical bulge (141) which is used for being matched with the first limiting hole (122) and the second limiting hole (151).

9. The coating fixture for a Sagnac-type interferometer component of claim 8, wherein: the four window blades are matched with the splashing holes (112) through rabbets and are fixedly connected with the clamp flange plate (11) through screws.

10. The coating fixture for a Sagnac-type interferometer component of claim 9, wherein: and a flange plate spigot (111) is arranged on the peripheral surface of the clamp flange plate (11) and is used for being matched and fixed with a rotating disc of a film coating machine.