CN212736763U

CN212736763U - Film forming machine compression roller crossbeam device

Info

Publication number: CN212736763U
Application number: CN202020682928.3U
Authority: CN
Inventors: 汪良恩; 王锡康; 姜兰虎; 乔建明; 王桂芝
Original assignee: Shandong Xinyuan Microelectronics Co ltd
Current assignee: Shandong Xinyuan Microelectronics Co ltd
Priority date: 2020-04-29
Filing date: 2020-04-29
Publication date: 2021-03-19
Anticipated expiration: 2030-04-29

Abstract

The utility model discloses a film forming machine compression roller beam device, which mainly relates to the technical field of semiconductor film production equipment, and comprises a guide rail I, a guide rail V and a bracket, wherein the guide is more stable through the double-track guide of the guide rail I and the guide rail V, the upper and lower fixed constraint guide of the guide rail I and the guide rail V is realized, the constraint return in the horizontal direction is realized through a tensioning spring, a left adjusting wheel and a right adjusting wheel, the friction of the upper guide wheel and the lower guide wheel to the guide rail I or the guide rail V is increased through the tensioning spring, the two ends and the middle shaft of the bracket are provided with guide holes, a fixed lead passes through the guide holes and is fixed on a film forming frame, the guide fixation of the bracket is further realized through the guide holes on the middle shaft by the fixed lead on the film forming frame, the constraint of the motion direction of the bracket beam is improved, so that the spraying of the spray head is more uniform.

Description

Film forming machine compression roller crossbeam device

Technical Field

The utility model mainly relates to a semiconductor film production facility technical field specifically is a membrane forming machine compression roller crossbeam device.

Background

Semiconductor materials are the main materials of microelectronic and optoelectronic devices, especially the integration of components on large-scale integrated circuit chips is higher and higher, the size of the components is smaller and smaller, and semiconductor films are the basic materials for forming such devices. The semiconductor film is mainly a film-shaped diffusion source containing phosphorus and boron, but the production of the film-shaped diffusion source is difficult, in the film forming process, the forming of a press roll is an important process, the forming of the film on the press roll needs an upper cross beam device to control a spray head to uniformly spray film forming liquid on a rolling plate on the press roll, but in the existing device, the movement speed and direction of the spray head on the cross beam are not uniform, so that the spraying thickness of the spray head on the rolling plate of the press roll is not uniform.

SUMMERY OF THE UTILITY MODEL

In view of the deficiencies and defects in the prior art, the utility model aims to provide a membrane forming machine compression roller crossbeam device.

In order to solve the technical problem, the utility model discloses a following technical scheme: the utility model provides a membrane forming machine compression roller crossbeam device which characterized in that: including guide rail I, guide rail V, support the center department of support is equipped with the jackshaft about running through, the jackshaft upper end is equipped with the guide hole, and fixed wire passes the guide hole and fixes in membrane shaping frame, the jackshaft lower extreme passes through horizontal fixation clamp fixed nozzle, and feeding hose is connected on shower nozzle upper portion guide rail I, guide rail V all are equipped with guide pulley, lower guide pulley from top to bottom, all are equipped with about and transfer the wheel, transfer the wheel on the right side, go up guide pulley, lower guide pulley both sides and rotate and connect the fixed plate side, the fixed plate underrun that corresponds about the left side of tensioning spring connection in the middle of transfers the wheel or transfers the wheel on the right side, and the fixed plate in the bottom outside is fixed.

As a further improvement of the utility model, the support sets up under guide rail I, guide rail V to fix in the membrane shaping frame.

As a further improvement, the two ends of the bracket are respectively provided with guide holes, and the fixed wire passes through the guide holes and is fixed on the film forming frame.

As a further improvement of the utility model, the fixing plate is L-shaped.

As a further improvement of the present invention, the support is driven by an external two-way motor device.

As a further improvement, the circumference radian of the upper guide wheel, the lower guide wheel, the guide rail I and the guide rail V is matched, and the included angle A between the two ends of the guide wheel and the center of the guide rail is not less than 90 degrees.

Compared with the prior art, the utility model discloses the beneficial effect who has does: the utility model discloses in, it is more stable through guide rail I, guide rail V double track way direction upper and lower equal guide pulley, lower guide pulley about guide rail I, guide rail V realize upper and lower fixed restraint direction, transfer the wheel, transfer the restraint of wheel realization horizontal direction through tensioning spring, a left side and reply to increase guide pulley, lower guide pulley to guide rail I or guide rail V's friction through tensioning spring support both ends and jackshaft are equipped with the guide hole, and fixed wire passes the guide hole and fixes in the membrane shaping frame, and the direction that passes the further realization support of guide hole on the jackshaft through the fixed wire in the membrane shaping frame is fixed, has improved the restraint of support beam direction of motion for motion and stroke are difficult for receiving the external influence, make the shower nozzle more even at the spraying.

Drawings

The invention will be further described with reference to the accompanying drawings:

fig. 1 is a schematic structural view of a press roller beam device of a film forming machine of the present invention;

in the figure: the device comprises a guide rail I1, an upper guide wheel 2, a lower guide wheel 3, a left adjusting wheel 4, a right adjusting wheel 5, a fixing plate 6, a tensioning spring 7, a bracket 8, a guide hole 9, a fixing wire 10, an intermediate shaft 11, a fixing clamp 12, a spray head 13, a feeding hose 14 and a guide rail V15.

Detailed Description

In order to make the technical solution and the advantageous effects of the present invention more clear, the present invention will be further described in detail with reference to the following embodiments.

FIG. 1 is a schematic structural diagram of a press roll beam device of a film forming machine of the present invention, which includes a guide rail I1, a guide rail V15, and a bracket 8, wherein the bracket 8 is disposed under the guide rail I1 and the guide rail V15 and fixed on a film forming frame, a middle shaft 11 penetrating through the upper and lower parts is disposed at the center of the bracket 8, a guide hole 9 is disposed at the upper end of the middle shaft 11, a fixed wire 10 is fixed on the film forming frame through the guide hole 9, a nozzle 13 is fixed at the lower end of the middle shaft 11 through a transverse fixing clamp 12, a feeding hose 14 is connected to the upper part of the nozzle 13, guide holes 9 are respectively disposed at both ends of the bracket 8, the fixed wire 10 is fixed on the film forming frame through the guide hole 9, an upper guide wheel 2 and a lower guide wheel 3 are disposed above and below the guide rail I1 and the guide rail V15, a left adjustment wheel 4 and a right adjustment wheel 5 are disposed at both sides, the bottom surfaces of the L-shaped fixing plates 6 corresponding up and down are connected with the middle left adjusting wheel 4 or the middle right adjusting wheel 5 through the tensioning spring 7, the L-shaped fixing plates 6 on the outermost sides of the bottom are fixed at two ends of the support 8, and the support 8 is driven by an external bidirectional motor device.

In the utility model, an external bidirectional motor device drives a bracket 8 to move left and right, a guide rail I1 and a guide rail V15 are respectively arranged at the two ends of the bracket 8, double-rail guiding is more stable, an upper guide wheel 2 and a lower guide wheel 3 are respectively arranged at the upper part and the lower part of the guide rail I1 and the guide rail V15 to realize upper and lower fixed constraint guiding, the upper guide wheel 2 and the lower guide wheel 3 are matched with the circumferential radian of the guide rail I1 and the guide rail V15, the included angle A between the two ends of the guide wheel and the circle center of the guide rail is not less than 90 degrees, so that the guide rail can better constrain guiding, the upper guide wheel 2 and the lower guide wheel 3 are respectively provided with a left adjusting wheel 4 and a right adjusting wheel 5 at the left side and the right side, the two sides of the upper guide wheel 2 and the lower guide wheel 3 are rotatably connected with the side surface of an L-shaped fixing plate 6, the bottom surface of the L-shaped fixing plate 6 corresponding up and, the friction of the upper guide wheel 2 and the lower guide wheel 3 on the guide rail I1 or the guide rail V15 is increased through a tensioning spring 7, L-shaped fixing plates 6 at the bottom of the outermost side are fixed at two ends of a support 8, a middle shaft 11 penetrating up and down is arranged at the center of the support 8, a guide hole 9 is arranged at the upper end of the middle shaft 11, a fixing lead 10 penetrates through the guide hole 9 and is fixed on a film forming rack, a spray head 13 is fixed at the lower end of the middle shaft 11 through a transverse fixing clamp 12, the firmness of the spray head 13 is improved, a feeding hose 14 is connected to the upper portion of the spray head 13, guide holes 9 are respectively arranged at two ends of the support 8, the fixing lead 10 penetrates through the guide hole 9 and is fixed on the film forming rack, and the guide fixing of the support 8 is further realized through.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. It should be understood that the detailed description and specific examples, while indicating the invention, are given by way of illustration only, not by way of limitation, since other embodiments will become apparent to those skilled in the art upon consideration of the following detailed description of the invention without any creative effort.

Claims

1. The utility model provides a membrane forming machine compression roller crossbeam device which characterized in that: the membrane forming machine comprises a guide rail I (1), a guide rail V (15) and a support (8), wherein a middle shaft (11) penetrating from top to bottom is arranged at the center of the support (8), a guide hole (9) is formed in the upper end of the middle shaft (11), a fixed lead (10) penetrates through the guide hole (9) and is fixed on a membrane forming machine frame, a spray head (13) is fixed at the lower end of the middle shaft (11) through a transverse fixing clamp (12), a feeding hose (14) is connected to the upper portion of the spray head (13), an upper guide wheel (2) and a lower guide wheel (3) are arranged on the upper portion and the lower portion of the guide rail I (1) and the guide rail V (15), a left adjusting wheel (4) and a right adjusting wheel (5) are arranged on the left and the right, the two sides of the upper guide wheel (2) and the lower guide wheel (3) are rotatably connected with the side surfaces of a fixing plate, the fixing plates (6) on the outermost sides of the bottom are fixed at two ends of the bracket (8).

2. The film forming machine roll beam device according to claim 1, wherein: and the bracket (8) is arranged right below the guide rail I (1) and the guide rail V (15) and is fixed on the film forming rack.

3. The film forming machine roll beam device according to claim 1, wherein: guide holes (9) are respectively arranged at two ends of the bracket (8).

4. The film forming machine roll beam device according to claim 1, wherein: the fixing plate (6) is L-shaped.

5. The film forming machine roll beam device according to claim 1, wherein: the support (8) is driven by an external bidirectional motor device.

6. The film forming machine roll beam device according to claim 1, wherein: the upper guide wheel (2) and the lower guide wheel (3) are matched with the guide rail I (1) and the guide rail V (15) in circumferential radian, and the included angle A between the two ends of the guide wheels and the circle center of the guide rail is not less than 90 degrees.