CN212731703U - Low-temperature plasma synergistic adsorption catalysis VOCs device - Google Patents
Low-temperature plasma synergistic adsorption catalysis VOCs device Download PDFInfo
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- CN212731703U CN212731703U CN202021475553.XU CN202021475553U CN212731703U CN 212731703 U CN212731703 U CN 212731703U CN 202021475553 U CN202021475553 U CN 202021475553U CN 212731703 U CN212731703 U CN 212731703U
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- 238000006555 catalytic reaction Methods 0.000 title claims abstract description 9
- 238000001179 sorption measurement Methods 0.000 title claims description 11
- 230000002195 synergetic effect Effects 0.000 title claims description 8
- 238000000746 purification Methods 0.000 claims abstract description 32
- 230000003197 catalytic effect Effects 0.000 claims abstract description 29
- 239000003054 catalyst Substances 0.000 claims abstract description 21
- 239000003463 adsorbent Substances 0.000 claims abstract description 13
- 239000000203 mixture Substances 0.000 claims abstract description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 27
- 229930195733 hydrocarbon Natural products 0.000 claims description 27
- 150000002430 hydrocarbons Chemical class 0.000 claims description 27
- 238000002156 mixing Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910000510 noble metal Inorganic materials 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 229910000278 bentonite Inorganic materials 0.000 claims description 3
- 239000000440 bentonite Substances 0.000 claims description 3
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 210000002381 plasma Anatomy 0.000 claims 19
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- 239000002912 waste gas Substances 0.000 abstract description 23
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000001699 photocatalysis Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
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- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
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- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
Abstract
The utility model discloses a low temperature plasma adsorbs catalysis VOCs device in coordination, buffer tank including inside foraminiferous baffle one is equipped with, buffer tank divide into mixed region and buffer, be equipped with spiral spoiler in the mixed region and form fluidic helical coiled passage, helical coiled passage's entrance point is equipped with air intake pipe and VOCs intake pipe, the buffer passes through the gas mixture intake pipe and links to each other with low temperature plasma catalytic purification device, the inside one end that is close to the gas mixture intake pipe of low temperature plasma catalytic purification device is equipped with foraminiferous baffle two, the right-hand member of foraminiferous baffle two is equipped with low temperature plasma reactor, the intussuseption of low temperature plasma reactor is filled with catalyst and adsorbent, low temperature plasma catalytic purification device's gas outlet links to each other with exhaust duct, be equipped with the circulating line between exhaust duct and the gas mixture intake pipe. The utility model discloses can high-efficient catalytic oxidation VOCs waste gas in the large concentration range, the catalyst can be regenerated and improve life, and energy utilization is high, the energy consumption is low, no secondary pollution.
Description
Technical Field
The utility model relates to a VOCs handles technical field, in particular to low temperature plasma adsorbs catalysis VOCs device in coordination.
Background
Volatile Organic Compounds (VOCs) refer to Organic Compounds having a saturated vapor pressure of greater than 70.91Pa at normal temperature and a boiling point of 50-260 ℃ at a standard atmospheric pressure of 101.3kPa, or any Organic solid or liquid that can be volatilized at normal temperature and pressure. The sources of the VOCs are very wide, and in urban areas, the main sources of the VOCs are industrial emissions, which have serious threats to the quality of atmospheric environment. At present, the common VOCs control technologies include condensation, absorption, adsorption, photocatalytic oxidation, thermal incineration, low-temperature plasma and the like.
The low-temperature plasma technology utilizes a large amount of electrons, ions, molecules, neutral atoms, excited atoms, photons, free radicals and the like with high activity generated by gas discharge under a strong electric field to react with VOCs and degrade the VOCs into CO2And H2And O. The low-temperature plasma technology is suitable for treating organic waste gas with low concentration and large air volume, and has a treatment effect on almost all organic waste gas. But the pollutants are not completely degraded, CO2Low selectivity, O produced3And the full utilization is not obtained, and the like.
SUMMERY OF THE UTILITY MODEL
To the above problem, the utility model aims at providing a low temperature plasma adsorbs catalysis VOCs device in coordination collects low temperature plasma oxidation technology, adsorption technology and chemical catalysis technology in an organic whole, and the advantage of each technique of full play improves VOCs's degradation efficiency and energy utilization.
The technical scheme of the utility model as follows:
the utility model provides a low temperature plasma adsorbs catalysis VOCs device in coordination, includes the buffer tank, the inside foraminiferous baffle I that is equipped with of buffer tank, foraminiferous baffle I will the buffer tank divides into mixed region and buffer zone, be equipped with the spiral spoiler in the mixed region, the spiral spoiler makes form fluidic spiral channel in the mixed region, spiral channel's entrance point is equipped with air intake pipe and VOCs intake pipe, air intake pipe's the other end links to each other with the output of air-blower I, and is equipped with gas flow controller I on the pipeline that links to each other, the VOCs intake pipe links to each other with the VOCs air supply, and is equipped with gas flow controller II and total hydrocarbon on-line analyzer I on the pipeline that links to each other in proper order, spiral channel's exit end with foraminiferous baffle I is adjacent, the buffer zone passes through the gas mixture intake pipe and links to each other with low temperature plasma catalytic purification device, a second total hydrocarbon on-line analyzer, a third gas flow controller and a first gas supply pipe, wherein the first gas supply pipe is provided with a first one-way valve, a second baffle plate with holes is arranged at one end of the interior of the low-temperature plasma catalytic purification device close to the mixed gas inlet pipe, the right end of the second baffle plate with the hole is provided with a low-temperature plasma reactor which is filled with a catalyst and an adsorbent, the air outlet of the low-temperature plasma catalytic purification device is connected with an exhaust pipeline, and a third total hydrocarbon on-line analyzer and a second one-way valve are sequentially arranged on the exhaust pipeline, the exhaust pipeline between the third total hydrocarbon on-line analyzer and the second one-way valve is connected with the first circulation pipeline through a tee joint, the other end of the first circulating pipeline is connected with the input end of a second air blower, the output end of the second air blower is connected with a second circulating pipeline, and the other end of the second circulating pipeline is connected with a mixed gas inlet pipe in front of the dehumidifier.
Preferably, a second gas supply pipe with a third one-way valve is further arranged on the mixed gas inlet pipe between the second total hydrocarbon on-line analyzer and the third gas flow controller.
Preferably, an end of the spiral spoiler is connected to a side wall of the surge tank.
Preferably, the catalyst is a noble metal catalyst or a non-noble metal oxide, and the adsorbent is activated carbon, diatomite or bentonite.
Preferably, two or more low-temperature plasma catalytic purification devices are arranged between the third gas flow controller and the third total hydrocarbon on-line analyzer in parallel, and the first gas supply pipe is arranged in front of a gas inlet of each low-temperature plasma catalytic purification device.
Preferably, two or more low-temperature plasma reactors are arranged, each low-temperature plasma reactor is vertically arranged along the direction of gas flow, and two polar plates of the low-temperature plasma reactors are respectively positioned at the front side and the rear side of the low-temperature plasma catalytic purification device.
Preferably, when three or more low-temperature plasma reactors are provided, the low-temperature plasma reactors are arranged in an equidistant distribution.
Preferably, the low-temperature plasma reactor adopts a double-dielectric barrier low-temperature plasma reactor.
The utility model has the advantages that:
1. through setting up the buffer tank, can reduce the concentration of VOCs waste gas through the air, make the utility model discloses can handle the VOCs waste gas of high concentration, it is big to handle the concentration scope.
2. Through setting up foraminiferous baffle one and spiral spoiler, can make air and VOCs waste gas intensive mixing, improve mist's torrent degree, increase organic molecule and oxygen molecule's collision probability makes the abundant oxidation of waste gas.
3. Through set up foraminiferous baffle two in low temperature plasma catalytic purification device inside, can utilize foraminiferous baffle two to make the inside VOCs waste gas of entering low temperature plasma catalytic purification device flow more evenly.
4. Set up low temperature plasma reactor through the right-hand member at foraminiferous baffle two, the intussuseption of low temperature plasma reactor is filled with catalyst and adsorbent, makes the utility model discloses can enough use low temperature plasma oxidation technology to handle VOCs waste gas, can utilize the adsorbent again to prolong the dwell time of VOCs waste gas in the device, improve purification efficiency, when can also utilizing catalyst treatment VOCs waste gas, handle the intermediate product that low temperature plasma reactor produced, further improved purification efficiency.
5. Through the arrangement of a first air supply pipe, theThe first air supply pipe is provided with a one-way valve, so that air can be supplied to the low-temperature plasma catalytic purification device by the first air supply pipe, a catalyst in the device is reduced, and a large amount of O is generated by strengthening corona discharge3、H2O2、HO2Or OH strong oxidizing free radicals, and the catalyst can be regenerated in situ under the action of the strong oxidizing free radicals, so that the service life of the catalyst is prolonged.
6. Through setting up total hydrocarbon on-line analyzer three, circulating line one, air-blower two and circulating line two, can detect whether low temperature plasma catalytic purification device combustion gas reaches emission standard through total hydrocarbon on-line analyzer three, if not handle totally, accessible circulating line and air-blower make VOCs waste gas flowback to the mist pipeline, handle once more.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic structural view of the device for catalyzing VOCs by low-temperature plasma synergistic adsorption;
fig. 2 is a schematic top view of the low-temperature plasma catalytic purification apparatus shown in fig. 1.
Reference numbers in the figures:
1-buffer tank, 2-first perforated baffle, 3-mixing zone, 4-buffer zone, 5-spiral spoiler, 6-spiral channel, 7-air inlet pipe, 8-VOCs inlet pipe, 9-first blower, 10-first gas flow controller, 11-second gas flow controller, 12-first total hydrocarbon on-line analyzer, 13-mixed gas inlet pipe, 14-low temperature plasma catalytic purification device, 15-dehumidifier, 16-second total hydrocarbon on-line analyzer, 17-third gas flow controller, 18-first air make-up pipe, 19-second perforated baffle, 20-low temperature plasma reactor, 21-catalyst and adsorbent, 22-exhaust pipeline, 23-third total hydrocarbon on-line analyzer, 24-second one-way valve, 25-a first circulation pipeline, 26-a second blower, 27-a second circulation pipeline and 28-a second air supply pipe.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
It should be noted that, in the present application, the embodiments and the technical features of the embodiments may be combined with each other without conflict.
It is noted that, unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
In the present application, the terms "first", "second", and the like are used for distinguishing similar objects, and not for describing a particular order or sequence order, unless otherwise specified. It is to be understood that the terms so used; the terms "upper", "lower", "left", "right", and the like are used generally with respect to the orientation shown in the drawings, or with respect to the component itself in a vertical, or gravitational orientation; likewise, "inner", "outer", and the like refer to the inner and outer relative to the contours of the components themselves for ease of understanding and description. The above directional terms are not intended to limit the present invention.
As shown in fig. 1-2, a low-temperature plasma synergistic adsorption catalysis VOCs device comprises a buffer tank 1, a perforated baffle plate 2 is arranged inside the buffer tank 1, the buffer tank 1 is divided into a mixing area 3 and a buffer area 4 by the perforated baffle plate 2, a spiral spoiler 5 is arranged in the mixing area 3, the spiral spoiler 5 enables a spiral channel 6 of fluid to be formed in the mixing area 3, an air inlet pipe 7 and a VOCs inlet pipe 8 are arranged at the inlet end of the spiral channel 6, the other end of the air inlet pipe 7 is connected with the output end of a blower 9, a first gas flow controller 10 is arranged on a connected pipeline, the VOCs inlet pipe 8 is connected with a VOCs gas source, a second gas flow controller 11 and a first total hydrocarbon online analyzer 12 are sequentially arranged on the connected pipeline, the outlet end of the spiral channel 6 is adjacent to the perforated baffle plate 2, the buffer zone 4 is connected with a low-temperature plasma catalytic purification device 14 through a mixed gas inlet pipe 13, a dehumidifier 15, a total hydrocarbon on-line analyzer II 16, a gas flow controller III 17 and a gas supplementing pipe I18 are sequentially arranged on the connected pipelines, a one-way valve I is arranged on the gas supplementing pipe I18, a perforated baffle plate II 19 is arranged at one end, close to the mixed gas inlet pipe 13, inside the low-temperature plasma catalytic purification device 14, a low-temperature plasma reactor 20 is arranged at the right end of the perforated baffle plate II 19, a catalyst and an adsorbent 21 are filled in the low-temperature plasma reactor 20, a gas outlet of the low-temperature plasma catalytic purification device 14 is connected with an exhaust pipeline 22, a total hydrocarbon on-line analyzer III 23 and a one-way valve II 24 are sequentially arranged on the exhaust pipeline 22, the exhaust pipeline 22 between the total hydrocarbon on-line analyzer III 23 and the one-way valve II 24 is connected with a circulation pipeline I25 through a tee joint, the other end of the first circulation pipeline 25 is connected with the input end of a second blower 26, the output end of the second blower 26 is connected with a second circulation pipeline 27, and the other end of the second circulation pipeline 27 is connected with a mixed gas inlet pipe 13 in front of the dehumidifier 15.
In a specific embodiment, the mixed gas inlet pipe 13 between the second total hydrocarbon on-line analyzer 16 and the third gas flow controller 17 is further connected with a second gas supplementing pipe 28 through a tee joint, and a third one-way valve is arranged on the second gas supplementing pipe 28. When the concentration of VOCs waste gas detected by the second total hydrocarbon on-line analyzer is too high, the second air supply pipe can be used for supplying air, and the concentration of VOCs waste gas is reduced again.
In a specific embodiment, two or more low-temperature plasma catalytic purification devices 14 are arranged in parallel between the gas flow controller three 17 and the total hydrocarbon on-line analyzer three 23, and the air inlet of each low-temperature plasma catalytic purification device 14 is provided with the air supplementing pipe one 18. The low-temperature plasma reactor 20 adopts a double-medium-barrier low-temperature plasma reactor, two or more low-temperature plasma reactors are arranged, each low-temperature plasma reactor 20 is vertically arranged along the airflow direction, and two polar plates of the low-temperature plasma reactor 20 are respectively positioned at the front side and the rear side of the low-temperature plasma catalytic purification device 14. Alternatively, when the number of the low temperature plasma reactors 20 is three or more, the low temperature plasma reactors 20 are arranged in an equally spaced distribution.
In a particular embodiment, the end of the spiral spoiler 5 is connected to the side wall of the buffer tank 1, enabling the incoming air and VOCs to flow entirely with the spiral channel 6, increasing the effect of turbulence.
In a specific embodiment, the catalyst is noble metal catalyst (Pd, Pt, Ag, Au, etc.) or non-noble metal oxide (MnO)2、Al2O3CuO, etc.), and the adsorbent is any one or more of activated carbon, diatomite, bentonite, molecular sieve and silica gel. The catalyst and the adsorbent are packed in fixed beds, optionally two fixed beds of catalyst are provided, and one fixed bed of adsorbent is provided between two fixed beds of catalyst.
The volume flow controller, the total hydrocarbon on-line analyzer, the dehumidifier, the low-temperature plasma reactor and the like used in the above embodiments are all the prior art, and the specific structures thereof are not described herein again.
In one embodiment of the present invention, the treatment of the waste gas containing VOCs comprises the following steps:
firstly, VOCs waste gas, outside air pass through the mixed zone of VOCs intake pipe, air-blower and air intake pipe entering blending tank respectively, and through the online analysis VOCs waste gas concentration of total hydrocarbon at this in-process, through the flow of two measurement air of gas flow controller one and gas flow controller and VOCs waste gas respectively, the concentration of VOCs waste gas in the controlling mixed gas is come through the air input of control VOCs waste gas and air to through the air input of air provides oxygen messenger VOCs waste gas oxidation.
Secondly, VOCs waste gas and air make its intensive mixing form even mist through the spiral spoiler, and mist passes through foraminiferous baffle and gets into the buffer region, and spiral spoiler and foraminiferous baffle can improve gaseous torrent degree in this in-process, increase organic molecule and oxygen molecule's collision probability, make VOCs waste gas fully oxidize.
Then, the mixed gas enters the low-temperature plasma catalytic purification device through the mixed gas inlet pipe, the mixed gas uniformly flows to the low-temperature plasma reactor through the second baffle plate with holes, and high-speed electrons generated by the low-temperature plasma reactor and N are utilized2、 O2、H2O or the like generates inelastic collision to generate OH, O or other free radicals with strong oxidizing property, and VOCs molecules are oxidized into CO2、H2O, and the like. In the process, the retention time of the VOCs waste gas in the device is prolonged through the adsorbent, and the purification efficiency is improved; VOCs waste gas and intermediate products generated by the low-temperature plasma reactor are treated by the catalyst, so that the purification efficiency is further improved.
And finally, discharging the treated gas through an exhaust pipeline, detecting whether the treated gas meets the discharge standard through a third total hydrocarbon on-line analyzer during discharging, if not, enabling the gas to reenter the mixed gas inlet pipe through the first circulating pipeline, the second blower and the second circulating pipeline, treating again, and if so, directly discharging the gas into the atmosphere.
The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the above embodiments, and although the present invention has been disclosed with the preferred embodiments, it is not limited to the present invention, and any skilled person in the art can make some modifications or equivalent embodiments without departing from the scope of the present invention, but all the technical matters of the present invention are within the scope of the present invention.
Claims (8)
1. A low-temperature plasma collaborative adsorption catalysis VOCs device is characterized by comprising a buffer tank, wherein a first perforated baffle is arranged inside the buffer tank and divides the buffer tank into a mixing area and a buffer area, a spiral spoiler is arranged in the mixing area and enables a spiral channel of fluid to be formed in the mixing area, an air inlet pipe and a VOCs inlet pipe are arranged at the inlet end of the spiral channel, the other end of the air inlet pipe is connected with the output end of a first blower, a first gas flow controller is arranged on a connected pipeline, the VOCs inlet pipe is connected with a VOCs gas source, a second gas flow controller and a first total hydrocarbon online analyzer are sequentially arranged on the connected pipeline, the outlet end of the spiral channel is adjacent to the first perforated baffle, and the buffer area is connected with a low-temperature plasma catalytic purification device through a mixed gas inlet pipe, a dehumidifier, a second total hydrocarbon on-line analyzer, a third gas flow controller and a first gas supply pipe are sequentially arranged on the connected pipelines, a first one-way valve is arranged on the first gas supply pipe, a second perforated baffle is arranged at one end of the low-temperature plasma catalytic purification device close to the mixed gas inlet pipe, a low-temperature plasma reactor is arranged at the right end of the second perforated baffle and filled with catalyst and adsorbent, the gas outlet of the low-temperature plasma catalytic purification device is connected with an exhaust pipeline, a third total hydrocarbon on-line analyzer and a second one-way valve are sequentially arranged on the exhaust pipeline, the exhaust pipeline between the third total hydrocarbon on-line analyzer and the second one-way valve is connected with the first circulation pipeline through a tee joint, the other end of the first circulation pipeline is connected with the input end of the second air blower, and the output end of the second air blower is connected with the second circulation pipeline, the other end of the second circulating pipeline is connected with a mixed gas inlet pipe in front of the dehumidifier.
2. The device for catalyzing VOCs through synergistic adsorption of low-temperature plasma according to claim 1, wherein a second gas supply pipe with a third one-way valve is further arranged on a gas mixture inlet pipe between a second total hydrocarbon on-line analyzer and a third gas flow controller.
3. The device of claim 1, wherein the spiral spoiler is connected to the sidewall of the buffer tank at an end thereof.
4. The device for co-adsorbing and catalyzing VOCs according to claim 1, wherein the catalyst is a noble metal catalyst or a non-noble metal oxide, and the adsorbent is activated carbon, diatomite or bentonite.
5. The device for co-adsorbing and catalyzing VOCs according to claim 1, wherein two or more low-temperature plasma catalytic purification devices are arranged in parallel between the third gas flow controller and the third total hydrocarbon on-line analyzer, and the first gas supply pipe is arranged in front of a gas inlet of each low-temperature plasma catalytic purification device.
6. The device for catalyzing VOCs through synergistic adsorption of low-temperature plasmas according to claim 5, wherein two or more low-temperature plasma reactors are arranged, each low-temperature plasma reactor is vertically arranged along the direction of gas flow, and two polar plates of each low-temperature plasma reactor are respectively positioned at the front side and the rear side of the low-temperature plasma catalytic purification device.
7. The device for catalyzing VOCs through synergistic adsorption of low-temperature plasmas according to claim 6, wherein when more than three low-temperature plasma reactors are arranged, the low-temperature plasma reactors are arranged in an equidistant distribution.
8. The device for catalyzing VOCs through synergistic adsorption of low-temperature plasmas according to any one of claims 1-7, wherein the low-temperature plasma reactor adopts a double-dielectric-barrier low-temperature plasma reactor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021475553.XU CN212731703U (en) | 2020-07-23 | 2020-07-23 | Low-temperature plasma synergistic adsorption catalysis VOCs device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021475553.XU CN212731703U (en) | 2020-07-23 | 2020-07-23 | Low-temperature plasma synergistic adsorption catalysis VOCs device |
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| CN212731703U true CN212731703U (en) | 2021-03-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114931848A (en) * | 2022-05-31 | 2022-08-23 | 华南理工大学 | SF based on low-temperature plasma 6 Cyclic degradation device and method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114931848A (en) * | 2022-05-31 | 2022-08-23 | 华南理工大学 | SF based on low-temperature plasma 6 Cyclic degradation device and method |
| CN114931848B (en) * | 2022-05-31 | 2023-09-26 | 华南理工大学 | SF based on low temperature plasma 6 Circulation degradation device and method |
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