CN212725219U - Sample bin of scanning electron microscope - Google Patents
Sample bin of scanning electron microscope Download PDFInfo
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- CN212725219U CN212725219U CN202021393773.8U CN202021393773U CN212725219U CN 212725219 U CN212725219 U CN 212725219U CN 202021393773 U CN202021393773 U CN 202021393773U CN 212725219 U CN212725219 U CN 212725219U
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Abstract
The utility model provides a scanning electron microscope's sample storehouse, it reduces holistic evacuation time and can reach the requirement of sample storehouse high vacuum, improves electron microscope work efficiency and guarantees the reliability of whole electron microscope simultaneously. The end face, facing the sample cabin door, of the mounting shell is provided with a mounting opening and is internally provided with a mounting cavity, linear guide mechanisms are arranged on two sides of the bottom of the mounting cavity and respectively comprise a linear bearing close to the mounting opening and a guide linear column cavity far away from the mounting opening, a lateral convex linear guide rail is fixedly arranged at the position, corresponding to the linear guide mechanism, of the bottom of the sample cabin door, a stop ring is fixedly arranged at the tail end of the corresponding linear guide rail and is inserted in the linear bearing, the stop ring is arranged in the guide linear column cavity, a horizontal movement support rail is arranged at the bottom of the mounting cavity, the four-axis moving platform is supported in an upper inner cavity of a support bracket, and the outer end of the support bracket is fixedly connected to the inner wall of the sample cabin door.
Description
Technical Field
The utility model relates to an electron microscope's technical field specifically is a scanning electron microscope's sample storehouse.
Background
With the continuous development of science and technology, scanning electron microscopes are widely used in various research and development schools and enterprise units. The scanning electron microscope generates high-speed electrons by utilizing high voltage between a cathode and an anode, forms an extremely fine electron beam through several stages of focusing, scans and excites various signals on the surface of a sample point by point, and finally collects and images through different sensors. Therefore, the design requirement of the sample bin is high, firstly, the moving space structure of the internal platform is met, secondly, the sample bin needs to have a high vacuum degree requirement, and finally, the sample bin needs to have a friendly interactive sensor interface and the like. The sample cabin in the prior art is not high in sealing reliability, and leakage points are increased when an external motor is driven to the inside, so that the overall vacuumizing time is greatly prolonged, and the requirement of high vacuum degree cannot be met.
Disclosure of Invention
To the above problem, the utility model provides a scanning electron microscope's sample storehouse, it reduces holistic evacuation time and can reach the sample storehouse high vacuum requirement, improves electron microscope work efficiency and guarantees the reliability of whole electron microscope simultaneously.
A sample chamber for a scanning electron microscope, comprising: the device comprises an installation shell and a sample cabin door, wherein an installation opening is formed in the end face, facing the sample cabin door, of the installation shell, an installation cavity is arranged in the installation shell, linear guide mechanisms are arranged on two sides of the bottom of the installation cavity, each linear guide mechanism specifically comprises a linear bearing close to the installation opening and a guide linear column cavity far away from the installation opening, a lateral convex linear guide rail is fixedly arranged at the position, corresponding to the linear guide mechanism, of the bottom of the sample cabin door, a stop ring is fixedly arranged at the tail end of the corresponding linear guide rail in an inserted mode in the linear bearing, the stop ring is arranged in the guide linear column cavity, a horizontal moving support rail is arranged at the bottom of the installation cavity, a four-axis moving platform is supported in an upper inner cavity of a support bracket, the outer end of the support bracket is fixedly connected to the inner wall of the sample cabin door, and at least one part of the support bracket is, And the linear direction is arranged in a sliding manner, the top of the four-axis moving platform is provided with a storage platform, the inner peripheral wall of the installation opening is provided with an O-shaped ring arranged in a copying manner, and the inner wall of the sample cabin door in a closed state corresponds to the position and is tightly attached to the O-shaped ring.
It is further characterized in that: the top of the mounting shell is provided with a lens cone mounting hole, the bottom of the mounting shell is provided with a molecular pump connecting hole, the side wall of the mounting shell is also provided with a plurality of mounting holes, each mounting hole is covered with a corresponding cover plate in an unused state, and the mounting shell can be externally connected with various sensors which are commonly used when in use;
a positioning sleeve is arranged at one side of the mounting opening of the mounting shell, which faces the top of the sample cabin door, a convex positioning pin is arranged at the position of the positioning sleeve, which faces the mounting opening, of the sample cabin door, and the positioning pin is inserted into an inner hole of the positioning sleeve in a closed state of the sample cabin to ensure the sealed closing of the sample cabin;
the four-axis moving platform comprises X, Y, Z, R four axes, wherein a stepping motor of the four-axis moving platform is arranged in a vacuum environment, so that the leakage point of a sample bin is reduced, the vacuum reliability of the bin is improved, the stepping motor of the four-axis moving platform is made of a corresponding material, a diamond-like film is etched and plated on the surface of the motor, the gas escape of an electron microscope is greatly reduced, molybdenum disulfide is plated on the surface of a transmission friction part, the solid lubrication effect is achieved, the service life is prolonged, the four-axis moving platform is reliable in transmission, and the repeated positioning precision can reach 0.2um and 0.006 degrees;
the sample cabin door is fixedly provided with a convex aviation plug, the aviation plug is used for connecting a wire of a corresponding stepping motor on the four-axis moving platform, and the aviation plug is specifically designed by polyimide materials and is specially used in a vacuum environment;
the mounting shell and the sample bin gate are made of high-density stainless steel, vapor pressure deflation of the materials is small, the minimum wall thickness of the mounting shell is more than 15mm, and the characteristics of reducing gas permeation of the bin wall and effectively blocking various electrons and rays can be realized;
and after the inner wall surfaces of the mounting shell and the sample bin door meet the finish requirement, vacuum plating is carried out, so that surface desorption gas is reduced, and the time for integrally vacuumizing the sample bin is shortened.
After the utility model is adopted, the four-axis moving platform is fixedly arranged on the sample cabin door, the sample cabin door moves along the linear bearing through the linear guide rail to complete the opening and closing of the sample cabin door, the sealing of the whole installation cavity is reliable due to the existence of the O-shaped ring, the quick middle-low vacuum pumping is realized, the high vacuum can be realized, the transmission of the four-axis moving platform is reliable, the sample support on the sample platform can be quickly and reliably positioned, the whole structure is simple and reliable, the sample can be quickly replaced, the installation is convenient, and the sample cabin is rich in external sensor interfaces; compared with the traditional scanning electron microscope sample storehouse, the electron microscope sample storehouse of this patent is small, and simple structure is reliable, can the evacuation fast, can external various sensors commonly used, can effectively obstruct most radiation, safe and reliable.
Drawings
Fig. 1 is a first perspective view (open state) of the present invention;
fig. 2 is a schematic perspective view of the second embodiment of the present invention (in an open state);
the names corresponding to the sequence numbers in the figure are as follows:
the device comprises an installation shell 1, a sample cabin door 2, an installation opening 3, an installation cavity 4, a linear bearing 5, a guide linear column cavity 6, a linear guide rail 7, a stop ring 8, a horizontal movement support rail 9, a four-axis moving platform 10, a support 11, an object placing platform 12, an O-shaped ring 13, a lens cone installation hole 14, a molecular pump connection hole 15, an installation hole 16, a cover plate 17, a positioning sleeve 18, a positioning pin 19 and an aviation plug 20.
Detailed Description
A sample chamber of a scanning electron microscope, see fig. 1, 2: the device comprises an installation shell 1 and a sample cabin door 2, wherein an installation opening 3 and an installation cavity 4 are arranged on the end face of the installation shell 1 facing the sample cabin door 2, linear guide mechanisms are arranged on two sides of the bottom of the installation cavity 4, each linear guide mechanism specifically comprises a linear bearing 5 close to the installation opening 3 and a guide linear column cavity 6 far away from the installation opening 3, a lateral convex linear guide rail 7 is fixedly arranged at the position of the bottom of the sample cabin door 2 corresponding to the linear guide mechanisms, the corresponding linear guide rail 7 is inserted into the linear bearing 5, a stop ring 8 is fixedly arranged at the tail end of the linear bearing 5, the stop ring 8 is arranged in the guide linear column cavity 6, a horizontal moving support rail 9 is arranged at the bottom of the installation cavity 4, a four-axis moving platform 10 is supported on an upper inner cavity of a support bracket 11, the outer end of the support bracket 11 is fixedly connected to the inner wall of the sample cabin door 2, and at least one part, And the sample cabin door 2 is arranged in a sliding manner in the linear direction, the top of the four-axis moving platform 10 is provided with a storage platform 12, the inner peripheral wall of the installation opening 3 is provided with an O-shaped ring 13 arranged in a profiling manner, and the corresponding position of the inner wall of the sample cabin door 2 in a closed state is tightly attached to the O-shaped ring 13.
The top of the installation shell 1 is provided with a lens cone installation hole 14, the bottom of the installation shell is provided with a molecular pump connection hole 15, the side wall of the installation shell 1 is also provided with a plurality of installation holes 16, each installation hole 16 is covered with a corresponding cover plate 17 in an unused state, and various sensors which are commonly used can be externally connected when the installation shell is used;
a positioning sleeve 18 is arranged at one side of the mounting opening 3 of the mounting shell 1 facing the top of the sample cabin door 2, a convex positioning pin 19 is arranged at the position of the positioning sleeve 18 of the sample cabin door 2 facing the mounting opening 3, and the positioning pin 19 is inserted into an inner hole of the positioning sleeve 18 in a closed state of the sample cabin to ensure the sealed closing of the sample cabin;
the four-axis moving platform 10 comprises X, Y, Z, R four axes, wherein a stepping motor of the four-axis moving platform is arranged in a vacuum environment, so that the leakage point of a sample bin is reduced, the vacuum reliability of the bin is improved, the stepping motor of the four-axis moving platform is made of a corresponding material, a diamond-like film is etched and plated on the surface of the motor, the gas escape of an electron microscope is greatly reduced, molybdenum disulfide is completely plated on the surface of a transmission friction part, the solid lubrication effect is achieved, the service life is prolonged, the transmission of the four-axis moving platform 10 is reliable, and the repeated positioning precision can reach 0.2um and 0.006;
the sample cabin door 2 is also fixedly provided with a convex aviation plug 20, the aviation plug 20 is used for connecting a wire of a corresponding stepping motor on the four-axis moving platform 10, and the aviation plug 20 is specifically designed by polyimide materials and is specially used in a vacuum environment;
the mounting shell 1 and the sample bin gate 2 are made of high-density stainless steel, vapor pressure deflation of the materials is less, the minimum wall thickness of the mounting shell is more than 15mm, and the characteristics of reducing gas permeation of the bin wall and effectively blocking various electrons and rays can be realized;
and after the inner wall surfaces of the installation shell 1 and the sample bin door 2 meet the finish requirement, vacuum plating is carried out, so that surface desorption gas is reduced, and the time for overall vacuumizing of the sample bin is shortened.
The working principle is as follows: the sample cabin is arranged on the machine cabinet, the molecular pump and the mechanical pump are connected in series below the sample cabin, the lens cone and the electronic gun are arranged above the sample cabin, the four-axis moving platform is fixedly arranged on the sample cabin door, the sample cabin door moves along the linear bearing through the linear guide rail to complete the opening and closing of the sample cabin door, the whole installation cavity is reliably sealed due to the existence of the O-shaped ring, the fast middle-vacuum pumping and the low-vacuum pumping are realized, the high vacuum is realized, the four-axis moving platform is reliable in transmission, the sample support on the sample platform can be fast and reliably positioned, the overall structure is simple and reliable, the sample can be quickly replaced, the installation; compared with the traditional scanning electron microscope sample storehouse, the electron microscope sample storehouse of this patent is small, and simple structure is reliable, can the evacuation fast, can external various sensors commonly used, can effectively obstruct most radiation, safe and reliable.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. A sample chamber for a scanning electron microscope, comprising: the device comprises an installation shell and a sample cabin door, wherein an installation opening is formed in the end face, facing the sample cabin door, of the installation shell, an installation cavity is arranged in the installation shell, linear guide mechanisms are arranged on two sides of the bottom of the installation cavity, each linear guide mechanism specifically comprises a linear bearing close to the installation opening and a guide linear column cavity far away from the installation opening, a lateral convex linear guide rail is fixedly arranged at the position, corresponding to the linear guide mechanism, of the bottom of the sample cabin door, a stop ring is fixedly arranged at the tail end of the corresponding linear guide rail in an inserted mode in the linear bearing, the stop ring is arranged in the guide linear column cavity, a horizontal moving support rail is arranged at the bottom of the installation cavity, a four-axis moving platform is supported in an upper inner cavity of a support bracket, the outer end of the support bracket is fixedly connected to the inner wall of the sample cabin door, and at least one part of the support bracket is, And the linear direction is arranged in a sliding manner, the top of the four-axis moving platform is provided with a storage platform, the inner peripheral wall of the installation opening is provided with an O-shaped ring arranged in a copying manner, and the inner wall of the sample cabin door in a closed state corresponds to the position and is tightly attached to the O-shaped ring.
2. A sample chamber for a scanning electron microscope as claimed in claim 1 wherein: the top of the installation shell is provided with a lens cone installation hole, the bottom of the installation shell is provided with a molecular pump connection hole, the side wall of the installation shell is also provided with a plurality of installation holes, each installation hole is covered with a corresponding cover plate in an unused state, and the installation shell can be externally connected with various sensors in common use.
3. A sample chamber for a scanning electron microscope as claimed in claim 1 wherein: a positioning sleeve is arranged at one side of the mounting opening of the mounting shell facing the top of the sample cabin door, a convex positioning pin is arranged at the position of the positioning sleeve of the sample cabin door facing the mounting opening, and the positioning pin is inserted into an inner hole of the positioning sleeve when the sample cabin is closed.
4. A sample chamber for a scanning electron microscope as claimed in claim 1 wherein: four-axis moving platform, it includes X, Y, Z, R four-axis, and its step motor reduces the leak source in sample storehouse in arranging vacuum environment in, increases storehouse vacuum reliability, four-axis moving platform's step motor uses corresponding material to make, and the motor surface etching plates type diamond film, and the surface of transmission friction part is whole plates molybdenum disulfide.
5. A sample chamber for a scanning electron microscope as claimed in claim 1 wherein: still set firmly the aviation plug of evagination on the sample hatch door, the aviation plug is used for connecting the electric wire of the last corresponding step motor of four-axis moving platform, the aviation plug specifically is that the polyimide material design forms.
6. A sample chamber for a scanning electron microscope as claimed in claim 1 wherein: the material of the installation shell and the material of the sample bin door are both high-density stainless steel, and the minimum wall thickness of the installation shell is larger than 15 mm.
7. A sample chamber for a scanning electron microscope as claimed in claim 1 wherein: and after the inner wall surfaces of the mounting shell and the sample bin door reach the finish requirement, performing vacuum plating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021393773.8U CN212725219U (en) | 2020-07-15 | 2020-07-15 | Sample bin of scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021393773.8U CN212725219U (en) | 2020-07-15 | 2020-07-15 | Sample bin of scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212725219U true CN212725219U (en) | 2021-03-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021393773.8U Active CN212725219U (en) | 2020-07-15 | 2020-07-15 | Sample bin of scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212725219U (en) |
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2020
- 2020-07-15 CN CN202021393773.8U patent/CN212725219U/en active Active
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