CN212722901U - Plasmon enhanced fluorescence immunoassay chip - Google Patents

Plasmon enhanced fluorescence immunoassay chip Download PDF

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CN212722901U
CN212722901U CN202020994416.0U CN202020994416U CN212722901U CN 212722901 U CN212722901 U CN 212722901U CN 202020994416 U CN202020994416 U CN 202020994416U CN 212722901 U CN212722901 U CN 212722901U
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张大霄
代伟
刘扬
徐红星
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Anji Century Kangmin Biotechnology Co ltd
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Wuhan Century Kangmin Biotechnology Co ltd
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Abstract

The utility model provides a plasmon enhancement fluorescence immunodetection chip, including the substrate, the preparation has periodic nanometer hole structure on the substrate, and the nanometer hole in the periodic nanometer hole structure is the matrix distribution, and the nanometer hole is the inverted pyramid form, and the deposit has metal adhesion layer on periodic nanometer hole structure, and the deposit has the metal enhancement layer on metal adhesion layer, and the modification has the macromolecule layer on the metal enhancement layer. The chip can be used for immunodetection, such as nucleic acid, protein, polypeptide and other biomolecules, and can remarkably improve the flux and sensitivity of immunodetection.

Description

Plasmon enhanced fluorescence immunoassay chip
Technical Field
The utility model belongs to the immunodetection field, concretely relates to plasmon enhancement fluorescence immunoassay chip and application thereof.
Background
Immunoassay is an indispensable means for biochemical detection as a means for detecting proteins. The current immunodetection technology is mostly based on enzyme-linked immunosorbent assay (ELISA) or a derivative technology of ELISA, and is characterized in that biological enzyme is used for marking protein antibodies to amplify signals. The immunoassay of the bio-enzyme labeling technology has a bottleneck in terms of detection flux due to the homogeneity of detection signals, namely, signal amplification and detection need to be carried out in a liquid phase, and the amount of samples required for detection increases with the increase of detection indexes. The protein biochip utilizes surface fluorescence signals to detect protein molecules, and due to the heterogeneous detection, namely, the fluorescence molecules emitting signals are adsorbed on the surface, the multi-index condition of a detection sample can be distinguished through a spatial position, but due to the lack of a signal amplification means in the heterogeneous detection of the protein biochip, the sensitivity is obviously insufficient. The main application of biochips on the market is also in the field of nucleic acid detection with PCR (polymerase chain reaction) amplification technology. In order to improve the flux of protein detection and simultaneously improve the detection sensitivity to meet most detection requirements, the combination of a fluorescence enhancement means based on heterogeneous detection and a protein chip is the key to solve the problems of flux and sensitivity.
Disclosure of Invention
Based on above-mentioned prior art, the utility model provides a plasmon enhancement fluorescence immunoassay chip and application thereof, this chip can be used to immunodetection, like biomolecules such as detectable nucleic acid, protein and polypeptide, can show flux and the sensitivity that improves immunodetection.
Realize the utility model discloses the technical scheme that above-mentioned purpose adopted does:
a plasmon enhanced fluorescence immunoassay chip comprises a substrate, wherein a periodic nanometer pit structure is prepared on the substrate, nanometer pits in the periodic nanometer pit structure are distributed in a matrix mode and are in an inverted pyramid shape, a metal adhesion layer is deposited on the periodic nanometer pit structure, a metal enhancement layer is deposited on the metal adhesion layer, and a macromolecule layer is modified on the metal enhancement layer.
The top surface of the nano pit is square, the side surface of the nano pit is isosceles triangle, the side length of the top surface of the nano pit is 300-1400nm, the ratio of the side length of the top surface of the nano pit to the depth of the nano pit is 1:1.3-1.5, and the period of the nano pit structure is 500-2000 nm.
The metal used for the metal adhesion layer is chromium or titanium, and the thickness of the metal adhesion layer is 5-30 nm.
The metal selected for the metal enhancement layer is gold or silver, and the thickness of the metal is 200-300 nm.
The thickness of the macromolecule layer is 10-100 nm.
Compared with the prior art, the invention has the beneficial effects and advantages that:
1. the chip of the invention is prepared with a special periodic nanometer pit structure, namely the nanometer pit is in an inverted pyramid shape, and the fluorescence signal can be enhanced by plasmon resonance in the special periodic nanometer pit structure and the metal layer on the nanometer pit structure, compared with other nanometer pits in common shapes, such as a cylinder shape, the fluorescence signal intensity is enhanced by about 35 times, thus the sensitivity of immunoassay can be greatly improved by adopting the special periodic nanometer pit structure.
2. The chip is used for detecting EMMPRIN protein (extracellular matrix metalloproteinase inducing factor), and compared with an ELISA technology, the detection sensitivity is improved by 26 times.
3. The preparation method of the chip is simple, the chip is manufactured by adopting the technologies of electron beam lithography, reactive ion etching, nano imprinting, physical vapor deposition and the like, the manufacturing process is simple and easy to operate, and the preparation cost is low.
Drawings
FIG. 1 is a schematic structural diagram of a plasmon enhanced fluorescence immunoassay chip.
Wherein, the substrate is 1-substrate, the nano-pit is 2-metal adhesion layer, the metal enhancement layer is 4-metal enhancement layer and the polymer layer is 5-polymer layer.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
The structure schematic diagram of the plasmon-enhanced fluorescence immunoassay chip provided in this embodiment is shown in fig. 1, and includes a substrate, in this embodiment, the substrate is a silicon substrate.
As shown in fig. 1, a periodic nano pit structure is prepared on a substrate 1, nano pits in the periodic nano pit structure are distributed in a matrix form, the period of the nano pit structure is 2000nm, a nano pit 2 is in an inverted pyramid shape, the top surface of the nano pit 2 is in a square form, the side surface is in an isosceles triangle form, the side length of the top surface of the nano pit 2 is 1400nm, and the depth of the nano pit 2 is 1900 nm.
And a metal adhesion layer 3 with the thickness of 30nm is deposited on the periodic nanometer pit structure, and the metal selected for the metal adhesion layer 3 is chromium.
A metal enhancement layer 4 with the thickness of 300nm is deposited on the metal adhesion layer 3, and the metal selected for the metal enhancement layer 4 is gold.
The metal enhancement layer 4 is modified with a polymer layer 5 with the thickness of 10nm, and the structural units of the polymer used in the polymer layer 5 are as follows:
Figure BDA0002522876650000031
the macromolecule layer 5 serves to couple biomolecules, such as nucleic acids, proteins, polypeptides, etc., so that the resulting chip can be used for immunodetection.
The preparation method of the plasmon enhanced fluorescence immunoassay chip comprises the following steps:
1. taking a silicon substrate A (purchased commercially) with a silicon oxide layer with the thickness of 300nm, spinning and coating an electron beam photoresist layer (adopting PMMA photoresist) with the thickness of 200nm on the silicon oxide layer, processing a matrix formed by periodically arranging cylindrical grooves on the electron beam photoresist layer by using an electron beam exposure method, wherein the period of the periodic cylindrical groove matrix is 2000nm, the diameter of each cylindrical groove is 1400nm, the depth of each cylindrical groove is 200nm, and developing to expose the silicon oxide layer at the bottom of each cylindrical groove;
2. putting the silicon substrate A processed in the step 1 into reactive ion etching equipment, introducing trifluoromethane gas into the reactive ion etching equipment, and etching the substrate A processed in the step 1, wherein the etching conditions are as follows: the flow rate of trifluoromethane is 300sccm, the gas pressure is 1.6Pa, the radio frequency power is 150W, and the etching time is 250 s; then, replacing trifluoromethane as oxygen, introducing oxygen into the reactive ion etching equipment for etching again, wherein the etching conditions are as follows: the oxygen flow is 100sccm, the gas pressure is 1Pa, the radio frequency power is 100W, and the etching time is 60 s; after etching, taking out the etched substrate A, dropwise adding 0.5mL of trimethylchlorosilane into a vessel, placing the etched substrate A in the vessel without contacting with the trimethylchlorosilane, sealing the vessel and standing for 30min, taking out the substrate A subjected to standing treatment, cleaning with ethanol and drying to obtain a nano-imprint template;
3. carrying out nano imprinting on the nano imprinting template by using a polystyrene film, wherein the pressure of the nano imprinting is 40bar, the temperature is 150 ℃, and the periodic cylindrical groove matrix is transferred to the polystyrene film to obtain a periodic cylindrical protrusion matrix on the polystyrene film;
4. taking a silicon substrate B with a silicon oxide layer with the thickness of 100nm, spin-coating an ultraviolet nano-imprinting adhesive layer with the thickness of 200nm on the silicon oxide layer, attaching one surface of a polystyrene film, which is printed with a periodic cylindrical convex matrix, to the ultraviolet nano-imprinting adhesive layer, carrying out nano-imprinting again, wherein the pressure of the nano-imprinting is 30bar, the temperature is 65 ℃, and the periodic cylindrical convex matrix is transferred to the ultraviolet nano-imprinting adhesive layer to obtain a periodic cylindrical groove matrix on the ultraviolet nano-imprinting adhesive layer;
5. putting the substrate B processed in the step 4 into reactive ion etching equipment, introducing oxygen into the reactive ion etching equipment, etching off the residual ultraviolet nano imprint glue at the bottom of each cylindrical groove, and exposing the silicon oxide layer at the bottom of each cylindrical groove, wherein the etching conditions are as follows: the oxygen flow is 100sccm, the gas pressure is 1Pa, the radio frequency power is 50W, and the etching time is 30 s; then changing oxygen into trifluoromethane, introducing the trifluoromethane into the reactive ion etching equipment for etching again to completely etch the silicon oxide layer exposed at the bottom of each cylindrical groove and expose silicon at the bottom of each cylindrical groove, wherein the etching conditions are as follows: the flow rate of trifluoromethane is 300sccm, the gas pressure is 1.6Pa, the radio frequency power is 150W, and the etching time is 250 s; and finally, replacing trichloromethane as oxygen, introducing oxygen into the reactive ion etching equipment, etching the residual ultraviolet nano imprinting glue to obtain a substrate to be processed, wherein the etching conditions are as follows: the oxygen flow is 100sccm, the gas pressure is 1Pa, the radio frequency power is 100W, and the etching time is 60 s;
6. corroding the substrate to be treated for 15min by using a potassium hydroxide solution with the mass percentage concentration of 28.6%, controlling the size of the inverted pyramid-shaped nano pit by controlling the corrosion time, preparing a periodic nano pit structure on the substrate B, and removing residual silicon oxide by using hydrofluoric acid to obtain a periodic nano pit structure substrate;
7. depositing a metal adhesion layer (chromium is selected as metal) with the thickness of 30nm on the periodic nanometer pit structure substrate by adopting a physical vapor deposition method, and then depositing a metal enhancement layer (gold is selected as metal) with the thickness of 300nm on the metal adhesion layer to obtain the periodic metal nanometer pit structure substrate;
8. coupling and modifying a macromolecule layer on a periodic metal nano pit structure substrate:
8.1, uniformly mixing ethanol and water according to the volume ratio of the ethanol to the water of 4:1 to obtain a mixed solvent, adding mercaptoundecanol into the mixed solvent to prepare a mixed solution containing 10mmol/L mercaptoundecanol, soaking the periodic metal nano-pit structure substrate into the mixed solution for 12 hours to enable a coupling hydroxyl-based layer on the metal enhancement layer;
8.2, adding epichlorohydrin into 0.2mol/L sodium hydroxide solution to prepare 0.2mol/L epichlorohydrin alkaline solution, soaking the periodic metal nano pit structure substrate treated by 8.1 into the epichlorohydrin alkaline solution for 4 hours, activating a hydroxyl layer into an epoxy group layer, and soaking the periodic metal nano pit structure substrate containing the epoxy group layer into 0.3g/mL glucan solution or chitosan solution for 20 hours to obtain the periodic metal nano pit structure substrate with a glucan layer or chitosan layer with the thickness of 10 nm;
8.3, adding bromoacetic acid into 2mol/L NaOH solution to prepare 0.1mol/L bromoacetic acid alkaline solution, soaking the periodic metal nano-pit structure substrate treated by 8.3 into the bromoacetic acid alkaline solution for 12 hours, and modifying the glucan layer or the chitosan layer into a carboxylated glucan layer;
8.4 soaking the periodic metal nano pit structure substrate treated in the step 8.3 into an aqueous solution containing 0.1mol/L of N-hydroxysuccinimide and 0.1mol/L of (1- (3-dimethylaminopropyl) -3-ethylcarbodiimide hydrochloride) for 1 hour.

Claims (5)

1. The utility model provides a plasmon enhancement fluorescence immunoassay chip, includes the substrate, its characterized in that: the periodic nanometer pit structure is prepared on the substrate, nanometer pits in the periodic nanometer pit structure are distributed in a matrix mode, the nanometer pits are in an inverted pyramid shape, a metal adhesion layer is deposited on the periodic nanometer pit structure, a metal enhancement layer is deposited on the metal adhesion layer, and a macromolecule layer is modified on the metal enhancement layer.
2. The plasmon-enhanced fluorescence immunoassay chip of claim 1, wherein: the top surface of the nano pit is square, the side surface of the nano pit is isosceles triangle, the side length of the top surface of the nano pit is 300-1400nm, the ratio of the side length of the top surface of the nano pit to the depth of the nano pit is 1:1.3-1.5, and the period of the nano pit structure is 500-2000 nm.
3. The plasmon-enhanced fluorescence immunoassay chip of claim 1, wherein: the metal used for the metal adhesion layer is chromium or titanium, and the thickness of the metal adhesion layer is 5-30 nm.
4. The plasmon-enhanced fluorescence immunoassay chip of claim 1, wherein: the metal selected for the metal enhancement layer is gold or silver, and the thickness of the metal is 200-300 nm.
5. The plasmon-enhanced fluorescence immunoassay chip of claim 1, wherein: the thickness of the macromolecule layer is 10-100 nm.
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